Deposition of Hafnium oxides

Industry

CPC
H01L21/31645

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/31645Deposition of Hafnium oxides

Industries

Patents Grantslast 30 patents

Information Patent Grant
Enhanced thin film deposition
- Patent number 10,964,534
- Issue date Mar 30, 2021
- ASM International
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 10,297,444
- Issue date May 21, 2019
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming dielectric films, new precursors and their use in...
- Patent number 10,217,629
- Issue date Feb 26, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,251
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,252
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of vapor deposition with multiple vapor sources
- Patent number 9,873,942
- Issue date Jan 23, 2018
- ASM IP Holding B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 9,831,094
- Issue date Nov 28, 2017
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High κ gate stack on III-V compound semiconductors
- Patent number 9,805,949
- Issue date Oct 31, 2017
- GLOBALFOUNDRIES Inc.
- Jean Fompeyrine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming a semiconductor device by thermally treating a c...
- Patent number 9,799,523
- Issue date Oct 24, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui OuYang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a gate dielectric for high-k metal gate devices
- Patent number 9,711,373
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Hao Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded dielectric structures
- Patent number 9,627,501
- Issue date Apr 18, 2017
- Micron Technology, Inc.
- F. Daniel Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device comprising electron t...
- Patent number 9,449,853
- Issue date Sep 20, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Yoshitaka Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizing unit, film forming apparatus, film forming method, compu...
- Patent number 9,343,295
- Issue date May 17, 2016
- Tokyo Electron Limited
- Ikuo Sawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple vapor sources for vapor deposition
- Patent number 9,238,865
- Issue date Jan 19, 2016
- ASM IP Holding B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nonvolatile semiconductor memory device and manufacturing method th...
- Patent number 9,231,070
- Issue date Jan 5, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Tetsuya Kakehata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for forming zirconium and/or hafnium-containing...
- Patent number 9,184,061
- Issue date Nov 10, 2015
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a semiconductor device
- Patent number 9,159,582
- Issue date Oct 13, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui OuYang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping with ALD technology
- Patent number 9,139,906
- Issue date Sep 22, 2015
- ASM America, Inc.
- Chang-Gong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 9,127,351
- Issue date Sep 8, 2015
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High concentration water pulses for atomic layer deposition
- Patent number 9,117,773
- Issue date Aug 25, 2015
- ASM America, Inc.
- Eric J. Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,039,838
- Issue date May 26, 2015
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 8,993,055
- Issue date Mar 31, 2015
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post deposition plasma cleaning system and method
- Patent number 8,974,868
- Issue date Mar 10, 2015
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded dielectric structures
- Patent number 8,951,903
- Issue date Feb 10, 2015
- Micron Technology, Inc.
- Dan Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating a metal-insulator-metal (MIM) capacitor havi...
- Patent number 8,815,678
- Issue date Aug 26, 2014
- Renesas Electronics Corporation
- Toshihiro Iizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charge reservoir structure
- Patent number 8,802,539
- Issue date Aug 12, 2014
- Soitec
- Frederic Allibert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hafnium tantalum oxynitride dielectric
- Patent number 8,759,170
- Issue date Jun 24, 2014
- Micron Technology, Inc.
- Leonard Forbes
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,741,731
- Issue date Jun 3, 2014
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Memory device having a dielectric containing dysprosium doped hafni...
- Patent number 8,742,515
- Issue date Jun 3, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device including insulating layer of cubic system or...
- Patent number 8,710,564
- Issue date Apr 29, 2014
- Samsung Electronics Co., Ltd.
- Jong-cheol Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20180130666
- Publication date May 10, 2018
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...
- Publication number 20140327064
- Publication date Nov 6, 2014
- Toshihiro IIZUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS
- Publication number 20140327065
- Publication date Nov 6, 2014
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZING UNIT, FILM FORMING APPARATUS, FILM FORMING METHOD, COMPU...
- Publication number 20140256157
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Ikuo SAWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEMORY DEVICE HAVING A DIELECTRIC CONTAINING DYSPROSIUM DOPED HAFNI...
- Publication number 20130292782
- Publication date Nov 7, 2013
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC
- Publication number 20130279259
- Publication date Oct 24, 2013
- Leonard Forbes
- G11 - INFORMATION STORAGE
Information Patent Application
HAFNIUM TANTALUM TITANIUM OXIDE FILMS
- Publication number 20130224916
- Publication date Aug 29, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE VAPOR SOURCES FOR VAPOR DEPOSITION
- Publication number 20130203267
- Publication date Aug 8, 2013
- ASM IP HOLDING B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20130183445
- Publication date Jul 18, 2013
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR INCORPORATING NITROGEN IN OXIDE FILMS
- Publication number 20130149468
- Publication date Jun 13, 2013
- Applied Materials, Inc.
- Tatsuya Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130122720
- Publication date May 16, 2013
- Hitachi Kokusai Electric Inc.
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20130019804
- Publication date Jan 24, 2013
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HAFNIUM TANTALUM OXIDE DIELECTRICS
- Publication number 20130012031
- Publication date Jan 10, 2013
- Micron Technology, Inc.
- Kie Y. Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH k GATE STACK ON III-V COMPOUND SEMICONDUCTORS
- Publication number 20120326212
- Publication date Dec 27, 2012
- International Business Machines Corporation
- Jean Fompeyrine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING A THIN FILM CAPACITOR AND METHOD FOR FA...
- Publication number 20120261735
- Publication date Oct 18, 2012
- RENESAS ELECTRONICS CORPORATION
- Toshihiro IIZUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS DELIVERY FOR SEMICONDUCTOR PROCESS CHAMBERS
- Publication number 20120208372
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- KEDARNATH SANGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRADED DIELECTRIC STRUCTURES
- Publication number 20120202358
- Publication date Aug 9, 2012
- Dan Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device Including Insulating Layer of Cubic System or...
- Publication number 20120168904
- Publication date Jul 5, 2012
- Jong-cheol Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20120108078
- Publication date May 3, 2012
- Kabushiki Kalsha Toshiba
- Tsunehiro INO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC
- Publication number 20120094477
- Publication date Apr 19, 2012
- Leonard Forbes
- G11 - INFORMATION STORAGE
Information Patent Application
CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE
- Publication number 20120068272
- Publication date Mar 22, 2012
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Forming Metal Oxide Layers
- Publication number 20120067283
- Publication date Mar 22, 2012
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20120058645
- Publication date Mar 8, 2012
- Kabushiki Kaisha Toshiba
- Kouichi Muraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSTRUCTIONS COMPRISING HAFNIUM OXIDE AND/OR ZIRCONIUM OXIDE
- Publication number 20120037902
- Publication date Feb 16, 2012
- ROUND ROCK RESEARCH, LLC
- Cancheepuram V. Srividya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW ZIRCONIUM, HAFNIUM-CONTAINING COMPOSITIONS, PROCESSES FOR THE P...
- Publication number 20120029219
- Publication date Feb 2, 2012
- Scott Houston Meiere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Forming Metal Oxide Layers
- Publication number 20120021587
- Publication date Jan 26, 2012
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming Material on a Substrate, and a Method of Forming...
- Publication number 20120021610
- Publication date Jan 26, 2012
- Micron Technology, Inc.
- Gurtej S. Sandhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20120012942
- Publication date Jan 19, 2012
- Sangjin HYUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS
- Publication number 20110318915
- Publication date Dec 29, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Liang-Gi Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HAFNIUM TANTALUM TITANIUM OXIDE FILMS
- Publication number 20110298028
- Publication date Dec 8, 2011
- KIE Y. AHN
- H01 - BASIC ELECTRIC ELEMENTS

Deposition of Hafnium oxides

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Enhanced thin film deposition

Enhanced thin film deposition

Method of forming dielectric films, new precursors and their use in...

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device and substrate processi...

Methods of vapor deposition with multiple vapor sources

Enhanced thin film deposition

High κ gate stack on III-V compound semiconductors

Methods of forming a semiconductor device by thermally treating a c...

Method of fabricating a gate dielectric for high-k metal gate devices

Graded dielectric structures

Method for manufacturing semiconductor device comprising electron t...

Vaporizing unit, film forming apparatus, film forming method, compu...

Multiple vapor sources for vapor deposition

Nonvolatile semiconductor memory device and manufacturing method th...

Systems and methods for forming zirconium and/or hafnium-containing...

Methods of forming a semiconductor device

Doping with ALD technology

Enhanced thin film deposition

High concentration water pulses for atomic layer deposition

Method of manufacturing semiconductor device and substrate processi...

Enhanced thin film deposition

Post deposition plasma cleaning system and method

Graded dielectric structures

Method for fabricating a metal-insulator-metal (MIM) capacitor havi...

Charge reservoir structure

Hafnium tantalum oxynitride dielectric

Method of manufacturing a semiconductor device

Memory device having a dielectric containing dysprosium doped hafni...

Semiconductor device including insulating layer of cubic system or...

Patents Applicationslast 30 patents

ENHANCED THIN FILM DEPOSITION

METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...

CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS

VAPORIZING UNIT, FILM FORMING APPARATUS, FILM FORMING METHOD, COMPU...

MEMORY DEVICE HAVING A DIELECTRIC CONTAINING DYSPROSIUM DOPED HAFNI...

HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC

HAFNIUM TANTALUM TITANIUM OXIDE FILMS

MULTIPLE VAPOR SOURCES FOR VAPOR DEPOSITION

ENHANCED THIN FILM DEPOSITION

METHODS AND APPARATUS FOR INCORPORATING NITROGEN IN OXIDE FILMS

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

HAFNIUM TANTALUM OXIDE DIELECTRICS

HIGH k GATE STACK ON III-V COMPOUND SEMICONDUCTORS

SEMICONDUCTOR DEVICE HAVING A THIN FILM CAPACITOR AND METHOD FOR FA...

PROCESS GAS DELIVERY FOR SEMICONDUCTOR PROCESS CHAMBERS

GRADED DIELECTRIC STRUCTURES

Semiconductor Device Including Insulating Layer of Cubic System or...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

HAFNIUM TANTALUM OXYNITRIDE DIELECTRIC

CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE

Systems and Methods for Forming Metal Oxide Layers

METHOD OF FORMING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

CONSTRUCTIONS COMPRISING HAFNIUM OXIDE AND/OR ZIRCONIUM OXIDE

LOW ZIRCONIUM, HAFNIUM-CONTAINING COMPOSITIONS, PROCESSES FOR THE P...

Systems and Methods for Forming Metal Oxide Layers

Methods of Forming Material on a Substrate, and a Method of Forming...

SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME

PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS

HAFNIUM TANTALUM TITANIUM OXIDE FILMS