Deposition of non-insulating-

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3205Deposition of non-insulating-

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Remote capacitively coupled plasma deposition of amorphous silicon
- Patent number 12,365,986
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for controlling contact resistance in cobalt-titanium struc...
- Patent number 12,347,695
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, manufacturing method, solid state image senso...
- Patent number 12,347,798
- Issue date Jul 1, 2025
- Sony Group Corporation
- Masaki Haneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Backside metal patterning die singulation system and related methods
- Patent number 12,341,069
- Issue date Jun 24, 2025
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integration processes utilizing boron-doped silicon materials
- Patent number 12,334,358
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- Takehito Koshizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for homogenous intermixing of precursors in all...
- Patent number 12,331,396
- Issue date Jun 17, 2025
- Lam Research Corporation
- Ilanit Fisher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical thin-film transistor and application as bit-line connector...
- Patent number 12,324,159
- Issue date Jun 3, 2025
- SUNRISE MEMORY CORPORATION
- Tianhong Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for semiconductor silicon wafer
- Patent number 12,308,228
- Issue date May 20, 2025
- Globalwafers Japan Co., Ltd
- Takeshi Senda
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor device pre-cleaning
- Patent number 12,300,542
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Wei Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,283,622
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- De-Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,272,557
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Lun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low warpage high density trench capacitor
- Patent number 12,272,725
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jyun-Ying Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group VI precursor compounds
- Patent number 12,258,356
- Issue date Mar 25, 2025
- Entegris, Inc.
- David M. Ermert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device structure
- Patent number 12,250,833
- Issue date Mar 11, 2025
- NANYA TECHNOLOGY CORPORATION
- Yu-Ping Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with electromagnetic interference film and met...
- Patent number 12,243,833
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hsi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Titanium aluminum and tantalum aluminum thin films
- Patent number 12,237,392
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ruthenium film forming method and substrate processing system
- Patent number 12,227,841
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a MEMS switch having an embedded metal con...
- Patent number 12,230,457
- Issue date Feb 18, 2025
- Robert Bosch GmbH
- Jochen Reinmuth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of metal grid, thin film sensor and manufactur...
- Patent number 12,224,234
- Issue date Feb 11, 2025
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Hu Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deep trench intersections
- Patent number 12,218,188
- Issue date Feb 4, 2025
- Texas Instruments Incorporated
- Binghua Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device structure with conductive contacts of differen...
- Patent number 12,218,055
- Issue date Feb 4, 2025
- NANYA TECHNOLOGY CORPORATION
- Ming-Hung Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display substrate, display panel and manufacturing method of displa...
- Patent number 12,205,961
- Issue date Jan 21, 2025
- Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Chunge Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antenna with graded dielectirc and method of making the same
- Patent number 12,191,571
- Issue date Jan 7, 2025
- Intel Corporation
- Saravana Maruthamuthu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing gap filling including filling trenches between...
- Patent number 12,183,590
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- De-Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,176,216
- Issue date Dec 24, 2024
- Kokusai Electric Corporation
- Motomu Degai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,148,621
- Issue date Nov 19, 2024
- Kokusai Electric Corporation
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tuning threshold voltage through meta stable plasma treatment
- Patent number 12,148,620
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Jyun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacks of electrically resistive materials and related systems and...
- Patent number 12,148,789
- Issue date Nov 19, 2024
- Micron Technology, Inc.
- Ahmed N. Noemaun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming semiconductor device
- Patent number 12,142,628
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Ming Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Seam removal in high aspect ratio gap-fill
- Patent number 12,142,480
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VERTICAL THIN-FILM TRANSISTOR AND APPLICATION AS BIT-LINE CONNECTOR...
- Publication number 20250240970
- Publication date Jul 24, 2025
- Sunrise Memory Corporation
- Tianhong Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR
- Publication number 20250240981
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyun-Ying LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE FILM DEPOSITION
- Publication number 20250239484
- Publication date Jul 24, 2025
- ASM IP HOLDING B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250223692
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250215564
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE WITH CATALYTIC CONDUCTIVE LAYER AND METHOD FOR...
- Publication number 20250218791
- Publication date Jul 3, 2025
- NANYA TECHNOLOGY CORPORATION
- WEI-YU CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURES AND METHODS OF FORMING STRUCTURES
- Publication number 20250201578
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Debanjan Jana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE BOTTOM-UP FILL
- Publication number 20250183054
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Guannan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTIVITY CONTACTS AND INTERCONNECTS
- Publication number 20250183097
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Chiukin Steven LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
- Publication number 20250176248
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCTION METHOD FOR SINGLE CRYSTAL SEMICONDUCTOR FILM, PRODUCTION...
- Publication number 20250163606
- Publication date May 22, 2025
- Mach Corporation Co., Ltd.
- Goubun AKATSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMBEDDED COMPONENT INTERPOSER OR SUBSTRATE COMPRISING DISPLACEMENT...
- Publication number 20250167003
- Publication date May 22, 2025
- Deca Technologies USA, Inc.
- Craig BISHOP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION BARRIER INCLUDING METAL SILICIDE AND TITANIUM SILICON NIT...
- Publication number 20250167044
- Publication date May 22, 2025
- EUGENUS, INC.
- Ajit Dhamdhere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A POWER SEMICONDUCTOR COMPONENT HAVING CONTACT...
- Publication number 20250157931
- Publication date May 15, 2025
- SEMIKRON DANFOSS ELEKTRONIK GMBH & CO. KG
- Bernhard KÖNIG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH COMPOSITE INTERCONNECT STRUCTUR...
- Publication number 20250149451
- Publication date May 8, 2025
- NANYA TECHNOLOGY CORPORATION
- TSE-YAO HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radical Supply Device, Radical Processing Device, Radical Generatio...
- Publication number 20250140527
- Publication date May 1, 2025
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250137777
- Publication date May 1, 2025
- Fuji Electric Co., Ltd.
- Shunya HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20250133771
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Syuan SIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEEP TRENCH INTERSECTIONS
- Publication number 20250133780
- Publication date Apr 24, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Binghua Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIVE TYPE LIFT-OFF RESIST COMPOSITION AND METHOD FOR MANUFACTUR...
- Publication number 20250130496
- Publication date Apr 24, 2025
- Merck Patent GmbH
- YANO TOMOTSUGU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION METHOD
- Publication number 20250132168
- Publication date Apr 24, 2025
- UNITED MICROELECTRONICS CORP.
- Yi-Ching Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND PROCESSING SYSTEM
- Publication number 20250132167
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Shinya OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH REDUCED CRITICAL DIMENSION AND...
- Publication number 20250125190
- Publication date Apr 17, 2025
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH REDUCED CRITICAL DIMENSION AND...
- Publication number 20250125191
- Publication date Apr 17, 2025
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTIMUM MATERIAL STACKS FOR SEMICONDUCTOR CONTACTS
- Publication number 20250125157
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Michael HAVERTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECURSOR STRUCTURE FOR SELF-ALIGNED BIT LINE AND STORAGE NODE CONT...
- Publication number 20250120068
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Zhijun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALED SHAPE MEMORY ALLOY ON A SUBSTRATE
- Publication number 20250112174
- Publication date Apr 3, 2025
- Intel Corporation
- Siddarth KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20250105020
- Publication date Mar 27, 2025
- Hitachi High-Tech Corporation
- Masaya IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250101593
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CIRCULAR-SHAPED RESISTOR
- Publication number 20250089347
- Publication date Mar 13, 2025
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS

Deposition of non-insulating-

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Remote capacitively coupled plasma deposition of amorphous silicon

Methods for controlling contact resistance in cobalt-titanium struc...

Semiconductor device, manufacturing method, solid state image senso...

Backside metal patterning die singulation system and related methods

Integration processes utilizing boron-doped silicon materials

Systems and methods for homogenous intermixing of precursors in all...

Vertical thin-film transistor and application as bit-line connector...

Manufacturing method for semiconductor silicon wafer

Semiconductor device pre-cleaning

Semiconductor device and method

Semiconductor device and method

Low warpage high density trench capacitor

Group VI precursor compounds

Method for manufacturing semiconductor device structure

Semiconductor device with electromagnetic interference film and met...

Titanium aluminum and tantalum aluminum thin films

Ruthenium film forming method and substrate processing system

Method for manufacturing a MEMS switch having an embedded metal con...

Manufacturing method of metal grid, thin film sensor and manufactur...

Deep trench intersections

Semiconductor device structure with conductive contacts of differen...

Display substrate, display panel and manufacturing method of displa...

Antenna with graded dielectirc and method of making the same

Method of performing gap filling including filling trenches between...

Method of manufacturing semiconductor device, substrate processing...

Method of processing substrate, method of manufacturing semiconduct...

Tuning threshold voltage through meta stable plasma treatment

Stacks of electrically resistive materials and related systems and...

Method of forming semiconductor device

Seam removal in high aspect ratio gap-fill

Patents Applicationslast 30 patents

VERTICAL THIN-FILM TRANSISTOR AND APPLICATION AS BIT-LINE CONNECTOR...

LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR

SELECTIVE FILM DEPOSITION

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR DEVICE WITH CATALYTIC CONDUCTIVE LAYER AND METHOD FOR...

STRUCTURES AND METHODS OF FORMING STRUCTURES

SELECTIVE BOTTOM-UP FILL

LOW RESISTIVITY CONTACTS AND INTERCONNECTS

TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

PRODUCTION METHOD FOR SINGLE CRYSTAL SEMICONDUCTOR FILM, PRODUCTION...

EMBEDDED COMPONENT INTERPOSER OR SUBSTRATE COMPRISING DISPLACEMENT...

DIFFUSION BARRIER INCLUDING METAL SILICIDE AND TITANIUM SILICON NIT...

METHOD FOR PRODUCING A POWER SEMICONDUCTOR COMPONENT HAVING CONTACT...

SEMICONDUCTOR DEVICE STRUCTURE WITH COMPOSITE INTERCONNECT STRUCTUR...

Radical Supply Device, Radical Processing Device, Radical Generatio...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME

DEEP TRENCH INTERSECTIONS

POSITIVE TYPE LIFT-OFF RESIST COMPOSITION AND METHOD FOR MANUFACTUR...

PLANARIZATION METHOD

FILM FORMING METHOD AND PROCESSING SYSTEM

SEMICONDUCTOR DEVICE STRUCTURE WITH REDUCED CRITICAL DIMENSION AND...

SEMICONDUCTOR DEVICE STRUCTURE WITH REDUCED CRITICAL DIMENSION AND...

OPTIMUM MATERIAL STACKS FOR SEMICONDUCTOR CONTACTS

PRECURSOR STRUCTURE FOR SELF-ALIGNED BIT LINE AND STORAGE NODE CONT...

ANNEALED SHAPE MEMORY ALLOY ON A SUBSTRATE

PLASMA PROCESSING METHOD

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

CIRCULAR-SHAPED RESISTOR