Deposition of silicon only

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CPC
C23C16/24

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/24Deposition of silicon only

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for manufacturing hexagonal crystals
- Patent number 12,247,315
- Issue date Mar 11, 2025
- LNBS CO. LTD.
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 12,230,496
- Issue date Feb 18, 2025
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus, method and system, solar cell, module, and power...
- Patent number 12,230,728
- Issue date Feb 18, 2025
- SUZHOU MAIZHENG TECHNOLOGY CO. LTD.
- Jian Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of forming a semiconductor layer
- Patent number 12,224,175
- Issue date Feb 11, 2025
- Infineon Technologies AG
- Olaf Fiedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Engineered substrate structures for power and RF applications
- Patent number 12,217,957
- Issue date Feb 4, 2025
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for electrically conductive membrane separation
- Patent number 12,214,315
- Issue date Feb 4, 2025
- SiTration, Inc.
- Brendan D. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing electroactive materials for metal-ion batteries
- Patent number 12,203,165
- Issue date Jan 21, 2025
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead for process tool
- Patent number 12,180,589
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing epitaxial material, structure formed using the...
- Patent number 12,173,404
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 12,158,437
- Issue date Dec 3, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Charles Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decomposition of silicon-containing precursors on porous scaffold m...
- Patent number 12,155,066
- Issue date Nov 26, 2024
- Group14 Technologies, Inc.
- Henry R. Costantino
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for preparing silicon by using gas-phase electroreduction
- Patent number 12,148,923
- Issue date Nov 19, 2024
- BEILAB CORP.
- Jihyun Seo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single chamber flowable film formation and treatments
- Patent number 12,142,459
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 12,131,947
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yutaka Motoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth apparatus and method of producing epitaxial wafer
- Patent number 12,129,543
- Issue date Oct 29, 2024
- Sumco Corporation
- Haku Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Method of crystallizing amorphous silicon film and deposition appar...
- Patent number 12,112,947
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective silicon deposition
- Patent number 12,106,972
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Yifeng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma surface treatment apparatus for conductive powder
- Patent number 12,098,461
- Issue date Sep 24, 2024
- KOREA INSTITUTE OF FUSION ENERGY
- Seung Ryul Yoo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Optical metalens systems
- Patent number 12,092,791
- Issue date Sep 17, 2024
- Imagia, Inc.
- Gregory Kress
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure and manufacturing method of surface acoustic wave filter...
- Patent number 12,088,271
- Issue date Sep 10, 2024
- Shenzhen Newsonic Technologies Co., Ltd.
- Guojun Weng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-depth film for optical devices
- Patent number 12,084,761
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Karl J. Armstrong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing silicon film and film deposition apparatus
- Patent number 12,080,552
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing polycrystalline silicon
- Patent number 12,060,277
- Issue date Aug 13, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yasushi Kurosawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly efficient manufacturing of silicon-carbon composite material...
- Patent number 12,057,569
- Issue date Aug 6, 2024
- Group14 Technologies, Inc.
- Henry R. Costantino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable film curing using H2 plasma
- Patent number 12,054,827
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Shishi Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor system and method to reduce residue buildup during a film d...
- Patent number 12,043,899
- Issue date Jul 23, 2024
- ASM IP Holding B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method for semiconductor silicon wafer
- Patent number 12,046,469
- Issue date Jul 23, 2024
- Globalwafers Japan Co., Ltd
- Takeshi Senda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivated silicon-carbon composite materials
- Patent number 12,046,744
- Issue date Jul 23, 2024
- Group14 Technologies, Inc.
- Henry R. Costantino
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD FOR PROCESS TOOL
- Publication number 20250092521
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Anthony Dip
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF PASSIVATION TO CONTROL OXYGEN CONTENT AND REACTIVITY OF...
- Publication number 20250096242
- Publication date Mar 20, 2025
- Group14 Technologies, Inc.
- Henry R. COSTANTINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING EPITAXIAL MATERIAL, STRUCTURE FORMED USING THE...
- Publication number 20250084534
- Publication date Mar 13, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MESOPOROUS GRAPHITIC CARBON MATERIALS AND PRODUCTION USING ELECTROC...
- Publication number 20250083965
- Publication date Mar 13, 2025
- MAPLE MATERIALS INC.
- Kevin Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-ALIGNED THREE-DIMENSIONAL OPTICAL PHASED ARRAY AND FABRICATION...
- Publication number 20250067928
- Publication date Feb 27, 2025
- The Regents of the University of Michigan
- Dachuan WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250034699
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING METHOD
- Publication number 20250019821
- Publication date Jan 16, 2025
- SAFRAN CERAMICS
- Eric BOUILLON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECTIONAL SELECTIVE FILL OF SILICON OXIDE MATERIALS
- Publication number 20250022704
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiang Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Optical Metalens Systems and Methods of Manufacture
- Publication number 20250012944
- Publication date Jan 9, 2025
- Imagia, Inc.
- Gregory Kress
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS
- Publication number 20250006474
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Naomi YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRATHIN SILICON OXYNITRIDE INTERFACE MATERIAL, TUNNEL OXIDE PASSI...
- Publication number 20250006850
- Publication date Jan 2, 2025
- Teranergy Technology Co., Ltd.
- Jichun YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING SILICON FILMS BY ATOMIC LAYER DEPOSITION
- Publication number 20240425983
- Publication date Dec 26, 2024
- Micron Technology, Inc.
- Jean-Sebastien Materne Lehn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF MEMORY DEVICE CHANNEL HOLES USING DOPED FILM LAYER
- Publication number 20240401189
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Hsiang Yu LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PREPARING ELECTROACTIVE MATERIALS FOR METAL-ION BATTERIES
- Publication number 20240384398
- Publication date Nov 21, 2024
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING SILICON-CONTAINING MATERIALS IN A STIRRED-TAN...
- Publication number 20240376594
- Publication date Nov 14, 2024
- Wacker Chemie AG
- Christoph DRÄGER
- C01 - INORGANIC CHEMISTRY
Information Patent Application
LIQUID CHROMATOGRAPHY SYSTEM AND COMPONENT
- Publication number 20240327981
- Publication date Oct 3, 2024
- SILCOTEK CORP.
- Gary A. BARONE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20240331984
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...
- Publication number 20240332023
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240327984
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Tuhin Shuvra Basu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20240327973
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Ravi KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS
- Publication number 20240301552
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Harshil Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL AND SELECTIVE SIN DEPOSITION
- Publication number 20240290612
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Zeqing SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287671
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORTS FOR SEMICONDUCTOR STRUCTURES
- Publication number 20240290615
- Publication date Aug 29, 2024
- SOITEC
- Young-Pil Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240287673
- Publication date Aug 29, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279797
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279799
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279794
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279796
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition of silicon only

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for manufacturing hexagonal crystals

Organoaminosilane precursors and methods for depositing films compr...

Coating apparatus, method and system, solar cell, module, and power...

Apparatus and method of forming a semiconductor layer

Engineered substrate structures for power and RF applications

System and method for electrically conductive membrane separation

Process for preparing electroactive materials for metal-ion batteries

Showerhead for process tool

Method of depositing epitaxial material, structure formed using the...

XPS metrology for process control in selective deposition

Decomposition of silicon-containing precursors on porous scaffold m...

Method for preparing silicon by using gas-phase electroreduction

Single chamber flowable film formation and treatments

Method for manufacturing semiconductor device and substrate process...

Epitaxial growth apparatus and method of producing epitaxial wafer

Integrated epitaxy and preclean system

Method of crystallizing amorphous silicon film and deposition appar...

Selective silicon deposition

Plasma surface treatment apparatus for conductive powder

Optical metalens systems

Structure and manufacturing method of surface acoustic wave filter...

Multi-depth film for optical devices

Method of depositing silicon film and film deposition apparatus

Method for producing polycrystalline silicon

Highly efficient manufacturing of silicon-carbon composite material...

Flowable film curing using H2 plasma

Apparatus and method for manufacturing hexagonal silicon crystal

Reactor system and method to reduce residue buildup during a film d...

Manufacturing method for semiconductor silicon wafer

Passivated silicon-carbon composite materials

Patents Applicationslast 30 patents

SHOWERHEAD FOR PROCESS TOOL

METHODS OF PASSIVATION TO CONTROL OXYGEN CONTENT AND REACTIVITY OF...

METHOD OF DEPOSITING EPITAXIAL MATERIAL, STRUCTURE FORMED USING THE...

MESOPOROUS GRAPHITIC CARBON MATERIALS AND PRODUCTION USING ELECTROC...

SELF-ALIGNED THREE-DIMENSIONAL OPTICAL PHASED ARRAY AND FABRICATION...

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

COATING METHOD

DIRECTIONAL SELECTIVE FILL OF SILICON OXIDE MATERIALS

Optical Metalens Systems and Methods of Manufacture

INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS

ULTRATHIN SILICON OXYNITRIDE INTERFACE MATERIAL, TUNNEL OXIDE PASSI...

METHODS FOR DEPOSITING SILICON FILMS BY ATOMIC LAYER DEPOSITION

FORMATION OF MEMORY DEVICE CHANNEL HOLES USING DOPED FILM LAYER

PROCESS FOR PREPARING ELECTROACTIVE MATERIALS FOR METAL-ION BATTERIES

PROCESS FOR PRODUCING SILICON-CONTAINING MATERIALS IN A STIRRED-TAN...

LIQUID CHROMATOGRAPHY SYSTEM AND COMPONENT

PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM

METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...

FILM FORMING METHOD AND FILM FORMING APPARATUS

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS

CONFORMAL AND SELECTIVE SIN DEPOSITION

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUPPORTS FOR SEMICONDUCTOR STRUCTURES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES