Deposition of silicon only

Industry

CPC
C23C16/24

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/24Deposition of silicon only

Industries

Patents Grantslast 30 patents

Information Patent Grant
Decomposition of silicon-containing precursors on porous scaffold m...
- Patent number 12,155,066
- Issue date Nov 26, 2024
- Group14 Technologies, Inc.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing silicon by using gas-phase electroreduction
- Patent number 12,148,923
- Issue date Nov 19, 2024
- BEILAB CORP.
- Jihyun Seo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single chamber flowable film formation and treatments
- Patent number 12,142,459
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 12,131,947
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yutaka Motoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth apparatus and method of producing epitaxial wafer
- Patent number 12,129,543
- Issue date Oct 29, 2024
- Sumco Corporation
- Haku Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Method of crystallizing amorphous silicon film and deposition appar...
- Patent number 12,112,947
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective silicon deposition
- Patent number 12,106,972
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Yifeng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma surface treatment apparatus for conductive powder
- Patent number 12,098,461
- Issue date Sep 24, 2024
- KOREA INSTITUTE OF FUSION ENERGY
- Seung Ryul Yoo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Optical metalens systems
- Patent number 12,092,791
- Issue date Sep 17, 2024
- Imagia, Inc.
- Gregory Kress
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure and manufacturing method of surface acoustic wave filter...
- Patent number 12,088,271
- Issue date Sep 10, 2024
- Shenzhen Newsonic Technologies Co., Ltd.
- Guojun Weng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-depth film for optical devices
- Patent number 12,084,761
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Karl J. Armstrong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing silicon film and film deposition apparatus
- Patent number 12,080,552
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing polycrystalline silicon
- Patent number 12,060,277
- Issue date Aug 13, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yasushi Kurosawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly efficient manufacturing of silicon-carbon composite material...
- Patent number 12,057,569
- Issue date Aug 6, 2024
- Group14 Technologies, Inc.
- Henry R. Costantino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable film curing using H2 plasma
- Patent number 12,054,827
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Shishi Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor system and method to reduce residue buildup during a film d...
- Patent number 12,043,899
- Issue date Jul 23, 2024
- ASM IP Holding B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method for semiconductor silicon wafer
- Patent number 12,046,469
- Issue date Jul 23, 2024
- Globalwafers Japan Co., Ltd
- Takeshi Senda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivated silicon-carbon composite materials
- Patent number 12,046,744
- Issue date Jul 23, 2024
- Group14 Technologies, Inc.
- Henry R. Costantino
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,037,677
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid chromatography system and component
- Patent number 12,037,685
- Issue date Jul 16, 2024
- Silcotek Corp.
- Gary A. Barone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing a support for a semiconductor structure
- Patent number 12,009,209
- Issue date Jun 11, 2024
- Soitec
- Young-Pil Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for etching a semiconductor structure and for conditioning...
- Patent number 12,009,249
- Issue date Jun 11, 2024
- GlobalWafers Co., Ltd.
- Gang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Engineered substrate structures for power and RF applications
- Patent number 12,009,205
- Issue date Jun 11, 2024
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming structures including silicon germanium and silic...
- Patent number 11,996,289
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 11,965,246
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Naonori Fujiwara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming structures, semiconductor processing systems, an...
- Patent number 11,959,173
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for conditioning a processing reactor
- Patent number 11,926,892
- Issue date Mar 12, 2024
- GlobalWafers Co., Ltd.
- Gang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing electroactive materials for metal-ion batteries
- Patent number 11,905,593
- Issue date Feb 20, 2024
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR PREPARING ELECTROACTIVE MATERIALS FOR METAL-ION BATTERIES
- Publication number 20240384398
- Publication date Nov 21, 2024
- Nexeon Limited
- Sefa Yilmaz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR PRODUCING SILICON-CONTAINING MATERIALS IN A STIRRED-TAN...
- Publication number 20240376594
- Publication date Nov 14, 2024
- Wacker Chemie AG
- Christoph DRÄGER
- C01 - INORGANIC CHEMISTRY
Information Patent Application
LIQUID CHROMATOGRAPHY SYSTEM AND COMPONENT
- Publication number 20240327981
- Publication date Oct 3, 2024
- SILCOTEK CORP.
- Gary A. BARONE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240327984
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Tuhin Shuvra Basu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20240331984
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...
- Publication number 20240332023
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20240327973
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Ravi KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS
- Publication number 20240301552
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Harshil Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL AND SELECTIVE SIN DEPOSITION
- Publication number 20240290612
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Zeqing SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287671
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORTS FOR SEMICONDUCTOR STRUCTURES
- Publication number 20240290615
- Publication date Aug 29, 2024
- SOITEC
- Young-Pil Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240287673
- Publication date Aug 29, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279797
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279794
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279796
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279798
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279799
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279793
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279795
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...
- Publication number 20240274437
- Publication date Aug 15, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNTHESIS OF 1,1,1-TRICHLORODISILANE
- Publication number 20240253997
- Publication date Aug 1, 2024
- DDP Specialty Electronic Materials US 9, LLC
- Andrew Millward
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATED SILICON-CARBON COMPOSITE MATERIALS
- Publication number 20240258509
- Publication date Aug 1, 2024
- Group14 Technologies, Inc.
- Henry R. COSTANTINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREPARING SILICON BY USING GAS-PHASE ELECTROREDUCTION
- Publication number 20240243270
- Publication date Jul 18, 2024
- BEILab corp.
- Jihyun SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RECYCLING PROCESS
- Publication number 20240227121
- Publication date Jul 11, 2024
- SK SILTRON CO., LTD
- Soo Cheon JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL MONITOR FOR HIGH PRESSURE PROCESSING
- Publication number 20240218560
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Sandeep Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...
- Publication number 20240222114
- Publication date Jul 4, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Claudia Fafard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING EPITAXIAL TEMPLATE LAYER
- Publication number 20240222116
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Gregory Deye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...
- Publication number 20240209510
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL LAMINATE, METHOD FOR PRODUCING OPTICAL LAMINATE, OPTICAL ME...
- Publication number 20240200182
- Publication date Jun 20, 2024
- NITTO DENKO CORPORATION
- Ryota Morishima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240186139
- Publication date Jun 6, 2024
- ASM IP HOLDING B.V.
- Sungdae Woo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition of silicon only

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Decomposition of silicon-containing precursors on porous scaffold m...

Method for preparing silicon by using gas-phase electroreduction

Single chamber flowable film formation and treatments

Method for manufacturing semiconductor device and substrate process...

Epitaxial growth apparatus and method of producing epitaxial wafer

Integrated epitaxy and preclean system

Method of crystallizing amorphous silicon film and deposition appar...

Selective silicon deposition

Plasma surface treatment apparatus for conductive powder

Optical metalens systems

Structure and manufacturing method of surface acoustic wave filter...

Multi-depth film for optical devices

Method of depositing silicon film and film deposition apparatus

Method for producing polycrystalline silicon

Highly efficient manufacturing of silicon-carbon composite material...

Flowable film curing using H2 plasma

Apparatus and method for manufacturing hexagonal silicon crystal

Reactor system and method to reduce residue buildup during a film d...

Manufacturing method for semiconductor silicon wafer

Passivated silicon-carbon composite materials

Method of manufacturing semiconductor device, substrate processing...

Liquid chromatography system and component

Process for preparing a support for a semiconductor structure

Methods for etching a semiconductor structure and for conditioning...

Engineered substrate structures for power and RF applications

Methods of forming structures including silicon germanium and silic...

Deposition method and deposition apparatus

Methods of forming structures, semiconductor processing systems, an...

Methods for conditioning a processing reactor

Process for preparing electroactive materials for metal-ion batteries

Patents Applicationslast 30 patents

PROCESS FOR PREPARING ELECTROACTIVE MATERIALS FOR METAL-ION BATTERIES

PROCESS FOR PRODUCING SILICON-CONTAINING MATERIALS IN A STIRRED-TAN...

LIQUID CHROMATOGRAPHY SYSTEM AND COMPONENT

FILM FORMING METHOD AND FILM FORMING APPARATUS

PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM

METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS

CONFORMAL AND SELECTIVE SIN DEPOSITION

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUPPORTS FOR SEMICONDUCTOR STRUCTURES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...

SYNTHESIS OF 1,1,1-TRICHLORODISILANE

PASSIVATED SILICON-CARBON COMPOSITE MATERIALS

METHOD FOR PREPARING SILICON BY USING GAS-PHASE ELECTROREDUCTION

CARRIER RECYCLING PROCESS

THERMAL MONITOR FOR HIGH PRESSURE PROCESSING

METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...

METHOD, SYSTEM AND APPARATUS FOR FORMING EPITAXIAL TEMPLATE LAYER

METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...

OPTICAL LAMINATE, METHOD FOR PRODUCING OPTICAL LAMINATE, OPTICAL ME...

SUBSTRATE PROCESSING METHOD