Deposition using atomic layer deposition techniques [ALD]

Industry

CPC
H01L21/3141

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3141Deposition using atomic layer deposition techniques [ALD]

Industries

Patents Grantslast 30 patents

Information Patent Grant
Enhanced thin film deposition
- Patent number 10,964,534
- Issue date Mar 30, 2021
- ASM International
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method
- Patent number 10,858,736
- Issue date Dec 8, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Yi Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 10,297,444
- Issue date May 21, 2019
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming dielectric films, new precursors and their use in...
- Patent number 10,217,629
- Issue date Feb 26, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma assisted atomic layer deposition metal oxide for patterning...
- Patent number 10,043,657
- Issue date Aug 7, 2018
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for forming film including at least...
- Patent number 10,026,607
- Issue date Jul 17, 2018
- Hitachi Kokusai Electric, Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 9,972,583
- Issue date May 15, 2018
- SPTS Technologies Limited
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,251
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,252
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of metal oxides, silicates and phosphates, and sil...
- Patent number 9,905,414
- Issue date Feb 27, 2018
- President and Fellows of Harvard College
- Roy Gerald Gordon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Plasma assisted atomic layer deposition of multi-layer films for pa...
- Patent number 9,892,917
- Issue date Feb 13, 2018
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication technique for high frequency, high power group III nitr...
- Patent number 9,882,039
- Issue date Jan 30, 2018
- University of South Carolina
- M. Asif Khan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced thin film deposition
- Patent number 9,831,094
- Issue date Nov 28, 2017
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a semiconductor device by thermally treating a c...
- Patent number 9,799,523
- Issue date Oct 24, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui OuYang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a gate dielectric for high-k metal gate devices
- Patent number 9,711,373
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Hao Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma assisted atomic layer deposition titanium oxide for patterni...
- Patent number 9,673,041
- Issue date Jun 6, 2017
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded dielectric structures
- Patent number 9,627,501
- Issue date Apr 18, 2017
- Micron Technology, Inc.
- F. Daniel Gealy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium lanthanide oxide films
- Patent number 9,583,334
- Issue date Feb 28, 2017
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma assisted atomic layer deposition titanium oxide for conforma...
- Patent number 9,570,290
- Issue date Feb 14, 2017
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus and method
- Patent number 9,512,519
- Issue date Dec 6, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Yi Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device for forming film inclu...
- Patent number 9,478,417
- Issue date Oct 25, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming semiconductor structures including tight pitch c...
- Patent number 9,437,480
- Issue date Sep 6, 2016
- Micron Technology, Inc.
- Luan C. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method and substrate processing...
- Patent number 9,416,446
- Issue date Aug 16, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
- Patent number 9,384,971
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of manufacturing a semiconductor device by for...
- Patent number 9,385,013
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device by forming a film on...
- Patent number 9,384,966
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device by forming a film on...
- Patent number 9,384,968
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
- Patent number 9,384,969
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
- Patent number 9,384,972
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device by forming a film on...
- Patent number 9,384,967
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20180130666
- Publication date May 10, 2018
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH DIFFERENT FINS OF FINFETS
- Publication number 20140332824
- Publication date Nov 13, 2014
- Chin-Fu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...
- Publication number 20140327064
- Publication date Nov 6, 2014
- Toshihiro IIZUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS
- Publication number 20140327065
- Publication date Nov 6, 2014
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20140322923
- Publication date Oct 30, 2014
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RUTHENIUM FILM FORMATION METHOD AND STORAGE MEDIUM
- Publication number 20140287585
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Hiroaki ASHIZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURES INCLUDING TIGHT PITCH CONTACTS
- Publication number 20140246784
- Publication date Sep 4, 2014
- Micron Technology, Inc.
- Luan C. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD
- Publication number 20140154414
- Publication date Jun 5, 2014
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Chia-Yi CHUANG
- C30 - CRYSTAL GROWTH
Information Patent Application
NANOCRYSTAL FORMATION USING ATOMIC LAYER DEPOSITION
- Publication number 20140148002
- Publication date May 29, 2014
- Micron Technology, Inc.
- Prashant MAJHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS
- Publication number 20140065806
- Publication date Mar 6, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20140065840
- Publication date Mar 6, 2014
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-K LAYERS, TRANSISTORS, AND FABRICATION METHOD
- Publication number 20140042559
- Publication date Feb 13, 2014
- SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
- YONG CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20140035101
- Publication date Feb 6, 2014
- Micron Technology, Inc.
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Novel Fabrication Technique for High Frequency, High Power Group II...
- Publication number 20140015011
- Publication date Jan 16, 2014
- M. Asif Khan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOISTURE BARRIER COATINGS
- Publication number 20130320509
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES
- Publication number 20130320510
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NIOBIUM AND VANADIUM ORGANOMETALLIC PRECURSORS FOR THIN FILM DEPOSI...
- Publication number 20130295778
- Publication date Nov 7, 2013
- Nicolas BLASCO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEMORY DEVICE HAVING A DIELECTRIC CONTAINING DYSPROSIUM DOPED HAFNI...
- Publication number 20130292782
- Publication date Nov 7, 2013
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal-Oxide-Semiconductor High Electron Mobility Transistors and Me...
- Publication number 20130288461
- Publication date Oct 31, 2013
- Thomas Edward DUNGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COBALT TITANIUM OXIDE DIELECTRIC FILMS
- Publication number 20130264625
- Publication date Oct 10, 2013
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING FINFETS AND SEMICONDUCTOR STRUCTURE FABRICAT...
- Publication number 20130207122
- Publication date Aug 15, 2013
- United Microelectronics Corp.
- Chin-Fu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20130183445
- Publication date Jul 18, 2013
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES
- Publication number 20130166057
- Publication date Jun 27, 2013
- Micron Technology, Inc.
- Lingyi A. Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR WITH REDUCED DEPLETION FIELD WIDTH
- Publication number 20130140646
- Publication date Jun 6, 2013
- ROUND ROCK RESEARCH, LLC
- Shuang Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
- Publication number 20130122328
- Publication date May 16, 2013
- President and Fellows of Harvard College
- Roy Gerald GORDON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20130095668
- Publication date Apr 18, 2013
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming a Nanocluster-Comprising Dielectric Layer and Dev...
- Publication number 20130087848
- Publication date Apr 11, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jinesh Balakrishna Pillai Kochupurackal
- B82 - NANO-TECHNOLOGY
Information Patent Application
Yttrium and Titanium High-K Dielectric Films
- Publication number 20130069201
- Publication date Mar 21, 2013
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Yttrium and Titanium High-K Dielectric Films
- Publication number 20130071990
- Publication date Mar 21, 2013
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Depositing High-K Dielectrics
- Publication number 20130056852
- Publication date Mar 7, 2013
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition using atomic layer deposition techniques [ALD]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Enhanced thin film deposition

Atomic layer deposition method

Enhanced thin film deposition

Method of forming dielectric films, new precursors and their use in...

Plasma assisted atomic layer deposition metal oxide for patterning...

Substrate processing apparatus for forming film including at least...

Durable, heat-resistant multi-layer coatings and coated articles

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device and substrate processi...

Vapor deposition of metal oxides, silicates and phosphates, and sil...

Plasma assisted atomic layer deposition of multi-layer films for pa...

Fabrication technique for high frequency, high power group III nitr...

Enhanced thin film deposition

Methods of forming a semiconductor device by thermally treating a c...

Method of fabricating a gate dielectric for high-k metal gate devices

Plasma assisted atomic layer deposition titanium oxide for patterni...

Graded dielectric structures

Gallium lanthanide oxide films

Plasma assisted atomic layer deposition titanium oxide for conforma...

Atomic layer deposition apparatus and method

Method of manufacturing semiconductor device for forming film inclu...

Methods of forming semiconductor structures including tight pitch c...

Semiconductor device manufacturing method and substrate processing...

Method of manufacturing semiconductor device by forming a film on a...

Method and apparatus of manufacturing a semiconductor device by for...

Method of manufacturing a semiconductor device by forming a film on...

Method of manufacturing a semiconductor device by forming a film on...

Method of manufacturing semiconductor device by forming a film on a...

Method of manufacturing semiconductor device by forming a film on a...

Method of manufacturing a semiconductor device by forming a film on...

Patents Applicationslast 30 patents

ENHANCED THIN FILM DEPOSITION

SEMICONDUCTOR STRUCTURE WITH DIFFERENT FINS OF FINFETS

METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...

CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

RUTHENIUM FILM FORMATION METHOD AND STORAGE MEDIUM

SEMICONDUCTOR STRUCTURES INCLUDING TIGHT PITCH CONTACTS

ATOMIC LAYER DEPOSITION APPARATUS AND METHOD

NANOCRYSTAL FORMATION USING ATOMIC LAYER DEPOSITION

ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

HIGH-K LAYERS, TRANSISTORS, AND FABRICATION METHOD

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

Novel Fabrication Technique for High Frequency, High Power Group II...

MOISTURE BARRIER COATINGS

DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES

NIOBIUM AND VANADIUM ORGANOMETALLIC PRECURSORS FOR THIN FILM DEPOSI...

MEMORY DEVICE HAVING A DIELECTRIC CONTAINING DYSPROSIUM DOPED HAFNI...

Metal-Oxide-Semiconductor High Electron Mobility Transistors and Me...

COBALT TITANIUM OXIDE DIELECTRIC FILMS

METHOD FOR FABRICATING FINFETS AND SEMICONDUCTOR STRUCTURE FABRICAT...

ENHANCED THIN FILM DEPOSITION

METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES

TRANSISTOR WITH REDUCED DEPLETION FIELD WIDTH

VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

Method of Forming a Nanocluster-Comprising Dielectric Layer and Dev...

Yttrium and Titanium High-K Dielectric Films

Yttrium and Titanium High-K Dielectric Films

Methods For Depositing High-K Dielectrics