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H01J2237/006
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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/006
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Patents Grants
last 30 patents
Information
Patent Grant
Aperture device and analyzer arrangement
Patent number
11,942,316
Issue date
Mar 26, 2024
SCIENTA OMICRON AB
Peter Amann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus and method for controlling electron beam ap...
Patent number
11,894,211
Issue date
Feb 6, 2024
HITACHI HIGH-TECH CORPORATION
Erina Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced charging by low negative voltage in FIB systems
Patent number
11,887,810
Issue date
Jan 30, 2024
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas delivery system for a shared gas delivery architecture
Patent number
11,881,416
Issue date
Jan 23, 2024
Applied Materials, Inc.
Arun Chakravarthy Chakravarthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Build material handling unit for a powder module for an apparatus f...
Patent number
11,878,463
Issue date
Jan 23, 2024
CONCEPT LASER GMBH
Dominik Eideloth
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Electron microscope sample holder fluid handling with independent p...
Patent number
11,869,744
Issue date
Jan 9, 2024
PROTOCHIPS, INC.
Franklin Stampley Walden
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Broad-energy spectrum electron gun
Patent number
11,848,174
Issue date
Dec 19, 2023
The Regents of the University of Colorado, a Body Corporate
Kieran Wilson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
Patent number
11,827,973
Issue date
Nov 28, 2023
Entegris, Inc.
Oleg Byl
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Operating a gas supply device for a particle beam device
Patent number
11,764,036
Issue date
Sep 19, 2023
Carl Zeiss Microscopy GmbH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for extending a lifetime of an ion source for mol...
Patent number
11,756,772
Issue date
Sep 12, 2023
Axcelis Technologies, Inc.
David Sporleder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multidimensional printer
Patent number
11,738,312
Issue date
Aug 29, 2023
GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY O...
Andrei A. Kolmakov
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
11,738,376
Issue date
Aug 29, 2023
ASML Netherlands, B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method for cross-section sample preparation
Patent number
11,726,050
Issue date
Aug 15, 2023
Fibics Incorporated
Michael William Phaneuf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorine based molecular co-gas when running dimethylaluminum chlor...
Patent number
11,699,565
Issue date
Jul 11, 2023
Axcelis Technologies, Inc.
Neil K. Colvin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering apparatus including gas distribution system
Patent number
11,674,213
Issue date
Jun 13, 2023
Cardinal CG Company
Klaus Hartig
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
11,569,068
Issue date
Jan 31, 2023
Tokyo Electron Limited
Kazushi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas delivery system for ion implanter
Patent number
11,569,062
Issue date
Jan 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hom-Chung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and gas introducing method
Patent number
11,562,889
Issue date
Jan 24, 2023
Tokyo Electron Limited
Mayo Uda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and technique for profile modulation using high tilt angles
Patent number
11,551,904
Issue date
Jan 10, 2023
Applied Materials, Inc.
Venkataramana R. Chavva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,542,603
Issue date
Jan 3, 2023
Kokusai Electric Corporation
Hirohisa Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implanter toxic gas delivery system
Patent number
11,527,380
Issue date
Dec 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ying-Chieh Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Member for plasma processing devices
Patent number
11,527,388
Issue date
Dec 13, 2022
Kyocera Corporation
Hiromasa Matsufuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering apparatus including gas distribution system
Patent number
11,501,959
Issue date
Nov 15, 2022
Cardinal CG Company
Klaus Hartig
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
11,476,122
Issue date
Oct 18, 2022
Kioxia Corporation
Shuichi Kuboi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultrahigh selective nitride etch to form FinFET devices
Patent number
11,469,079
Issue date
Oct 11, 2022
Lam Research Corporation
Kwame Eason
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Personnel-tolerant carbon dioxide beamline variation reduction
Patent number
11,402,361
Issue date
Aug 2, 2022
International Business Machines Corporation
Shane D. Bryant
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radical deactivation component, plasma processing apparatus using t...
Patent number
11,380,522
Issue date
Jul 5, 2022
Tokyo Electron Limited
Koji Yamagishi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method for cross-section sample preparation
Patent number
11,366,074
Issue date
Jun 21, 2022
Fibics Incorporated
Michael William Phaneuf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing apparatus and control method thereof
Patent number
11,352,694
Issue date
Jun 7, 2022
NuFlare Technology, Inc.
Satoshi Nakahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
Patent number
11,299,802
Issue date
Apr 12, 2022
Entegris, Inc.
Oleg Byl
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...
Publication number
20240105421
Publication date
Mar 28, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OPTIMIZED SADDLE NOZZLE DESIGN FOR GAS INJECTION SYSTEM
Publication number
20240096592
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
Publication number
20240062990
Publication date
Feb 22, 2024
APPLIED MATERIALS ISRAEL LTD.
Sean Kashy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHLORINE-CONTAINING PRECURSORS FOR ION IMPLANTATION SYSTEMS AND REL...
Publication number
20240062987
Publication date
Feb 22, 2024
Entegris, Inc.
Joseph R. Despres
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR IMAGING AND PROCESSING A SAMPLE USING A FOCUSED PARTICLE...
Publication number
20240062989
Publication date
Feb 22, 2024
Carl Zeiss SMT GMBH
Daniel Schwarz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND RELATED SYSTEM AND C...
Publication number
20240047175
Publication date
Feb 8, 2024
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING A SAMPLE, PARTICLE BEAM SYSTEM, AND COMPUTER P...
Publication number
20240029996
Publication date
Jan 25, 2024
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20240017301
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE
Publication number
20230420224
Publication date
Dec 28, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCE HAVING DIFFERENT MODES OF OPERATION
Publication number
20230395357
Publication date
Dec 7, 2023
Applied Materials, Inc.
Graham Wright
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE
Publication number
20230386786
Publication date
Nov 30, 2023
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma-Assisted Etching Of Metal Oxides
Publication number
20230386854
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chansyun David YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CROSS-SECTION SAMPLE PREPARATION
Publication number
20230358696
Publication date
Nov 9, 2023
Fibics Incorporated
Michael William PHANEUF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...
Publication number
20230352265
Publication date
Nov 2, 2023
Axcelis Technologies, Inc.
Neil K. Colvin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCED CHARGING BY LOW NEGATIVE VOLTAGE IN FIB SYSTEMS
Publication number
20230343545
Publication date
Oct 26, 2023
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
END POINT DETERMINATION BY MEANS OF CONTRAST GAS
Publication number
20230341766
Publication date
Oct 26, 2023
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...
Publication number
20230282442
Publication date
Sep 7, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
Publication number
20230280647
Publication date
Sep 7, 2023
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SUPPLY DEVICE, SYSTEM HAVING A GAS SUPPLY DEVICE, AND PARTICLE...
Publication number
20230241650
Publication date
Aug 3, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
B08 - CLEANING
Information
Patent Application
GAS SUPPLY DEVICE, PARTICLE BEAM APPARATUS HAVING A GAS SUPPLY DEVI...
Publication number
20230215688
Publication date
Jul 6, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR OBSERVING PERMEATION AND DIFFUSION PATH OF OBSERVATION T...
Publication number
20230127466
Publication date
Apr 27, 2023
National Institute for Materials Science
Akiko Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
Publication number
20230084901
Publication date
Mar 16, 2023
LAM RESEARCH CORPORATION
Kwame EASON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPARATUS AND METHOD FOR CONTROLLING ELECTRON BEAM AP...
Publication number
20220351934
Publication date
Nov 3, 2022
HITACHI HIGH-TECH CORPORATION
Erina KAWAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CROSS-SECTION SAMPLE PREPARATION
Publication number
20220317072
Publication date
Oct 6, 2022
Fibics Incorporated
Michael William PHANEUF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA-ASSISTED ETCHING OF METAL OXIDES
Publication number
20220216064
Publication date
Jul 7, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chansyun David YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR STORAGE AND SUPPLY OF F3NO-FREE FNO GASES A...
Publication number
20220208517
Publication date
Jun 30, 2022
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Ayaka NISHIYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATI...
Publication number
20220186358
Publication date
Jun 16, 2022
Entegris, Inc.
Oleg Byl
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS DELIVERY SYSTEM FOR A SHARED GAS DELIVERY ARCHITECTURE
Publication number
20220189793
Publication date
Jun 16, 2022
Applied Materials, Inc.
Arun Chakravarthy Chakravarthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MIXED GAS CLUSTER ION BEAM GENERATOR AND MASS SPECTROMETER INCLUDIN...
Publication number
20220157554
Publication date
May 19, 2022
KOREA BASIC SCIENCE INSTITUTE
Sang Ju LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...
Publication number
20220139664
Publication date
May 5, 2022
Axcells Technologies, Inc.
Neil K. Colvin
H01 - BASIC ELECTRIC ELEMENTS