Membership
Tour
Register
Log in
Details of optical elements
Follow
Industry
CPC
G03F7/7015
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/7015
Details of optical elements
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Diffraction based overlay metrology tool and method of diffraction...
Patent number
11,953,450
Issue date
Apr 9, 2024
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Long sweep length DUV microlithographic beam scanning acousto-optic...
Patent number
11,947,241
Issue date
Apr 2, 2024
Mycronic AB
Andrzej Karawajczyk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical diffraction component
Patent number
11,947,265
Issue date
Apr 2, 2024
Carl Zeiss SMT GmbH
Heiko Feldmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology apparatus
Patent number
11,940,739
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fabricating reticle
Patent number
11,940,737
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsueh-Yi Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
Patent number
11,934,104
Issue date
Mar 19, 2024
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Grant
Optical component and clamp used in lithographic apparatus
Patent number
11,892,779
Issue date
Feb 6, 2024
ASML Holding N.V.
Victor Antonio Perez-Falcon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for nanoscale data recording
Patent number
11,886,123
Issue date
Jan 30, 2024
Franklin Mark Schellenberg
G11 - INFORMATION STORAGE
Information
Patent Grant
Assembly including a non-linear element and a method of use thereof
Patent number
11,886,096
Issue date
Jan 30, 2024
ASML Netherlands B.V.
Vitaliy Prosyentsov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High uniformity telecentric illuminator
Patent number
11,868,049
Issue date
Jan 9, 2024
Innovations In Optics, Inc.
Thomas J. Brukilacchio
G02 - OPTICS
Information
Patent Grant
Memory device
Patent number
11,854,972
Issue date
Dec 26, 2023
Winbond Electronics Corp.
Chia-Jung Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reticle transportation container
Patent number
11,837,486
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Ching Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field facet system, optical arrangement and lithography apparatus
Patent number
11,815,817
Issue date
Nov 14, 2023
Carl Zeiss SMT GmbH
Guenter Rudolph
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror, in particular for a microlithographic projection exposure a...
Patent number
11,809,085
Issue date
Nov 7, 2023
Carl Zeiss SMT GmbH
Hans Michael Stiepan
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Radiation source supply system for lithographic tools
Patent number
11,809,084
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
11,762,298
Issue date
Sep 19, 2023
Canon Kabushiki Kaisha
Daisuke Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Frequency broadening apparatus and method
Patent number
11,733,617
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Patrick Sebastian Uebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Graded interface in Bragg reflector
Patent number
11,720,013
Issue date
Aug 8, 2023
Applied Materials, Inc.
Wen Xiao
G02 - OPTICS
Information
Patent Grant
Measurement illumination optical unit for guiding illumination ligh...
Patent number
11,720,028
Issue date
Aug 8, 2023
Carl Zeiss SMT GmbH
Thomas Fischer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Digital exposure apparatus and exposure method
Patent number
11,669,016
Issue date
Jun 6, 2023
BOE Technology Group Co., Ltd.
Jing Feng
G02 - OPTICS
Information
Patent Grant
Projection optical unit for microlithography and method for produci...
Patent number
11,650,510
Issue date
May 16, 2023
Carl Zeiss SMT GmbH
Hans-Juergen Rostalski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Diffraction based overlay metrology tool and method of diffraction...
Patent number
11,644,428
Issue date
May 9, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay pattern
Patent number
11,635,680
Issue date
Apr 25, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Mei-Li Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Diffraction based overlay metrology tool and method of diffraction...
Patent number
11,619,595
Issue date
Apr 4, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Exposure apparatus, exposure method, decision method, and article m...
Patent number
11,592,750
Issue date
Feb 28, 2023
Canon Kabushiki Kaisha
Manabu Hakko
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pulse stretcher and method
Patent number
11,569,628
Issue date
Jan 31, 2023
ASML Netherlands B.V.
Herman Philip Godfried
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Maskless photolithography devices, methods, and systems
Patent number
11,567,411
Issue date
Jan 31, 2023
NANOPATH, INC.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Configuring optical layers in imprint lithography processes
Patent number
11,550,226
Issue date
Jan 10, 2023
Magic Leap, Inc.
Vikramjit Singh
G02 - OPTICS
Information
Patent Grant
Control apparatus and control method, exposure apparatus and exposu...
Patent number
11,537,051
Issue date
Dec 27, 2022
Nikon Corporation
Satoshi Yashiki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scatterometer and method of scatterometry using acoustic radiation
Patent number
11,536,654
Issue date
Dec 27, 2022
ASML Netherlands B.V.
Maxim Pisarenco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240136787
Publication date
Apr 25, 2024
Gigaphoton Inc.
Yousuke FUJIMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BYPASS APPARATUS, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTUR...
Publication number
20240128702
Publication date
Apr 18, 2024
Gigaphoton Inc.
Shinichi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGING OPTICAL UNIT
Publication number
20240103382
Publication date
Mar 28, 2024
Carl Zeiss SMT GMBH
Hans-Jürgen Rostalski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FILM, PELLICLE, EXPOSURE ORIGINAL PLATE, EXPOSURE DEVICE,...
Publication number
20240103357
Publication date
Mar 28, 2024
MITSUI CHEMICALS, INC.
Yosuke ONO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTUATOR-SENSOR DEVICE AND LITHOGRAPHY APPARATUS
Publication number
20240027914
Publication date
Jan 25, 2024
Carl Zeiss SMT GMBH
Holger Sontag
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV MIRROR WITH IMPROVED OPTICAL STABILITY
Publication number
20240019786
Publication date
Jan 18, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Yung-Yao Lee
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
HIGH FORCE LOW VOLTAGE PIEZOELECTRIC MICROMIRROR ACTUATOR
Publication number
20240012332
Publication date
Jan 11, 2024
ASML NETHERLANDS B.V.
Luc Roger Simonne HASPESLAGH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT, OPTICAL ARRANGEMENT AND INSERT COMPONENT
Publication number
20240004160
Publication date
Jan 4, 2024
Carl Zeiss SMT GMBH
Eduard Schweigert
G02 - OPTICS
Information
Patent Application
FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230384685
Publication date
Nov 30, 2023
Carl Zeiss SMT GMBH
Arno Schmittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LAYER-FORMING METHOD, OPTICAL ELEMENT AND OPTICAL SYSTEM
Publication number
20230367226
Publication date
Nov 16, 2023
Carl Zeiss SMT GMBH
Vitaliy SHKLOVER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Adjustable Permanent Magnetic Lens Having Shunting Device
Publication number
20230360878
Publication date
Nov 9, 2023
IMS Nanofabrication GmbH
Dietmar Puchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROJECTION EXPOSURE DEVICE AND PROJECTION EXPOSURE METHOD
Publication number
20230359126
Publication date
Nov 9, 2023
V TECHNOLOGY CO., LTD.
Yoshiyuki ENOMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING A MAIN BODY OF AN OPTICAL ELEMENT FOR SEMICOND...
Publication number
20230288662
Publication date
Sep 14, 2023
Carl Zeiss SMT GMBH
Franz-Josef STICKEL
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
Publication number
20230280658
Publication date
Sep 7, 2023
TSINGHUA UNIVERSITY
Leijie WANG
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL ELEMENT, IN PARTICULAR FOR REFLECTING EUV RADIATION, OPTICA...
Publication number
20230266673
Publication date
Aug 24, 2023
Carl Zeiss SMT GMBH
Vitaliy SHKLOVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TRANSMISSIVE DIFFRACTION GRATING
Publication number
20230251407
Publication date
Aug 10, 2023
ASML NETHERLANDS B.V.
Derick Yun Chek Chong
G02 - OPTICS
Information
Patent Application
ASSEMBLY FOR COLLIMATING BROADBAND RADIATION
Publication number
20230221659
Publication date
Jul 13, 2023
ASML NETHERLANDS B.V.
Yongfeng NI
G02 - OPTICS
Information
Patent Application
OPTICAL COMPONENT
Publication number
20230221648
Publication date
Jul 13, 2023
Carl Zeiss SMT GMBH
Valentin Jonatan Bolsinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
Publication number
20230213866
Publication date
Jul 6, 2023
SEMES CO.,LTD
Hyun YOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING PHOTORESIST PATTERN AND PROJECTION EXPOSURE APPAR...
Publication number
20230185201
Publication date
Jun 15, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Kanyu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS
Publication number
20230168588
Publication date
Jun 1, 2023
NanoPath, Inc.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL DEVICES AND METHODS FOR MANUFACTURING THE OPTICAL DEVICES
Publication number
20230152708
Publication date
May 18, 2023
II-VI Delaware, Inc.
Christoph M. GREINER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONFIGURING OPTICAL LAYERS IN IMPRINT LITHOGRAPHY PROCESSES
Publication number
20230105058
Publication date
Apr 6, 2023
Magic Leap, Inc.
Vikramjit Singh
G02 - OPTICS
Information
Patent Application
AN ASSEMBLY INCLUDING A NON-LINEAR ELEMENT AND A METHOD OF USE THEREOF
Publication number
20230091241
Publication date
Mar 23, 2023
ASML NETHERLANDS B.V.
Vitaliy PROSYENTSOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR FORMING NAN...
Publication number
20230076667
Publication date
Mar 9, 2023
Carl Zeiss SMT GMBH
Anastasia GONCHAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Diffraction Based Overlay Metrology Tool and Method of Diffraction...
Publication number
20230075781
Publication date
Mar 9, 2023
ASML NETHERLANDS B.V.
Arie Jeffrey DEN BOEF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR GENERATING EUV RADIATION
Publication number
20230064760
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Sheng-Min WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology System and Method for Determining a Characteristic of One...
Publication number
20230062585
Publication date
Mar 2, 2023
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus TINNEMANS
G01 - MEASURING TESTING
Information
Patent Application
PROTECTIVE COATING FOR NONLINEAR OPTICAL CRYSTAL
Publication number
20230034635
Publication date
Feb 2, 2023
John Fielden
G02 - OPTICS
Information
Patent Application
ASSEMBLY, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE...
Publication number
20230034958
Publication date
Feb 2, 2023
Carl Zeiss SMT GMBH
Stefan Troeger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY