detecting loss or breakage of a workpiece during lapping

Industry

CPC
B24B37/0053

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B37/00Lapping machines or devices Accessories

Current Industry

B24B37/0053detecting loss or breakage of a workpiece during lapping

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for suction pad assemblies
- Patent number 12,087,646
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Hsiang Chao
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing unit, substrate processing apparatus, and polishing method
- Patent number 11,890,716
- Issue date Feb 6, 2024
- Ebara Corporation
- Akihiro Yazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Silicon wafer single-side polishing method
- Patent number 11,628,534
- Issue date Apr 18, 2023
- Sumco Corporation
- Toshiharu Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for monitoring chemical mechanical polishing
- Patent number 11,565,365
- Issue date Jan 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Yu Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for suction pad assemblies
- Patent number 11,328,965
- Issue date May 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Hsiang Chao
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and method for detecting abnormality...
- Patent number 10,903,101
- Issue date Jan 26, 2021
- Ebara Corporation
- Mitsunori Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,850,363
- Issue date Dec 1, 2020
- TOSHIBA MEMORY CORPORATION
- Yukiteru Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
- Patent number 10,622,232
- Issue date Apr 14, 2020
- Samsung Electronics Co., Ltd.
- Kyung Ho Ha
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Abrasive tool indicator system, method and apparatus
- Patent number 10,569,382
- Issue date Feb 25, 2020
- United Technologies Corporation
- Micah Beckman
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,414,017
- Issue date Sep 17, 2019
- Shin-Etsu Handotai Co., Ltd.
- Junichi Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 10,029,344
- Issue date Jul 24, 2018
- Ebara Corporation
- Shuichi Kamata
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,434,044
- Issue date Sep 6, 2016
- Ebara Corporation
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer slip detection during CMP processing
- Patent number 9,240,042
- Issue date Jan 19, 2016
- GLOBALFOUNDRIES Inc.
- John R. Doughty
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method, polishing apparatus and polishing tool
- Patent number 8,912,095
- Issue date Dec 16, 2014
- Osaka University
- Yasuhisa Sano
- B24 - GRINDING POLISHING
Information Patent Grant
Spectraphic monitoring based on pre-screening of theoretical library
- Patent number 8,808,059
- Issue date Aug 19, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and substrate processing method
- Patent number 8,128,458
- Issue date Mar 6, 2012
- Ebara Corporation
- Kenichiro Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head testing with movable pedestal
- Patent number 8,008,941
- Issue date Aug 30, 2011
- Applied Materials, Inc.
- Jeffrey P. Schmidt
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head testing with movable pedestal
- Patent number 7,750,657
- Issue date Jul 6, 2010
- Applied Materials Inc.
- Jeffrey P Schmidt
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head for chemical mechanical polishing apparatus
- Patent number 7,121,934
- Issue date Oct 17, 2006
- Doosan DND Co., Ltd.
- Taek-Soo Jung
- B24 - GRINDING POLISHING
Information Patent Grant
Method for assembling a polishing head and apparatus for detecting...
- Patent number 7,086,132
- Issue date Aug 8, 2006
- Samsung Electronics Co., Ltd.
- Bong Choi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,997,778
- Issue date Feb 14, 2006
- Ebara Corporation
- Koji Ono
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system having a carrier head with substrate presence sensing
- Patent number 6,905,392
- Issue date Jun 14, 2005
- FREESCALE SEMICONDUCTOR, INC.
- Brian E. Bottema
- B24 - GRINDING POLISHING
Information Patent Grant
Smart automatic recording system and method for monitoring wafer fr...
- Patent number 6,816,748
- Issue date Nov 9, 2004
- Winbond Electronics Corp.
- Ting Kuo Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Dual wafer-loss sensor and water-resistant sensor holder
- Patent number 6,796,879
- Issue date Sep 28, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Rico Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Method for assembling a polishing head and apparatus for detecting...
- Patent number 6,754,942
- Issue date Jun 29, 2004
- Samsung Electronics Co., Ltd.
- Bong Choi
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a substrate detection mechanism for a chemical me...
- Patent number 6,705,924
- Issue date Mar 16, 2004
- Applied Materials Inc.
- Sasson Somekh
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer protection method
- Patent number 6,673,634
- Issue date Jan 6, 2004
- Calitech Co., Ltd.
- Chin-Ting Kuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,634,924
- Issue date Oct 21, 2003
- Ebara Corporation
- Koji Ono
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for sensing a wafer in a carrier
- Patent number 6,568,991
- Issue date May 27, 2003
- SpeedFam-IPEC Corporation
- John D. Herb
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a substrate sensor
- Patent number 6,547,641
- Issue date Apr 15, 2003
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES
- Publication number 20240371708
- Publication date Nov 7, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yu-Hsiang CHAO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR DETECTION OF WAFER SLIPPAGE
- Publication number 20240308019
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Wei Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING
- Publication number 20230182257
- Publication date Jun 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Yu WANG
- B24 - GRINDING POLISHING
Information Patent Application
WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINE...
- Publication number 20230166299
- Publication date Jun 1, 2023
- Samsung Electronics Co., Ltd.
- Jongsu KIM
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES
- Publication number 20220246483
- Publication date Aug 4, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yu-Hsiang CHAO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING UNIT, SUBSTRATE PROCESSING APPARATUS, AND POLISHING METHOD
- Publication number 20210187692
- Publication date Jun 24, 2021
- EBARA CORPORATION
- Akihiro YAZAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND RETAINER RING
- Publication number 20210039224
- Publication date Feb 11, 2021
- KIOXIA Corporation
- Takahiko KAWASAKI
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES
- Publication number 20200043814
- Publication date Feb 6, 2020
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yu-Hsiang CHAO
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING
- Publication number 20190143474
- Publication date May 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Yu WANG
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20190067059
- Publication date Feb 28, 2019
- Samsung Electronics Co., Ltd.
- Kyung Ho HA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SILICON WAFER SINGLE-SIDE POLISHING METHOD
- Publication number 20190030676
- Publication date Jan 31, 2019
- SUMCO CORPORATION
- Toshiharu NAKAJIMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20170304986
- Publication date Oct 26, 2017
- Shin-Etsu Handotai Co., Ltd.
- Junichi UENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR DETECTING ABNORMALITY...
- Publication number 20160315002
- Publication date Oct 27, 2016
- EBARA CORPORATION
- Mitsunori KOMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20160207163
- Publication date Jul 21, 2016
- Kabushiki Kaisha Toshiba
- Yukiteru MATSUI
- G01 - MEASURING TESTING
Information Patent Application
ABRASIVE TOOL INDICATOR SYSTEM, METHOD AND APPARATUS
- Publication number 20160199960
- Publication date Jul 14, 2016
- United Technologies Corporation
- MICAH BECKMAN
- B24 - GRINDING POLISHING
Information Patent Application
WAFER SLIP DETECTION DURING CMP PROCESSING
- Publication number 20160082566
- Publication date Mar 24, 2016
- GLOBALFOUNDRIES INC.
- John R. Doughty
- G01 - MEASURING TESTING
Information Patent Application
In-Situ Acoustic Monitoring of Chemical Mechanical Polishing
- Publication number 20160013085
- Publication date Jan 14, 2016
- Applied Materials, Inc.
- Xiong Yeu Chew
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20150273649
- Publication date Oct 1, 2015
- EBARA CORPORATION
- Ryuichi KOSUGE
- B24 - GRINDING POLISHING
Information Patent Application
WAFER SLIP DETECTION DURING CMP PROCESSING
- Publication number 20150117755
- Publication date Apr 30, 2015
- International Business Machines Corporation
- John R. Doughty
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR ACOUSTICAL MONITORING AND CONTROL OF THRO...
- Publication number 20140329439
- Publication date Nov 6, 2014
- Xiong Yeu Chew
- B24 - GRINDING POLISHING
Information Patent Application
SPECTRAPHIC MONITORING BASED ON PRE-SCREENING OF THEORETICAL LIBRARY
- Publication number 20140242730
- Publication date Aug 28, 2014
- Jeffrey Drue David
- G01 - MEASURING TESTING
Information Patent Application
POLISHING METHOD, POLISHING APPARATUS AND POLISHING TOOL
- Publication number 20120244649
- Publication date Sep 27, 2012
- Yasuhisa Sano
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD TESTING WITH MOVABLE PEDESTAL
- Publication number 20100327900
- Publication date Dec 30, 2010
- Applied Materials, Inc.
- Jeffrey P. Schmidt
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and substrate processing method
- Publication number 20090209175
- Publication date Aug 20, 2009
- Kenichiro Saito
- B24 - GRINDING POLISHING
Information Patent Application
DETECTING THE PRESENCE OF A WORKPIECE RELATIVE TO A CARRIER HEAD
- Publication number 20090181475
- Publication date Jul 16, 2009
- Novellus Systems, Inc.
- Toru AKASAKO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD TESTING WITH MOVABLE PEDESTAL
- Publication number 20080227374
- Publication date Sep 18, 2008
- Applied Materials, Inc.
- Jeffrey P. Schmidt
- B24 - GRINDING POLISHING
Information Patent Application
Carrier head for chemical mechanical polishing apparatus
- Publication number 20050272355
- Publication date Dec 8, 2005
- Taek-Soo Jung
- B24 - GRINDING POLISHING
Information Patent Application
Polishing system having a carrier head with substrate presence sensing
- Publication number 20040266324
- Publication date Dec 30, 2004
- Brian E. Bottema
- B24 - GRINDING POLISHING
Information Patent Application
Method for assembling a polishing head and apparatus for detecting...
- Publication number 20040214513
- Publication date Oct 28, 2004
- Samsung Electronics Co., Ltd.
- Bong Choi
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20040033761
- Publication date Feb 19, 2004
- Koji Ono
- B24 - GRINDING POLISHING

detecting loss or breakage of a workpiece during lapping

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for suction pad assemblies

Polishing unit, substrate processing apparatus, and polishing method

Silicon wafer single-side polishing method

System and method for monitoring chemical mechanical polishing

Systems and methods for suction pad assemblies

Substrate processing apparatus and method for detecting abnormality...

Manufacturing method of semiconductor device and semiconductor manu...

Semiconductor manufacturing apparatus and method of manufacturing s...

Abrasive tool indicator system, method and apparatus

Polishing apparatus

Polishing apparatus and polishing method

Polishing apparatus

Wafer slip detection during CMP processing

Polishing method, polishing apparatus and polishing tool

Spectraphic monitoring based on pre-screening of theoretical library

Polishing apparatus and substrate processing method

Polishing head testing with movable pedestal

Polishing head testing with movable pedestal

Carrier head for chemical mechanical polishing apparatus

Method for assembling a polishing head and apparatus for detecting...

Polishing apparatus

Polishing system having a carrier head with substrate presence sensing

Smart automatic recording system and method for monitoring wafer fr...

Dual wafer-loss sensor and water-resistant sensor holder

Method for assembling a polishing head and apparatus for detecting...

Carrier head with a substrate detection mechanism for a chemical me...

Wafer protection method

Polishing apparatus

Method and apparatus for sensing a wafer in a carrier

Carrier head with a substrate sensor

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES

METHOD FOR DETECTION OF WAFER SLIPPAGE

SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING

WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINE...

SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES

POLISHING UNIT, SUBSTRATE PROCESSING APPARATUS, AND POLISHING METHOD

POLISHING APPARATUS AND RETAINER RING

SYSTEMS AND METHODS FOR SUCTION PAD ASSEMBLIES

SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SILICON WAFER SINGLE-SIDE POLISHING METHOD

POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR DETECTING ABNORMALITY...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

ABRASIVE TOOL INDICATOR SYSTEM, METHOD AND APPARATUS

WAFER SLIP DETECTION DURING CMP PROCESSING

In-Situ Acoustic Monitoring of Chemical Mechanical Polishing

POLISHING APPARATUS

WAFER SLIP DETECTION DURING CMP PROCESSING

APPARATUS AND METHODS FOR ACOUSTICAL MONITORING AND CONTROL OF THRO...

SPECTRAPHIC MONITORING BASED ON PRE-SCREENING OF THEORETICAL LIBRARY

POLISHING METHOD, POLISHING APPARATUS AND POLISHING TOOL

POLISHING HEAD TESTING WITH MOVABLE PEDESTAL

Polishing apparatus and substrate processing method

DETECTING THE PRESENCE OF A WORKPIECE RELATIVE TO A CARRIER HEAD

POLISHING HEAD TESTING WITH MOVABLE PEDESTAL

Carrier head for chemical mechanical polishing apparatus

Polishing system having a carrier head with substrate presence sensing

Method for assembling a polishing head and apparatus for detecting...

Polishing apparatus