Detectors Associated components or circuits therefor

Industry

CPC
H01J37/244

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/244Detectors Associated components or circuits therefor

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam inspection apparatus
- Patent number 12,261,015
- Issue date Mar 25, 2025
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron detection device and scanning electron microscope
- Patent number 12,261,016
- Issue date Mar 25, 2025
- CIQTEK CO., LTD.
- Da Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and image generation method using scan...
- Patent number 12,255,043
- Issue date Mar 18, 2025
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of correcting aberration
- Patent number 12,255,041
- Issue date Mar 18, 2025
- Jeol Ltd.
- Keito Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, manufacturing method thereof, and detecting m...
- Patent number 12,249,662
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Chin King
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and inspection device
- Patent number 12,237,145
- Issue date Feb 25, 2025
- HITACHI HIGH-TECH CORPORATION
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for determining the virtual source location of a liquid met...
- Patent number 12,237,142
- Issue date Feb 25, 2025
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining a depth of a hidden structural element background
- Patent number 12,237,146
- Issue date Feb 25, 2025
- Applied Materials Israel Ltd.
- Lior Akerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for event modulated electron microscopy
- Patent number 12,237,147
- Issue date Feb 25, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Bryan Walter Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion milling device
- Patent number 12,230,471
- Issue date Feb 18, 2025
- HITACHI HIGH-TECH CORPORATION
- Shota Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-precision timing clock method
- Patent number 12,226,246
- Issue date Feb 18, 2025
- Weng-Dah Ken
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Charged particle detector with gain element
- Patent number 12,230,470
- Issue date Feb 18, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 12,224,153
- Issue date Feb 11, 2025
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data acquisition and processing techniques for three-dimensional re...
- Patent number 12,211,666
- Issue date Jan 28, 2025
- FEI Company
- Oleksii Kaplenko
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High framerate and high dynamic range electron microscopy
- Patent number 12,211,667
- Issue date Jan 28, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Ruth Bloom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,668
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rating substrate support assemblies based on impedance circuit elec...
- Patent number 12,205,791
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Arvind Shankar Raman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 12,205,790
- Issue date Jan 21, 2025
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
Sample holder and charged particle beam apparatus
- Patent number 12,198,892
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Shigeru Haneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ML-enabled assured microelectronics manufacturing: a technique to m...
- Patent number 12,198,325
- Issue date Jan 14, 2025
- University of Southern California
- Ajey Poovannummoottil Jacob
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma process monitoring apparatus using terahertz waves and monit...
- Patent number 12,198,893
- Issue date Jan 14, 2025
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Hak Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for defect inspection using voltage contrast in a...
- Patent number 12,191,112
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and overlay misalignment measurement m...
- Patent number 12,183,541
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of determining aberrations in images obtained b...
- Patent number 12,183,540
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Yifeng Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope and imaging method
- Patent number 12,183,542
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroki Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspecting device
- Patent number 12,176,181
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...
- Publication number 20250104966
- Publication date Mar 27, 2025
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
- Publication number 20250095133
- Publication date Mar 20, 2025
- ASML NETHERLANDS B.V.
- Vincent Sylvester KUIPER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...
- Publication number 20250095952
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Ori Noked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
- Publication number 20250095953
- Publication date Mar 20, 2025
- FEI Company
- Adam STOKES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION
- Publication number 20250095958
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Frank SINCLAIR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
- Publication number 20250095955
- Publication date Mar 20, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Konstantin Chirko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS, FOIL OR GRID LENS, AND METHOD OF OPERATING...
- Publication number 20250087442
- Publication date Mar 13, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
- Publication number 20250087444
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Sample Analysis Method
- Publication number 20250087447
- Publication date Mar 13, 2025
- Hitachi High-Tech Corporation
- Yuya SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROFILING USING OPTICAL TOMOGRAPHY
- Publication number 20250087448
- Publication date Mar 13, 2025
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Filter
- Publication number 20250087449
- Publication date Mar 13, 2025
- Oxford Instruments Nanotechnology Tools Limited
- Peter Statham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT GUIDE, ELECTRON RAY DETECTOR, AND CHARGED PARTICLE DEVICE
- Publication number 20250079118
- Publication date Mar 6, 2025
- Hamamatsu Photonics K.K.
- Kuniyoshi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION
- Publication number 20250076038
- Publication date Mar 6, 2025
- FEI Company
- Stefano Vespucci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR DEVICE AND SYSTEM USING THE SAME
- Publication number 20250069846
- Publication date Feb 27, 2025
- Samsung Electronics Co., Ltd.
- Solhee IN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY
- Publication number 20250069844
- Publication date Feb 27, 2025
- FEI Company
- Petr Hlavenka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELEC...
- Publication number 20250069845
- Publication date Feb 27, 2025
- FEI Company
- Neel Leslie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20250069848
- Publication date Feb 27, 2025
- KIOXIA Corporation
- Kazuya HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MONITORING RADICAL SPECIES FLUX OF PLASMA
- Publication number 20250062107
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Martin Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device, and Beam Deflection Method in Charged...
- Publication number 20250062096
- Publication date Feb 20, 2025
- Hitachi High-Tech Corporation
- Naoto ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION
- Publication number 20250062098
- Publication date Feb 20, 2025
- KLA Corporation
- Xiaoxue Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLED SPUTTERING TARGET FOR ION SOURCE
- Publication number 20250054722
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Ori NOKED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20250046564
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME
- Publication number 20250046562
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS
- Publication number 20250046563
- Publication date Feb 6, 2025
- Axcelis Technologies, Inc.
- Wilhelm Peter Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...
- Publication number 20250037967
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD...
- Publication number 20250037969
- Publication date Jan 30, 2025
- NuFlare Technology, Inc.
- Tatsuya MUROFUSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR SUBSTRATE, APPARATUS, AND METHOD
- Publication number 20250029811
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Arthur Eduard OVERLACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR SELECTIVELY MANAGING IMAGE AND METADATA FRO...
- Publication number 20250029810
- Publication date Jan 23, 2025
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE
- Publication number 20250022677
- Publication date Jan 16, 2025
- FEI Company
- Joseph M. Lebow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Resolution Light Valve Detector for Detecting X-Ray
- Publication number 20250020818
- Publication date Jan 16, 2025
- Carl Zeiss X-ray Microscopy, Inc.
- Xiaochao Xu
- G01 - MEASURING TESTING

Detectors Associated components or circuits therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron beam inspection apparatus

Electron detection device and scanning electron microscope

Scanning electron microscope and image generation method using scan...

Electron microscope and method of correcting aberration

Semiconductor device, manufacturing method thereof, and detecting m...

Charged particle beam device and inspection device

Methods for determining the virtual source location of a liquid met...

Determining a depth of a hidden structural element background

Methods and systems for event modulated electron microscopy

Ion milling device

Ultra-precision timing clock method

Charged particle detector with gain element

Electron microscope

Data acquisition and processing techniques for three-dimensional re...

Multiple charged-particle beam apparatus with low crosstalk

High framerate and high dynamic range electron microscopy

Charged particle beam device

Semiconductor charged particle detector for microscopy

Rating substrate support assemblies based on impedance circuit elec...

Charged particle beam device

Systems and methods for voltage contrast defect detection

Sample holder and charged particle beam apparatus

ML-enabled assured microelectronics manufacturing: a technique to m...

Plasma process monitoring apparatus using terahertz waves and monit...

System and method for defect inspection using voltage contrast in a...

Charged particle beam system and overlay misalignment measurement m...

Systems and methods of determining aberrations in images obtained b...

Transmission electron microscope and imaging method

Pattern inspecting device

Method and system of image-forming multi-electron beams

Patents Applicationslast 30 patents

MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...

METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE

CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...

CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION

METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES

ELECTRON BEAM APPARATUS, FOIL OR GRID LENS, AND METHOD OF OPERATING...

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...

Charged Particle Beam Apparatus and Sample Analysis Method

ION BEAM PROFILING USING OPTICAL TOMOGRAPHY

Electron Filter

LIGHT GUIDE, ELECTRON RAY DETECTOR, AND CHARGED PARTICLE DEVICE

FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION

SENSOR DEVICE AND SYSTEM USING THE SAME

SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY

TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELEC...

CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

METHOD AND SYSTEM FOR MONITORING RADICAL SPECIES FLUX OF PLASMA

Charged Particle Beam Device, and Beam Deflection Method in Charged...

SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION

COOLED SPUTTERING TARGET FOR ION SOURCE

CHARGED PARTICLE BEAM APPARATUS

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...

CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD...

SENSOR SUBSTRATE, APPARATUS, AND METHOD

METHODS AND SYSTEMS FOR SELECTIVELY MANAGING IMAGE AND METADATA FRO...

APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE

High Resolution Light Valve Detector for Detecting X-Ray