Detectors Associated components or circuits therefor

Industry

CPC
H01J37/244

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/244Detectors Associated components or circuits therefor

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron microscope
- Patent number 12,224,153
- Issue date Feb 11, 2025
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data acquisition and processing techniques for three-dimensional re...
- Patent number 12,211,666
- Issue date Jan 28, 2025
- FEI Company
- Oleksii Kaplenko
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High framerate and high dynamic range electron microscopy
- Patent number 12,211,667
- Issue date Jan 28, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Ruth Bloom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,668
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rating substrate support assemblies based on impedance circuit elec...
- Patent number 12,205,791
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Arvind Shankar Raman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 12,205,790
- Issue date Jan 21, 2025
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
Sample holder and charged particle beam apparatus
- Patent number 12,198,892
- Issue date Jan 14, 2025
- HITACHI HIGH-TECH CORPORATION
- Shigeru Haneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ML-enabled assured microelectronics manufacturing: a technique to m...
- Patent number 12,198,325
- Issue date Jan 14, 2025
- University of Southern California
- Ajey Poovannummoottil Jacob
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma process monitoring apparatus using terahertz waves and monit...
- Patent number 12,198,893
- Issue date Jan 14, 2025
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Hak Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for defect inspection using voltage contrast in a...
- Patent number 12,191,112
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and overlay misalignment measurement m...
- Patent number 12,183,541
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of determining aberrations in images obtained b...
- Patent number 12,183,540
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Yifeng Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope and imaging method
- Patent number 12,183,542
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroki Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspecting device
- Patent number 12,176,181
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods for automated processing of multiple samples in...
- Patent number 12,165,833
- Issue date Dec 10, 2024
- FEI Company
- Michal Hrouzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stroboscopic illumination synchronized electron detection and imaging
- Patent number 12,165,835
- Issue date Dec 10, 2024
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of profiling charged-particle beams
- Patent number 12,165,836
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Maikel Robert Goosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 12,165,832
- Issue date Dec 10, 2024
- FEI Company
- Adam Stokes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Observation method by means of scanning transmission electron micro...
- Patent number 12,154,758
- Issue date Nov 26, 2024
- The University of Tokyo
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
- Patent number 12,148,593
- Issue date Nov 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and image acquiring method
- Patent number 12,148,594
- Issue date Nov 19, 2024
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,142,457
- Issue date Nov 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus
- Patent number 12,142,453
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus with multiple detectors and methods...
- Patent number 12,142,455
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual speed acquisition for drift corrected, fast, low dose, adaptiv...
- Patent number 12,136,532
- Issue date Nov 5, 2024
- FEI Company
- Pavel Potocek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and specimen contamination prevention method
- Patent number 12,131,881
- Issue date Oct 29, 2024
- Jeol Ltd.
- Takeshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COOLED SPUTTERING TARGET FOR ION SOURCE
- Publication number 20250054722
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Ori NOKED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20250046564
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME
- Publication number 20250046562
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS
- Publication number 20250046563
- Publication date Feb 6, 2025
- Axcelis Technologies, Inc.
- Wilhelm Peter Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...
- Publication number 20250037967
- Publication date Jan 30, 2025
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD...
- Publication number 20250037969
- Publication date Jan 30, 2025
- NuFlare Technology, Inc.
- Tatsuya MUROFUSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR SUBSTRATE, APPARATUS, AND METHOD
- Publication number 20250029811
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Arthur Eduard OVERLACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR SELECTIVELY MANAGING IMAGE AND METADATA FRO...
- Publication number 20250029810
- Publication date Jan 23, 2025
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE
- Publication number 20250022677
- Publication date Jan 16, 2025
- FEI Company
- Joseph M. Lebow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Resolution Light Valve Detector for Detecting X-Ray
- Publication number 20250020818
- Publication date Jan 16, 2025
- Carl Zeiss X-ray Microscopy, Inc.
- Xiaochao Xu
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Determining Properties of a Substrate
- Publication number 20250012743
- Publication date Jan 9, 2025
- Eric Arno Vigen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20250006454
- Publication date Jan 2, 2025
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...
- Publication number 20250006459
- Publication date Jan 2, 2025
- Carl Zeiss MultiSEM GmbH
- Daniel Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20250006456
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON BEAM MONITORING DEVICE AND ELECTRON BEAM IRRADIATION SYSTEM
- Publication number 20240420918
- Publication date Dec 19, 2024
- Hamamatsu Photonics K.K.
- Shinjiro MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR DETECTING PROBE LANDING IN INTEGRATED CIRCUIT TESTIN...
- Publication number 20240410937
- Publication date Dec 12, 2024
- FEI Company
- James S. Vickers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...
- Publication number 20240412939
- Publication date Dec 12, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN
- Publication number 20240412940
- Publication date Dec 12, 2024
- AIRSEM TECHNOLOGIES LTD.
- Jenny SHKLOVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM SPOT SHAPE RECONSTRUCTION UNIT
- Publication number 20240386589
- Publication date Nov 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Mor Baram
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTIPLE ELECTRON BEAM OPTICS
- Publication number 20240387140
- Publication date Nov 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Alon Litman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...
- Publication number 20240379324
- Publication date Nov 14, 2024
- FEI Company
- Wouter Rene J. VAN DEN BROEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20240371598
- Publication date Nov 7, 2024
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
- Publication number 20240371600
- Publication date Nov 7, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20240371601
- Publication date Nov 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THE...
- Publication number 20240369389
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Srikanth Krishnamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
- Publication number 20240371611
- Publication date Nov 7, 2024
- Samsung Electronics Co., Ltd.
- SEJIN OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240363306
- Publication date Oct 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Minami SHOUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM
- Publication number 20240363318
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wun-Kai TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FEW-SHOT LEARNING FOR PROCESSING MICROSCOPY IMAGES
- Publication number 20240354924
- Publication date Oct 24, 2024
- FEI Company
- John Flanagan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
- Publication number 20240355581
- Publication date Oct 24, 2024
- Integrated Dynamic Electron Solutions, Inc.
- Bryan Walter REED
- H01 - BASIC ELECTRIC ELEMENTS

Detectors Associated components or circuits therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron microscope

Data acquisition and processing techniques for three-dimensional re...

Multiple charged-particle beam apparatus with low crosstalk

High framerate and high dynamic range electron microscopy

Charged particle beam device

Semiconductor charged particle detector for microscopy

Rating substrate support assemblies based on impedance circuit elec...

Charged particle beam device

Systems and methods for voltage contrast defect detection

Sample holder and charged particle beam apparatus

ML-enabled assured microelectronics manufacturing: a technique to m...

Plasma process monitoring apparatus using terahertz waves and monit...

System and method for defect inspection using voltage contrast in a...

Charged particle beam system and overlay misalignment measurement m...

Systems and methods of determining aberrations in images obtained b...

Transmission electron microscope and imaging method

Pattern inspecting device

Method and system of image-forming multi-electron beams

System and methods for automated processing of multiple samples in...

Stroboscopic illumination synchronized electron detection and imaging

Systems and methods of profiling charged-particle beams

Systems and methods for performing sample lift-out for highly react...

Observation method by means of scanning transmission electron micro...

Ion beam device

Charged particle beam apparatus and image acquiring method

Charged particle beam device

Multi-beam inspection apparatus

Charged particle beam apparatus with multiple detectors and methods...

Dual speed acquisition for drift corrected, fast, low dose, adaptiv...

Electron microscope and specimen contamination prevention method

Patents Applicationslast 30 patents

COOLED SPUTTERING TARGET FOR ION SOURCE

CHARGED PARTICLE BEAM APPARATUS

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS

CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS...

CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD...

SENSOR SUBSTRATE, APPARATUS, AND METHOD

METHODS AND SYSTEMS FOR SELECTIVELY MANAGING IMAGE AND METADATA FRO...

APPARATUS AND METHOD FOR MANIPULATING A MICROSCOPIC SAMPLE

High Resolution Light Valve Detector for Detecting X-Ray

System and Method for Determining Properties of a Substrate

CHARGED PARTICLE BEAM DEVICE

METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

ELECTRON BEAM MONITORING DEVICE AND ELECTRON BEAM IRRADIATION SYSTEM

TECHNIQUES FOR DETECTING PROBE LANDING IN INTEGRATED CIRCUIT TESTIN...

ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...

CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN

ELECTRON BEAM SPOT SHAPE RECONSTRUCTION UNIT

MULTIPLE ELECTRON BEAM OPTICS

METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...

FOCUSED ION BEAM SYSTEM

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...

Charged Particle Beam System

PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THE...

METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS

CHARGED PARTICLE BEAM DEVICE

ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM

FEW-SHOT LEARNING FOR PROCESSING MICROSCOPY IMAGES

METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY