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H01J37/244
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/244
Detectors Associated components or circuits therefor
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Patents Grants
last 30 patents
Information
Patent Grant
Ion collector for use in plasma systems
Patent number
11,996,276
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Otto Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon photomultiplier imaging system and method for cooling the same
Patent number
11,994,427
Issue date
May 28, 2024
Temple University - of the Commonwealth System of Higher Education
C. J. Martoff
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement system, temperature measurement method, and...
Patent number
11,972,921
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for performing sample lift-out for highly react...
Patent number
11,972,923
Issue date
Apr 30, 2024
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of determining an energy width of a charged particle beam
Patent number
11,948,771
Issue date
Apr 2, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field programmable detector array
Patent number
11,942,304
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sampling assembly and testing instrument
Patent number
11,933,668
Issue date
Mar 19, 2024
Rohde & Schwarz GmbH & Co. KG
Bernhard Sterzbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,923,167
Issue date
Mar 5, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a particle beam microscope
Patent number
11,915,907
Issue date
Feb 27, 2024
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,658
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Non-contact angle measuring apparatus
Patent number
11,903,755
Issue date
Feb 20, 2024
Weng-Dah Ken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real-time dosimetry
Patent number
11,906,675
Issue date
Feb 20, 2024
Reveam, Inc.
Chip Starns
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and apparatus for inspection
Patent number
11,875,966
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Bernardo Kastrup
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for transferring a focus ring into processing app...
Patent number
11,869,752
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Switch matrix design for beam image system
Patent number
11,862,427
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
RE49784
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Weiming Ren
Information
Patent Grant
Backscattered electron detector, apparatus of charged-particle beam...
Patent number
11,854,763
Issue date
Dec 26, 2023
BORRIES PTE. LTD.
Wei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and charged particle beam device calib...
Patent number
11,848,171
Issue date
Dec 19, 2023
HITACHI HIGH-TECH CORPORATION
Akio Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-plate electrostatic chucks with ceramic baseplates
Patent number
11,848,177
Issue date
Dec 19, 2023
Lam Research Corporation
Feng Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scintillator for charged particle beam apparatus and charged partic...
Patent number
11,846,736
Issue date
Dec 19, 2023
HITACHI HIGH-TECH CORPORATION
Eri Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for event modulated electron microscopy
Patent number
11,848,173
Issue date
Dec 19, 2023
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Bryan Walter Reed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement device and signal processing method
Patent number
11,842,881
Issue date
Dec 12, 2023
HITACHI HIGH-TECH CORPORATION
Akio Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor detector and method of fabricating same
Patent number
11,843,069
Issue date
Dec 12, 2023
ASML Netherlands B.V.
Gianpaolo Lorito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjustable attenuation optical unit
Patent number
11,835,769
Issue date
Dec 5, 2023
Applied Materials Israel Ltd.
Eitam Yitzchak Vinegrad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle optical device, objective lens assembly, detector,...
Patent number
11,821,859
Issue date
Nov 21, 2023
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
Publication number
20240178022
Publication date
May 30, 2024
APPLIED MATERIALS ISRAEL LTD.
Ofer Dudovitch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System
Publication number
20240177964
Publication date
May 30, 2024
Hitachi High-Tech Corporation
Heita KIMIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHIELDED APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
Publication number
20240177965
Publication date
May 30, 2024
Impedans Ltd
David GAHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST FRAMING ELECTRON DETECTOR FOR 4D-STEM
Publication number
20240162002
Publication date
May 16, 2024
DECTRIS AG
Michael RISSI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR TARGETED RE-EXAMINATION, INNER LAYER DEFECT A...
Publication number
20240159695
Publication date
May 16, 2024
Eric Arno Vigen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING COATING FILM AND INSPECTIO...
Publication number
20240162012
Publication date
May 16, 2024
SEMES CO., LTD.
Ki Ryong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser Thermal Epitaxy in a Charged Particle Microscope
Publication number
20240161999
Publication date
May 16, 2024
FEI Company
Rudolf Geurink
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIXEL ELEMENTS, PARTICLE BEAM MICROSCOPES INCLUDING THE SAME, AND A...
Publication number
20240153735
Publication date
May 9, 2024
FEI Company
Gerrit Cornelis van Hoften
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE INSPECTION APPARATUS AND A METHOD OF INSPECTING A SUBSTRA...
Publication number
20240151664
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Kwang-Eun KIM
G01 - MEASURING TESTING
Information
Patent Application
ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATI...
Publication number
20240153736
Publication date
May 9, 2024
Japan Science and Technology Agency
Takumi SANNOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
Publication number
20240136462
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Gianpaolo LORITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
Publication number
20240136148
Publication date
Apr 25, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITANCE SENSING SYSTEMS AND METHODS
Publication number
20240125832
Publication date
Apr 18, 2024
Advanced Energy Industries, Inc.
Donald Enzinna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENT REPLACEMENT METHOD, COMPONENT REPLACEMENT DEVICE, AND COM...
Publication number
20240128064
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Hiroki ENDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE...
Publication number
20240128045
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Erwin SLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE
Publication number
20240128049
Publication date
Apr 18, 2024
HITACHI HIGH-TECH CORPORATION
Katsura TAKAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
Publication number
20240120172
Publication date
Apr 11, 2024
Northwestern University
Vinayak P. Dravid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ULTRA-PRECISION TIMING CLOCK METHOD AND APPARATUS
Publication number
20240115222
Publication date
Apr 11, 2024
Weng-Dah Ken
G04 - HOROLOGY
Information
Patent Application
DISTORTION REDUCTION IN A MULTI-BEAM IMAGING SYSTEM
Publication number
20240112884
Publication date
Apr 4, 2024
KLA Corporation
Michael I. Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
Publication number
20240112893
Publication date
Apr 4, 2024
LAM RESEARCH CORPORATION
Feng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH FRAMERATE AND HIGH DYNAMIC RANGE ELECTRON MICROSCOPY
Publication number
20240105418
Publication date
Mar 28, 2024
Integrated Dynamic Electron Solutions, Inc.
Ruth BLOOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF COMPENSATING FOR AN EFFECT OF ELECTRODE DISTORTION, ASSES...
Publication number
20240105416
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
Publication number
20240096586
Publication date
Mar 21, 2024
KLA Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
Publication number
20240096589
Publication date
Mar 21, 2024
ASML NETHERLANDS B.V.
Stoyan NIHTIANOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...
Publication number
20240096590
Publication date
Mar 21, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240096591
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20240087843
Publication date
Mar 14, 2024
PSK INC.
JONG CHAN LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope and Map Display Method for Absorption...
Publication number
20240085357
Publication date
Mar 14, 2024
JEOL Ltd.
Hideyuki Takahashi
G06 - COMPUTING CALCULATING COUNTING