Detectors Associated components or circuits therefor

Industry

CPC
H01J37/244

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/244Detectors Associated components or circuits therefor

Industries

Patents Grantslast 30 patents

Information Patent Grant
Particle beam device having a deflection unit
- Patent number 12,288,664
- Issue date Apr 29, 2025
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam image acquisition method, multiple electron...
- Patent number 12,288,666
- Issue date Apr 29, 2025
- NuFlare Technology, Inc.
- Koichi Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Live-assisted image acquisition method and system with charged part...
- Patent number 12,288,667
- Issue date Apr 29, 2025
- FEI Company
- Pavel Potocek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle source module
- Patent number 12,288,663
- Issue date Apr 29, 2025
- ASML Netherlands B.V.
- Laura Dinu-Gurtler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,283,458
- Issue date Apr 22, 2025
- HITACHI HIGH-TECH CORPORATION
- Mai Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for filtering radio frequencies from a signal o...
- Patent number 12,283,451
- Issue date Apr 22, 2025
- Lam Research Corporation
- Vince Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid scanning electron microscopy and acousto-optic based metrology
- Patent number 12,278,085
- Issue date Apr 15, 2025
- Applied Materials Israel Ltd.
- Guy Shwartz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 12,278,087
- Issue date Apr 15, 2025
- FEI Company
- Christopher Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 12,265,043
- Issue date Apr 1, 2025
- NuFlare Technology, Inc.
- Riki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection apparatus
- Patent number 12,261,015
- Issue date Mar 25, 2025
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron detection device and scanning electron microscope
- Patent number 12,261,016
- Issue date Mar 25, 2025
- CIQTEK CO., LTD.
- Da Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and image generation method using scan...
- Patent number 12,255,043
- Issue date Mar 18, 2025
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of correcting aberration
- Patent number 12,255,041
- Issue date Mar 18, 2025
- Jeol Ltd.
- Keito Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, manufacturing method thereof, and detecting m...
- Patent number 12,249,662
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Chin King
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and inspection device
- Patent number 12,237,145
- Issue date Feb 25, 2025
- HITACHI HIGH-TECH CORPORATION
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for determining the virtual source location of a liquid met...
- Patent number 12,237,142
- Issue date Feb 25, 2025
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining a depth of a hidden structural element background
- Patent number 12,237,146
- Issue date Feb 25, 2025
- Applied Materials Israel Ltd.
- Lior Akerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for event modulated electron microscopy
- Patent number 12,237,147
- Issue date Feb 25, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Bryan Walter Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-precision timing clock method
- Patent number 12,226,246
- Issue date Feb 18, 2025
- Weng-Dah Ken
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Ion milling device
- Patent number 12,230,471
- Issue date Feb 18, 2025
- HITACHI HIGH-TECH CORPORATION
- Shota Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle detector with gain element
- Patent number 12,230,470
- Issue date Feb 18, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 12,224,153
- Issue date Feb 11, 2025
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data acquisition and processing techniques for three-dimensional re...
- Patent number 12,211,666
- Issue date Jan 28, 2025
- FEI Company
- Oleksii Kaplenko
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,211,669
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High framerate and high dynamic range electron microscopy
- Patent number 12,211,667
- Issue date Jan 28, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Ruth Bloom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,211,668
- Issue date Jan 28, 2025
- HITACHI HIGH-TECH CORPORATION
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rating substrate support assemblies based on impedance circuit elec...
- Patent number 12,205,791
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Arvind Shankar Raman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 12,205,790
- Issue date Jan 21, 2025
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM ETCHING MACHINE AND LOWER ELECTRODE STRUCTURE THEREOF
- Publication number 20250140512
- Publication date May 1, 2025
- JIANGSU LEUVEN INSTRUMENTS CO., LTD.
- Huaidong ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY IMAGING SYSTEM FOR RADIATION THERAPY
- Publication number 20250140515
- Publication date May 1, 2025
- Shanghai United Imaging Healthcare Co., Ltd.
- Buliang SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEA...
- Publication number 20250140511
- Publication date May 1, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEV...
- Publication number 20250132117
- Publication date Apr 24, 2025
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED...
- Publication number 20250132121
- Publication date Apr 24, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stanislav Bardy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SC...
- Publication number 20250132125
- Publication date Apr 24, 2025
- University of Connecticut
- Joseph Favata
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING...
- Publication number 20250125118
- Publication date Apr 17, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Birgit Schabinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH CONDUCTIVE RINGS
- Publication number 20250126929
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin KING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE
- Publication number 20250116587
- Publication date Apr 10, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS OF ELECTRON DIFFRACTION
- Publication number 20250112022
- Publication date Apr 3, 2025
- FEI Company
- Jakub HOLZER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...
- Publication number 20250104966
- Publication date Mar 27, 2025
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
- Publication number 20250095133
- Publication date Mar 20, 2025
- ASML NETHERLANDS B.V.
- Vincent Sylvester KUIPER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...
- Publication number 20250095952
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Ori Noked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
- Publication number 20250095953
- Publication date Mar 20, 2025
- FEI Company
- Adam STOKES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION
- Publication number 20250095958
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Frank SINCLAIR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
- Publication number 20250095955
- Publication date Mar 20, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Konstantin Chirko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS, FOIL OR GRID LENS, AND METHOD OF OPERATING...
- Publication number 20250087442
- Publication date Mar 13, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
- Publication number 20250087444
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Sample Analysis Method
- Publication number 20250087447
- Publication date Mar 13, 2025
- Hitachi High-Tech Corporation
- Yuya SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROFILING USING OPTICAL TOMOGRAPHY
- Publication number 20250087448
- Publication date Mar 13, 2025
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Filter
- Publication number 20250087449
- Publication date Mar 13, 2025
- Oxford Instruments Nanotechnology Tools Limited
- Peter Statham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT GUIDE, ELECTRON RAY DETECTOR, AND CHARGED PARTICLE DEVICE
- Publication number 20250079118
- Publication date Mar 6, 2025
- Hamamatsu Photonics K.K.
- Kuniyoshi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION
- Publication number 20250076038
- Publication date Mar 6, 2025
- FEI Company
- Stefano Vespucci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR DEVICE AND SYSTEM USING THE SAME
- Publication number 20250069846
- Publication date Feb 27, 2025
- Samsung Electronics Co., Ltd.
- Solhee IN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY
- Publication number 20250069844
- Publication date Feb 27, 2025
- FEI Company
- Petr Hlavenka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELEC...
- Publication number 20250069845
- Publication date Feb 27, 2025
- FEI Company
- Neel Leslie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20250069848
- Publication date Feb 27, 2025
- KIOXIA Corporation
- Kazuya HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MONITORING RADICAL SPECIES FLUX OF PLASMA
- Publication number 20250062107
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Martin Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device, and Beam Deflection Method in Charged...
- Publication number 20250062096
- Publication date Feb 20, 2025
- Hitachi High-Tech Corporation
- Naoto ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION
- Publication number 20250062098
- Publication date Feb 20, 2025
- KLA Corporation
- Xiaoxue Chen
- H01 - BASIC ELECTRIC ELEMENTS

Detectors Associated components or circuits therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle beam device having a deflection unit

Multiple electron beam image acquisition method, multiple electron...

Live-assisted image acquisition method and system with charged part...

Charged particle source module

Charged particle beam device

Systems and methods for filtering radio frequencies from a signal o...

Hybrid scanning electron microscopy and acousto-optic based metrology

Systems and methods for performing sample lift-out for highly react...

Inspection apparatus

Electron beam inspection apparatus

Electron detection device and scanning electron microscope

Scanning electron microscope and image generation method using scan...

Electron microscope and method of correcting aberration

Semiconductor device, manufacturing method thereof, and detecting m...

Charged particle beam device and inspection device

Methods for determining the virtual source location of a liquid met...

Determining a depth of a hidden structural element background

Methods and systems for event modulated electron microscopy

Ultra-precision timing clock method

Ion milling device

Charged particle detector with gain element

Electron microscope

Data acquisition and processing techniques for three-dimensional re...

Multiple charged-particle beam apparatus with low crosstalk

High framerate and high dynamic range electron microscopy

Charged particle beam device

Semiconductor charged particle detector for microscopy

Rating substrate support assemblies based on impedance circuit elec...

Charged particle beam device

Systems and methods for voltage contrast defect detection

Patents Applicationslast 30 patents

ION BEAM ETCHING MACHINE AND LOWER ELECTRODE STRUCTURE THEREOF

X-RAY IMAGING SYSTEM FOR RADIATION THERAPY

METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEA...

METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEV...

METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED...

REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SC...

DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING...

SEMICONDUCTOR STRUCTURE WITH CONDUCTIVE RINGS

METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE

METHODS AND SYSTEMS OF ELECTRON DIFFRACTION

MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...

METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE

CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...

CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION

METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES

ELECTRON BEAM APPARATUS, FOIL OR GRID LENS, AND METHOD OF OPERATING...

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...

Charged Particle Beam Apparatus and Sample Analysis Method

ION BEAM PROFILING USING OPTICAL TOMOGRAPHY

Electron Filter

LIGHT GUIDE, ELECTRON RAY DETECTOR, AND CHARGED PARTICLE DEVICE

FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION

SENSOR DEVICE AND SYSTEM USING THE SAME

SHIELDED DETECTOR FOR CHARGED PARTICLE MICROSCOPY

TECHNIQUES FOR IMAGING LOW DUTY CYCLE SIGNALS USING A SCANNING ELEC...

CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

METHOD AND SYSTEM FOR MONITORING RADICAL SPECIES FLUX OF PLASMA

Charged Particle Beam Device, and Beam Deflection Method in Charged...

SYSTEM AND METHOD FOR DYNAMIC ABERRATION CORRECTION