Differential etching apparatus having a horizontal tube reactor

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CPC
Y10S156/913

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S156/00Adhesive bonding and miscellaneous chemical manufacture

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Y10S156/913Differential etching apparatus having a horizontal tube reactor

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for hermetically sealing a chamber
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- Issue date Sep 19, 2000
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuen Lin Guan
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Apparatus and method for regulating pressure in two chambers
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- Issue date Jun 22, 1999
- Tokyo Electron Ltd.
- Susumu Kato
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Plasma enhanced chemical vapor processing of semiconductor substrates
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- Issue date Jul 6, 1993
- Process Technology (1988) Limited
- Kamel Aite
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Impurity doping apparatus
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- Issue date Apr 6, 1993
- Seiko Instruments Inc.
- Kenji Aoki
- C30 - CRYSTAL GROWTH
Information Patent Grant
Transmission line for providing power to an electrode boat in a pla...
- Patent number 5,175,021
- Issue date Dec 29, 1992
- Advanced Semiconductor Materials America, Inc.
- Michael R. Bonsaver
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Information Patent Grant
Plasma enhanced chemical vapor processing system using hollow catho...
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- Issue date Jul 28, 1992
- International Business Machines Corporation
- Joseph M. Blum
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Information Patent Grant
Apparatus for producing semiconductor devices
- Patent number 4,920,920
- Issue date May 1, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Susumu Shigeki
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Information Patent Grant
In-situ CVD chamber cleaner
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- Issue date Apr 14, 1987
- Benzing Technologies, Inc.
- David W. Benzing
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Information Patent Grant
Glow discharge method and apparatus and photoreceptor devices made...
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- Issue date Feb 11, 1986
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Differential etching apparatus having a horizontal tube reactor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for hermetically sealing a chamber

Apparatus and method for regulating pressure in two chambers

Plasma enhanced chemical vapor processing of semiconductor substrates

Impurity doping apparatus

Transmission line for providing power to an electrode boat in a pla...

Plasma enhanced chemical vapor processing system using hollow catho...

Apparatus for producing semiconductor devices

In-situ CVD chamber cleaner

Glow discharge method and apparatus and photoreceptor devices made...

Patents Applicationslast 30 patents