Differential etching apparatus having a horizontal tube reactor

Industry

CPC
Y10S156/913

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S156/00Adhesive bonding and miscellaneous chemical manufacture

Current Industry

Y10S156/913Differential etching apparatus having a horizontal tube reactor

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for hermetically sealing a chamber
- Patent number 6,120,611
- Issue date Sep 19, 2000
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuen Lin Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for regulating pressure in two chambers
- Patent number 5,913,978
- Issue date Jun 22, 1999
- Tokyo Electron Ltd.
- Susumu Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor processing of semiconductor substrates
- Patent number 5,225,375
- Issue date Jul 6, 1993
- Process Technology (1988) Limited
- Kamel Aite
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Impurity doping apparatus
- Patent number 5,199,994
- Issue date Apr 6, 1993
- Seiko Instruments Inc.
- Kenji Aoki
- C30 - CRYSTAL GROWTH
Information Patent Grant
Transmission line for providing power to an electrode boat in a pla...
- Patent number 5,175,021
- Issue date Dec 29, 1992
- Advanced Semiconductor Materials America, Inc.
- Michael R. Bonsaver
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor processing system using hollow catho...
- Patent number 5,133,986
- Issue date Jul 28, 1992
- International Business Machines Corporation
- Joseph M. Blum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for producing semiconductor devices
- Patent number 4,920,920
- Issue date May 1, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Susumu Shigeki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ CVD chamber cleaner
- Patent number 4,657,616
- Issue date Apr 14, 1987
- Benzing Technologies, Inc.
- David W. Benzing
- C30 - CRYSTAL GROWTH
Information Patent Grant
Glow discharge method and apparatus and photoreceptor devices made...
- Patent number 4,569,719
- Issue date Feb 11, 1986
- Plasma Physics Corporation
- John H. Coleman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Differential etching apparatus having a horizontal tube reactor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for hermetically sealing a chamber

Apparatus and method for regulating pressure in two chambers

Plasma enhanced chemical vapor processing of semiconductor substrates

Impurity doping apparatus

Transmission line for providing power to an electrode boat in a pla...

Plasma enhanced chemical vapor processing system using hollow catho...

Apparatus for producing semiconductor devices

In-situ CVD chamber cleaner

Glow discharge method and apparatus and photoreceptor devices made...