Dry etching

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CPC
B81C1/00531

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00531Dry etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
- Patent number 12,043,537
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fluid sensor system
- Patent number 12,044,646
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chwen Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching method
- Patent number 12,020,942
- Issue date Jun 25, 2024
- ULVAC, Inc.
- Taichi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,774,437
- Issue date Oct 3, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing micro-cavity array surface product with inclin...
- Patent number 11,655,144
- Issue date May 23, 2023
- JIANGSU UNIVERSITY
- Jian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide structure, device, and method
- Patent number 11,649,159
- Issue date May 16, 2023
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interposer substrate, MEMS device and corresponding manufacturing m...
- Patent number 11,623,860
- Issue date Apr 11, 2023
- Robert Bosch GmbH
- Corinna Koepernik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a substrate having a region mechanically d...
- Patent number 11,608,264
- Issue date Mar 21, 2023
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a plurality of resonators
- Patent number 11,584,639
- Issue date Feb 21, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bruno Fain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro fluid actuator
- Patent number 11,581,483
- Issue date Feb 14, 2023
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,572,271
- Issue date Feb 7, 2023
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic layer etching on microdevices and nanodevices
- Patent number 11,565,936
- Issue date Jan 31, 2023
- The Regents of the University of Colorado
- Steven M. George
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented pedestal for mounting device on chip
- Patent number 11,542,153
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,535,512
- Issue date Dec 27, 2022
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single crystalline diamond part production method for stand alone s...
- Patent number 11,512,409
- Issue date Nov 29, 2022
- Ecole Polytechnique Federale de Lausanne
- Niels Quack
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing hollow structure and hollow structure
- Patent number 11,505,456
- Issue date Nov 22, 2022
- Canon Kabushiki Kaisha
- Takayuki Sumida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor ICF target processing
- Patent number 11,443,937
- Issue date Sep 13, 2022
- INNOVEN ENERGY LLC
- Tyler A. Lowrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for manufacturing microfluidic chip with femto...
- Patent number 11,370,657
- Issue date Jun 28, 2022
- CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY
- Heping Zeng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and method of manufacturing thereof
- Patent number 11,358,858
- Issue date Jun 14, 2022
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Amir Rahafrooz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming MEMS cavity structure
- Patent number 11,332,364
- Issue date May 17, 2022
- AAC Technologies Pte. Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,300,554
- Issue date Apr 12, 2022
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for a carrier proximity mask
- Patent number 11,232,930
- Issue date Jan 25, 2022
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduced MEMS cavity gap
- Patent number 11,220,423
- Issue date Jan 11, 2022
- Invensense, Inc.
- Ian Flader
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacture
- Patent number 11,214,483
- Issue date Jan 4, 2022
- TDK Corporation
- Kurt Rasmussen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sidewall stopper for MEMS device
- Patent number 11,203,522
- Issue date Dec 21, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device having silicon layer with trench
- Patent number 11,192,781
- Issue date Dec 7, 2021
- Denso Corporation
- Takahiro Higuchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 11,167,980
- Issue date Nov 9, 2021
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing conductive structure
- Patent number 11,111,134
- Issue date Sep 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Lieng Loo
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
FLUID SENSOR SYSTEM
- Publication number 20240337618
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHWEN YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING METHOD
- Publication number 20240304453
- Publication date Sep 12, 2024
- Ulvac, Inc.
- Taichi SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20240239649
- Publication date Jul 18, 2024
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMEN...
- Publication number 20230136105
- Publication date May 4, 2023
- Calient Technologies, Inc.
- Scott A. MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUID SENSOR SYSTEM
- Publication number 20220365019
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHWEN YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING METHOD
- Publication number 20220344167
- Publication date Oct 27, 2022
- Ulvac, Inc.
- Taichi SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
- Publication number 20220267144
- Publication date Aug 25, 2022
- JIANGSU UNIVERSITY
- Jian LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY
- Publication number 20220107302
- Publication date Apr 7, 2022
- Saudi Arabian Oil Company
- Dong Kyu CHA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON CARBIDE NANONEEDLES AND FABRICATION THEREOF
- Publication number 20220040463
- Publication date Feb 10, 2022
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Clint D. Frye
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...
- Publication number 20210380404
- Publication date Dec 9, 2021
- Industrial Technology Research Institute
- Heng-chung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
- Publication number 20210331915
- Publication date Oct 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING MICROFLUIDIC CHIP WITH FEMTO...
- Publication number 20210323814
- Publication date Oct 21, 2021
- Chongqing Institute of East China Normal University
- Heping ZENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF MICRO FLUID ACTUATOR
- Publication number 20210296567
- Publication date Sep 23, 2021
- MICROJET TECHNOLOGY CO., LTD.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF
- Publication number 20210229978
- Publication date Jul 29, 2021
- Panasonic Intellectual Property Management Co., Ltd.
- Amir RAHAFROOZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY
- Publication number 20210215658
- Publication date Jul 15, 2021
- Saudi Arabian Oil Company
- Dong Kyu CHA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK
- Publication number 20210210308
- Publication date Jul 8, 2021
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
- Publication number 20210198096
- Publication date Jul 1, 2021
- Rensselaer Polytechnic Institute
- Diana-Andra Borca-Tasciuc
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A SUBSTRATE HAVING A REGION MECHANICALLY D...
- Publication number 20210130168
- Publication date May 6, 2021
- ROBERT BOSCH GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone and Method of Manufacture
- Publication number 20210122626
- Publication date Apr 29, 2021
- TDK Corporation
- Kurt Rasmussen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON CARBIDE STRUCTURE, DEVICE, AND METHOD
- Publication number 20200407213
- Publication date Dec 31, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PLURALITY OF RESONATORS
- Publication number 20200385262
- Publication date Dec 10, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Bruno FAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200369512
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
- Publication number 20200369515
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200369511
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERPOSER SUBSTRATE, MEMS DEVICE AND CORRESPONDING MANUFACTURING M...
- Publication number 20200346921
- Publication date Nov 5, 2020
- ROBERT BOSCH GmbH
- Corinna Koepernik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND STRUCTURE TO REDUCE IMPACT OF EXTERNAL STRESS AND AGING...
- Publication number 20200350889
- Publication date Nov 5, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Peter Smeys
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) MICRO ELECTRO-MECHAN...
- Publication number 20200207613
- Publication date Jul 2, 2020
- CHUAN-WEI WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCED MEMS CAVITY GAP
- Publication number 20200140263
- Publication date May 7, 2020
- InvenSense, Inc.
- Ian FLADER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING HOLLOW STRUCTURE AND HOLLOW STRUCTURE
- Publication number 20200123005
- Publication date Apr 23, 2020
- Canon Kabushiki Kaisha
- Takayuki Sumida
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Dry etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing a microelectromechanical systems (MEMS) device

Fluid sensor system

Etching method

MEMS device, manufacturing method of the same, and integrated MEMS...

Calcite channel structures with heterogeneous wettability

Method for preparing micro-cavity array surface product with inclin...

Silicon carbide structure, device, and method

Interposer substrate, MEMS device and corresponding manufacturing m...

Method for manufacturing a substrate having a region mechanically d...

Method for manufacturing a plurality of resonators

Manufacturing method of micro fluid actuator

Method for manufacturing an etch stop layer and MEMS sensor compris...

Atomic layer etching on microdevices and nanodevices

Segmented pedestal for mounting device on chip

Method for manufacturing an etch stop layer and MEMS sensor compris...

Single crystalline diamond part production method for stand alone s...

Method for producing hollow structure and hollow structure

Semiconductor ICF target processing

Method and apparatus for manufacturing microfluidic chip with femto...

Semiconductor device and method of manufacturing thereof

Method for forming MEMS cavity structure

Calcite channel structures with heterogeneous wettability

Fence structure to prevent stiction in a MEMS motion sensor

Method and device for a carrier proximity mask

Reduced MEMS cavity gap

MEMS microphone and method of manufacture

Sidewall stopper for MEMS device

Semiconductor device having silicon layer with trench

Micro-electro-mechanical system (MEMS) structures and design struct...

Method for processing conductive structure

Patents Applicationslast 30 patents

FLUID SENSOR SYSTEM

ETCHING METHOD

METHOD OF MANUFACTURING A MICROSTRUCTURE

VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMEN...

FLUID SENSOR SYSTEM

ETCHING METHOD

METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...

CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY

SILICON CARBIDE NANONEEDLES AND FABRICATION THEREOF

MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...

SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP

METHOD AND APPARATUS FOR MANUFACTURING MICROFLUIDIC CHIP WITH FEMTO...

MANUFACTURING METHOD OF MICRO FLUID ACTUATOR

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF

CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY

METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK

ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES

METHOD FOR MANUFACTURING A SUBSTRATE HAVING A REGION MECHANICALLY D...

MEMS Microphone and Method of Manufacture

SILICON CARBIDE STRUCTURE, DEVICE, AND METHOD

METHOD FOR MANUFACTURING A PLURALITY OF RESONATORS

SIDEWALL STOPPER FOR MEMS DEVICE

SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP

SIDEWALL STOPPER FOR MEMS DEVICE

INTERPOSER SUBSTRATE, MEMS DEVICE AND CORRESPONDING MANUFACTURING M...

METHOD AND STRUCTURE TO REDUCE IMPACT OF EXTERNAL STRESS AND AGING...

COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) MICRO ELECTRO-MECHAN...

REDUCED MEMS CAVITY GAP

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

METHOD FOR PRODUCING HOLLOW STRUCTURE AND HOLLOW STRUCTURE