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B81C1/00849

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00849during manufacture

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Residue removal during semiconductor device formation
- Patent number 11,791,152
- Issue date Oct 17, 2023
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Using sacrificial polymer materials in semiconductor processing
- Patent number 11,651,952
- Issue date May 16, 2023
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Freezing a sacrificial material in forming a semiconductor
- Patent number 11,482,409
- Issue date Oct 25, 2022
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 11,159,894
- Issue date Oct 26, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Linlin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas residue removal
- Patent number 11,037,779
- Issue date Jun 15, 2021
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Removing a sacrificial material via sublimation in forming a semico...
- Patent number 10,964,525
- Issue date Mar 30, 2021
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Freezing a sacrificial material in forming a semiconductor
- Patent number 10,957,530
- Issue date Mar 23, 2021
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Using sacrificial polymer materials in semiconductor processing
- Patent number 10,916,418
- Issue date Feb 9, 2021
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Using sacrificial polymer materials in semiconductor processing
- Patent number 10,497,558
- Issue date Dec 3, 2019
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of processing nano- and micro-pores
- Patent number 10,427,936
- Issue date Oct 1, 2019
- GUANGDONG UNIVERSITY OF TECHNOLOGY
- Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polarization dependent surface enhanced Raman scattering system
- Patent number 10,161,874
- Issue date Dec 25, 2018
- King Fahd University of Petroleum & Minerals
- Mohammad Kamal Hossain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus for detecting an analyte with surface enhanced raman scat...
- Patent number 9,995,687
- Issue date Jun 12, 2018
- King Fahd University of Petroleum & Minerals
- Mohammad Kamal Hossain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composition for treating surface of substrate, method and device
- Patent number 9,976,037
- Issue date May 22, 2018
- VERSUM MATERIALS US, LLC
- Seiji Inaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 9,875,965
- Issue date Jan 23, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Guangcai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anisotropic monolayer gold nanoassembly: a highly SERS-active subst...
- Patent number 9,772,290
- Issue date Sep 26, 2017
- King Fahd University of Petroleum & Minerals
- Mohammad Kamal Hossain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etch release residue removal using anhydrous solution
- Patent number 9,663,356
- Issue date May 30, 2017
- NXP USA, INC.
- Srivatsa G. Kundalgurki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with over-travel stop structure and method of fabrication
- Patent number 9,638,712
- Issue date May 2, 2017
- NXP USA, INC.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS pressure sensor and method of manufacturing the same
- Patent number 9,573,805
- Issue date Feb 21, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- Guangcai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and fabrication method
- Patent number 9,416,004
- Issue date Aug 16, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- Guangcai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming MEMS device
- Patent number 9,315,379
- Issue date Apr 19, 2016
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Zhenxing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nonaqueous cleaning liquid and method for etching processing of sil...
- Patent number 9,250,534
- Issue date Feb 2, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Daijiro Mori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level hermetic bond using metal alloy with raised feature and...
- Patent number 9,162,878
- Issue date Oct 20, 2015
- Innovative Micro Technology
- Christopher S Gudeman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 9,011,604
- Issue date Apr 21, 2015
- Denso Corporation
- Daigorou Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for masking and removal of residue from complex shapes
- Patent number 8,518,832
- Issue date Aug 27, 2013
- Western Digital (Fremont), LLC
- Xiaoyu Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for removing residues formed during the manufacture of MEMS...
- Patent number 8,071,486
- Issue date Dec 6, 2011
- Teledyne Dalsa Semiconductor Inc.
- Vincent Fortin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming an ink supply channel
- Patent number 7,837,887
- Issue date Nov 23, 2010
- Silverbrook Research Pty Ltd
- Darrell LaRue McReynolds
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,790,625
- Issue date Sep 7, 2010
- Oki Semiconductor Co., Ltd.
- Shinsuke Miki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing structural body and etchant for silicon oxide...
- Patent number 7,670,496
- Issue date Mar 2, 2010
- Sony Corporation
- Koichiro Saga
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of modifying an etched trench
- Patent number 7,588,693
- Issue date Sep 15, 2009
- Silverbrook Research Pty Ltd
- Darrell LaRue McReynolds
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Preparation of microelectromechanical system device using an anti-s...
- Patent number 7,443,001
- Issue date Oct 28, 2008
- Helwett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
VOID REDUCTION ON WAFER BONDING INTERFACE
- Publication number 20220048762
- Publication date Feb 17, 2022
- Beijing Voyager Technology Co., Ltd.
- Sergio Almeida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Microfluidic Device
- Publication number 20210300752
- Publication date Sep 30, 2021
- IMEC vzw
- Giuseppe Fiorentino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESIDUE REMOVAL
- Publication number 20210305039
- Publication date Sep 30, 2021
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBLIMATION IN FORMING A SEMICONDUCTOR
- Publication number 20210210341
- Publication date Jul 8, 2021
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone
- Publication number 20210204069
- Publication date Jul 1, 2021
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Linlin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING
- Publication number 20210159069
- Publication date May 27, 2021
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURE...
- Publication number 20200148534
- Publication date May 14, 2020
- TEL FSI, Inc.
- Brent D. Schwab
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING
- Publication number 20200075316
- Publication date Mar 5, 2020
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING
- Publication number 20190267232
- Publication date Aug 29, 2019
- Micron Technology, Inc.
- Michael T. Andreas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
- Publication number 20190233280
- Publication date Aug 1, 2019
- Shenyang Silicon Technology Co., Ltd.
- Xiang LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESIDUE REMOVAL
- Publication number 20190189425
- Publication date Jun 20, 2019
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PROCESSING NANO- AND MICRO-PORES
- Publication number 20190185319
- Publication date Jun 20, 2019
- Guangdong University of Technology
- Yun CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBLIMATION IN FORMING A SEMICONDUCTOR
- Publication number 20190189426
- Publication date Jun 20, 2019
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FREEZING A SACRIFICIAL MATERIAL IN FORMING A SEMICONDUCTOR
- Publication number 20190189427
- Publication date Jun 20, 2019
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLARIZATION DEPENDENT SURFACE ENHANCED RAMAN SCATTERING SYSTEM
- Publication number 20180284029
- Publication date Oct 4, 2018
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Mohammad Kamal HOSSAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Performing a Wet Treatment of a Substrate
- Publication number 20180047560
- Publication date Feb 15, 2018
- IMEC vzw
- Paul Mertens
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR DETECTING AN ANALYTE WITH SURFACE ENHANCED RAMAN SCAT...
- Publication number 20170350819
- Publication date Dec 7, 2017
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Mohammad Kamal HOSSAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ADDRESSING FILM LIFTOFF IN MEMS FABRICATION
- Publication number 20170174510
- Publication date Jun 22, 2017
- TEXAS INSTRUMENTS INCORPORATED
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Composition for Treating Surface of Substrate, Method and Device
- Publication number 20160289455
- Publication date Oct 6, 2016
- Air Products and Chemicals, Inc.
- Seiji Inaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20150368096
- Publication date Dec 24, 2015
- Semiconductor Manufacturing International (Shanghai) Corporation
- Guangcai FU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH RAISED FEATURE AND...
- Publication number 20150266726
- Publication date Sep 24, 2015
- Innovative Micro Technology
- Christopher S. GUDEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING MEMS DEVICE
- Publication number 20150259198
- Publication date Sep 17, 2015
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Zhenxing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATION METHOD
- Publication number 20150203351
- Publication date Jul 23, 2015
- Semiconductor Manufacturing International (Shanghai) Corporation
- GUANGCAI FU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO RELEASE DIAPHRAGM IN MEMS DEVICE
- Publication number 20150147841
- Publication date May 28, 2015
- SOLID STATE SYSTEM CO., LTD.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NONAQUEOUS CLEANING LIQUID AND METHOD FOR ETCHING PROCESSING OF SIL...
- Publication number 20140017902
- Publication date Jan 16, 2014
- Daijiro Mori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSING LIQUID FOR SUPPRESSING PATTERN COLLAPSE OF MICROSTRUCTUR...
- Publication number 20130171828
- Publication date Jul 4, 2013
- MITSUBISHI GAS CHEMICAL COMPANY , INC.
- Hiroshi Matsunaga
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TREATMENT SOLUTION FOR PREVENTING PATTERN COLLAPSE IN METAL FINE ST...
- Publication number 20120214722
- Publication date Aug 23, 2012
- Mitsubishi Gas Chemical Company Inc.
- Masaru Ohto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TREATMENT SOLUTION FOR PREVENTING PATTERN COLLAPSE IN METAL FINE ST...
- Publication number 20120205345
- Publication date Aug 16, 2012
- MITSUBISHI GAS CHEMICAL COMPANY, INC
- Masaru Ohto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20120000484
- Publication date Jan 5, 2012
- DENSO CORPORATION
- Daigorou Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING BACKSIDE INK SUPPLY CHANNELS FOR AN INKJET PRINTHEAD
- Publication number 20110024389
- Publication date Feb 3, 2011
- SILVERBROOK RESEARCH PTY LTD
- Darrell LaRue McReynolds
- B81 - MICRO-STRUCTURAL TECHNOLOGY

during manufacture

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Residue removal during semiconductor device formation

Using sacrificial polymer materials in semiconductor processing

Freezing a sacrificial material in forming a semiconductor

MEMS microphone

Gas residue removal

Removing a sacrificial material via sublimation in forming a semico...

Freezing a sacrificial material in forming a semiconductor

Using sacrificial polymer materials in semiconductor processing

Using sacrificial polymer materials in semiconductor processing

Method of processing nano- and micro-pores

Polarization dependent surface enhanced Raman scattering system

Apparatus for detecting an analyte with surface enhanced raman scat...

Composition for treating surface of substrate, method and device

Semiconductor device

Anisotropic monolayer gold nanoassembly: a highly SERS-active subst...

Etch release residue removal using anhydrous solution

MEMS device with over-travel stop structure and method of fabrication

MEMS pressure sensor and method of manufacturing the same

Semiconductor device and fabrication method

Methods of forming MEMS device

Nonaqueous cleaning liquid and method for etching processing of sil...

Wafer level hermetic bond using metal alloy with raised feature and...

Manufacturing method of semiconductor device

Process for masking and removal of residue from complex shapes

Method for removing residues formed during the manufacture of MEMS...

Method of forming an ink supply channel

Method for manufacturing semiconductor device

Process for producing structural body and etchant for silicon oxide...

Method of modifying an etched trench

Preparation of microelectromechanical system device using an anti-s...

Patents Applicationslast 30 patents

VOID REDUCTION ON WAFER BONDING INTERFACE

Method for Fabricating a Microfluidic Device

RESIDUE REMOVAL

SUBLIMATION IN FORMING A SEMICONDUCTOR

MEMS Microphone

USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING

METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURE...

USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING

USING SACRIFICIAL POLYMER MATERIALS IN SEMICONDUCTOR PROCESSING

METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE

RESIDUE REMOVAL

METHOD OF PROCESSING NANO- AND MICRO-PORES

SUBLIMATION IN FORMING A SEMICONDUCTOR

FREEZING A SACRIFICIAL MATERIAL IN FORMING A SEMICONDUCTOR

POLARIZATION DEPENDENT SURFACE ENHANCED RAMAN SCATTERING SYSTEM

Method for Performing a Wet Treatment of a Substrate

APPARATUS FOR DETECTING AN ANALYTE WITH SURFACE ENHANCED RAMAN SCAT...

METHOD OF ADDRESSING FILM LIFTOFF IN MEMS FABRICATION

Composition for Treating Surface of Substrate, Method and Device

MEMS PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME

WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH RAISED FEATURE AND...

METHODS OF FORMING MEMS DEVICE

SEMICONDUCTOR DEVICE AND FABRICATION METHOD

METHOD TO RELEASE DIAPHRAGM IN MEMS DEVICE

NONAQUEOUS CLEANING LIQUID AND METHOD FOR ETCHING PROCESSING OF SIL...

PROCESSING LIQUID FOR SUPPRESSING PATTERN COLLAPSE OF MICROSTRUCTUR...

TREATMENT SOLUTION FOR PREVENTING PATTERN COLLAPSE IN METAL FINE ST...

TREATMENT SOLUTION FOR PREVENTING PATTERN COLLAPSE IN METAL FINE ST...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

METHOD OF ETCHING BACKSIDE INK SUPPLY CHANNELS FOR AN INKJET PRINTHEAD