Electrical characteristics

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B81C1/00698

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00698Electrical characteristics

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with compensation of residual voltage
- Patent number 12,174,215
- Issue date Dec 24, 2024
- Invensense, Inc.
- Giacomo Gafforelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,975,965
- Issue date May 7, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
- Patent number 11,944,998
- Issue date Apr 2, 2024
- Korea Institute of Science and Technology
- Byung Chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure including a functional element sit...
- Patent number 11,939,215
- Issue date Mar 26, 2024
- Robert Bosch GmbH
- Penny Weir
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microphone sensor design and fabrication method for achi...
- Patent number 11,902,741
- Issue date Feb 13, 2024
- Kathirgamasundaram Sooriakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,724,934
- Issue date Aug 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring for robust piezoelectric sensing
- Patent number 11,634,317
- Issue date Apr 25, 2023
- Kionix, Inc.
- Andrew Hocking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,584,642
- Issue date Feb 21, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity detection device, manufacturing method for physic...
- Patent number 11,555,702
- Issue date Jan 17, 2023
- Seiko Epson Corporation
- Ryuta Nishizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micro structure
- Patent number 11,548,779
- Issue date Jan 10, 2023
- Teknologian tutkimuskeskus VTT Oy
- Hannu Kattelus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microphone sensor design and fabrication method for achi...
- Patent number 11,523,224
- Issue date Dec 6, 2022
- Kathirgamasundaram Sooriakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,941,036
- Issue date Mar 9, 2021
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with compensation of residual voltage
- Patent number 10,877,063
- Issue date Dec 29, 2020
- Invensense, Inc.
- Giacomo Gafforelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducers (CMUTs) and related...
- Patent number 10,850,306
- Issue date Dec 1, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,836,632
- Issue date Nov 17, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing low contact resistance semiconductor struc...
- Patent number 10,815,120
- Issue date Oct 27, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chao Zheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for protecting a MEMS unit against infrared investigations a...
- Patent number 10,793,425
- Issue date Oct 6, 2020
- Robert Bosch GmbH
- Michael Curcic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a switch
- Patent number 10,745,273
- Issue date Aug 18, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low contact resistance semiconductor structure and method for manuf...
- Patent number 10,689,246
- Issue date Jun 23, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chao Zheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 10,676,349
- Issue date Jun 9, 2020
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture for MEMS switches with reduced switching vol...
- Patent number 10,647,569
- Issue date May 12, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacturing for MEMS switches with reduced switching v...
- Patent number 10,640,373
- Issue date May 5, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin film metal silicides and methods for formation
- Patent number 10,535,526
- Issue date Jan 14, 2020
- The Trustees of the University of Pennsylvania
- Robert W. Carpick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone having reduced leakage current and method of manufa...
- Patent number 10,448,168
- Issue date Oct 15, 2019
- Semiconductor Manufacturing International (Beijing) Corporation
- Qiang Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration transducer
- Patent number 10,447,231
- Issue date Oct 15, 2019
- Yokogawa Electric Corporation
- Takeshi Mishima
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective conductive coating for MEMS sensors
- Patent number 10,427,931
- Issue date Oct 1, 2019
- Analog Devices, Inc.
- Bradley C. Kaanta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin film metal silicides and methods for formation
- Patent number 10,032,635
- Issue date Jul 24, 2018
- The Trustees of the University of Pennsylvania
- Robert W. Carpick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,017,383
- Issue date Jul 10, 2018
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
- Publication number 20240137711
- Publication date Apr 25, 2024
- Innogrity Pte Ltd
- KATHIRGAMASUNDARAM SOORIAKUMAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230416081
- Publication date Dec 28, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...
- Publication number 20230242393
- Publication date Aug 3, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230183060
- Publication date Jun 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
- Publication number 20230054811
- Publication date Feb 23, 2023
- Innogrity Pte Ltd
- KATHIRGAMASUNDARAM SOORIAKUMAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM AND PROCESS OF MAKING IT
- Publication number 20220306455
- Publication date Sep 29, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE
- Publication number 20220250901
- Publication date Aug 11, 2022
- ROBERT BOSCH GmbH
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
- Publication number 20210266679
- Publication date Aug 26, 2021
- INNOGRITY PTE LTD
- KATHIRGAMASUNDARAM SOORIAKUMAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL STRUCTURE INCLUDING A FUNCTIONAL ELEMENT SIT...
- Publication number 20210229986
- Publication date Jul 29, 2021
- ROBERT BOSCH GmbH
- Penny Weir
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mems sensor with compensation of residual voltage
- Publication number 20210102970
- Publication date Apr 8, 2021
- InvenSense, Inc.
- Giacomo Gafforelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...
- Publication number 20200298275
- Publication date Sep 24, 2020
- Korea Institute of Science and Technology
- Byung Chul LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICRO STRUCTURE
- Publication number 20200180943
- Publication date Jun 11, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Hannu KATTELUS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFA...
- Publication number 20200156111
- Publication date May 21, 2020
- VERMON S.A.
- Dominique GROSS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20200095115
- Publication date Mar 26, 2020
- DENSO CORPORATION
- Takahiro KAWANO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING LOW CONTACT RESISTANCE SEMICONDUCTOR STRUC...
- Publication number 20190345025
- Publication date Nov 14, 2019
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chao ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE SPRING FOR ROBUST PIEZOELECTRIC SENSING
- Publication number 20190322522
- Publication date Oct 24, 2019
- Kionix, Inc.
- Andrew Hocking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROTECTING A MEMS UNIT AGAINST INFRARED INVESTIGATIONS A...
- Publication number 20180297837
- Publication date Oct 18, 2018
- ROBERT BOSCH GmbH
- Michael Curcic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUTs) AND RELATED...
- Publication number 20180243792
- Publication date Aug 30, 2018
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW CONTACT RESISTANCE SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUF...
- Publication number 20180201500
- Publication date Jul 19, 2018
- Semiconductor Manufacturing International (Beijing) Corporation
- CHAO ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN FILM METAL SILICIDES AND METHODS FOR FORMATION
- Publication number 20180174851
- Publication date Jun 21, 2018
- The Trustees of the University of Pennsylvania
- Robert W. Carpick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE HAVING REDUCED LEAKAGE CURRENT AND METHOD OF MANUFA...
- Publication number 20180152791
- Publication date May 31, 2018
- Semiconductor Manufacturing International (Beijing) Corporation
- QIANG WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE
- Publication number 20180093884
- Publication date Apr 5, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE
- Publication number 20180065847
- Publication date Mar 8, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...
- Publication number 20180016137
- Publication date Jan 18, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...
- Publication number 20180016138
- Publication date Jan 18, 2018
- International Business Machines Corporation
- Stephen E. LUCE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVE CONDUCTIVE COATING FOR MEMS SENSORS
- Publication number 20170369304
- Publication date Dec 28, 2017
- Analog Devices, Inc.
- Bradley C. Kaanta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-FACED COMPONENT-BASED ELECTROMECHANICAL DEVICE
- Publication number 20170081182
- Publication date Mar 23, 2017
- International Business Machines Corporation
- Qing Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Electrical characteristics

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectromechanical system and process of making it

MEMS sensor with compensation of residual voltage

Electrostatically driven comb structure of MEMS, micro-mirror using...

MEMS resonator

Capacitive micromachined ultrasonic transducer and method of fabric...

Microelectromechanical structure including a functional element sit...

Capacitive microphone sensor design and fabrication method for achi...

MEMS resonator

Composite spring for robust piezoelectric sensing

MEMS resonator

Physical quantity detection device, manufacturing method for physic...

Capacitive micro structure

Capacitive microphone sensor design and fabrication method for achi...

Method of manufacturing MEMS switches with reduced switching voltage

MEMS sensor with compensation of residual voltage

Capacitive micromachined ultrasonic transducers (CMUTs) and related...

Method of manufacturing MEMS switches with reduced switching voltage

Method for manufacturing low contact resistance semiconductor struc...

Method for protecting a MEMS unit against infrared investigations a...

Method of manufacturing a switch

Low contact resistance semiconductor structure and method for manuf...

MEMS resonator

Methods of manufacture for MEMS switches with reduced switching vol...

Methods of manufacturing for MEMS switches with reduced switching v...

Thin film metal silicides and methods for formation

MEMS microphone having reduced leakage current and method of manufa...

Vibration transducer

Selective conductive coating for MEMS sensors

Thin film metal silicides and methods for formation

Method of manufacturing MEMS switches with reduced switching voltage

Patents Applicationslast 30 patents

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...

MEMS RESONATOR

MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...

MEMS RESONATOR

CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...

MICROELECTROMECHANICAL SYSTEM AND PROCESS OF MAKING IT

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE

CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...

MICROELECTROMECHANICAL STRUCTURE INCLUDING A FUNCTIONAL ELEMENT SIT...

Mems sensor with compensation of residual voltage

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...

CAPACITIVE MICRO STRUCTURE

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFA...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR MANUFACTURING LOW CONTACT RESISTANCE SEMICONDUCTOR STRUC...

COMPOSITE SPRING FOR ROBUST PIEZOELECTRIC SENSING

METHOD FOR PROTECTING A MEMS UNIT AGAINST INFRARED INVESTIGATIONS A...

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUTs) AND RELATED...

LOW CONTACT RESISTANCE SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUF...

THIN FILM METAL SILICIDES AND METHODS FOR FORMATION

MEMS MICROPHONE HAVING REDUCED LEAKAGE CURRENT AND METHOD OF MANUFA...

METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE

METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE

MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...

MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFAC...

SELECTIVE CONDUCTIVE COATING FOR MEMS SENSORS

MULTI-FACED COMPONENT-BASED ELECTROMECHANICAL DEVICE