Electrochemical etching, anodic oxidation

Industry

CPC
B81C2201/0114

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0114Electrochemical etching, anodic oxidation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Flexible electrode and preparation method thereof
- Patent number 11,970,391
- Issue date Apr 30, 2024
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Enhanced microfabrication using electrochemical techniques
- Patent number 11,549,903
- Issue date Jan 10, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Christian Arrington
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of producing a semiconductor device
- Patent number 11,167,981
- Issue date Nov 9, 2021
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Sabine Trupp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Feedback control of dimensions in nanopore and nanofluidic devices
- Patent number 11,015,258
- Issue date May 25, 2021
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tunable MEMS etalon
- Patent number 10,827,152
- Issue date Nov 3, 2020
- TECHNOLOGY INNOVATION MOMENTUM FUND (ISRAEL) LIMITED PARTNERSHIP
- Viacheslav Krylov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,734,237
- Issue date Aug 4, 2020
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method for manufacturing the same
- Patent number 10,547,954
- Issue date Jan 28, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Hui Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of producing a semiconductor device
- Patent number 10,519,034
- Issue date Dec 31, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Sabine Trupp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultra-high charge density electrets and method of making same
- Patent number 10,424,441
- Issue date Sep 24, 2019
- Honeywell International Inc.
- Steven Tin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Feedback control of dimensions in nanopore and nanofluidic devices
- Patent number 10,323,333
- Issue date Jun 18, 2019
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Feedback control of dimensions in nanopore and nanofluidic devices
- Patent number 10,316,423
- Issue date Jun 11, 2019
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming local nano/micro size structures of anodized metal
- Patent number 10,273,592
- Issue date Apr 30, 2019
- Luxembourg Institute of Science and Technology (LIST)
- Guillaume Lamblin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,115,599
- Issue date Oct 30, 2018
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anodic oxide film structure cutting method and unit anodic oxide fi...
- Patent number 9,764,949
- Issue date Sep 19, 2017
- Point Engineering Co., Ltd.
- Bum Mo Ahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabrication of a micromechanical and/or nanomechanical...
- Patent number 9,527,729
- Issue date Dec 27, 2016
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Feedback control of dimensions in nanopore and nanofluidic devices
- Patent number 9,422,154
- Issue date Aug 23, 2016
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a nano-structure
- Patent number 9,410,260
- Issue date Aug 9, 2016
- Hewlett-Packard Development Company, L.P.
- Peter Mardilovich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making a suspended part of a microelectronic and/or nano...
- Patent number 9,096,427
- Issue date Aug 4, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Sofiane Ben Mbarek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a porous microneedle array and correspondi...
- Patent number 8,986,256
- Issue date Mar 24, 2015
- Robert Bosch GmbH
- Dick Scholten
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for electrochemically structuring a conductive or semiconduc...
- Patent number 8,329,017
- Issue date Dec 11, 2012
- Commissariat a l'Energie Atomique
- Denis Buttard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a capacitive electromechanical transducer
- Patent number 8,288,192
- Issue date Oct 16, 2012
- Canon Kabushiki Kaisha
- Chienliu Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and corresponding production method
- Patent number 7,833,405
- Issue date Nov 16, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of silicon micro-mechanical structures
- Patent number 7,566,939
- Issue date Jul 28, 2009
- International Business Machines Corporation
- Michel Despont
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surfactant-enhanced protection of micromechanical components from g...
- Patent number 7,560,037
- Issue date Jul 14, 2009
- Altera Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Direct patterning of silicon by photoelectrochemical etching
- Patent number 7,433,811
- Issue date Oct 7, 2008
- The Regents of the University of California
- Jun Gao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing optically transparent regions in a silicon sub...
- Patent number 7,419,581
- Issue date Sep 2, 2008
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low power silicon thermal sensors and microfluidic devices based on...
- Patent number 7,233,000
- Issue date Jun 19, 2007
- Androula G. Nassiopoulou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surfactant-enhanced protection of micromechanical components from g...
- Patent number 7,153,440
- Issue date Dec 26, 2006
- PTS Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-structure and method of manufacturing nano-structure
- Patent number 6,982,217
- Issue date Jan 3, 2006
- Canon Kabushiki Kaisha
- Aya Imada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of silicon micro mechanical structures
- Patent number 6,949,397
- Issue date Sep 27, 2005
- International Business Machines Corporation
- Michel Despont
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
- Publication number 20240067520
- Publication date Feb 29, 2024
- INFINEON TECHNOLOGIES AG
- Fabian Streb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLEXIBLE ELECTRODE AND PREPARATION METHOD THEREOF
- Publication number 20220234885
- Publication date Jul 28, 2022
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
- Publication number 20200062586
- Publication date Feb 27, 2020
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Sabine TRUPP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES
- Publication number 20190323138
- Publication date Oct 24, 2019
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRA-HIGH CHARGE DENSITY ELECTRETS AND METHOD OF MAKING SAME
- Publication number 20190013151
- Publication date Jan 10, 2019
- HONEYWELL INTERNATIONAL INC.
- Steven Tin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180262845
- Publication date Sep 13, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- HUI SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
- Publication number 20180208459
- Publication date Jul 26, 2018
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Sabine TRUPP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TUNABLE MEMS ETALON
- Publication number 20180205915
- Publication date Jul 19, 2018
- Technology Innovation Momentum Fund (Israel) Limited Partnership
- Viacheslav KRYLOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Forming Local Nano/Micro Size Structures of Anodized Metal
- Publication number 20180179657
- Publication date Jun 28, 2018
- Luxembourg Institute of Science and Technology ( LIST)
- Guillaume Lamblin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anodic Oxide Film Structure Cutting Method and Unit Anodic Oxide Fi...
- Publication number 20170081184
- Publication date Mar 23, 2017
- Point Engineering Co., Ltd.
- Bum Mo Ahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES
- Publication number 20160355942
- Publication date Dec 8, 2016
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES
- Publication number 20160355943
- Publication date Dec 8, 2016
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...
- Publication number 20150274516
- Publication date Oct 1, 2015
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Eric OLLIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAKING A SUSPENDED PART OF A MICROELECTRONIC AND/OR NANO...
- Publication number 20140357006
- Publication date Dec 4, 2014
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Sofiane BEN MBAREK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING A NANO-STRUCTURE
- Publication number 20130175177
- Publication date Jul 11, 2013
- Hewlett-Packard Development Company, L.P.
- Peter Mardilovich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES
- Publication number 20120103821
- Publication date May 3, 2012
- International Business Machines Corporation
- Stefan Harrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Formation Of Nanoporous Materials
- Publication number 20110253544
- Publication date Oct 20, 2011
- University of South Australia
- Dusan Losic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing method for a porous microneedle array and correspondi...
- Publication number 20110137254
- Publication date Jun 9, 2011
- Dick Scholten
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER AND...
- Publication number 20100327380
- Publication date Dec 30, 2010
- Canon Kabushiki Kaisha
- Chienliu Chang
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
METHOD FOR ELECTROCHEMICALLY STRUCTURING A CONDUCTIVE OR SEMICONDUC...
- Publication number 20090255820
- Publication date Oct 15, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Denis Buttard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW POWER SILICON THERMAL SENSORS AND MICROFLUIDIC DEVICES BASED ON...
- Publication number 20080044939
- Publication date Feb 21, 2008
- Androula G. Nassiopoulou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surfactant-enhanced protection of micromechanical components from g...
- Publication number 20070289940
- Publication date Dec 20, 2007
- PTS Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of silicon micro-mechanical structures
- Publication number 20050230839
- Publication date Oct 20, 2005
- Michel Despont
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
"Low power silicon thermal sensors and microfluidic devices based o...
- Publication number 20050072926
- Publication date Apr 7, 2005
- Androula G. Nassiopoulou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Direct patterning of silicon by photoelectrochemical etching
- Publication number 20050009374
- Publication date Jan 13, 2005
- The Regents of the University of California.
- Jun Gao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing optically transparent regions in a silicon sub...
- Publication number 20040155010
- Publication date Aug 12, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of silicon micro mechanical structures
- Publication number 20040135219
- Publication date Jul 15, 2004
- Michel Despont
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and corresponding production method
- Publication number 20040080004
- Publication date Apr 29, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surfactant-enhanced protection of micromechanical components from g...
- Publication number 20040065637
- Publication date Apr 8, 2004
- Network Photonics, Inc.
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Nano-structure and method of manufacturing nano-structure
- Publication number 20030186514
- Publication date Oct 2, 2003
- Canon Kabushiki Kaisha
- Aya Imada
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Electrochemical etching, anodic oxidation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Flexible electrode and preparation method thereof

Enhanced microfabrication using electrochemical techniques

Semiconductor device and method of producing a semiconductor device

Feedback control of dimensions in nanopore and nanofluidic devices

Tunable MEMS etalon

Spectrally and temporally engineered processing using photoelectroc...

MEMS microphone and method for manufacturing the same

Semiconductor device and method of producing a semiconductor device

Ultra-high charge density electrets and method of making same

Feedback control of dimensions in nanopore and nanofluidic devices

Feedback control of dimensions in nanopore and nanofluidic devices

Method of forming local nano/micro size structures of anodized metal

Spectrally and temporally engineered processing using photoelectroc...

Anodic oxide film structure cutting method and unit anodic oxide fi...

Process for fabrication of a micromechanical and/or nanomechanical...

Feedback control of dimensions in nanopore and nanofluidic devices

Method of forming a nano-structure

Method for making a suspended part of a microelectronic and/or nano...

Manufacturing method for a porous microneedle array and correspondi...

Method for electrochemically structuring a conductive or semiconduc...

Method of manufacturing a capacitive electromechanical transducer

Micromechanical component and corresponding production method

Fabrication of silicon micro-mechanical structures

Surfactant-enhanced protection of micromechanical components from g...

Direct patterning of silicon by photoelectrochemical etching

Method for producing optically transparent regions in a silicon sub...

Low power silicon thermal sensors and microfluidic devices based on...

Surfactant-enhanced protection of micromechanical components from g...

Nano-structure and method of manufacturing nano-structure

Fabrication of silicon micro mechanical structures

Patents Applicationslast 30 patents

ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE

FLEXIBLE ELECTRODE AND PREPARATION METHOD THEREOF

SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE

FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES

ULTRA-HIGH CHARGE DENSITY ELECTRETS AND METHOD OF MAKING SAME

MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE

TUNABLE MEMS ETALON

Method of Forming Local Nano/Micro Size Structures of Anodized Metal

Anodic Oxide Film Structure Cutting Method and Unit Anodic Oxide Fi...

FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES

FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES

PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...

METHOD FOR MAKING A SUSPENDED PART OF A MICROELECTRONIC AND/OR NANO...

METHOD OF FORMING A NANO-STRUCTURE

FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES

Formation Of Nanoporous Materials

Manufacturing method for a porous microneedle array and correspondi...

METHOD OF MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER AND...

METHOD FOR ELECTROCHEMICALLY STRUCTURING A CONDUCTIVE OR SEMICONDUC...

LOW POWER SILICON THERMAL SENSORS AND MICROFLUIDIC DEVICES BASED ON...

Surfactant-enhanced protection of micromechanical components from g...

Fabrication of silicon micro-mechanical structures

"Low power silicon thermal sensors and microfluidic devices based o...

Direct patterning of silicon by photoelectrochemical etching

Method for producing optically transparent regions in a silicon sub...

Fabrication of silicon micro mechanical structures

Micromechanical component and corresponding production method

Surfactant-enhanced protection of micromechanical components from g...

Nano-structure and method of manufacturing nano-structure