Elements in the interior of the support

Industry

CPC
C23C16/4586

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4586Elements in the interior of the support

Industries

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for faceplate temperature control
- Patent number 12,191,169
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with spatially tunable RF coupling to a wafer
- Patent number 12,191,122
- Issue date Jan 7, 2025
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods to transfer substrates into and out of a spat...
- Patent number 12,183,618
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support table and RF rod
- Patent number 12,170,190
- Issue date Dec 17, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD system with substrate carrier and associated mechanisms for mov...
- Patent number 12,163,228
- Issue date Dec 10, 2024
- Mellanox Technologies, Ltd.
- Elad Mentovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous liner for use in a processing chamber
- Patent number 12,163,218
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Screwless semiconductor processing chambers
- Patent number 12,165,909
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Bo-Ru Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,112,927
- Issue date Oct 8, 2024
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method for dechucking wafer in the...
- Patent number 12,106,942
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Yi Rop Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool
- Patent number 12,084,769
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Atomic layer deposition part coating chamber
- Patent number 12,074,010
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Michael R. Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor system and method to reduce residue buildup during a film d...
- Patent number 12,043,899
- Issue date Jul 23, 2024
- ASM IP Holding B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and moisture removal method thereof
- Patent number 12,043,898
- Issue date Jul 23, 2024
- Shibaura Mechatronics Corporation
- Shohei Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck heater and manufacturing method therefor
- Patent number 12,040,209
- Issue date Jul 16, 2024
- MiCo Ceramics Ltd.
- Chul Ho Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-pressure bipolar electrostatic chucking
- Patent number 12,040,210
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor-manufacturing apparatus member and plug
- Patent number 12,040,160
- Issue date Jul 16, 2024
- NGK Insulators, Ltd.
- Masaki Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer placement table
- Patent number 12,040,165
- Issue date Jul 16, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holding body
- Patent number 12,033,880
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support apparatus and method
- Patent number 12,027,407
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yueh Lin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution ceramic heater for deposition chamber
- Patent number 12,016,092
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus having improved temperature control
- Patent number 12,009,185
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Jun Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for transporting substrate, treatment device with receiving...
- Patent number 12,009,186
- Issue date Jun 11, 2024
- MEYER BURGER (GERMANY) GMBH
- Hermann Schlemm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 12,000,048
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor having cooling device
- Patent number 12,002,661
- Issue date Jun 4, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,993,843
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Seung Wook Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
- Publication number 20250011918
- Publication date Jan 9, 2025
- Seoul National University R&DB Foundation
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...
- Publication number 20250011933
- Publication date Jan 9, 2025
- TORAY ENGINEERING CO., LTD.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER HOLDER ASSEMBLY
- Publication number 20250006528
- Publication date Jan 2, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- CHENG-YOU TAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR HEATING JACKET WITH REMOLDABLE INSULATOR
- Publication number 20250003076
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
- Publication number 20240424514
- Publication date Dec 26, 2024
- Leybold GmbH
- Maik Burkhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR
- Publication number 20240417856
- Publication date Dec 19, 2024
- Point Engineering Co., Ltd.
- Bum Mo AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME
- Publication number 20240410054
- Publication date Dec 12, 2024
- MICO CERAMICS LTD.
- Min-Ho JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240404802
- Publication date Dec 5, 2024
- Kokusai Electric Corporation
- Atsushi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND CRYSTALLINE OXIDE...
- Publication number 20240395548
- Publication date Nov 28, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...
- Publication number 20240392441
- Publication date Nov 28, 2024
- AIXTRON SE
- Jared Lee HOLZWARTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING
- Publication number 20240387226
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL
- Publication number 20240384416
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Systems with Rotating Electrostatic Chuck and Methods Th...
- Publication number 20240376602
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER WITH GAS RECYCLING
- Publication number 20240368764
- Publication date Nov 7, 2024
- APPLIED MATERIALS,INC.
- Michael Robert Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF TEMPERATURE MEASURING, AN...
- Publication number 20240368765
- Publication date Nov 7, 2024
- Jusung Engineering Co., Ltd.
- Oh Hyeon KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHO...
- Publication number 20240363390
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Xinning LUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT PLATE, SUBSTRATE PROCESSING APPARATUS INCLUDING T...
- Publication number 20240363331
- Publication date Oct 31, 2024
- ASM IP HOLDING B.V.
- DaeYoun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENABLE CVD CHAMBER PROCESS WAFERS AT DIFFERENT TEMPERATURES
- Publication number 20240352588
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Peiqi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING ELECTROSTATIC CHUCK
- Publication number 20240352587
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Nobuaki Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...
- Publication number 20240337011
- Publication date Oct 10, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Yongjun FENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT
- Publication number 20240337019
- Publication date Oct 10, 2024
- BENEQ OY
- Olli-Pekka SUHONEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION AND LIFTING
- Publication number 20240327987
- Publication date Oct 3, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Weicong SONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION...
- Publication number 20240327986
- Publication date Oct 3, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Xiaoliang JIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT DEVICE
- Publication number 20240318314
- Publication date Sep 26, 2024
- Samsung Electronics Co., Ltd.
- Yonjoo KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...
- Publication number 20240312770
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Jian LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ceramic Pedestal Shaft with Heated/Cooled Gas Tube
- Publication number 20240304491
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240304436
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Elements in the interior of the support

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for faceplate temperature control

Electrostatic chuck with spatially tunable RF coupling to a wafer

Apparatus and methods to transfer substrates into and out of a spat...

Wafer support table and RF rod

CVD system with substrate carrier and associated mechanisms for mov...

Continuous liner for use in a processing chamber

Screwless semiconductor processing chambers

In situ real-time sensing and compensation of non-uniformities in s...

Multi-zone pedestal heater without vias

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Substrate processing apparatus and method

Plasma processing apparatus and method of manufacturing semiconduct...

Plasma processing apparatus and method for dechucking wafer in the...

Semiconductor processing tool

Atomic layer deposition part coating chamber

Reactor system and method to reduce residue buildup during a film d...

Film formation apparatus and moisture removal method thereof

Electrostatic chuck heater and manufacturing method therefor

Multi-pressure bipolar electrostatic chucking

Semiconductor-manufacturing apparatus member and plug

Substrate lift mechanism and reactor including same

Wafer placement table

Wafer holding body

Substrate support apparatus and method

Gas distribution ceramic heater for deposition chamber

Semiconductor processing apparatus having improved temperature control

Device for transporting substrate, treatment device with receiving...

Pedestal for substrate processing chambers

Susceptor having cooling device

Substrate processing apparatus

Patents Applicationslast 30 patents

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...

LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...

WAFER HOLDER ASSEMBLY

MODULAR HEATING JACKET WITH REMOLDABLE INSULATOR

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...

SUSCEPTOR

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND CRYSTALLINE OXIDE...

CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...

REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING

SEMICONDUCTOR PROCESSING TOOL

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

Deposition Systems with Rotating Electrostatic Chuck and Methods Th...

PROCESSING CHAMBER WITH GAS RECYCLING

SUBSTRATE PROCESSING APPARATUS, METHOD OF TEMPERATURE MEASURING, AN...

GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHO...

SUBSTRATE SUPPORT PLATE, SUBSTRATE PROCESSING APPARATUS INCLUDING T...

ENABLE CVD CHAMBER PROCESS WAFERS AT DIFFERENT TEMPERATURES

SUBSTRATE PROCESSING APPARATUS INCLUDING ELECTROSTATIC CHUCK

MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...

AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT

VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION AND LIFTING

CHEMICAL VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION...

SUBSTRATE SUPPORT DEVICE

APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...

Ceramic Pedestal Shaft with Heated/Cooled Gas Tube

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS