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Eliminating deleterious effects due to thermal effects or electric or magnetic fields
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H01J37/07
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/07
Eliminating deleterious effects due to thermal effects or electric or magnetic fields
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Patents Grants
last 30 patents
Information
Patent Grant
Laminate, electron source and electronic device containing laminate...
Patent number
12,237,141
Issue date
Feb 25, 2025
National Institute for Materials Science
Katsumi Nagaoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun and electron microscope
Patent number
12,217,928
Issue date
Feb 4, 2025
HITACHI HIGH-TECH CORPORATION
Hideo Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun, electron beam applicator, and method for controlling...
Patent number
12,198,889
Issue date
Jan 14, 2025
Photo electron Soul Inc.
Atsushi Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dielectric coated plasmonic photoemitter
Patent number
12,183,535
Issue date
Dec 31, 2024
Board of Trustees of Michigan State University
Peng Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray cathode focusing element
Patent number
12,183,536
Issue date
Dec 31, 2024
GE Precision Healthcare LLC
Kevin Kruse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission electron microscope and imaging method
Patent number
12,183,542
Issue date
Dec 31, 2024
HITACHI HIGH-TECH CORPORATION
Hiroki Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Joint electron-optical columns for flood-charging and image-forming...
Patent number
12,165,838
Issue date
Dec 10, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for Schottky TFE inspection
Patent number
12,165,834
Issue date
Dec 10, 2024
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun and electron beam application apparatus
Patent number
12,165,828
Issue date
Dec 10, 2024
HITACHI HIGH-TECH CORPORATION
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam gun control systems and methods
Patent number
12,145,006
Issue date
Nov 19, 2024
Varian Medical Systems, Inc.
Mark Everett Trail
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Emitter and device provided with same
Patent number
12,125,663
Issue date
Oct 22, 2024
DENKA COMPANY LIMITED
Daisuke Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cathode mechanism of electron emission source, and method for manuf...
Patent number
12,106,928
Issue date
Oct 1, 2024
NuFlare Technology, Inc.
Ryoei Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun, electron beam applicator, emission axis verification...
Patent number
12,080,507
Issue date
Sep 3, 2024
Photo electron Soul Inc.
Hokuto Iijima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photocathode kit, electron gun, and electron beam applicator
Patent number
12,033,827
Issue date
Jul 9, 2024
Photo electron Soul Inc.
Haruka Shikano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source and charged particle beam device
Patent number
11,990,311
Issue date
May 21, 2024
HITACHI HIGH-TECH CORPORATION
Masahiro Fukuta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation generation apparatus and radiation generation method
Patent number
11,990,310
Issue date
May 21, 2024
MITSUBISHI HEAVY INDUSTRIES MACHINERY SYSTEMS, LTD.
Nobuyuki Shigeoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun and charged particle beam device equipped with electro...
Patent number
11,978,609
Issue date
May 7, 2024
HITACHI HIGH-TECH CORPORATION
Minoru Kaneda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light emitting sealed body, light emitting unit, and light source d...
Patent number
11,972,931
Issue date
Apr 30, 2024
Hamamatsu Photonics K.K.
Akio Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electron source and charged particle beam device
Patent number
11,929,230
Issue date
Mar 12, 2024
HITACHI HIGH-TECH CORPORATION
Keigo Kasuya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conical heat shield for electron emitting cathode
Patent number
11,901,154
Issue date
Feb 13, 2024
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus and method for controlling electron beam ap...
Patent number
11,894,211
Issue date
Feb 6, 2024
HITACHI HIGH-TECH CORPORATION
Erina Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Filament-less electron source
Patent number
11,887,805
Issue date
Jan 30, 2024
FEI Company
John Stiller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput multi-electron beam system
Patent number
11,869,743
Issue date
Jan 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun, electron gun component, electron beam applicator, and...
Patent number
11,842,879
Issue date
Dec 12, 2023
Photo electron Soul Inc.
Tomohiro Nishitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cold-field-emitter electron gun with self-cleaning extractor using...
Patent number
11,830,699
Issue date
Nov 28, 2023
KLA Corporation
Luca Grella
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam source for optical device fabrication using a segmented io...
Patent number
11,810,755
Issue date
Nov 7, 2023
Applied Materials, Inc.
Ludovic Godet
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Extended lifetime dual indirectly-heated cathode ion source
Patent number
11,798,775
Issue date
Oct 24, 2023
Axcelis Technologies, Inc.
Wilhelm Platow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus
Patent number
11,784,022
Issue date
Oct 10, 2023
HITACHI HIGH-TECH CORPORATION
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mechanically-stable electron source
Patent number
11,749,492
Issue date
Sep 5, 2023
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam writing apparatus and cathode life span prediction me...
Patent number
11,749,491
Issue date
Sep 5, 2023
NuFlare Technology, Inc.
Satoshi Nakahashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IN-LINE ELECTRON BEAM INSPECTION METHOD FOR SEMICONDUCTOR PROCESSES...
Publication number
20250054721
Publication date
Feb 13, 2025
ALES TECH INC.
Wei-Tse Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM DEVICE INCLUDING SCHOTTKY EMITTER AND METHOD OF OPERA...
Publication number
20250022676
Publication date
Jan 16, 2025
HITACHI HIGH-TECH CORPORATION
Toshiaki KUSUNOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTING COLD PHOTOCATHODE DEVICE USING ELECTRIC FIELD TO CON...
Publication number
20240412938
Publication date
Dec 12, 2024
ATTOLIGHT AG
Nicolas Tappy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...
Publication number
20240412939
Publication date
Dec 12, 2024
PHOTO ELECTRON SOUL INC.
Tomohiro NISHITANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
Publication number
20240395499
Publication date
Nov 28, 2024
RINKEN
Takahiro SHIMOJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAMINATE, ELECTRON SOURCE AND ELECTRONIC DEVICE CONTAINING LAMINATE...
Publication number
20240395494
Publication date
Nov 28, 2024
NATIONAL INSTITUTE FOR MATERIALS SCIENCE
Katsumi NAGAOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20240379318
Publication date
Nov 14, 2024
HITACHI HIGH-TECH CORPORATION
Keigo KASUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Structure for Particle Acceleration And Charged Particle Beam Appar...
Publication number
20240242918
Publication date
Jul 18, 2024
Hitachi High-Tech Corporation
RYO SUGIYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE D...
Publication number
20240242941
Publication date
Jul 18, 2024
HAMAMATSU PHOTONICS K. K.
Akio Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electron Gun, Electron Beam Applying Device, and Irradiation Positi...
Publication number
20240222062
Publication date
Jul 4, 2024
Photo electron Soul, Inc.
Tomohiro NISHITANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Gun and Charged Particle Beam Apparatus
Publication number
20240212966
Publication date
Jun 27, 2024
HITACHI HIGH-TECH CORPORATION
Tomoya IGARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...
Publication number
20240212967
Publication date
Jun 27, 2024
PHOTO ELECTRON SOUL INC.
Tomohiro NISHITANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN CHAMBER FOR SCANNING ELECTRON MICROSCOPE, ELECTRON GUN...
Publication number
20240212971
Publication date
Jun 27, 2024
National Institute for Materials Science
Han ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPLICATION DEVICE
Publication number
20240161997
Publication date
May 16, 2024
HITACHI HIGH-TECH CORPORATION
Takashi OHSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EMITTER AND DEVICE PROVIDED WITH SAME
Publication number
20240153730
Publication date
May 9, 2024
Denka Company Limited
Daisuke ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
Publication number
20240120168
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT
Publication number
20240038490
Publication date
Feb 1, 2024
Axcelis Technologies, Inc.
Steven T. Drummond
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGING, PROCESSING, AND/OR ANALYZING AN OBJECT USING A PARTICLE BE...
Publication number
20240038481
Publication date
Feb 1, 2024
CARL ZEISS MICROSCOPY GMBH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE
Publication number
20230402246
Publication date
Dec 14, 2023
HITACHI HIGH-TECH CORPORATION
Hideo MORISHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Creating Multiple Electron Beams with a Photocathode Film
Publication number
20230395349
Publication date
Dec 7, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SOURCE, PLASMA SOURCE AND SWITCH DEVICE
Publication number
20230377828
Publication date
Nov 23, 2023
Kabushiki Kaisha Toshiba
Hisao MIYAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE
Publication number
20230352262
Publication date
Nov 2, 2023
HITACHI HIGH-TECH CORPORATION
Keigo KASUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN CATHODE TECHNOLOGY
Publication number
20230330751
Publication date
Oct 19, 2023
Freemelt AB
Ulric LJUNGBLAD
B22 - CASTING POWDER METALLURGY
Information
Patent Application
Electron Source, Method of Manufacturing the Same, And Electron Bea...
Publication number
20230317401
Publication date
Oct 5, 2023
Hitachi High-Tech Corporation
Toshiaki KUSUNOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON MICROSCOPE
Publication number
20230298847
Publication date
Sep 21, 2023
KLA Corporation
Yung-Ho Alex Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
Publication number
20230253178
Publication date
Aug 10, 2023
NUFLARE TECHNOLOGY, INC.
Victor KATSAP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Source and Charged Particle Beam Device
Publication number
20230238205
Publication date
Jul 27, 2023
HITACHI HIGH-TECH CORPORATION
Masahiro FUKUTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...
Publication number
20230230794
Publication date
Jul 20, 2023
PHOTO ELECTRON SOUL INC.
Tomohiro Nishitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...
Publication number
20230207249
Publication date
Jun 29, 2023
PHOTO ELECTRON SOUL INC.
Tomohiro Nishitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
X-RAY CATHODE FOCUSING ELEMENT
Publication number
20230197396
Publication date
Jun 22, 2023
GE Precision Healthcare LLC
Kevin Kruse
H01 - BASIC ELECTRIC ELEMENTS