Eliminating or avoiding remaining moisture after the wet etch release of the movable structure

Industry

CPC
B81C1/00928

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00928Eliminating or avoiding remaining moisture after the wet etch release of the movable structure

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device with patterned contact area
- Patent number 11,230,470
- Issue date Jan 25, 2022
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,615,026
- Issue date Apr 7, 2020
- SCREEN Holdings Co., Ltd.
- Shota Iwahata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 10,513,432
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma assisted method of accurate alignment and pre-bonding for mi...
- Patent number 9,842,749
- Issue date Dec 12, 2017
- Beijing University of Technology
- Guangsheng Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to release diaphragm in MEMS device
- Patent number 9,321,635
- Issue date Apr 26, 2016
- Solid State System Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing liquid for suppressing pattern collapse of fine metal st...
- Patent number 9,196,472
- Issue date Nov 24, 2015
- Mitsubishi Gas Chemical Company, Inc.
- Masaru Ohto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming hydrophobic surfaces on semiconductor device str...
- Patent number 8,932,933
- Issue date Jan 13, 2015
- Micron Technology, Inc.
- Ian C. Laboriante
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for etching the silicon oxide layer of a semic...
- Patent number 8,889,563
- Issue date Nov 18, 2014
- Pukyong National University Industry—University Cooperation Foundation
- Kwon-Taek Lim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit with MEMS element and manufacturing method thereof
- Patent number 8,841,736
- Issue date Sep 23, 2014
- NXP, B.V.
- Robert James Pascoe Lander
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for removing residues formed during the manufacture of MEMS...
- Patent number 8,071,486
- Issue date Dec 6, 2011
- Teledyne Dalsa Semiconductor Inc.
- Vincent Fortin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective etching of oxides from substrates
- Patent number 7,431,853
- Issue date Oct 7, 2008
- Primaxx, Inc.
- Paul D. Mumbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating suspended structure
- Patent number 7,410,821
- Issue date Aug 12, 2008
- Touch Micro-System Technology Inc.
- Yao-Tian Chow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vapor phase etching MEMS devices
- Patent number 7,279,431
- Issue date Oct 9, 2007
- Semitool, Inc.
- Eric J. Bergman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction resistant release process
- Patent number 7,087,456
- Issue date Aug 8, 2006
- Zyvex Corporation
- Igor Gory
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etch process for etching microstructures
- Patent number 6,936,183
- Issue date Aug 30, 2005
- Applied Materials, Inc.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined component and method of manufacture
- Patent number 6,811,714
- Issue date Nov 2, 2004
- FREESCALE SEMICONDUCTOR, INC.
- Jonathan F. Gorrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor dynamic quantity-sensor and method of manufacturing t...
- Patent number 6,483,283
- Issue date Nov 19, 2002
- Fuji Electric Co., Ltd.
- Katsumichi Uayanagi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device manufacturing process
- Patent number 6,337,027
- Issue date Jan 8, 2002
- Rockwell Science Center, LLC
- Kurt D. Humphrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor dynamic quantity-sensor and method of manufacturing t...
- Patent number 6,281,033
- Issue date Aug 28, 2001
- Fuji Electric Co., Ltd.
- Katsumichi Uayanagi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor physical quantity sensor having movable portion and f...
- Patent number 6,276,207
- Issue date Aug 21, 2001
- Denso Corporation
- Minekazu Sakai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated micromechanical sensor device and process for producing it
- Patent number 6,133,059
- Issue date Oct 17, 2000
- Infineon Technologies AG
- Wolfgang Werner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of drying passivated micromachines by dewetting from a liqui...
- Patent number 6,114,044
- Issue date Sep 5, 2000
- Regents of the University of California
- Michael R. Houston
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to prevent adhesion of micromechanical structures
- Patent number 5,772,902
- Issue date Jun 30, 1998
- Carnegie Mellon University
- Michael L. Reed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preventing micromechanical structures from adhering to a...
- Patent number 5,766,367
- Issue date Jun 16, 1998
- Sandia Corporation
- James H. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated micromechanical sensor device
- Patent number 5,744,719
- Issue date Apr 28, 1998
- Siemens Aktiengesellschaft
- Wolfgang Werner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for drying micromechanical components
- Patent number 5,700,379
- Issue date Dec 23, 1997
- Siemens Aktiengesellschaft
- Markus Biebl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to prevent adhesion of micromechanical structures
- Patent number 5,658,636
- Issue date Aug 19, 1997
- Carnegie Mellon University
- Michael L. Reed
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURE...
- Publication number 20200148534
- Publication date May 14, 2020
- TEL FSI, Inc.
- Brent D. Schwab
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180261449
- Publication date Sep 13, 2018
- SCREEN Holdings Co., Ltd.
- Shota IWAHATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device and Method of Manufacturing the Semiconductor...
- Publication number 20180047582
- Publication date Feb 15, 2018
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Marko Lemke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Plasma assisted method of accurate alignment and pre-bonding for mi...
- Publication number 20170301564
- Publication date Oct 19, 2017
- BEIJING UNIVERSITY OF TECHNOLOGY
- Guangsheng Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATOR, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPLIANCE
- Publication number 20150244289
- Publication date Aug 27, 2015
- SEIKO EPSON CORPORATION
- Takahiko YOSHIZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods And Apparatus For MEMS Structure Release
- Publication number 20140252512
- Publication date Sep 11, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tai-I Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED CIRCUIT WITH MEMS ELEMENT AND MANUFACTURING METHOD THEREOF
- Publication number 20140042563
- Publication date Feb 13, 2014
- NXP B.V.
- Robert James Pascoe Lander
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING HYDROPHOBIC SURFACES ON SEMICONDUCTOR DEVICE STR...
- Publication number 20130292647
- Publication date Nov 7, 2013
- Micron Technology, Inc.
- Ian C. Laboriante
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREVENTING THE COLLAPSE OF HIGH ASPECT RATIO STRUCTURES...
- Publication number 20130280123
- Publication date Oct 24, 2013
- Advanced Technology Materials, Inc.
- Tianniu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR ETCHING THE SILICON OXIDE LAYER OF A SEMIC...
- Publication number 20120196445
- Publication date Aug 2, 2012
- Pukyong National University
- Kwon-Taek LIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSING LIQUID FOR SUPPRESSING PATTERN COLLAPSE OF FINE METAL ST...
- Publication number 20120135604
- Publication date May 31, 2012
- Mitsubishi Gas Chemical Company, Inc.
- Masaru Ohto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR REMOVING RESIDUES FORMED DURING THE MANUFACTURE OF MEMS...
- Publication number 20070134927
- Publication date Jun 14, 2007
- DALSA Semiconductor Inc.
- Vincent Fortin
- B08 - CLEANING
Information Patent Application
METHOD OF FABRICATING SUSPENDED STRUCTURE
- Publication number 20070105385
- Publication date May 10, 2007
- Yao-Tian Chow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Selective etching of oxides from substrates
- Publication number 20060207968
- Publication date Sep 21, 2006
- Paul D. Mumbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Stiction resistant release process
- Publication number 20050074913
- Publication date Apr 7, 2005
- Zyvex Corporation
- Igor Gory
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fine structure composite and drying method of fine structure using...
- Publication number 20050051930
- Publication date Mar 10, 2005
- Kabushiki Kaisha Kobe Seiko Sho.
- Nobuyuki Kawakami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surface treatment method, semiconductor device, method of fabricati...
- Publication number 20040259357
- Publication date Dec 23, 2004
- Koichiro Saga
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vapor phase etching MEMS devices
- Publication number 20040259370
- Publication date Dec 23, 2004
- Semitool, Inc.
- Eric J. Bergman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for releasing and drying moveable elements of micro-electron...
- Publication number 20040139987
- Publication date Jul 22, 2004
- David J. Mount
- B08 - CLEANING
Information Patent Application
Fine structure composite and drying method of fine structure using...
- Publication number 20040038060
- Publication date Feb 26, 2004
- Kabushiki Kaisha Kobe Seiko Sho.
- Nobuyuki Kawakami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Etch process for etching microstructures
- Publication number 20030071015
- Publication date Apr 17, 2003
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anti-stiction method and apparatus for drying wafer using centrifug...
- Publication number 20030008506
- Publication date Jan 9, 2003
- SAMSUNG ELECTRONICS CO., LTD.
- Jin-Woo Cho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor dynamic quantity-sensor and method of manufacturing t...
- Publication number 20010018260
- Publication date Aug 30, 2001
- Fuji Electric, Co., Ltd.
- Katsumichi Uayanagi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Eliminating or avoiding remaining moisture after the wet etch release of the movable structure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Anti-stiction process for MEMS device

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Semiconductor device with patterned contact area

Substrate processing method and substrate processing apparatus

Anti-stiction process for MEMS device

Plasma assisted method of accurate alignment and pre-bonding for mi...

Method to release diaphragm in MEMS device

Processing liquid for suppressing pattern collapse of fine metal st...

Methods of forming hydrophobic surfaces on semiconductor device str...

Method and apparatus for etching the silicon oxide layer of a semic...

Integrated circuit with MEMS element and manufacturing method thereof

Method for removing residues formed during the manufacture of MEMS...

Selective etching of oxides from substrates

Method of fabricating suspended structure

Vapor phase etching MEMS devices

Stiction resistant release process

Etch process for etching microstructures

Micromachined component and method of manufacture

Semiconductor dynamic quantity-sensor and method of manufacturing t...

Microelectromechanical device manufacturing process

Semiconductor dynamic quantity-sensor and method of manufacturing t...

Semiconductor physical quantity sensor having movable portion and f...

Integrated micromechanical sensor device and process for producing it

Method of drying passivated micromachines by dewetting from a liqui...

Method to prevent adhesion of micromechanical structures

Method for preventing micromechanical structures from adhering to a...

Integrated micromechanical sensor device

Method for drying micromechanical components

Method to prevent adhesion of micromechanical structures

Patents Applicationslast 30 patents

ANTI-STICTION PROCESS FOR MEMS DEVICE

METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURE...

ANTI-STICTION PROCESS FOR MEMS DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Semiconductor Device and Method of Manufacturing the Semiconductor...

Plasma assisted method of accurate alignment and pre-bonding for mi...

VIBRATOR, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPLIANCE

Methods And Apparatus For MEMS Structure Release

INTEGRATED CIRCUIT WITH MEMS ELEMENT AND MANUFACTURING METHOD THEREOF

METHODS OF FORMING HYDROPHOBIC SURFACES ON SEMICONDUCTOR DEVICE STR...

METHOD FOR PREVENTING THE COLLAPSE OF HIGH ASPECT RATIO STRUCTURES...

METHOD AND APPARATUS FOR ETCHING THE SILICON OXIDE LAYER OF A SEMIC...

PROCESSING LIQUID FOR SUPPRESSING PATTERN COLLAPSE OF FINE METAL ST...

METHOD FOR REMOVING RESIDUES FORMED DURING THE MANUFACTURE OF MEMS...

METHOD OF FABRICATING SUSPENDED STRUCTURE

Selective etching of oxides from substrates

Stiction resistant release process

Fine structure composite and drying method of fine structure using...

Surface treatment method, semiconductor device, method of fabricati...

Vapor phase etching MEMS devices

Method for releasing and drying moveable elements of micro-electron...

Fine structure composite and drying method of fine structure using...

Etch process for etching microstructures

Anti-stiction method and apparatus for drying wafer using centrifug...

Semiconductor dynamic quantity-sensor and method of manufacturing t...