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G01N21/211
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PHYSICS
G01
Measuring instruments
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N21/00
Investigating or analysing materials by the use of optical means
Current Industry
G01N21/211
Ellipsometry
Industries
Overview
Organizations
People
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Impact
Patents Grants
last 30 patents
Information
Patent Grant
Imaging ellipsometry (IE)-based inspection method and method of fab...
Patent number
11,972,960
Issue date
Apr 30, 2024
Samsung Electronics Co., Ltd.
Myungjun Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for determining properties of a sample by ellipsometry
Patent number
11,959,852
Issue date
Apr 16, 2024
Park Systems GmbH
Matthias Duwe
G01 - MEASURING TESTING
Information
Patent Grant
Reconstruction of frequency registration for quantitative spectroscopy
Patent number
11,953,427
Issue date
Apr 9, 2024
Endress+Hauser Optical Analysis, Inc.
Alfred Feitisch
G01 - MEASURING TESTING
Information
Patent Grant
Second Harmonic Generation (SHG) optical inspection system designs
Patent number
11,946,863
Issue date
Apr 2, 2024
FemtoMetrix, Inc.
Ming Lei
G01 - MEASURING TESTING
Information
Patent Grant
Multiple reflectometry for measuring etch parameters
Patent number
11,927,543
Issue date
Mar 12, 2024
Applied Materials, Inc.
Blake Erickson
G01 - MEASURING TESTING
Information
Patent Grant
Optical metrology in machine learning to characterize features
Patent number
11,921,433
Issue date
Mar 5, 2024
Lam Research Corporation
Ye Feng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical metrology tool equipped with modulated illumination sources
Patent number
11,913,874
Issue date
Feb 27, 2024
KLA Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Grant
Method for extracting a transverse magneto-optic effect signal
Patent number
11,906,604
Issue date
Feb 20, 2024
ASOCIACIÓN CENTRO DE INVESTIGACIÓN COOPERATIVA EN NANOCIENCIAS “CIC NANOGUNE”
Eva Oblak
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for optical characterization of patterned samples
Patent number
11,885,737
Issue date
Jan 30, 2024
Nova Ltd.
Dror Shafir
G01 - MEASURING TESTING
Information
Patent Grant
Reflectometer, spectrophotometer, ellipsometer or polarimeter syste...
Patent number
11,885,738
Issue date
Jan 30, 2024
J. A. Woollam Co., Inc.
Martin M. Liphardt
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring film thickness of semiconductor device
Patent number
11,867,497
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yongshang Sheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for predicting properties of structures, imager system, and...
Patent number
11,869,178
Issue date
Jan 9, 2024
Micron Technology, Inc.
Amitava Majumdar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Fountain solution thickness measurement system and method using ell...
Patent number
11,835,446
Issue date
Dec 5, 2023
Xerox Corporation
Donald Thresh
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Method for measuring characteristic of thin film
Patent number
11,835,447
Issue date
Dec 5, 2023
AUROS TECHNOLOGY, INC.
Tae Dong Kang
G01 - MEASURING TESTING
Information
Patent Grant
Fast and accurate Mueller matrix infrared ellipsometer
Patent number
11,821,833
Issue date
Nov 21, 2023
J. A. Woollam Co., Inc.
Stefan Schoeche
G01 - MEASURING TESTING
Information
Patent Grant
Metrology apparatus and a method of determining a characteristic of...
Patent number
11,822,254
Issue date
Nov 21, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Single ion detection method and device
Patent number
11,808,695
Issue date
Nov 7, 2023
INSTITUTE OF MECHANICS, CHINESE ACADEMY OF SCIENCES
Wei Liu
G01 - MEASURING TESTING
Information
Patent Grant
Part quality monitoring in a stereolithographic additive manufactur...
Patent number
11,794,411
Issue date
Oct 24, 2023
Stratasys, Inc.
J. Samuel Batchelder
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Grant
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
Patent number
11,740,176
Issue date
Aug 29, 2023
J. A. Woollam Co., Inc.
Stefan Schoeche
G01 - MEASURING TESTING
Information
Patent Grant
Liquid immersion micro-channel measurement device and measurement m...
Patent number
11,719,624
Issue date
Aug 8, 2023
Korea Research Institute of Standards and Science
Hyun Mo Cho
G01 - MEASURING TESTING
Information
Patent Grant
Techniques for characterizing films on optically clear substrates u...
Patent number
11,714,045
Issue date
Aug 1, 2023
Meta Platforms Technologies, LLC
Gangadhara Raja Muthinti
G01 - MEASURING TESTING
Information
Patent Grant
Device for detecting water on a surface and a method for detecting...
Patent number
11,680,895
Issue date
Jun 20, 2023
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Dietrich Dumler
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for semiconductor chip hole geometry metrology
Patent number
11,674,909
Issue date
Jun 13, 2023
Yangtze Memory Technologies Co., Ltd.
Le Wang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Spectroscopic ellipsometry system for thin film imaging
Patent number
11,668,645
Issue date
Jun 6, 2023
Bruker Nano, Inc.
Emad Zawaideh
G02 - OPTICS
Information
Patent Grant
Thin film spectroellipsometric imaging
Patent number
11,644,412
Issue date
May 9, 2023
Aizhong Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring dielectric tensor of material
Patent number
11,644,413
Issue date
May 9, 2023
Huazhong University of Science & Technology
Honggang Gu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Conical pocket laser-sustained plasma lamp
Patent number
11,637,008
Issue date
Apr 25, 2023
KLA Corporation
Sumeet Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for evaluating structure used for nuclide transmutation reac...
Patent number
11,630,055
Issue date
Apr 18, 2023
Mitsubishi Heavy Industries, Ltd.
Shigenori Tsuruga
G01 - MEASURING TESTING
Information
Patent Grant
Measurement system capable of adjusting AOI, AOI spread and azimuth...
Patent number
11,624,699
Issue date
Apr 11, 2023
Samsung Electronics Co., Ltd.
Jaehwang Jung
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for determining optical constant of material,...
Patent number
11,619,578
Issue date
Apr 4, 2023
Nankai University
Meng-Xin Ren
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM FOR PREDICTING PROPERTIES OF STRUCTURES, IMAGER SYSTEM, AND...
Publication number
20240153062
Publication date
May 9, 2024
Micron Technology, Inc.
Amitava Majumdar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF INSPECTING LITHIUM ION SECONDARY BATTERY SEPARATOR AND ME...
Publication number
20240027330
Publication date
Jan 25, 2024
ZEON CORPORATION
Tomofumi YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PART QUALITY MONITORING IN A STEREOLITHOGRAPHIC ADDITIVE MANUFACTUR...
Publication number
20240025123
Publication date
Jan 25, 2024
Stratasys, Inc.
J. Samuel Batchelder
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
SUBSTRATE INSPECTION METHOD
Publication number
20240019380
Publication date
Jan 18, 2024
Samsung Electronics Co., Ltd.
Kihong Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METASURFACE POLARIZATION FILTERING FOR CHARACTERIZATION OF SAMPLES
Publication number
20240019358
Publication date
Jan 18, 2024
The Board of Trustees of the Leland Stanford Junior University
Jonathan A. Fan
G01 - MEASURING TESTING
Information
Patent Application
MUELLER MATRIX ELLIPSOMETER
Publication number
20240011894
Publication date
Jan 11, 2024
Government of the United States of America, as Represented by the Secretary o...
Thomas Avery Germer
G01 - MEASURING TESTING
Information
Patent Application
IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING...
Publication number
20230408401
Publication date
Dec 21, 2023
Samsung Electronics Co., Ltd.
Jaehyeon Son
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL METROLOGY WITH NUISANCE FEATURE MITIGATION
Publication number
20230402328
Publication date
Dec 14, 2023
ONTO INNOVATION INC.
Jonathan Andrew Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metrology Apparatus and a Method of Determining a Characteristic of...
Publication number
20230393490
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Arie Jeffrey DEN BOEF
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING CHARACTHERISTIC OF THIN FILM
Publication number
20230384213
Publication date
Nov 30, 2023
AUROS TECHNOLOGY, INC.
Tae Dong KANG
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR MEASUREMENT APPARATUS
Publication number
20230375463
Publication date
Nov 23, 2023
Samsung Electronics Co., Ltd.
Seoyeon JEONG
G02 - OPTICS
Information
Patent Application
SPECTROSCOPIC ELLIPSOMETRY SYSTEM FOR THIN FILM IMAGING
Publication number
20230324283
Publication date
Oct 12, 2023
Bruker Nano, Inc.
Emad Zawaideh
G01 - MEASURING TESTING
Information
Patent Application
INFRARED MEASUREMENT METHOD AND APPARATUS, COMPUTER DEVICE AND STOR...
Publication number
20230304921
Publication date
Sep 28, 2023
NANKAI UNIVERSITY
MENG-XIN REN
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING THICKNESS AND OPTICAL PROPERTIES OF MULTI-LAYE...
Publication number
20230304788
Publication date
Sep 28, 2023
HUAQIAO UNIVERSITY
Changcai Cui
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING THICKNESS AND OPTICAL CONSTANTS OF DIAMOND FILM
Publication number
20230236007
Publication date
Jul 27, 2023
HUAQIAO UNIVERSITY
Changcai Cui
G01 - MEASURING TESTING
Information
Patent Application
ANNULAR APODIZER FOR SMALL TARGET OVERLAY MEASUREMENT
Publication number
20230236113
Publication date
Jul 27, 2023
KLA Corporation
Itay GDOR
G01 - MEASURING TESTING
Information
Patent Application
IN-SITU CONTAMINATION MONITORING
Publication number
20230228672
Publication date
Jul 20, 2023
The Aerospace Corporation
Rocky G. MORALES
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Application
SINGLE ION DETECTION METHOD AND DEVICE
Publication number
20230228673
Publication date
Jul 20, 2023
Institute of mechanics, Chinese academy of sciences
Wei LIU
G01 - MEASURING TESTING
Information
Patent Application
IMAGING ASSEMBLY AND SPECTRAL IMAGING ELLIPSOMETER INCLUDING THE SAME
Publication number
20230204422
Publication date
Jun 29, 2023
Samsung Electronics Co., Ltd.
Jinwoo Ahn
G01 - MEASURING TESTING
Information
Patent Application
PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...
Publication number
20230204493
Publication date
Jun 29, 2023
Samsung Electronics Co., Ltd.
Jaehwang JUNG
G01 - MEASURING TESTING
Information
Patent Application
Fast and accurated mueller matrix infrared ellipsometer
Publication number
20230194414
Publication date
Jun 22, 2023
J. A. WOOLLAM CO., INC.
STEFAN SCHOECHE
G01 - MEASURING TESTING
Information
Patent Application
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
Publication number
20230184671
Publication date
Jun 15, 2023
J. A. WOOLLAM CO., INC.
STEFAN SCHOECHE
G01 - MEASURING TESTING
Information
Patent Application
DEVICE AND METHOD FOR MULTI-REFLECTION SOLUTION IMMERSED SILICON-BA...
Publication number
20230168185
Publication date
Jun 1, 2023
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
Hyun Mo CHO
G01 - MEASURING TESTING
Information
Patent Application
Sensor Device for Biosensing and Other Applications
Publication number
20230168184
Publication date
Jun 1, 2023
ZYVEX LABS, LLC
Gerhard Maale
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information
Patent Application
MULTIPLE REFLECTOMETRY FOR MEASURING ETCH PARAMETERS
Publication number
20230168210
Publication date
Jun 1, 2023
Applied Materials, Inc.
Blake Erickson
G01 - MEASURING TESTING
Information
Patent Application
ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCL...
Publication number
20230152213
Publication date
May 18, 2023
Samsung Electronics Co., LTD
Yasuhiro HIDAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MEASURING ELEMENT CONCENTRATION OF MATERIAL
Publication number
20230111160
Publication date
Apr 13, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
YING-CHIH WANG
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR CONCURRENT MEASUREMENTS OF INTERFEROMETRIC...
Publication number
20230098439
Publication date
Mar 30, 2023
ALLAGI INC.
Michael J. Darwin
G01 - MEASURING TESTING
Information
Patent Application
POLARIZATION IMAGING SYSTEM AND POLARIZATION IMAGING METHOD
Publication number
20230034139
Publication date
Feb 2, 2023
SONY GROUP CORPORATION
Piergiorgio SARTOR
G01 - MEASURING TESTING
Information
Patent Application
TECHNIQUES FOR CHARACTERIZING FILMS ON OPTICALLY CLEAR SUBSTRATES U...
Publication number
20230025649
Publication date
Jan 26, 2023
Meta Platforms Technologies, LLC
Gangadhara Raja MUTHINTI
G01 - MEASURING TESTING