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Patents Grants
last 30 patents
Information
Patent Grant
Material management method and system
Patent number
12,360,465
Issue date
Jul 15, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Rong-Syuan Fan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle beam inspection apparatus
Patent number
12,354,891
Issue date
Jul 8, 2025
ASML Netherlands B.V.
Jeroen Gerard Gosen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System, lithographic apparatus and method
Patent number
12,346,032
Issue date
Jul 1, 2025
ASML Netherlands B.V.
Rob Johan Theodoor Rutten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exhaust system with U-shaped pipes
Patent number
12,276,923
Issue date
Apr 15, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Fu Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
EUV light source contamination monitoring system
Patent number
12,228,863
Issue date
Feb 18, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng Hung Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Clamp assembly
Patent number
12,189,309
Issue date
Jan 7, 2025
ASML Netherlands B.V.
Ronald Van Der Wilk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Storage environment monitoring system and methods of operation
Patent number
12,174,528
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Wei Lu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,164,235
Issue date
Dec 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shao-Hua Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of bubble removal from viscous fluid
Patent number
12,083,450
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chian-Niang Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Light source apparatus, exposure apparatus, and article manufacturi...
Patent number
12,066,759
Issue date
Aug 20, 2024
Canon Kabushiki Kaisha
Hiroyuki Tomita
F21 - LIGHTING
Information
Patent Grant
Droplet generator and method of servicing a photolithographic tool
Patent number
12,055,864
Issue date
Aug 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Huan Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Exhaust system with u-shaped pipes
Patent number
11,994,809
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Fu Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle beam inspection apparatus
Patent number
11,942,340
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Jeroen Gerard Gosen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for bubble removal from viscous fluid
Patent number
11,918,938
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chian-Niang Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Apparatus for and method of reducing contamination from source mate...
Patent number
11,874,608
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Yue Ma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Immersion liquid supply and recovery device with new-type pumping a...
Patent number
11,868,052
Issue date
Jan 9, 2024
ZHEJIANG CHEER TECHNOLOGY CO., LTD.
Xin Fu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,803,129
Issue date
Oct 31, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shao-Hua Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,762,304
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Güneş Nakiboğlu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Material management method and system
Patent number
11,720,033
Issue date
Aug 8, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Rong-Syuan Fan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for generating extreme ultraviolet light and lithography...
Patent number
11,720,027
Issue date
Aug 8, 2023
Samsung Electronics Co., Ltd.
Injae Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exhaust system with u-shaped pipes
Patent number
11,681,232
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Fu Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Degassing apparatus and substrate treating apparatus
Patent number
11,673,075
Issue date
Jun 13, 2023
Semes Co., Ltd.
Dae Sung Kim
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,669,021
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
Patent number
11,579,533
Issue date
Feb 14, 2023
ASML Netherlands B.V.
Günes Nakiboglu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber device, extreme ultraviolet light generation apparatus, and...
Patent number
11,483,917
Issue date
Oct 25, 2022
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV chamber apparatus, extreme ultraviolet light generation system,...
Patent number
11,452,196
Issue date
Sep 20, 2022
Gigaphoton Inc.
Kouichiro Kouge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,450,540
Issue date
Sep 20, 2022
Semes Co., Ltd.
Donghyuk Seo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle beam inspection apparatus
Patent number
11,430,678
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Jeroen Gerard Gosen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage driving apparatus, lithography apparatus, and method of manuf...
Patent number
11,381,196
Issue date
Jul 5, 2022
Canon Kabushiki Kaisha
Takayasu Matsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus and article manufacturing method
Patent number
11,335,548
Issue date
May 17, 2022
Canon Kabushiki Kaisha
Kohei Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
AIR CONDITIONER AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
Publication number
20250216800
Publication date
Jul 3, 2025
SEMES CO., LTD.
Sang Hoon LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV LIGHT SOURCE CONTAMINATION MONITORING SYSTEM
Publication number
20250155828
Publication date
May 15, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng Hung TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20250053103
Publication date
Feb 13, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Shao-Hua WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PERFORMANCE QUALIFICATION AND ASSOCIATED APPARATUSES
Publication number
20250044707
Publication date
Feb 6, 2025
ASML NETHERLANDS B.V.
Alina Nicoleta TARAU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
Publication number
20250028256
Publication date
Jan 23, 2025
TOKYO ELECTRON LIMITED
Keiichi YAHATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXHAUST DISCHARGING DEVICE WITH TEMPERATURE CONTROL AND HEAT RETENT...
Publication number
20250004389
Publication date
Jan 2, 2025
CHYI DING TECHNOLOGIES CO., LTD.
Shih-Chia CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH RESOLUTION PHOTOLITHOGRAPHY
Publication number
20240411229
Publication date
Dec 12, 2024
TERA-PRINT LLC
Andrey IVANKIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20240411235
Publication date
Dec 12, 2024
Samsung Electronics Co., Ltd.
Dae Geun YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
Publication number
20240377727
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Wei LU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASURING DEVICE AND METHOD FOR INSPECTING PHOTOMASKS INTENDED FOR...
Publication number
20240353768
Publication date
Oct 24, 2024
Carl Zeiss SMT GMBH
Lutz Brekerbohm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF SERVICING PHOTOLITHOGRAPHIC APPARATUS
Publication number
20240345493
Publication date
Oct 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LIGHT SOURCE CONTAMINATION MONITORING SYSTEM
Publication number
20240345491
Publication date
Oct 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng Hung TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
Publication number
20240310741
Publication date
Sep 19, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Yu-Fu Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SYSTEMS, METHODS, AND DEVICES FOR THERMAL CONDITIONING OF RETICLES...
Publication number
20240295832
Publication date
Sep 5, 2024
ASML NETHERLANDS B.V.
Jean-Philippe Xavier VAN DAMME
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COOLING SYSTEM, A SEMICONDUCTOR APPARATUS INCLUDING THE SAME, AND A...
Publication number
20240263831
Publication date
Aug 8, 2024
Samsung Electronics Co., Ltd.
MOONKI KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE BEAM INSPECTION APPARATUS
Publication number
20240258138
Publication date
Aug 1, 2024
ASML NETHERLANDS B.V.
Jeroen Gerard GOSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AIR COOLING APPARATUS, ENVIRONMENTAL CONTROL APPARATUS, LITHOGRAPHY...
Publication number
20240201603
Publication date
Jun 20, 2024
Canon Kabushiki Kaisha
SHINTARO AICHI
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...
Publication number
20240118624
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Jörg Wolterink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATE...
Publication number
20240103387
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF BUBBLE REMOVAL FROM VISCOUS FLUID
Publication number
20240017190
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chian-Niang LIN
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230375947
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shao-Hua WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MATERIAL MANAGEMENT METHOD AND SYSTEM
Publication number
20230341787
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Rong-Syuan FAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
Publication number
20230333480
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Christianus Wilhelmus Johannes BERENDSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20230333487
Publication date
Oct 19, 2023
Rob Johan Theodoor RUTTEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
Publication number
20230333489
Publication date
Oct 19, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Yu-Fu Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20230288821
Publication date
Sep 14, 2023
Ushio Denki Kabushiki Kaisha
Noritaka ASHIZAWA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
GAS PURIFYING FILTER AND SUBSTRATE TREATMENT APPARATUS INCLUDING TH...
Publication number
20230285897
Publication date
Sep 14, 2023
Samsung Electronics Co., Ltd.
Mira Park
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
RESIDUAL GAS ANALYSER, AND EUV LITHOGRAPHY SYSTEM HAVING A RESIDUAL...
Publication number
20230162967
Publication date
May 25, 2023
Carl Zeiss SMT GMBH
Achim SCHOELL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL APPARATUS AND TEMPERATURE CONTROL METHOD
Publication number
20230061927
Publication date
Mar 2, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Enhao CHEN
G05 - CONTROLLING REGULATING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230046032
Publication date
Feb 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shao-Hua WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY