Environment aspects

Industry

CPC
G03F7/70858

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70858Environment aspects

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Clamp assembly
- Patent number 12,189,309
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Ronald Van Der Wilk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Storage environment monitoring system and methods of operation
- Patent number 12,174,528
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Wei Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,164,235
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of bubble removal from viscous fluid
- Patent number 12,083,450
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chian-Niang Lin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Light source apparatus, exposure apparatus, and article manufacturi...
- Patent number 12,066,759
- Issue date Aug 20, 2024
- Canon Kabushiki Kaisha
- Hiroyuki Tomita
- F21 - LIGHTING
Information Patent Grant
Droplet generator and method of servicing a photolithographic tool
- Patent number 12,055,864
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 11,994,809
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle beam inspection apparatus
- Patent number 11,942,340
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for bubble removal from viscous fluid
- Patent number 11,918,938
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chian-Niang Lin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for and method of reducing contamination from source mate...
- Patent number 11,874,608
- Issue date Jan 16, 2024
- ASML Netherlands B.V.
- Yue Ma
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Immersion liquid supply and recovery device with new-type pumping a...
- Patent number 11,868,052
- Issue date Jan 9, 2024
- ZHEJIANG CHEER TECHNOLOGY CO., LTD.
- Xin Fu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 11,803,129
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,762,304
- Issue date Sep 19, 2023
- ASML Netherlands B.V.
- Güneş Nakiboğlu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Material management method and system
- Patent number 11,720,033
- Issue date Aug 8, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Rong-Syuan Fan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for generating extreme ultraviolet light and lithography...
- Patent number 11,720,027
- Issue date Aug 8, 2023
- Samsung Electronics Co., Ltd.
- Injae Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 11,681,232
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Degassing apparatus and substrate treating apparatus
- Patent number 11,673,075
- Issue date Jun 13, 2023
- Semes Co., Ltd.
- Dae Sung Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,669,021
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
- Patent number 11,579,533
- Issue date Feb 14, 2023
- ASML Netherlands B.V.
- Günes Nakiboglu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber device, extreme ultraviolet light generation apparatus, and...
- Patent number 11,483,917
- Issue date Oct 25, 2022
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
EUV chamber apparatus, extreme ultraviolet light generation system,...
- Patent number 11,452,196
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Kouichiro Kouge
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,450,540
- Issue date Sep 20, 2022
- Semes Co., Ltd.
- Donghyuk Seo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Particle beam inspection apparatus
- Patent number 11,430,678
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage driving apparatus, lithography apparatus, and method of manuf...
- Patent number 11,381,196
- Issue date Jul 5, 2022
- Canon Kabushiki Kaisha
- Takayasu Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 11,335,548
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting unit and substrate processing apparatus including the same
- Patent number 11,320,752
- Issue date May 3, 2022
- Semes Co., Ltd.
- Jaeoh Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light source systems
- Patent number 11,304,287
- Issue date Apr 12, 2022
- Samsung Electronics Co., Ltd.
- Sunghyup Kim
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cleaning apparatus and methods of cleaning
- Patent number 11,287,753
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,275,316
- Issue date Mar 15, 2022
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet generator and method of servicing a photolithographic tool
- Patent number 11,275,317
- Issue date Mar 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXHAUST DISCHARGING DEVICE WITH TEMPERATURE CONTROL AND HEAT RETENT...
- Publication number 20250004389
- Publication date Jan 2, 2025
- CHYI DING TECHNOLOGIES CO., LTD.
- Shih-Chia CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH RESOLUTION PHOTOLITHOGRAPHY
- Publication number 20240411229
- Publication date Dec 12, 2024
- TERA-PRINT LLC
- Andrey IVANKIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240411235
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Dae Geun YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20240377727
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Wei LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASURING DEVICE AND METHOD FOR INSPECTING PHOTOMASKS INTENDED FOR...
- Publication number 20240353768
- Publication date Oct 24, 2024
- Carl Zeiss SMT GMBH
- Lutz Brekerbohm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF SERVICING PHOTOLITHOGRAPHIC APPARATUS
- Publication number 20240345493
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT SOURCE CONTAMINATION MONITORING SYSTEM
- Publication number 20240345491
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng Hung TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
- Publication number 20240310741
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Fu Lin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEMS, METHODS, AND DEVICES FOR THERMAL CONDITIONING OF RETICLES...
- Publication number 20240295832
- Publication date Sep 5, 2024
- ASML NETHERLANDS B.V.
- Jean-Philippe Xavier VAN DAMME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COOLING SYSTEM, A SEMICONDUCTOR APPARATUS INCLUDING THE SAME, AND A...
- Publication number 20240263831
- Publication date Aug 8, 2024
- Samsung Electronics Co., Ltd.
- MOONKI KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20240258138
- Publication date Aug 1, 2024
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR COOLING APPARATUS, ENVIRONMENTAL CONTROL APPARATUS, LITHOGRAPHY...
- Publication number 20240201603
- Publication date Jun 20, 2024
- Canon Kabushiki Kaisha
- SHINTARO AICHI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...
- Publication number 20240118624
- Publication date Apr 11, 2024
- ESKO-GRAPHICS IMAGING GMBH
- Jörg Wolterink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATE...
- Publication number 20240103387
- Publication date Mar 28, 2024
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF BUBBLE REMOVAL FROM VISCOUS FLUID
- Publication number 20240017190
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chian-Niang LIN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20230375947
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MATERIAL MANAGEMENT METHOD AND SYSTEM
- Publication number 20230341787
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Rong-Syuan FAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20230333480
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Christianus Wilhelmus Johannes BERENDSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20230333487
- Publication date Oct 19, 2023
- Rob Johan Theodoor RUTTEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
- Publication number 20230333489
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20230288821
- Publication date Sep 14, 2023
- Ushio Denki Kabushiki Kaisha
- Noritaka ASHIZAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS PURIFYING FILTER AND SUBSTRATE TREATMENT APPARATUS INCLUDING TH...
- Publication number 20230285897
- Publication date Sep 14, 2023
- Samsung Electronics Co., Ltd.
- Mira Park
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
RESIDUAL GAS ANALYSER, AND EUV LITHOGRAPHY SYSTEM HAVING A RESIDUAL...
- Publication number 20230162967
- Publication date May 25, 2023
- Carl Zeiss SMT GMBH
- Achim SCHOELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20230061927
- Publication date Mar 2, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Enhao CHEN
- G05 - CONTROLLING REGULATING
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20230046032
- Publication date Feb 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLAMP ASSEMBLY
- Publication number 20230008915
- Publication date Jan 12, 2023
- ASML NETHERLANDS B.V.
- Ronald Van Der Wilk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20220415678
- Publication date Dec 29, 2022
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMMERSION LIQUID SUPPLY AND RECOVERY DEVICE WITH NEW-TYPE PUMPING A...
- Publication number 20220404715
- Publication date Dec 22, 2022
- ZHEJIANG CHEER TECHNOLOGY CO., LTD.
- XIN FU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF BUBBLE REMOVAL FROM VISCOUS FLUID
- Publication number 20220379239
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chian-Niang LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20220308442
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Chen-Wei LU
- G06 - COMPUTING CALCULATING COUNTING

Environment aspects

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Clamp assembly

Storage environment monitoring system and methods of operation

Semiconductor processing tool and methods of operation

Method of bubble removal from viscous fluid

Light source apparatus, exposure apparatus, and article manufacturi...

Droplet generator and method of servicing a photolithographic tool

Exhaust system with u-shaped pipes

Particle beam inspection apparatus

Device for bubble removal from viscous fluid

Apparatus for and method of reducing contamination from source mate...

Immersion liquid supply and recovery device with new-type pumping a...

Semiconductor processing tool and methods of operation

Lithographic apparatus

Material management method and system

Apparatus for generating extreme ultraviolet light and lithography...

Exhaust system with u-shaped pipes

Degassing apparatus and substrate treating apparatus

Lithographic apparatus and device manufacturing method

Substrate holder, a lithographic apparatus and method of manufactur...

Chamber device, extreme ultraviolet light generation apparatus, and...

EUV chamber apparatus, extreme ultraviolet light generation system,...

Apparatus and method for treating substrate

Particle beam inspection apparatus

Stage driving apparatus, lithography apparatus, and method of manuf...

Exposure apparatus and article manufacturing method

Supporting unit and substrate processing apparatus including the same

Extreme ultraviolet light source systems

Cleaning apparatus and methods of cleaning

Lithographic apparatus and device manufacturing method

Droplet generator and method of servicing a photolithographic tool

Patents Applicationslast 30 patents

EXHAUST DISCHARGING DEVICE WITH TEMPERATURE CONTROL AND HEAT RETENT...

HIGH RESOLUTION PHOTOLITHOGRAPHY

SEMICONDUCTOR MANUFACTURING APPARATUS

STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION

MEASURING DEVICE AND METHOD FOR INSPECTING PHOTOMASKS INTENDED FOR...

METHODS OF SERVICING PHOTOLITHOGRAPHIC APPARATUS

EUV LIGHT SOURCE CONTAMINATION MONITORING SYSTEM

EXHAUST SYSTEM WITH U-SHAPED PIPES

SYSTEMS, METHODS, AND DEVICES FOR THERMAL CONDITIONING OF RETICLES...

COOLING SYSTEM, A SEMICONDUCTOR APPARATUS INCLUDING THE SAME, AND A...

PARTICLE BEAM INSPECTION APPARATUS

AIR COOLING APPARATUS, ENVIRONMENTAL CONTROL APPARATUS, LITHOGRAPHY...

PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...

APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATE...

METHOD OF BUBBLE REMOVAL FROM VISCOUS FLUID

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

MATERIAL MANAGEMENT METHOD AND SYSTEM

A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD

EXHAUST SYSTEM WITH U-SHAPED PIPES

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

GAS PURIFYING FILTER AND SUBSTRATE TREATMENT APPARATUS INCLUDING TH...

RESIDUAL GAS ANALYSER, AND EUV LITHOGRAPHY SYSTEM HAVING A RESIDUAL...

TEMPERATURE CONTROL APPARATUS AND TEMPERATURE CONTROL METHOD

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

CLAMP ASSEMBLY

PARTICLE BEAM INSPECTION APPARATUS

IMMERSION LIQUID SUPPLY AND RECOVERY DEVICE WITH NEW-TYPE PUMPING A...

METHOD OF BUBBLE REMOVAL FROM VISCOUS FLUID

STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION