Epitaxy

Industry

CPC
B81C2201/0177

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0177Epitaxy

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming monocrystalline nickel-titanium films on single c...
- Patent number 12,116,271
- Issue date Oct 15, 2024
- Arizona Board of Regents on behalf of Arizona State University
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a MEMS micromirror device, and associated...
- Patent number 11,294,168
- Issue date Apr 5, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a MEMS micromirror device, and associated...
- Patent number 10,768,408
- Issue date Sep 8, 2020
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a multilayer MEMS component, and corresponding...
- Patent number 10,427,937
- Issue date Oct 1, 2019
- Robert Bosch GmbH
- Arnd Kaelberer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro-nano structure antireflective coating...
- Patent number 10,274,645
- Issue date Apr 30, 2019
- Wuhan China Star Optoelectronics Technology Co., Ltd.
- Guowei Zha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Epi-poly etch stop for out of plane spacer defined electrode
- Patent number 10,173,887
- Issue date Jan 8, 2019
- Robert Bosch GmbH
- Andrew Graham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure comprising carbon material and method for...
- Patent number 10,106,398
- Issue date Oct 23, 2018
- Infineon Technologies AG
- Ulrich Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating suspended MEMS structures
- Patent number 9,656,859
- Issue date May 23, 2017
- The United States of America, as represented by the Secretary of the Navy
- David J. Meyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component, and corresponding...
- Patent number 9,593,012
- Issue date Mar 14, 2017
- Robert Bosch GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Epi-poly etch stop for out of plane spacer defined electrode
- Patent number 9,469,522
- Issue date Oct 18, 2016
- Robert Bosch GmbH
- Andrew Graham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
- Patent number 8,629,011
- Issue date Jan 14, 2014
- Robert Bosch GmbH
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device including N-type doping for providing temper...
- Patent number 8,558,643
- Issue date Oct 15, 2013
- Teknologian Tutkimuskeskus VTT
- Mika Prunnila
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing MEMS sensor and thin film thereof with im...
- Patent number 7,998,776
- Issue date Aug 16, 2011
- Memsensing Microsystems Technology Co., Ltd.
- Gang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing MEMS sensor and thin film and cantilever...
- Patent number 7,972,888
- Issue date Jul 5, 2011
- Memsensing Microsystems Technology Co., Ltd.
- Gang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a MEMS/NEMS electromechanical component
- Patent number 7,906,439
- Issue date Mar 15, 2011
- Commissarit a l'Energie Atomique
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Episeal pressure sensor
- Patent number 7,629,657
- Issue date Dec 8, 2009
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming semiconductor devices through epitaxy
- Patent number 7,122,395
- Issue date Oct 17, 2006
- Motorola, Inc.
- Bishnu Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor component having a first earlier structure differing...
- Patent number 6,972,447
- Issue date Dec 6, 2005
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Episeal pressure sensor and method for making an episeal pressure s...
- Patent number 6,928,879
- Issue date Aug 16, 2005
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing buried channels and cavities in semicondu...
- Patent number 6,376,291
- Issue date Apr 23, 2002
- STMicroelectronics S.r.l.
- Gabriele Barlocchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing integrated structures including removing a...
- Patent number 6,197,655
- Issue date Mar 6, 2001
- STMicroelectronics S.r.l.
- Pietro Montanini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing high-sensitivity accelerometric and gyros...
- Patent number 6,184,051
- Issue date Feb 6, 2001
- STMicroelectronics S.r.l.
- Paolo Ferrari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing high-sensitivity accelerometric and gyros...
- Patent number 6,109,106
- Issue date Aug 29, 2000
- STMicroelectronics S.r.l.
- Paolo Ferrari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Accelerometers using silicon on insulator technology
- Patent number 5,780,885
- Issue date Jul 14, 1998
- Commissariat a l'Energie Atomique
- Bernard Diem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for the production of accelerometers using silicon on insul...
- Patent number 5,576,250
- Issue date Nov 19, 1996
- Commissariat a l'Energie Atomique
- Bernard Diem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for making semiconductor acceleration sensor having anti-et...
- Patent number 5,395,802
- Issue date Mar 7, 1995
- Nissan Motor Co., Ltd.
- Shigeyuki Kiyota
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
- Publication number 20250030998
- Publication date Jan 23, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
- Publication number 20250019230
- Publication date Jan 16, 2025
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240208805
- Publication date Jun 27, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTO...
- Publication number 20240190702
- Publication date Jun 13, 2024
- ROBERT BOSCH GmbH
- Gregor Schuermann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20240017989
- Publication date Jan 18, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
- Publication number 20230052052
- Publication date Feb 16, 2023
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20220396476
- Publication date Dec 15, 2022
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED...
- Publication number 20200363629
- Publication date Nov 19, 2020
- STMicroelectronics S.r.l
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STR...
- Publication number 20200216307
- Publication date Jul 9, 2020
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Dan Dai
- B60 - VEHICLES IN GENERAL
Information Patent Application
METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...
- Publication number 20190016590
- Publication date Jan 17, 2019
- ROBERT BOSCH GmbH
- Arnd Kaelberer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF MICRO-NANO STRUCTURE ANTIREFLECTIVE COATING...
- Publication number 20180143352
- Publication date May 24, 2018
- Wuhan China Star Optoelectronics Technology Co., Ltd.
- Guowei ZHA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED...
- Publication number 20180031822
- Publication date Feb 1, 2018
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode
- Publication number 20170297896
- Publication date Oct 19, 2017
- ROBERT BOSCH GmbH
- Andrew Graham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating Suspended MEMS Structures
- Publication number 20160304340
- Publication date Oct 20, 2016
- THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETA...
- David J. Meyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode
- Publication number 20160137485
- Publication date May 19, 2016
- ROBERT BOSCH GmbH
- Andrew Graham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Producing a Micromechanical Component, and Corresponding...
- Publication number 20160023895
- Publication date Jan 28, 2016
- ROBERT BOSCH GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY
- Publication number 20140034465
- Publication date Feb 6, 2014
- Omron Corporation
- Takahiro Masuda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF IMPROVING THIN-FILM ENCAPSULATION FOR AN ELECTROMECHANICA...
- Publication number 20130106875
- Publication date May 2, 2013
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Rihui HE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EPITAXIAL SILICON CMOS-MEMS MICROPHONES AND METHOD FOR MANUFACTURING
- Publication number 20120319219
- Publication date Dec 20, 2012
- ROBERT BOSCH GmbH
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical device and method of designing thereof
- Publication number 20120286903
- Publication date Nov 15, 2012
- TEKNOLOGIAN TUTKIMUSKESKUS VTT
- Mika Prunnila
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY
- Publication number 20110209970
- Publication date Sep 1, 2011
- Omron Corporation
- Takahiro Masuda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS STRUCTURES
- Publication number 20100297781
- Publication date Nov 25, 2010
- ROBERT BOSCH GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT
- Publication number 20100029031
- Publication date Feb 4, 2010
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Episeal pressure sensor and method for making an episeal pressure s...
- Publication number 20050142688
- Publication date Jun 30, 2005
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Episeal pressure sensor and method for making an episeal pressure s...
- Publication number 20040163476
- Publication date Aug 26, 2004
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of forming semiconductor devices through epitaxy
- Publication number 20040121564
- Publication date Jun 24, 2004
- MOTOROLA INC.
- Bishnu Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor component and method
- Publication number 20040048430
- Publication date Mar 11, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of forming monocrystalline nickel-titanium films on single c...

Engineered substrates, free-standing semiconductor microstructures,...

Process for manufacturing a MEMS micromirror device, and associated...

Process for manufacturing a MEMS micromirror device, and associated...

Method for producing a multilayer MEMS component, and corresponding...

Manufacturing method of micro-nano structure antireflective coating...

Epi-poly etch stop for out of plane spacer defined electrode

Micromechanical structure comprising carbon material and method for...

Method for fabricating suspended MEMS structures

Method for producing a micromechanical component, and corresponding...

Epi-poly etch stop for out of plane spacer defined electrode

Epitaxial silicon CMOS-MEMS microphones and method for manufacturing

Micromechanical device including N-type doping for providing temper...

Methods for manufacturing MEMS sensor and thin film thereof with im...

Methods for manufacturing MEMS sensor and thin film and cantilever...

Method of fabricating a MEMS/NEMS electromechanical component

Episeal pressure sensor

Method of forming semiconductor devices through epitaxy

Semiconductor component having a first earlier structure differing...

Episeal pressure sensor and method for making an episeal pressure s...

Process for manufacturing buried channels and cavities in semicondu...

Method for manufacturing integrated structures including removing a...

Process for manufacturing high-sensitivity accelerometric and gyros...

Process for manufacturing high-sensitivity accelerometric and gyros...

Accelerometers using silicon on insulator technology

Process for the production of accelerometers using silicon on insul...

Process for making semiconductor acceleration sensor having anti-et...

Patents Applicationslast 30 patents

ANCHOR STRUCTURE

FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE

MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTO...

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED...

METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STR...

METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...

MANUFACTURING METHOD OF MICRO-NANO STRUCTURE ANTIREFLECTIVE COATING...

PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED...

Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode

Method for Fabricating Suspended MEMS Structures

Epi-Poly Etch Stop for Out of Plane Spacer Defined Electrode

Method for Producing a Micromechanical Component, and Corresponding...

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

METHOD OF IMPROVING THIN-FILM ENCAPSULATION FOR AN ELECTROMECHANICA...

EPITAXIAL SILICON CMOS-MEMS MICROPHONES AND METHOD FOR MANUFACTURING

Micromechanical device and method of designing thereof

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

METHOD FOR MANUFACTURING MEMS STRUCTURES

METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT

Episeal pressure sensor and method for making an episeal pressure s...

Episeal pressure sensor and method for making an episeal pressure s...

Method of forming semiconductor devices through epitaxy

Semiconductor component and method