Etch mask forming

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CPC
B81C1/00388

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00388Etch mask forming

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Patents Grantslast 30 patents

Information Patent Grant
Method for preparing micro-cavity array surface product with inclin...
- Patent number 11,655,144
- Issue date May 23, 2023
- JIANGSU UNIVERSITY
- Jian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing three-dimensionally structured member, met...
- Patent number 11,584,641
- Issue date Feb 21, 2023
- TOKYO KEIKl INC.
- Kazuaki Tani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming nano-patterns on a substrate
- Patent number 11,287,551
- Issue date Mar 29, 2022
- Agency for Science, Technology and Research
- Kwang Wei Joel Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Localized functionalization of nanotextured surfaces
- Patent number 11,247,896
- Issue date Feb 15, 2022
- UChicago Argonne, LLC
- Martyna Michalska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for a mems transducer
- Patent number 11,225,408
- Issue date Jan 18, 2022
- Infineon Technologies AG
- Andreas Wiesbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with reduced electric charge, cavity volume and stiction
- Patent number 10,988,372
- Issue date Apr 27, 2021
- Invensense, Inc.
- Dongyang Kang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,906,802
- Issue date Feb 2, 2021
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Enhanced control of shuttle mass motion in MEMS devices
- Patent number 10,858,241
- Issue date Dec 8, 2020
- Rensselaer Polytechnic Institute
- Diana-Andra Borca-Tasciuc
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a functionalised assembly guide
- Patent number 10,784,108
- Issue date Sep 22, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Guillaume Claveau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,745,270
- Issue date Aug 18, 2020
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for a MEMS transducer
- Patent number 10,589,987
- Issue date Mar 17, 2020
- Infineon Technologies AG
- Andreas Wiesbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrically conductive patterns with wide line-width and methods f...
- Patent number 10,399,851
- Issue date Sep 3, 2019
- 3M Innovative Properties Company
- Chi-fan Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polarizer, method of manufacturing the polarizer and display panel...
- Patent number 10,048,418
- Issue date Aug 14, 2018
- Samsung Display Co., Ltd.
- Sung-Won Cho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polymer-based microfabricated thermal ground plane
- Patent number 9,921,004
- Issue date Mar 20, 2018
- KELVIN THERMAL TECHNOLOGIES, INC.
- Ryan John Lewis
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wire grid polarizer and method of fabricating the same
- Patent number 9,903,991
- Issue date Feb 27, 2018
- Samsung Display Co., Ltd.
- Eun Ae Kwak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reactive ion etching
- Patent number 9,656,858
- Issue date May 23, 2017
- Atlantic Inertial Systems Limited
- Tracey Hawke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Positive microcontact printing
- Patent number 9,575,226
- Issue date Feb 21, 2017
- The Chinese University of Hong Kong
- Shih-Chi Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Out-of plane travel restriction structures
- Patent number 9,571,008
- Issue date Feb 14, 2017
- Hewlett-Packard Development Company, L.P.
- Donald J. Milligan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming pattern, and polysiloxane composition
- Patent number 9,434,609
- Issue date Sep 6, 2016
- JSR Corporation
- Satoshi Dei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs-based cantilever energy harvester
- Patent number 9,388,041
- Issue date Jul 12, 2016
- The Board of Regents of the University of Texas System
- Erika Fuentes-Fernandez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a structured surface
- Patent number 9,233,843
- Issue date Jan 12, 2016
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming method
- Patent number 9,023,222
- Issue date May 5, 2015
- Kabushiki Kaisha Toshiba
- Ayako Kawanishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs-based cantilever energy harvester
- Patent number 8,633,634
- Issue date Jan 21, 2014
- The Board of Regents of the University of Texas System
- Erika Fuentes-Fernandez
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
- Publication number 20220267144
- Publication date Aug 25, 2022
- JIANGSU UNIVERSITY
- Jian LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
- Publication number 20210198096
- Publication date Jul 1, 2021
- Rensselaer Polytechnic Institute
- Diana-Andra Borca-Tasciuc
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR A MEMS TRANSDUCER
- Publication number 20200148531
- Publication date May 14, 2020
- INFINEON TECHNOLOGIES AG
- Andreas Wiesbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20200131031
- Publication date Apr 30, 2020
- InvenSense, Inc.
- Daesung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A METHOD OF FORMING NANO-PATTERNS ON A SUBSTRATE
- Publication number 20190187337
- Publication date Jun 20, 2019
- AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCHY
- Kwang Wei Joel YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
- Publication number 20180354780
- Publication date Dec 13, 2018
- Rensselaer Polytechnic Institute
- Diana-Andra Borca-Tasciuc
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME
- Publication number 20180136382
- Publication date May 17, 2018
- SAMSUNG DISPLAY CO., LTD.
- Eun Ae KWAK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICALLY CONDUCTIVE PATTERNS WITH WIDE LINE-WIDTH AND METHODS F...
- Publication number 20170217768
- Publication date Aug 3, 2017
- 3M Innovative Properties Company
- Chi-fan CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A STRUCTURED SURFACE
- Publication number 20150140717
- Publication date May 21, 2015
- ROBERT BOSCH GmbH
- Andrea URBAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and Method for a MEMS Transducer
- Publication number 20150125003
- Publication date May 7, 2015
- INFINEON TECHNOLOGIES AG
- Andreas Wiesbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REACTIVE ION ETCHING
- Publication number 20150021745
- Publication date Jan 22, 2015
- Atlantic lnertial Systems Limited
- Tracey Hawke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD
- Publication number 20140295669
- Publication date Oct 2, 2014
- Kabushiki Kaisha Toshiba
- Ayako KAWANISHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-BASED CANTILEVER ENERGY HARVESTER
- Publication number 20140087509
- Publication date Mar 27, 2014
- Texas Micropower, Inc.
- Erika Fuentes-Fernandez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUT-OF-PLANE TRAVEL RESTRICTION STRUCTURES
- Publication number 20140042869
- Publication date Feb 13, 2014
- Donald J. Milligan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-BASED CANTILEVER ENERGY HARVESTER
- Publication number 20130140950
- Publication date Jun 6, 2013
- Texas Micropower, Inc.
- Erika Fuentes-Fernandez
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Etch mask forming

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for preparing micro-cavity array surface product with inclin...

Method for manufacturing three-dimensionally structured member, met...

Method of forming nano-patterns on a substrate

Localized functionalization of nanotextured surfaces

System and method for a mems transducer

MEMS device with reduced electric charge, cavity volume and stiction

Actuator layer patterning with topography

Enhanced control of shuttle mass motion in MEMS devices

Method for forming a functionalised assembly guide

Actuator layer patterning with topography

System and method for a MEMS transducer

Electrically conductive patterns with wide line-width and methods f...

Polarizer, method of manufacturing the polarizer and display panel...

Polymer-based microfabricated thermal ground plane

Wire grid polarizer and method of fabricating the same

Reactive ion etching

Positive microcontact printing

Out-of plane travel restriction structures

Method for forming pattern, and polysiloxane composition

MEMs-based cantilever energy harvester

Method for manufacturing a structured surface

Pattern forming method

MEMs-based cantilever energy harvester

Patents Applicationslast 30 patents

METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...

ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES

SYSTEM AND METHOD FOR A MEMS TRANSDUCER

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

A METHOD OF FORMING NANO-PATTERNS ON A SUBSTRATE

ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES

WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME

ELECTRICALLY CONDUCTIVE PATTERNS WITH WIDE LINE-WIDTH AND METHODS F...

METHOD FOR MANUFACTURING A STRUCTURED SURFACE

System and Method for a MEMS Transducer

REACTIVE ION ETCHING

PATTERN FORMING METHOD

MEMS-BASED CANTILEVER ENERGY HARVESTER

OUT-OF-PLANE TRAVEL RESTRICTION STRUCTURES

MEMS-BASED CANTILEVER ENERGY HARVESTER