Etching microareas

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CPC
H01J2237/3174

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/3174Etching microareas

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 12,198,895
- Issue date Jan 14, 2025
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced spatial/temporal overlaps to increase temporal overlaps to...
- Patent number 12,191,110
- Issue date Jan 7, 2025
- The University of Liverpool
- Nigel D Browning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam chamber fluid delivery apparatus and method and ion beam e...
- Patent number 12,176,177
- Issue date Dec 24, 2024
- Techinsights Inc.
- Christopher Pawlowicz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing lamella, analysis system and method for analyz...
- Patent number 12,176,180
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Atsushi Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 12,165,832
- Issue date Dec 10, 2024
- FEI Company
- Adam Stokes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated ion-beam alignment for dual-beam instrument
- Patent number 12,154,757
- Issue date Nov 26, 2024
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
- Patent number 12,148,593
- Issue date Nov 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas phase sample preparation for cryo-electron microscopy
- Patent number 12,130,217
- Issue date Oct 29, 2024
- Wisconsin Alumni Research Foundation
- Joshua Coon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for pre-aligning samples for more efficient pro...
- Patent number 12,106,931
- Issue date Oct 1, 2024
- FEI Company
- Michal Hrouzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of rolling k vectors of angled gratings
- Patent number 12,106,935
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 12,106,936
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
- Patent number 12,033,831
- Issue date Jul 9, 2024
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cross-section sample preparation
- Patent number 12,007,344
- Issue date Jun 11, 2024
- Fibics Incorporated
- Michael William Phaneuf
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
- Patent number RE50001
- Issue date Jun 4, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
Information Patent Grant
Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip
- Patent number 11,996,210
- Issue date May 28, 2024
- UChicago Argonne, LLC
- Jin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and structures for semiconductor device testing
- Patent number 11,982,709
- Issue date May 14, 2024
- Yangtze Memory Technologies Co., Ltd.
- Lin Qi
- G01 - MEASURING TESTING
Information Patent Grant
Analysis device, analysis method, and storage medium
- Patent number 11,977,009
- Issue date May 7, 2024
- Honda Motor Co., Ltd.
- Atsushi Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 11,972,923
- Issue date Apr 30, 2024
- FEI Company
- Christopher Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 11,955,310
- Issue date Apr 9, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 11,935,723
- Issue date Mar 19, 2024
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
- Patent number 11,923,168
- Issue date Mar 5, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of preparing and analyzing thin films
- Patent number 11,894,216
- Issue date Feb 6, 2024
- Yangtze Memory Technologies Co., Ltd.
- Jing Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Textured surfaces for breast implants
- Patent number 11,890,179
- Issue date Feb 6, 2024
- Establishment Labs S.A.
- Ardeshir Bayat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced charging by low negative voltage in FIB systems
- Patent number 11,887,810
- Issue date Jan 30, 2024
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,848,172
- Issue date Dec 19, 2023
- Carl Zeiss SMT GmbH
- Dmitry Klochkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Depositive shielding for fiducial protection from redeposition
- Patent number 11,817,395
- Issue date Nov 14, 2023
- FEI Company
- Sean Morgan-Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of material deposition
- Patent number 11,798,804
- Issue date Oct 24, 2023
- FEI Company
- Brian Roberts Routh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Writing data generating method, multi charged particle beam writing...
- Patent number 11,774,860
- Issue date Oct 3, 2023
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective shutter for charged particle microscope
- Patent number 11,749,496
- Issue date Sep 5, 2023
- FEI Company
- Philip Brundage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid metal ion source and focused ion beam apparatus
- Patent number 11,749,493
- Issue date Sep 5, 2023
- Hitachi High-Tech Science Corporation
- Yoshihiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
JIG AND SAMPLE PROCESSING METHOD
- Publication number 20250037964
- Publication date Jan 30, 2025
- KIOXIA Corporation
- Takafumi INAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-TREATMENT PROCESSES FOR ION BEAM ETCHING OF MAGNETIC TUNNEL JU...
- Publication number 20250040442
- Publication date Jan 30, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Hung-Yu CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
- Publication number 20250022680
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION
- Publication number 20250005714
- Publication date Jan 2, 2025
- FEI Company
- Matej Dolník
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...
- Publication number 20240404786
- Publication date Dec 5, 2024
- Carl Zeiss SMT GMBH
- Ivo IHRKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...
- Publication number 20240379327
- Publication date Nov 14, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20240371598
- Publication date Nov 7, 2024
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM DEVICE
- Publication number 20240355574
- Publication date Oct 24, 2024
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Koji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...
- Publication number 20240347312
- Publication date Oct 17, 2024
- CARL ZEISS MICROSCOPY GMBH
- Heiko Stegmann
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
- Publication number 20240339289
- Publication date Oct 10, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adar Sonn-Segev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...
- Publication number 20240331969
- Publication date Oct 3, 2024
- FEI Company
- Chad Rue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated Circuit with FIB-Ready Structures
- Publication number 20240321548
- Publication date Sep 26, 2024
- Nuvoton Technology Corporation
- Yuval Kirschner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
- Publication number 20240310722
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Device For Interfacing A Sample Transfer Device To An Analytic Or S...
- Publication number 20240274399
- Publication date Aug 15, 2024
- Ferrovac AG
- Urs MAIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
- Publication number 20240266142
- Publication date Aug 8, 2024
- FEI Company
- Christopher THOMPSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
- Publication number 20240258067
- Publication date Aug 1, 2024
- FEI Company
- Peter Christiaan TIEMEIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI
- Publication number 20240249910
- Publication date Jul 25, 2024
- FEI Company
- Jaroslav Stárek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...
- Publication number 20240249909
- Publication date Jul 25, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...
- Publication number 20240234086
- Publication date Jul 11, 2024
- CARL ZEISS MICROSCOPY GMBH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
- Publication number 20240234085
- Publication date Jul 11, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM LITHOGRAPHY AND NANOENGINEERING
- Publication number 20240222073
- Publication date Jul 4, 2024
- Intel Corporation
- Shida Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LINE DEPTH MEASUREMENTS BY AFM
- Publication number 20240212976
- Publication date Jun 27, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20240177966
- Publication date May 30, 2024
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MICROMACHINING A BIOLOGICAL SAMPLE FOR CREATING A LAMELL...
- Publication number 20240177967
- Publication date May 30, 2024
- FEI Company
- Matej Dolník
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
- Publication number 20240178022
- Publication date May 30, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Ofer Dudovitch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SAMPLE PREPARATON AND ANALYSIS
- Publication number 20240162001
- Publication date May 16, 2024
- FEI Company
- Michal Valík
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
- Publication number 20240136150
- Publication date Apr 25, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY
- Publication number 20240120175
- Publication date Apr 11, 2024
- CARL ZEISS MICROSCOPY GMBH
- Lorenz Lechner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERING OPERATIONAL CHARACTERISTICS OF A SEMICONDUCTOR DEVICE USIN...
- Publication number 20240105419
- Publication date Mar 28, 2024
- Intel Corporation
- Shida TAN
- H01 - BASIC ELECTRIC ELEMENTS

Etching microareas

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and device for preparing a microscopic sample from a volume...

Reduced spatial/temporal overlaps to increase temporal overlaps to...

Ion beam chamber fluid delivery apparatus and method and ion beam e...

Method for producing lamella, analysis system and method for analyz...

Systems and methods for performing sample lift-out for highly react...

Automated ion-beam alignment for dual-beam instrument

Ion beam device

Gas phase sample preparation for cryo-electron microscopy

Systems and methods for pre-aligning samples for more efficient pro...

Modulation of rolling k vectors of angled gratings

Scanned angled etching apparatus and techniques providing separate...

Analyzing a sidewall of hole milled in a sample to determine thickn...

Method for cross-section sample preparation

Method and system for cross-sectioning a sample with a preset thick...

Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip

Methods and structures for semiconductor device testing

Analysis device, analysis method, and storage medium

Systems and methods for performing sample lift-out for highly react...

Transmission charged particle microscope with an electron energy lo...

Method and device for preparing a microscopic sample from a volume...

Microscopy imaging method for 3D tomography with predictive drift t...

Method of preparing and analyzing thin films

Textured surfaces for breast implants

Reduced charging by low negative voltage in FIB systems

Method for measuring a sample and microscope implementing the method

Depositive shielding for fiducial protection from redeposition

Method of material deposition

Writing data generating method, multi charged particle beam writing...

Protective shutter for charged particle microscope

Liquid metal ion source and focused ion beam apparatus

Patents Applicationslast 30 patents

JIG AND SAMPLE PROCESSING METHOD

POST-TREATMENT PROCESSES FOR ION BEAM ETCHING OF MAGNETIC TUNNEL JU...

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...

FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION

METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...

ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...

FOCUSED ION BEAM SYSTEM

FOCUSED ION BEAM DEVICE

DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...

FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS

CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...

Integrated Circuit with FIB-Ready Structures

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

Device For Interfacing A Sample Transfer Device To An Analytic Or S...

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...

SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI

FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...

METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...

ION BEAM LITHOGRAPHY AND NANOENGINEERING

IN-LINE DEPTH MEASUREMENTS BY AFM

MICROSCOPY IMAGING METHOD AND SYSTEM

METHOD FOR MICROMACHINING A BIOLOGICAL SAMPLE FOR CREATING A LAMELL...

CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS

METHOD OF SAMPLE PREPARATON AND ANALYSIS

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...

METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY

ALTERING OPERATIONAL CHARACTERISTICS OF A SEMICONDUCTOR DEVICE USIN...