Etching processes not provided for in groups B81C1/00531 - B81C1/00539

Industry

CPC
B81C1/00547

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00547Etching processes not provided for in groups B81C1/00531 - B81C1/00539

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for ablating or roughening wafer surfaces
- Patent number 11,958,739
- Issue date Apr 16, 2024
- University of Rhode Island Board of Trustees
- Jason Rodger Dwyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of a nanochannel for DNA sequencing using electrical pl...
- Patent number 11,714,061
- Issue date Aug 1, 2023
- Seagate Technology LLC
- David S. Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 11,640,222
- Issue date May 2, 2023
- Materion Newton, Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing three-dimensionally structured member, met...
- Patent number 11,584,641
- Issue date Feb 21, 2023
- TOKYO KEIKl INC.
- Kazuaki Tani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,572,271
- Issue date Feb 7, 2023
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,535,512
- Issue date Dec 27, 2022
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 11,392,257
- Issue date Jul 19, 2022
- MATERION NEWTON INC.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-volume millimeter scale manufacturing
- Patent number 11,325,828
- Issue date May 10, 2022
- Vibrant Composites Inc.
- Pratheev S. Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film transistor and method of forming an electrode of a thin-f...
- Patent number 10,916,569
- Issue date Feb 9, 2021
- H.C. Starck Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,906,802
- Issue date Feb 2, 2021
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS strain gauge sensor and manufacturing method
- Patent number 10,775,248
- Issue date Sep 15, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Man Wong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,745,270
- Issue date Aug 18, 2020
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of a nanochannel for DNA sequencing using electrical pl...
- Patent number 10,641,726
- Issue date May 5, 2020
- Seagate Technology LLC
- David S. Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical timepiece part and said...
- Patent number 10,558,169
- Issue date Feb 11, 2020
- Nivarox-Far S.A.
- Philippe Dubois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device manufacturing method and device manufacturing apparatus
- Patent number 10,002,801
- Issue date Jun 19, 2018
- Hitachi, Ltd.
- Misuzu Sagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 9,929,187
- Issue date Mar 27, 2018
- H.C. Starck Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT device and manufacturing method
- Patent number 9,889,472
- Issue date Feb 13, 2018
- Koninklijke Philips N.V.
- Ruediger Mauczok
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress relief MEMS structure and package
- Patent number 9,850,123
- Issue date Dec 26, 2017
- MKS Instruments, Inc.
- Lei Gu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Magnet placement for integrated sensor packages
- Patent number 9,791,470
- Issue date Oct 17, 2017
- Intel Corporation
- Feras Eid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor with nested seismic masses and method for manufactu...
- Patent number 9,631,929
- Issue date Apr 25, 2017
- SAFRAN ELECTRONICS & DEFENSE
- Alain Jeanroy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress relief MEMS structure and package
- Patent number 9,499,393
- Issue date Nov 22, 2016
- MKS Instruments, Inc.
- Lei Gu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of pressure sensors into integrated circuit fabrication...
- Patent number 9,501,068
- Issue date Nov 22, 2016
- Intel Corporation
- Kyu Oh Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of pressure or inertial sensors into integrated circuit...
- Patent number 9,260,294
- Issue date Feb 16, 2016
- Intel Corporation
- Kyu Oh Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, systems and devices for forming nanochannels
- Patent number 9,139,426
- Issue date Sep 22, 2015
- The University of North Carolina at Chapel Hill
- John Michael Ramsey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Angle control of multi-cavity molded components for MEMS and NEMS g...
- Patent number 8,877,071
- Issue date Nov 4, 2014
- Metadigm LLC
- Victor B. Kley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and methods for preparing freestanding films using laser-ass...
- Patent number 8,866,240
- Issue date Oct 21, 2014
- The Aerospace Corporation
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 8,624,336
- Issue date Jan 7, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of processing substrates
- Patent number 8,486,198
- Issue date Jul 16, 2013
- Aviza Technology Limited
- Nicholas John Appleyard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for preparing freestanding films using laser-as...
- Patent number 8,368,155
- Issue date Feb 5, 2013
- The Aerospace Corporation
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 8,043,950
- Issue date Oct 25, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20220308705
- Publication date Sep 29, 2022
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20220259038
- Publication date Aug 18, 2022
- Vibrant Composites Inc.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing Three-Dimensionally Structured Member, Met...
- Publication number 20210278433
- Publication date Sep 9, 2021
- TOKYO KEIKI INC.
- Kazuaki TANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN ETCH STOP LAYER AND MEMS SENSOR COMPRIS...
- Publication number 20210214216
- Publication date Jul 15, 2021
- ams AG
- Alessandro FAES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20210208738
- Publication date Jul 8, 2021
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...
- Publication number 20210139321
- Publication date May 13, 2021
- Massachusetts Institute of Technology
- Prashant Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INERTIAL SENSOR
- Publication number 20200371130
- Publication date Nov 26, 2020
- Panasonic Intellectual Property Management Co., Ltd.
- Takahiro SHINOHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF A NANOCHANNEL FOR DNA SEQUENCING USING ELECTRICAL PL...
- Publication number 20200249195
- Publication date Aug 6, 2020
- SEAGATE TECHNOLOGY LLC
- David S. KUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20200131031
- Publication date Apr 30, 2020
- InvenSense, Inc.
- Daesung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20190256353
- Publication date Aug 22, 2019
- VIBRANT COMPOSITES, INC.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRAIN GAUGE SENSOR AND MANUFACTURING METHOD
- Publication number 20180299335
- Publication date Oct 18, 2018
- Man WONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF A NANOCHANNEL FOR DNA SEQUENCING USING ELECTRICAL PL...
- Publication number 20180217083
- Publication date Aug 2, 2018
- SEAGATE TECHNOLOGY LLC
- David S. KUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20180175075
- Publication date Jun 21, 2018
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURING APPARATUS
- Publication number 20180005906
- Publication date Jan 4, 2018
- Hitachi, Ltd
- Misuzu SAGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMUT DEVICE AND MANUFACTURING METHOD
- Publication number 20170080460
- Publication date Mar 23, 2017
- Ruediger Mauczok
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL TIMEPIECE PART AND SAID...
- Publication number 20170068215
- Publication date Mar 9, 2017
- Nivarox-Far S.A.
- Philippe DUBOIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS RELIEF MEMS STRUCTURE AND PACKAGE
- Publication number 20160229688
- Publication date Aug 11, 2016
- MKS Instruments, Inc.
- Lei Gu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION OF PRESSURE OR INERTIAL SENSORS INTO INTEGRATED CIRCUIT...
- Publication number 20150183635
- Publication date Jul 2, 2015
- Kyu Oh Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...
- Publication number 20140326702
- Publication date Nov 6, 2014
- FUJIKURA LTD.
- Osamu NUKAGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR LIGHT INDUCED ETCHING OF GLASS SUBSTRATES...
- Publication number 20140251947
- Publication date Sep 11, 2014
- QUALCOMM Incorporated
- John H. HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...
- Publication number 20130309445
- Publication date Nov 21, 2013
- THE UNIVERSITY OF TOKYO
- Osamu NUKAGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS, SYSTEMS AND DEVICES FOR FORMING NANOCHANNELS
- Publication number 20130195723
- Publication date Aug 1, 2013
- John Michael Ramsey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANGLE CONTROL OF MULTI-CAVITY MOLDED COMPONENTS FOR MEMS AND NEMS G...
- Publication number 20130098865
- Publication date Apr 25, 2013
- Metadigm LLC
- Victor B. Kley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHODS FOR PREPARING FREESTANDING FILMS USING LASER-ASS...
- Publication number 20130043486
- Publication date Feb 21, 2013
- The Aerospace Corporation
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR PREPARING FREESTANDING FILMS USING LASER-AS...
- Publication number 20120049200
- Publication date Mar 1, 2012
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20120032304
- Publication date Feb 9, 2012
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE FOR DECREASING MINIMUM FEATURE SIZE IN AN INTEGRATED CIRCUIT
- Publication number 20110115042
- Publication date May 19, 2011
- André Paul Labonté
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANGLE CONTROL OF MULTI-CAVITY MOLDED COMPONENTS FOR MEMS AND NEMS G...
- Publication number 20080254570
- Publication date Oct 16, 2008
- Metadigm LLC
- Victory B. Kley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Processing Substrates
- Publication number 20080230510
- Publication date Sep 25, 2008
- Nicholas John Appleyard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF CREATING SOLID OBJECT FROM A MATERIAL AND APPARATUS THEREOF
- Publication number 20080142475
- Publication date Jun 19, 2008
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Etching processes not provided for in groups B81C1/00531 - B81C1/00539

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for ablating or roughening wafer surfaces

Fabrication of a nanochannel for DNA sequencing using electrical pl...

Copper-alloy capping layers for metallization in touch-panel displays

Method for manufacturing three-dimensionally structured member, met...

Method for manufacturing an etch stop layer and MEMS sensor compris...

Method for manufacturing an etch stop layer and MEMS sensor compris...

Copper-alloy capping layers for metallization in touch-panel displays

High-volume millimeter scale manufacturing

Thin-film transistor and method of forming an electrode of a thin-f...

Actuator layer patterning with topography

MEMS strain gauge sensor and manufacturing method

Actuator layer patterning with topography

Fabrication of a nanochannel for DNA sequencing using electrical pl...

Method for manufacturing a micromechanical timepiece part and said...

Device manufacturing method and device manufacturing apparatus

Copper-alloy capping layers for metallization in touch-panel displays

CMUT device and manufacturing method

Stress relief MEMS structure and package

Magnet placement for integrated sensor packages

Inertial sensor with nested seismic masses and method for manufactu...

Stress relief MEMS structure and package

Integration of pressure sensors into integrated circuit fabrication...

Integration of pressure or inertial sensors into integrated circuit...

Methods, systems and devices for forming nanochannels

Angle control of multi-cavity molded components for MEMS and NEMS g...

System and methods for preparing freestanding films using laser-ass...

Semiconductor device and manufacturing method thereof

Method of processing substrates

Systems and methods for preparing freestanding films using laser-as...

Semiconductor device and manufacturing method thereof

Patents Applicationslast 30 patents

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

Method for Manufacturing Three-Dimensionally Structured Member, Met...

METHOD FOR MANUFACTURING AN ETCH STOP LAYER AND MEMS SENSOR COMPRIS...

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...

INERTIAL SENSOR

FABRICATION OF A NANOCHANNEL FOR DNA SEQUENCING USING ELECTRICAL PL...

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

MEMS STRAIN GAUGE SENSOR AND MANUFACTURING METHOD

FABRICATION OF A NANOCHANNEL FOR DNA SEQUENCING USING ELECTRICAL PL...

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURING APPARATUS

CMUT DEVICE AND MANUFACTURING METHOD

METHOD FOR MANUFACTURING A MICROMECHANICAL TIMEPIECE PART AND SAID...

STRESS RELIEF MEMS STRUCTURE AND PACKAGE

INTEGRATION OF PRESSURE OR INERTIAL SENSORS INTO INTEGRATED CIRCUIT...

METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...

METHOD AND APPARATUS FOR LIGHT INDUCED ETCHING OF GLASS SUBSTRATES...

METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...

METHODS, SYSTEMS AND DEVICES FOR FORMING NANOCHANNELS

ANGLE CONTROL OF MULTI-CAVITY MOLDED COMPONENTS FOR MEMS AND NEMS G...

SYSTEM AND METHODS FOR PREPARING FREESTANDING FILMS USING LASER-ASS...

SYSTEMS AND METHODS FOR PREPARING FREESTANDING FILMS USING LASER-AS...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

STRUCTURE FOR DECREASING MINIMUM FEATURE SIZE IN AN INTEGRATED CIRCUIT

ANGLE CONTROL OF MULTI-CAVITY MOLDED COMPONENTS FOR MEMS AND NEMS G...

Method of Processing Substrates

METHOD OF CREATING SOLID OBJECT FROM A MATERIAL AND APPARATUS THEREOF