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B81C2201/013

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/013Etching

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a microstructure
- Patent number 12,358,784
- Issue date Jul 15, 2025
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of manufa...
- Patent number 12,350,710
- Issue date Jul 8, 2025
- Vermon S.A.
- Dominique Gross
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS structures from fused silica for inertial sensors
- Patent number 12,351,451
- Issue date Jul 8, 2025
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microelectromechanical device and method for forming a c...
- Patent number 12,332,271
- Issue date Jun 17, 2025
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Embedded permeable polysilicon layer in MEMS device for multiple ca...
- Patent number 12,330,934
- Issue date Jun 17, 2025
- STMICROELECTRONICS INTERNATIONAL N.V.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor and manufacturing method thereof
- Patent number 12,313,611
- Issue date May 27, 2025
- Electronics and Telecommunications Research Institute
- Seungeon Moon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 12,297,102
- Issue date May 13, 2025
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with an etch-stop-layer
- Patent number 12,298,493
- Issue date May 13, 2025
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device
- Patent number 12,294,832
- Issue date May 6, 2025
- DENSO CORPORATION
- Yuki Ohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a micro-fluid probe
- Patent number 12,286,344
- Issue date Apr 29, 2025
- CYTOSURGE AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 12,269,061
- Issue date Apr 8, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing mirror device
- Patent number 12,264,065
- Issue date Apr 1, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding process for forming semiconductor device structure
- Patent number 12,258,265
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level microelectromechanical system structure with non-photod...
- Patent number 12,252,396
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Christopher Murray Beard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for transmission and detection of free radicals
- Patent number 12,247,920
- Issue date Mar 11, 2025
- Wisconsin Alumni Research Foundation
- J. Leon Shohet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Top notch slit profile for MEMS device
- Patent number 12,238,478
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,209,013
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor substrate, method for manufa...
- Patent number 12,187,607
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Nao Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching gaps of unequal width
- Patent number 12,187,605
- Issue date Jan 7, 2025
- Murata Manufacturing Co., Ltd.
- Petteri Kilpinen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...
- Patent number 12,172,886
- Issue date Dec 24, 2024
- UPBEAT TECHNOLOGY CO., LTD
- Hsien-Lung Ho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME
- Publication number 20250240578
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...
- Publication number 20250236507
- Publication date Jul 24, 2025
- XI'AN JIAOTONG UNIVERSITY
- Xudong FANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230037
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230038
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM
- Publication number 20250230039
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250206596
- Publication date Jun 26, 2025
- Seoul National University R&DB Foundation
- Woo Young CHOI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250197195
- Publication date Jun 19, 2025
- AAC TECHNOLOGIES PTE. LTD
- Veronica Tan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20250187907
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE
- Publication number 20250187908
- Publication date Jun 12, 2025
- AAC MICROTECH (CHANGZHOU) CO., LTD.
- Yuwei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND A...
- Publication number 20250187901
- Publication date Jun 12, 2025
- Lawrence Semiconductor Research Laboratory, Inc.
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) MIRROR COMB DRIVE
- Publication number 20250187905
- Publication date Jun 12, 2025
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20250178890
- Publication date Jun 5, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS transducer having a carrier layer and at least two piezoelectr...
- Publication number 20250171295
- Publication date May 29, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...
- Publication number 20250171298
- Publication date May 29, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PACKAGING STRUCTURE
- Publication number 20250171299
- Publication date May 29, 2025
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Audrey BERTHELOT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...
- Publication number 20250171296
- Publication date May 29, 2025
- Industry-Academic Cooperation Foundation, Yonsei University
- Jongbaeg KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...
- Publication number 20250145453
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Lorenzo CORSO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BLACK SILICON-BASED NANOPATTERNED ELECTRODES
- Publication number 20250134407
- Publication date May 1, 2025
- Ecate LLC
- Alessandro MAGGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Device Fabrication
- Publication number 20250136437
- Publication date May 1, 2025
- X-FAB Global Services GmbH
- Yves Dufour
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ultrasonic sensor and manufacturing method thereof
- Publication number 20250128288
- Publication date Apr 24, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCALE FLEXIBLE STRAIN SENSOR
- Publication number 20250122073
- Publication date Apr 17, 2025
- Carnegie Mellon University
- Jay Reddy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURES WITH GAPS
- Publication number 20250109012
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...
- Publication number 20250109015
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Jeanette LINDROOS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
- Publication number 20250093212
- Publication date Mar 20, 2025
- Centre National de la Recherche Scientifique
- Olivier BOURGEOIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
- Publication number 20250091858
- Publication date Mar 20, 2025
- INFINEON TECHNOLOGIES AG
- Theresa LUTZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME
- Publication number 20250074762
- Publication date Mar 6, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing a microstructure

Capacitive micromachined ultrasonic transducer and method of manufa...

Fabrication of MEMS structures from fused silica for inertial sensors

Capacitive microelectromechanical device and method for forming a c...

Embedded permeable polysilicon layer in MEMS device for multiple ca...

Gas sensor and manufacturing method thereof

Membrane support for dual backplate transducers

MEMS display device with an etch-stop-layer

Microelectromechanical systems device

Method of manufacturing a micro-fluid probe

Bottom electrode via structures for micromachined ultrasonic transd...

Microelectromechanical microphone with membrane trench reinforcemen...

Method for manufacturing mirror device

Bonding process for forming semiconductor device structure

Method and system for fabricating a MEMS device

Multi-level microelectromechanical system structure with non-photod...

Methods and systems for transmission and detection of free radicals

Top notch slit profile for MEMS device

Arched membrane structure for MEMS device

Method for manufacturing semiconductor substrate, method for manufa...

Optical device production method

Method for etching gaps of unequal width

Microelectromechanical system and process of making it

Method and system for fabricating a MEMS device

Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

Anti-stiction process for MEMS device

CMUT transducer with motion-stopping structure and CMUT transducer...

Multiple layer electrode transducers

Pressure sensor with high stability

Patents Applicationslast 30 patents

MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME

ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM

NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE

MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND A...

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) MIRROR COMB DRIVE

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

MEMS transducer having a carrier layer and at least two piezoelectr...

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...

METHOD FOR MANUFACTURING A PACKAGING STRUCTURE

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...

BLACK SILICON-BASED NANOPATTERNED ELECTRODES

Membrane Device Fabrication

Ultrasonic sensor and manufacturing method thereof

MICROSCALE FLEXIBLE STRAIN SENSOR

MEMS STRUCTURES WITH GAPS

MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...

SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME