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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/013
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing a microelectromechanical structure and mic...
Patent number
11,975,964
Issue date
May 7, 2024
ROBE IT BOSCH GMBH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system device containing a bump stopper an...
Patent number
11,970,387
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chun-wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
Patent number
11,965,797
Issue date
Apr 23, 2024
Wuxi Sencoch Semiconductor Co., Ltd.
Tongqing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for ablating or roughening wafer surfaces
Patent number
11,958,739
Issue date
Apr 16, 2024
University of Rhode Island Board of Trustees
Jason Rodger Dwyer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
Patent number
11,953,674
Issue date
Apr 9, 2024
Texas Instruments Incorporated
Jose A. Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
Patent number
11,952,268
Issue date
Apr 9, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device production method
Patent number
11,953,675
Issue date
Apr 9, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-device structures with etch holes
Patent number
11,952,266
Issue date
Apr 9, 2024
X-CELEPRINT LIMITED
Pierluigi Rubino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic device
Patent number
11,944,965
Issue date
Apr 2, 2024
Imec VZW
Giuseppe Fiorentino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated digital force sensors and related methods of manufacture
Patent number
11,946,817
Issue date
Apr 2, 2024
DecaWave, Ltd.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
Patent number
11,946,822
Issue date
Apr 2, 2024
Sciosense B.V.
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
Patent number
11,939,216
Issue date
Mar 26, 2024
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
Patent number
11,932,534
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor with dimple features and improved out-of-plane stiction
Patent number
11,919,769
Issue date
Mar 5, 2024
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for scanning MEMS cantilevers
Patent number
11,912,566
Issue date
Feb 27, 2024
Magic Leap, Inc.
Steven Alexander-Boyd Hickman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method for a micromechanical component
Patent number
11,905,166
Issue date
Feb 20, 2024
Robert Bosch GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual membrane transducer
Patent number
11,905,167
Issue date
Feb 20, 2024
Infineon Technologies AG
Wolfgang Klein
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device production method
Patent number
11,906,727
Issue date
Feb 20, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method of miniature fluid actuator
Patent number
11,905,168
Issue date
Feb 20, 2024
Microjet Technology Co., Ltd.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,890,643
Issue date
Feb 6, 2024
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
Patent number
11,878,906
Issue date
Jan 23, 2024
Sciosense B.V.
Kailash Vijayakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Chip package and manufacturing method thereof
Patent number
11,873,212
Issue date
Jan 16, 2024
Xintec Inc.
Wei-Luen Suen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for inflating micro-channels
Patent number
11,858,809
Issue date
Jan 2, 2024
Taiyuan University of Technology
Jingwei Zhao
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Micro-electro mechanical system and manufacturing method thereof
Patent number
11,851,321
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Li Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
Patent number
11,851,320
Issue date
Dec 26, 2023
The Johns Hopkins University
Gi-Dong Sim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of fabricating micro electro-mechanical systems structures
Patent number
11,845,654
Issue date
Dec 19, 2023
The University of British Columbia
Edmond Cretu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vehicle key and method of manufacturing the same
Patent number
11,845,401
Issue date
Dec 19, 2023
Hyundai Motor Company
Ji Hyun Woo
B60 - VEHICLES IN GENERAL
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
11,833,542
Issue date
Dec 5, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dielectric comb for MEMS device
Patent number
11,825,266
Issue date
Nov 21, 2023
Knowles Electronics, LLC
Mohsin Nawaz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure of micro speaker and method for forming the same
Patent number
11,818,563
Issue date
Nov 14, 2023
FORTEMEDIA, INC.
Li-Jen Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240158225
Publication date
May 16, 2024
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
Publication number
20240158224
Publication date
May 16, 2024
INFINEON TECHNOLOGIES AG
Wolfgang Klein
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
Publication number
20240120172
Publication date
Apr 11, 2024
Northwestern University
Vinayak P. Dravid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240109769
Publication date
Apr 4, 2024
XINTEC INC.
Wei-Luen SUEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
Publication number
20240109770
Publication date
Apr 4, 2024
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
Publication number
20240106357
Publication date
Mar 28, 2024
Saginomiya Seisakusho, Inc.
Noriko Shimomura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20240100565
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240092632
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MIRROR DEVICE
Publication number
20240092634
Publication date
Mar 21, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240083742
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
Publication number
20240067520
Publication date
Feb 29, 2024
INFINEON TECHNOLOGIES AG
Fabian Streb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MIRROR DEVICE
Publication number
20240059555
Publication date
Feb 22, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
Publication number
20240051819
Publication date
Feb 15, 2024
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Ping-He Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...
Publication number
20240043263
Publication date
Feb 8, 2024
STMicroelectronics S.r.l
Luca SEGHIZZI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL MICROSYSTEM
Publication number
20240034616
Publication date
Feb 1, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Laurent MOLLARD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND FORMATION METHOD THEREFOR
Publication number
20240027488
Publication date
Jan 25, 2024
SEMICONDUCTOR MANUFACTURING ELECTRONICS (SHAOXING) CORPORATION
Zhaolin ZHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
Publication number
20240017986
Publication date
Jan 18, 2024
INFINEON TECHNOLOGIES AG
Stefan Barzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
Publication number
20240017989
Publication date
Jan 18, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
Publication number
20240017988
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE ST...
Publication number
20240017990
Publication date
Jan 18, 2024
Microfabrica Inc.
Duy P. Le
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PRO...
Publication number
20240010489
Publication date
Jan 11, 2024
STMicroelectronics S.r.l.
Manuel RIANI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A Method of Manufacturing a MEMS Device
Publication number
20230416080
Publication date
Dec 28, 2023
Cytosurge AG
Edin SARAJLIC
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
Publication number
20230406692
Publication date
Dec 21, 2023
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
Publication number
20230406698
Publication date
Dec 21, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
Publication number
20230399754
Publication date
Dec 14, 2023
Entegris, Inc.
Daniela White
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER
Publication number
20230399226
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Fan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A Method of Manufacturing a Micro-Fluid Probe
Publication number
20230391613
Publication date
Dec 7, 2023
CYTOSURGE AG
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
Publication number
20230382715
Publication date
Nov 30, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Samer DAGHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230382714
Publication date
Nov 30, 2023
DB HITEK CO., LTD.
Min Hyun JUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY