Exposure Apparatus therefor

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/20Exposure Apparatus therefor

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Patents Grantslast 30 patents

Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 12,366,808
- Issue date Jul 22, 2025
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Detection apparatus, detection method, exposure apparatus and artic...
- Patent number 12,366,812
- Issue date Jul 22, 2025
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,360,451
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Chawon Koh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stabilized interfaces of inorganic radiation patterning composition...
- Patent number 12,360,454
- Issue date Jul 15, 2025
- Inpria Corporation
- Brian J. Cardineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Poly(cyanocinnamate)s for structural and optical applications
- Patent number 12,360,455
- Issue date Jul 15, 2025
- Brewer Science, Inc.
- Tony D. Flaim
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate holder and methods of use
- Patent number 12,362,218
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chi Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PAG-free positive chemically amplified resist composition and metho...
- Patent number 12,360,453
- Issue date Jul 15, 2025
- Merck Patent GmbH
- Takanori Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for selecting photolithography processes
- Patent number 12,360,460
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Ming Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Silicon-containing composition and method of producing semiconducto...
- Patent number 12,353,133
- Issue date Jul 8, 2025
- JSR Corporation
- Ryuichi Serizawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Apparatus and method for generating a relief carrier by irradiation
- Patent number 12,353,135
- Issue date Jul 8, 2025
- XSYS PREPRESS N.V.
- Bart Wattyn
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Substrate holder and method of manufacturing a substrate holder
- Patent number 12,353,139
- Issue date Jul 8, 2025
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Material for forming adhesive film, patterning process, and method...
- Patent number 12,351,742
- Issue date Jul 8, 2025
- Shin-Etsu Chemical Co., Ltd.
- Mamoru Watabe
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Flow cell coating methods
- Patent number 12,353,136
- Issue date Jul 8, 2025
- Illumina, Inc.
- Neil Brahma
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Gas laser apparatus and electronic device manufacturing method
- Patent number 12,355,204
- Issue date Jul 8, 2025
- Gigaphoton Inc.
- Keisuke Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for cell control
- Patent number 12,344,855
- Issue date Jul 1, 2025
- CELLINO BIOTECH, INC.
- Stan Wang
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Composition for forming underlayer film, resist pattern forming met...
- Patent number 12,346,026
- Issue date Jul 1, 2025
- FUJIFILM Corporation
- Toshiaki Fukuhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of making a semiconductor device
- Patent number 12,346,027
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pei-Cheng Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of critical dimension control by oxygen and nitrogen plasma...
- Patent number 12,339,579
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pei-Cheng Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heat treatment device and treatment method
- Patent number 12,341,008
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photomask including fiducial mark and method of making a photomask
- Patent number 12,339,582
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsin-Chang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum dot, curable composition comprising the same, cured layer u...
- Patent number 12,331,234
- Issue date Jun 17, 2025
- Samsung SDI Co., Ltd.
- Jonggi Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern fidelity enhancement
- Patent number 12,334,342
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Tien Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for patterning a substrate using photolithography
- Patent number 12,334,391
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Katie Lutker-Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contaminated interface mitigation in a semiconductor device
- Patent number 12,324,301
- Issue date Jun 3, 2025
- Imec VZW
- Tung Huei Ke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 12,321,100
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffractive backlight fabrication method
- Patent number 12,321,006
- Issue date Jun 3, 2025
- LEIA SPV LLC
- Thomas Hoekman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods of synthesizing a polynucleotide array using photoactivated...
- Patent number 12,319,712
- Issue date Jun 3, 2025
- Vibrant Holdings, LLC
- John J. Rajasekaran
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Treatment condition setting method, storage medium, and substrate t...
- Patent number 12,314,023
- Issue date May 27, 2025
- Tokyo Electron Limited
- Takuya Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage container storing treatment liquid for manufacturing semico...
- Patent number 12,313,976
- Issue date May 27, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflective mask blank, reflective mask, and method for manufacturin...
- Patent number 12,313,968
- Issue date May 27, 2025
- Hoya Corporation
- Masanori Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ORGANOTIN COMPOUND PHOTORESIST COMPOSITION FOR PHOTOLITHOGRAPHY PAT...
- Publication number 20250237946
- Publication date Jul 24, 2025
- Feng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID CHEMICAL, METHOD FOR PRODUCING LIQUID CHEMICAL, AND METHOD F...
- Publication number 20250237957
- Publication date Jul 24, 2025
- FUJIFILM CORPORATION
- Tetsuya KAMIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS, COMPUTER PROGRAMS AND APPARATUSES FOR TREATING AN OPTICAL...
- Publication number 20250237960
- Publication date Jul 24, 2025
- Carl Zeiss SMS Ltd.
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR DETERMINING AN ANGULAR REFLECTIVITY PROFILE
- Publication number 20250237962
- Publication date Jul 24, 2025
- ASML NETHERLANDS B.V.
- Manfred Petrus Johannes Maria DIKKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SILICON-CONTAINING SULFONIUM SALT COMPOUND, COMPOSITION FOR FORMING...
- Publication number 20250237953
- Publication date Jul 24, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takashi SAWAMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING PATTERN USING THE SAME
- Publication number 20250237945
- Publication date Jul 24, 2025
- Samsung Electronics Co., Ltd.
- Kyuhyun IM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
- Publication number 20250237956
- Publication date Jul 24, 2025
- Samsung SDI Co., Ltd.
- Yongsik YOO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MANUFACTURE OF INTEGRATED CIRUIT USING POSITIVE TONE PHOTOPATTERNAB...
- Publication number 20250231492
- Publication date Jul 17, 2025
- SUNTIFIC MATERIALS (WEIFANG), LTD.
- Sam SUN
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR GENERATING WRITING DATA, WRITING DATA GENERATION APPARAT...
- Publication number 20250232950
- Publication date Jul 17, 2025
- NuFlare Technology, Inc.
- Kenichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANOTIN OXIDE HYDROXIDE PATTERNING COMPOSITIONS, PRECURSORS, AND...
- Publication number 20250224680
- Publication date Jul 10, 2025
- INPRIA CORPORATION
- Stephen T. Meyers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COOLING DEVICE FOR COOLING A POSITION-SENSITIVE COMPONENT OF A LITH...
- Publication number 20250224681
- Publication date Jul 10, 2025
- Carl Zeiss SMT GMBH
- Matthias FETZER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION, RESIST PATTERN FORMING METHOD, AND COMPOUND
- Publication number 20250224670
- Publication date Jul 10, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Daichi TAKAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SELECTIVE DEPOSITION OF CARBON ON PHOTORESIST LAYER FOR LITHOGRAPHY...
- Publication number 20250226221
- Publication date Jul 10, 2025
- Applied Materials, Inc.
- NANCY FUNG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST AND METHOD OF FORMATION AND USE
- Publication number 20250224673
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Keng-Chu Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPECTRAL FEATURE CONTROL APPARATUS
- Publication number 20250219346
- Publication date Jul 3, 2025
- CYMER, LLC
- Jian Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIDTH ADJUSTMENT OF EUV RADIATION BEAM
- Publication number 20250216789
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-SPACER MASKING PROCESS USING RESIST LAYER WITH SOLUBILITY SHIF...
- Publication number 20250216763
- Publication date Jul 3, 2025
- TOKYO ELECTRON LIMITED
- Phillip D. Hustad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRESS LAYER MODIFICATION USING ENERGETIC BEAM PROCESSING THROUGH P...
- Publication number 20250216786
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Morgan EVANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BUBBLE DEFECT REDUCTION
- Publication number 20250216788
- Publication date Jul 3, 2025
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID EJECTION METHOD, LIQUID EJECTION APPARATUS, IMPRINT METHOD,...
- Publication number 20250214335
- Publication date Jul 3, 2025
- Canon Kabushiki Kaisha
- HIROAKI FURUKAWA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
- Publication number 20250208511
- Publication date Jun 26, 2025
- Shin-Etsu Chemical Co., Ltd.
- Naoki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV LIGHT SOURCE, EUV LITHOGRAPHY APPARATUS, AND METHOD FOR GENERAT...
- Publication number 20250208513
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Kyungwan YOO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM-FORMING COMPOSITION, METHOD FOR PRODUCING CURED FILM, CAGE-TYP...
- Publication number 20250208507
- Publication date Jun 26, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Keiichi Ibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IMAGING A MASK LAYER WITH TWO IMAGING SETTINGS AND ASSOC...
- Publication number 20250208514
- Publication date Jun 26, 2025
- XSYS PREPRESS N.V.
- Dirk Ludo Julien DE RAUW
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20250210405
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250208516
- Publication date Jun 26, 2025
- Gigaphoton Inc.
- Yousuke FUJIMAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL PULSE STRETCHER APPARATUS
- Publication number 20250208404
- Publication date Jun 26, 2025
- CYMER, LLC
- Thao Trieu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
- Publication number 20250208506
- Publication date Jun 26, 2025
- Shin-Etsu Chemical Co., Ltd.
- Naoki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO- AND NANO-FLUIDIC CHIP, METHOD OF FABRICATING THE SAME, AND A...
- Publication number 20250196140
- Publication date Jun 19, 2025
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Hui Yang
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20250199408
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Tse LAI
- H01 - BASIC ELECTRIC ELEMENTS

Exposure Apparatus therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate holder, lithographic apparatus, device manufacturing meth...

Detection apparatus, detection method, exposure apparatus and artic...

Method of manufacturing semiconductor device

Stabilized interfaces of inorganic radiation patterning composition...

Poly(cyanocinnamate)s for structural and optical applications

Substrate holder and methods of use

PAG-free positive chemically amplified resist composition and metho...

System and method for selecting photolithography processes

Silicon-containing composition and method of producing semiconducto...

Apparatus and method for generating a relief carrier by irradiation

Substrate holder and method of manufacturing a substrate holder

Material for forming adhesive film, patterning process, and method...

Flow cell coating methods

Gas laser apparatus and electronic device manufacturing method

Systems for cell control

Composition for forming underlayer film, resist pattern forming met...

Methods of making a semiconductor device

Method of critical dimension control by oxygen and nitrogen plasma...

Heat treatment device and treatment method

Photomask including fiducial mark and method of making a photomask

Quantum dot, curable composition comprising the same, cured layer u...

Pattern fidelity enhancement

Method for patterning a substrate using photolithography

Contaminated interface mitigation in a semiconductor device

Semiconductor lithography system and/or method

Diffractive backlight fabrication method

Methods of synthesizing a polynucleotide array using photoactivated...

Treatment condition setting method, storage medium, and substrate t...

Storage container storing treatment liquid for manufacturing semico...

Reflective mask blank, reflective mask, and method for manufacturin...

Patents Applicationslast 30 patents

ORGANOTIN COMPOUND PHOTORESIST COMPOSITION FOR PHOTOLITHOGRAPHY PAT...

LIQUID CHEMICAL, METHOD FOR PRODUCING LIQUID CHEMICAL, AND METHOD F...

METHODS, COMPUTER PROGRAMS AND APPARATUSES FOR TREATING AN OPTICAL...

APPARATUS AND METHOD FOR DETERMINING AN ANGULAR REFLECTIVITY PROFILE

SILICON-CONTAINING SULFONIUM SALT COMPOUND, COMPOSITION FOR FORMING...

RESIST COMPOSITION AND METHOD OF FORMING PATTERN USING THE SAME

HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS

MANUFACTURE OF INTEGRATED CIRUIT USING POSITIVE TONE PHOTOPATTERNAB...

METHOD FOR GENERATING WRITING DATA, WRITING DATA GENERATION APPARAT...

ORGANOTIN OXIDE HYDROXIDE PATTERNING COMPOSITIONS, PRECURSORS, AND...

COOLING DEVICE FOR COOLING A POSITION-SENSITIVE COMPONENT OF A LITH...

RESIST COMPOSITION, RESIST PATTERN FORMING METHOD, AND COMPOUND

SELECTIVE DEPOSITION OF CARBON ON PHOTORESIST LAYER FOR LITHOGRAPHY...

PHOTORESIST AND METHOD OF FORMATION AND USE

SPECTRAL FEATURE CONTROL APPARATUS

WIDTH ADJUSTMENT OF EUV RADIATION BEAM

ANTI-SPACER MASKING PROCESS USING RESIST LAYER WITH SOLUBILITY SHIF...

STRESS LAYER MODIFICATION USING ENERGETIC BEAM PROCESSING THROUGH P...

BUBBLE DEFECT REDUCTION

LIQUID EJECTION METHOD, LIQUID EJECTION APPARATUS, IMPRINT METHOD,...

Compound For Forming Metal-Containing Film, Composition For Forming...

EUV LIGHT SOURCE, EUV LITHOGRAPHY APPARATUS, AND METHOD FOR GENERAT...

FILM-FORMING COMPOSITION, METHOD FOR PRODUCING CURED FILM, CAGE-TYP...

METHOD FOR IMAGING A MASK LAYER WITH TWO IMAGING SETTINGS AND ASSOC...

SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

OPTICAL PULSE STRETCHER APPARATUS

Compound For Forming Metal-Containing Film, Composition For Forming...

MICRO- AND NANO-FLUIDIC CHIP, METHOD OF FABRICATING THE SAME, AND A...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE