Exposure Apparatus therefor

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G03F7/20

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/20Exposure Apparatus therefor

Industries

Patents Grantslast 30 patents

Information Patent Grant
Diffractive backlight fabrication method
- Patent number 12,321,006
- Issue date Jun 3, 2025
- LEIA SPV LLC
- Thomas Hoekman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 12,321,100
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contaminated interface mitigation in a semiconductor device
- Patent number 12,324,301
- Issue date Jun 3, 2025
- Imec VZW
- Tung Huei Ke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of synthesizing a polynucleotide array using photoactivated...
- Patent number 12,319,712
- Issue date Jun 3, 2025
- Vibrant Holdings, LLC
- John J. Rajasekaran
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Treatment condition setting method, storage medium, and substrate t...
- Patent number 12,314,023
- Issue date May 27, 2025
- Tokyo Electron Limited
- Takuya Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage container storing treatment liquid for manufacturing semico...
- Patent number 12,313,976
- Issue date May 27, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflective mask blank, reflective mask, and method for manufacturin...
- Patent number 12,313,968
- Issue date May 27, 2025
- Hoya Corporation
- Masanori Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographically patterned electrically conductive hydrogels, photo...
- Patent number 12,313,969
- Issue date May 27, 2025
- The Board of Trustees of the Leland Stanford Junior University
- Jia Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photopolymerizable relief precursor having adjustable surface prope...
- Patent number 12,313,970
- Issue date May 27, 2025
- XSYS Germany GmbH
- Matthias Beyer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two-dimensional (2D) patterns using multiple exposures of one-dimen...
- Patent number 12,306,540
- Issue date May 20, 2025
- Google LLC
- Lu Tian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
UV LED radiation sources for use in photopolymer exposure
- Patent number 12,304,190
- Issue date May 20, 2025
- Esko-Graphics Imaging GmbH
- Klaus Walter Arlt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro- and nano-fluidic chip, method of fabricating the same, and a...
- Patent number 12,303,897
- Issue date May 20, 2025
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Hui Yang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Treatment liquid and pattern forming method
- Patent number 12,306,538
- Issue date May 20, 2025
- FUJIFILM Corporation
- Hideaki Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical device manufacturing method and manufacturing apparatus usi...
- Patent number 12,306,533
- Issue date May 20, 2025
- NTT Electronics Corporation
- Yoshinori Hibino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light irradiation device, and exposure apparatus provided therewith
- Patent number 12,298,627
- Issue date May 13, 2025
- Phoenix Electric Co., Ltd.
- Tomohiko Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography
- Patent number 12,298,667
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Meng-Che Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow cells and methods for making the same
- Patent number 12,298,665
- Issue date May 13, 2025
- Illumina, Inc.
- Sahngki Hong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Width adjustment of EUV radiation beam
- Patent number 12,292,687
- Issue date May 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Herringbone microstructure surface pattern for flexographic printin...
- Patent number 12,292,688
- Issue date May 6, 2025
- Esko Software BV
- Wolfgang Sievers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 12,292,686
- Issue date May 6, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adhesion layer for multi-layer photoresist
- Patent number 12,292,684
- Issue date May 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Yu Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fabrication of large area 3D photonic crys...
- Patent number 12,287,571
- Issue date Apr 29, 2025
- Steven R.J. Brueck
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Systems for fabricating appliances from polymerizable compositions
- Patent number 12,286,493
- Issue date Apr 29, 2025
- Align Technology, Inc.
- Michael Christopher Cole
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Lithography system and methods
- Patent number 12,287,572
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng Hung Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist and method of formation and use
- Patent number 12,287,575
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Keng-Chu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic device and method for manufacturing target substrate
- Patent number 12,287,577
- Issue date Apr 29, 2025
- Innolux Corporation
- Chien-Hsing Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Selective deposition of carbon on photoresist layer for lithography...
- Patent number 12,283,484
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Nancy Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photosensitive resin composition
- Patent number 12,282,253
- Issue date Apr 22, 2025
- JSR Corporation
- Kimiyuki Kanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for controlling extreme ultraviolet light
- Patent number 12,282,262
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas laser apparatus and electronic device manufacturing method
- Patent number 12,283,786
- Issue date Apr 22, 2025
- Gigaphoton Inc.
- Daisuke Tei
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250183610
- Publication date Jun 5, 2025
- Gigaphoton Inc.
- Yuki KAWASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPMENT FOR CHEMICALLY AMPLIFIED RESISTS
- Publication number 20250180995
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- NASRIN KAZEM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
UV LED RADIATION SOURCES FOR USE IN PHOTOPOLYMER EXPOSURE
- Publication number 20250178334
- Publication date Jun 5, 2025
- ESKO-GRAPHICS IMAGING GMBH
- Klaus Walter Arlt
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
METHOD, SYSTEM AND ELECTRONIC APPARATUS FOR MASK FEATURE OPTIMIZATION
- Publication number 20250180980
- Publication date Jun 5, 2025
- Wuhan Yuwei Optical Software Co., Ltd.
- Haiqing Wei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Using and Fabricating a Nanoimprint Template with a Mesa...
- Publication number 20250180985
- Publication date Jun 5, 2025
- Canon Kabushiki Kaisha
- Teresa Perez Estrada
- B82 - NANO-TECHNOLOGY
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250180933
- Publication date Jun 5, 2025
- Gigaphoton Inc.
- Seiji NOGIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING A SUBSTRATE AND METHOD OF FABRICATING BIT LINE...
- Publication number 20250185235
- Publication date Jun 5, 2025
- NANYA TECHNOLOGY CORPORATION
- CHIH-YING TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STATUS MONITORING AND REPORTING FOR ULTRAVIOLET LIGHT SOURCES
- Publication number 20250172886
- Publication date May 29, 2025
- CYMER, LLC
- Spencer Ryan Williams
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION
- Publication number 20250172878
- Publication date May 29, 2025
- ASML NETHERLANDS B.V.
- Johan REININK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROPATTERNING METHOD, MICROPATTERNING APPARATUS AND MICROPATTERNI...
- Publication number 20250164885
- Publication date May 22, 2025
- Seoul National University R&DB Foundation
- Seung Hwan KO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE INSPECTION METHOD, EXTREME ULTRAVIOLET (EUV...
- Publication number 20250164872
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Jiho PARK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER BOW COMPENSATION BY PATTERNED UV CURE
- Publication number 20250166991
- Publication date May 22, 2025
- LAM RESEARCH CORPORATION
- Tong LEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION-SENSITIVE COMPOSITION AND PATTERN FORMING METHOD
- Publication number 20250164883
- Publication date May 22, 2025
- JSR Corporation
- Motohiro SHIRATANI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
TIN COMPOUND, TIN COMPOSITION, PRODUCING METHODS THEREOF, RESIST SO...
- Publication number 20250155798
- Publication date May 15, 2025
- MITSUBISHI CHEMICAL CORPORATION
- Yuta Hioki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20250155817
- Publication date May 15, 2025
- SEMES CO., LTD.
- Ki Sang EUM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FABRICATION OF DENTAL APPLIANCES FROM PHASE-SEPARATED COMPOSITIONS
- Publication number 20250154307
- Publication date May 15, 2025
- Align Technology, Inc.
- Michael Christopher Cole
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
POLYPEPTIDE, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND METHOD...
- Publication number 20250155807
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Jinha KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
- Publication number 20250155808
- Publication date May 15, 2025
- ZEON CORPORATION
- Makoto FUJIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST COMPOSITION
- Publication number 20250155804
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Min-Hung TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
- Publication number 20250155805
- Publication date May 15, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Issei SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOSENSITIVE POLYMER, PHOTORESIST COMPOSITION INCLUDING THE SAME,...
- Publication number 20250155810
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Jiyup KIM
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PHOTORESIST COMPOSITION
- Publication number 20250147416
- Publication date May 8, 2025
- POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION
- Myung-Gil KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
- Publication number 20250147417
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRC...
- Publication number 20250149336
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Yonghoon MOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...
- Publication number 20250147431
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shinn-Sheng YU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LINE NARROWING DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250149847
- Publication date May 8, 2025
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING MASTER, METHOD FOR MANUFACTURING TRANSFERR...
- Publication number 20250147422
- Publication date May 8, 2025
- Dexerials Corporation
- Masanao KIKUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PRINTING PLATE IMAGING AND EXPOSURE APPARATUS AND METHOD
- Publication number 20250144928
- Publication date May 8, 2025
- ESKO-GRAPHICS IMAGING GMBH
- Wolfgang Sievers
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
RESIST COMPOSITIONS, METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICE...
- Publication number 20250138416
- Publication date May 1, 2025
- Inha University Research and Business Foundation
- JIN-KYUN LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING A SUBSTRATE IN ONE PR...
- Publication number 20250138439
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- YOUNG HO HWANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Exposure Apparatus therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Diffractive backlight fabrication method

Semiconductor lithography system and/or method

Contaminated interface mitigation in a semiconductor device

Methods of synthesizing a polynucleotide array using photoactivated...

Treatment condition setting method, storage medium, and substrate t...

Storage container storing treatment liquid for manufacturing semico...

Reflective mask blank, reflective mask, and method for manufacturin...

Lithographically patterned electrically conductive hydrogels, photo...

Photopolymerizable relief precursor having adjustable surface prope...

Two-dimensional (2D) patterns using multiple exposures of one-dimen...

UV LED radiation sources for use in photopolymer exposure

Micro- and nano-fluidic chip, method of fabricating the same, and a...

Treatment liquid and pattern forming method

Optical device manufacturing method and manufacturing apparatus usi...

Light irradiation device, and exposure apparatus provided therewith

Lithography

Flow cells and methods for making the same

Width adjustment of EUV radiation beam

Herringbone microstructure surface pattern for flexographic printin...

Semiconductor structure and manufacturing method thereof

Adhesion layer for multi-layer photoresist

Method and apparatus for fabrication of large area 3D photonic crys...

Systems for fabricating appliances from polymerizable compositions

Lithography system and methods

Photoresist and method of formation and use

Electronic device and method for manufacturing target substrate

Selective deposition of carbon on photoresist layer for lithography...

Photosensitive resin composition

Method for controlling extreme ultraviolet light

Gas laser apparatus and electronic device manufacturing method

Patents Applicationslast 30 patents

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

DEVELOPMENT FOR CHEMICALLY AMPLIFIED RESISTS

UV LED RADIATION SOURCES FOR USE IN PHOTOPOLYMER EXPOSURE

METHOD, SYSTEM AND ELECTRONIC APPARATUS FOR MASK FEATURE OPTIMIZATION

Method of Using and Fabricating a Nanoimprint Template with a Mesa...

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

METHOD OF PROCESSING A SUBSTRATE AND METHOD OF FABRICATING BIT LINE...

STATUS MONITORING AND REPORTING FOR ULTRAVIOLET LIGHT SOURCES

APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION

MICROPATTERNING METHOD, MICROPATTERNING APPARATUS AND MICROPATTERNI...

SEMICONDUCTOR STRUCTURE INSPECTION METHOD, EXTREME ULTRAVIOLET (EUV...

WAFER BOW COMPENSATION BY PATTERNED UV CURE

RADIATION-SENSITIVE COMPOSITION AND PATTERN FORMING METHOD

TIN COMPOUND, TIN COMPOSITION, PRODUCING METHODS THEREOF, RESIST SO...

SUBSTRATE TREATING APPARATUS

FABRICATION OF DENTAL APPLIANCES FROM PHASE-SEPARATED COMPOSITIONS

POLYPEPTIDE, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND METHOD...

RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

PHOTORESIST COMPOSITION

RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN

PHOTOSENSITIVE POLYMER, PHOTORESIST COMPOSITION INCLUDING THE SAME,...

PHOTORESIST COMPOSITION

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...

PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRC...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...

LINE NARROWING DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

METHOD FOR MANUFACTURING MASTER, METHOD FOR MANUFACTURING TRANSFERR...

PRINTING PLATE IMAGING AND EXPOSURE APPARATUS AND METHOD

RESIST COMPOSITIONS, METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICE...

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING A SUBSTRATE IN ONE PR...