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PHYSICS
G03
Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
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Patents Grants
last 30 patents
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Patent Grant
Digital exposure machine and exposure control method thereof
Patent number
11,971,662
Issue date
Apr 30, 2024
BOE Technology Group Co., Ltd.
Zhichong Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sequential infiltration synthesis apparatus
Patent number
11,970,766
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Ivo Johannes Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ablation layer, photosensitive resin structure, method for producin...
Patent number
11,971,658
Issue date
Apr 30, 2024
Asahi Kasei Kabushiki Kaisha
Norikiyo Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist composition and method of manufacturing a semiconductor...
Patent number
11,966,162
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tzu-Yang Lin
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with low...
Patent number
11,966,158
Issue date
Apr 23, 2024
Inpria Corporation
Benjamin L. Clark
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation-sensitive resin composition and method for forming pattern
Patent number
11,966,160
Issue date
Apr 23, 2024
JSR Corporation
Ryuichi Nemoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic printing plate precursors and method of use
Patent number
11,964,466
Issue date
Apr 23, 2024
Eastman Kodak Company
Oliver Merka
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Imaging optical system, exposure apparatus, and article manufacturi...
Patent number
11,966,043
Issue date
Apr 23, 2024
Canon Kabushiki Kaisha
Michio Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Task completion in a tracking device environment
Patent number
11,968,321
Issue date
Apr 23, 2024
Tile, Inc.
Felipe Knorr Kuhn
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Organometallic solution based high resolution patterning compositions
Patent number
11,966,159
Issue date
Apr 23, 2024
Inpria Corporation
Stephen T. Meyers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask for imprinting and manufacturing method therefor
Patent number
11,966,163
Issue date
Apr 23, 2024
LG Chem, Ltd.
Yong Goo Son
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of critical dimension control by oxygen and nitrogen plasma...
Patent number
11,960,201
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist composition, coated substrate including the photoresist...
Patent number
11,960,206
Issue date
Apr 16, 2024
Rohm and Hass Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
Patent number
11,960,213
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Electronic-sensing and magnetic-modulation (ESMM) biosensor for pha...
Patent number
11,951,476
Issue date
Apr 9, 2024
Rutgers, The State University of New Jersey
Umer Hassan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Molecular resist composition and patterning process
Patent number
11,953,827
Issue date
Apr 9, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actinic ray-sensitive or radiation-sensitive resin composition, res...
Patent number
11,953,829
Issue date
Apr 9, 2024
FUJIFILM Corporation
Kazunari Yagi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Two-stage bake photoresist with releasable quencher
Patent number
11,955,343
Issue date
Apr 9, 2024
Intel Corporation
Robert L. Bristol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of making a picoscopic scale/ nanoscopic scale circuit pattern
Patent number
11,953,828
Issue date
Apr 9, 2024
LONGSERVING TECHNOLOGY CO., LTD
Ko-Cheng Fang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist composition and pattern forming process
Patent number
11,953,832
Issue date
Apr 9, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Compound, substrate for pattern formation, photodegradable coupling...
Patent number
11,953,833
Issue date
Apr 9, 2024
Nikon Corporation
Yusuke Kawakami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of mask data synthesis and mask making
Patent number
11,947,254
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsu-Ting Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for making photolithography mask plate
Patent number
11,947,255
Issue date
Apr 2, 2024
Tsinghua University
Mo Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to determine a patterning process parameter
Patent number
11,947,269
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Anagnostis Tsiatmas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for making photolithography mask plate
Patent number
11,947,261
Issue date
Apr 2, 2024
Tsinghua University
Mo Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist compositions and pattern formation methods
Patent number
11,940,730
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Mitsuru Haga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask protective module, pellicle having the same, and lithography a...
Patent number
11,940,726
Issue date
Mar 26, 2024
Industry-University Cooperation Foundation Hanyang University
Jinho Ahn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating compositions and methods of forming electronic devices
Patent number
11,940,732
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Sheng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Treatment device and treatment method
Patent number
11,940,733
Issue date
Mar 26, 2024
FUJIFILM Corporation
Seiji Tajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist topcoat compositions and methods of processing photores...
Patent number
11,940,731
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Irvinder Kaur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND COMPOSITION
Publication number
20240142876
Publication date
May 2, 2024
JSR Corporation
Hiroyuki MIYAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM LITHOGRAPHY APPARATUS, ELECTRON BEAM LITHOGRAPHY METH...
Publication number
20240145212
Publication date
May 2, 2024
NIPPON CONTROL SYSTEM CORPORATION
Masakazu HAMAJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS AND MEASUREMENT SYSTEM
Publication number
20240142877
Publication date
May 2, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HALOGEN-AND ALIPHATIC-CONTAINING ORGANOTIN PHOTORESISTS AND METHODS...
Publication number
20240134274
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Polymer, Chemically Amplified Positive Resist Composition, Resist P...
Publication number
20240134280
Publication date
Apr 25, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INKJET HEAD, METHOD FOR PRODUCING SAME, METHOD FOR PRODUCING SEMICO...
Publication number
20240131841
Publication date
Apr 25, 2024
YAMAGATA UNIVERSITY
Shinri SAKAI
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
EUV-INDUCED CONDENSATION OF POLYSILOXANE SOL-GEL THIN FILM
Publication number
20240134281
Publication date
Apr 25, 2024
Brewer Science, Inc.
Daniel Patrick Sweat
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTUR...
Publication number
20240134283
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Niek Willem KLEIN KOERKAMP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLYMER, RESIST COMPOSITION INCLUDING THE SAME, AND METHOD OF FORMI...
Publication number
20240124635
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Minsang KIM
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
ULTRAVIOLET LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240128701
Publication date
Apr 18, 2024
Gigaphoton Inc.
Atsushi FUCHIMUKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF
Publication number
20240126161
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Sungwoo JANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PHOTORESIST COMP...
Publication number
20240126170
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Chih HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ONIUM SALT TYPE MONOMER, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPO...
Publication number
20240126168
Publication date
Apr 18, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLEXOGRAPHIC PRINTING PLATE PRECURSOR AND MANUFACTURING METHOD OF F...
Publication number
20240126173
Publication date
Apr 18, 2024
FUJIFILM CORPORATION
Kazuki WATANABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY
Publication number
20240126174
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Meng-Che Tu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...
Publication number
20240118624
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Jörg Wolterink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD
Publication number
20240118619
Publication date
Apr 11, 2024
Tokyo Ohka Kogyo Co., Ltd.
Keiichi Ibata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240118607
Publication date
Apr 11, 2024
SEMES CO.,LTD
Hyun YOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTIPLE PATTERNING WITH ORGANOMETALLIC PHOTOPATTERNABLE LAYERS WIT...
Publication number
20240118614
Publication date
Apr 11, 2024
INPRIA CORPORATION
Peter de Schepper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Polymer, Resist Composition, And Patterning Process
Publication number
20240118617
Publication date
Apr 11, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS AND APPARATUS FOR FEEDING A FLEXOGRAPHIC PRINTING PLATE PRO...
Publication number
20240118623
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Thomas Klein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD, APPARATUS AND COMPUTER PROGRAM FOR PROCESSING A SURFACE OF...
Publication number
20240118632
Publication date
Apr 11, 2024
Carl Zeiss SMT GMBH
Stefan Friedrich Rohrlack
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20240118615
Publication date
Apr 11, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND WIRING PATTERN FORMING METHOD
Publication number
20240118622
Publication date
Apr 11, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
Publication number
20240120232
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOVEL INTERFACE DEFINITION FOR LITHOGRAPHIC APPARATUS
Publication number
20240111214
Publication date
Apr 4, 2024
ASML NETHERLANDS B.V.
Jacob Fredrik Friso KLINKHAMER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
Publication number
20240112933
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Jeonghee Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIN, COMPOSITION, RESIST PATTERN FORMATION METHOD, CIRCUIT PATTER...
Publication number
20240109997
Publication date
Apr 4, 2024
Mitsubishi Gas Chemical Company, Inc.
Junya HORIUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL METASTRUCTURES HAVING META-ATOMS COMPOSED OF A HIGH REFRACT...
Publication number
20240111076
Publication date
Apr 4, 2024
NILT Switzerland GmbH
Maksim Zalkovskij
G02 - OPTICS
Information
Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
Publication number
20240112912
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Hsiung LIU
H01 - BASIC ELECTRIC ELEMENTS