Exposure without an original mask

Industry

CPC
G03F7/2051

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/2051Exposure without an original mask

Industries

Patents Grantslast 30 patents

Information Patent Grant
Digital exposure machine and exposure control method thereof
- Patent number 11,971,662
- Issue date Apr 30, 2024
- BOE Technology Group Co., Ltd.
- Zhichong Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Manufacturing method for cured substance, manufacturing method for...
- Patent number 11,934,102
- Issue date Mar 19, 2024
- FUJIFILM Corporation
- Atsuyasu Nozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maskless based lithography methods
- Patent number 11,934,107
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Shih-Hsien Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,886,123
- Issue date Jan 30, 2024
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Grant
Grating structure, manufacturing method thereof and display device
- Patent number 11,828,959
- Issue date Nov 28, 2023
- BOE Technology Group Co., Ltd.
- Wusheng Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Digital masking system, pattern imaging apparatus and digital maski...
- Patent number 11,747,732
- Issue date Sep 5, 2023
- Jabil Inc.
- Scott Klimczak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for illuminating image points
- Patent number 11,681,228
- Issue date Jun 20, 2023
- EV Group E. Thallner GmbH
- Bernhard Thallner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Maskless photolithography devices, methods, and systems
- Patent number 11,567,411
- Issue date Jan 31, 2023
- NANOPATH, INC.
- Kevin Donahue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for variable etch depths
- Patent number 11,456,205
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid masks for microfabrication processes
- Patent number 11,415,877
- Issue date Aug 16, 2022
- Northwestern University
- Chad A. Mirkin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension correction via calibrated trim dosing
- Patent number 11,360,388
- Issue date Jun 14, 2022
- Tokyo Electron Limited
- Anton deVilliers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,269,258
- Issue date Mar 8, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Light irradiating device, light irradiating method and recording me...
- Patent number 11,256,172
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of enclosed nanochannels using silica nanoparticles
- Patent number 10,976,299
- Issue date Apr 13, 2021
- UNM Rainforest Innovations
- Steven R. J. Brueck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Circuit pattern forming sheet, circuit pattern manufacturing appara...
- Patent number 10,962,882
- Issue date Mar 30, 2021
- KANTATSU CO., LTD.
- Eiji Oshima
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing pattern for electronic devices, and fiber-...
- Patent number 10,915,024
- Issue date Feb 9, 2021
- Korea Institute of Science and Technology
- Sunbin Hwang
- B32 - LAYERED PRODUCTS
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,884,340
- Issue date Jan 5, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and device for exposure of photosensitive layer
- Patent number 10,852,528
- Issue date Dec 1, 2020
- EV Group E. Thallner GmbH
- Bernhard Thallner
- G02 - OPTICS
Information Patent Grant
LM guide assembling method using half division and computer-readabl...
- Patent number 10,851,833
- Issue date Dec 1, 2020
- Gisu Kim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,747,118
- Issue date Aug 18, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for manufacturing array substrate and method for manufacturi...
- Patent number 10,712,665
- Issue date Jul 14, 2020
- Beijing BOE Optoelectronics Technology Co., Ltd
- Xiaojuan Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Creating rewritable lenses
- Patent number 10,698,231
- Issue date Jun 30, 2020
- Indizen Optical Technologies of America, LLC
- Juan Antonio Quiroga
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Maskless exposure method, maskless exposure apparatus and method of...
- Patent number 10,670,968
- Issue date Jun 2, 2020
- Samsung Electronics Co., Ltd.
- Sang-Min Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for printing on three-dimensional obj...
- Patent number 10,551,744
- Issue date Feb 4, 2020
- Massachusetts Institute of Technology
- Anastasios John Hart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,539,880
- Issue date Jan 21, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Critical dimension control by use of a photo agent
- Patent number 10,522,428
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Anton J. deVilliers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line edge roughness reduction via step size alteration
- Patent number 10,495,975
- Issue date Dec 3, 2019
- Applied Materials, Inc.
- Thomas L. Laidig
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems, devices, and methods for printing on three-dimensional obj...
- Patent number 10,345,703
- Issue date Jul 9, 2019
- Massachusetts Institute of Technology
- Anastasios John Hart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating mask pattern and exposure system
- Patent number 10,324,371
- Issue date Jun 18, 2019
- BOE Technology Group Co., Ltd.
- Tailiang Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line edge roughness reduction via step size alteration
- Patent number 10,289,003
- Issue date May 14, 2019
- Applied Materials, Inc.
- Thomas L. Laidig
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR DIGITAL LITHOGRAPHY SCAN SEQUENCING
- Publication number 20250076767
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Ulrich Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL LITHOGRAPHY APPARATUS WITH AUTOFOCUS POSITION CONTROL AND M...
- Publication number 20250076768
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Zhongchuan Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASKLESS PHOTOLITHOGRAPHY PROCESS FOR THE SYNTHESIS OF METALLIC NAN...
- Publication number 20250068086
- Publication date Feb 27, 2025
- QATAR FOUNDATION FOR EDUCATION, SCIENCE AND COMMUNITY DEVELOPMENT
- Hicham Hamoudi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRUCTURE COMPRISING MICROCHANNEL, PRODUCTION METHOD FOR SAID STRUC...
- Publication number 20240408595
- Publication date Dec 12, 2024
- Asahi Kasei Kabushiki Kaisha
- Yuzo KOTANI
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20240248407
- Publication date Jul 25, 2024
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
MASKLESS BASED LITHOGRAPHY METHODS
- Publication number 20240077805
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Shih-Hsien LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASKLESS EXPOSURE DEVICE AND DISPLAY DEVICE
- Publication number 20240036471
- Publication date Feb 1, 2024
- SAMSUNG DISPLAY CO., LTD.
- Sang Hyun YUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi Pattern Maskless Lithography Method and System
- Publication number 20230400776
- Publication date Dec 14, 2023
- ORBOTECH LTD.
- Uri Gold
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MANUFACTURING METHOD FOR CURED SUBSTANCE, MANUFACTURING METHOD FOR...
- Publication number 20230350305
- Publication date Nov 2, 2023
- FUJIFILM CORPORATION
- Atsuyasu NOZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TOOL DRIFT COMPENSATION WITH MACHINE LEARNING
- Publication number 20230296987
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- YenShuo LIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOG...
- Publication number 20230288812
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Chi-Ming TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESISTS CONTAINING TANTALUM
- Publication number 20230288798
- Publication date Sep 14, 2023
- LAM RESEARCH CORPORATION
- Eric Calvin Hansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS
- Publication number 20230168588
- Publication date Jun 1, 2023
- NanoPath, Inc.
- Kevin Donahue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR PHOTOPATTERNING AND MINIATURIZATION
- Publication number 20230084088
- Publication date Mar 16, 2023
- DUKE UNIVERSITY
- Xin Song
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20220197150
- Publication date Jun 23, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
CIRCUIT PATTERN FORMING SHEET, CIRCUIT PATTERN MANUFACTURING APPARA...
- Publication number 20220019147
- Publication date Jan 20, 2022
- Kantatsu Co., Ltd.
- Eiji OSHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR VARIABLE ETCH DEPTHS
- Publication number 20210351069
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Morgan Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZATION OF PARAMETERS FOR EXPOSING FLE...
- Publication number 20210318620
- Publication date Oct 14, 2021
- ESKO-GRAPHICS IMAGING GMBH
- Jörg Wolterink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR ILLUMINATING IMAGE POINTS
- Publication number 20210247697
- Publication date Aug 12, 2021
- EV GROUP E. THALLNER GMBH
- Bernhard Thallner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPMENT METHOD AND TREATMENT METHOD FOR PATTERNING METAL LAYER
- Publication number 20210223695
- Publication date Jul 22, 2021
- WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Tianhua YI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL EXPOSURE MACHINE AND EXPOSURE CONTROL METHOD THEREOF
- Publication number 20210132501
- Publication date May 6, 2021
- BOE TECHNOLOGY GROUP CO., LTD.
- Zhichong Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20210124273
- Publication date Apr 29, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
LIGHT IRRADIATING DEVICE, LIGHT IRRADIATING METHOD AND RECORDING ME...
- Publication number 20200409269
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL MASKING SYSTEM, PATTERN IMAGING APPARATUS AND DIGITAL MASKI...
- Publication number 20200401048
- Publication date Dec 24, 2020
- Jabil Inc.
- Scott Klimczak
- G02 - OPTICS
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200379356
- Publication date Dec 3, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
Digital Projection System for the Development of Photolithography D...
- Publication number 20200247038
- Publication date Aug 6, 2020
- Jesse Aaron Roll
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMAGE EXPOSURE DEVICE
- Publication number 20200201188
- Publication date Jun 25, 2020
- FUJIFILM CORPORATION
- Yoshihisa USAMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photoactive Catalyst Compositions
- Publication number 20200183276
- Publication date Jun 11, 2020
- California Institute of Technology
- RAYMOND A. WEITEKAMP
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200166850
- Publication date May 28, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING ARRAY SUBSTRATE AND METHOD FOR MANUFACTURI...
- Publication number 20200124969
- Publication date Apr 23, 2020
- BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Xiaojuan WU
- H01 - BASIC ELECTRIC ELEMENTS

Exposure without an original mask

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Digital exposure machine and exposure control method thereof

Manufacturing method for cured substance, manufacturing method for...

Maskless based lithography methods

Method and system for nanoscale data recording

Grating structure, manufacturing method thereof and display device

Digital masking system, pattern imaging apparatus and digital maski...

Method and apparatus for illuminating image points

Maskless photolithography devices, methods, and systems

Methods for variable etch depths

Liquid masks for microfabrication processes

Critical dimension correction via calibrated trim dosing

Method and system for nanoscale data recording

Light irradiating device, light irradiating method and recording me...

Fabrication of enclosed nanochannels using silica nanoparticles

Circuit pattern forming sheet, circuit pattern manufacturing appara...

Method for manufacturing pattern for electronic devices, and fiber-...

Method and system for nanoscale data recording

Method and device for exposure of photosensitive layer

LM guide assembling method using half division and computer-readabl...

Method and system for nanoscale data recording

Method for manufacturing array substrate and method for manufacturi...

Creating rewritable lenses

Maskless exposure method, maskless exposure apparatus and method of...

Systems, devices, and methods for printing on three-dimensional obj...

Method and system for nanoscale data recording

Critical dimension control by use of a photo agent

Line edge roughness reduction via step size alteration

Systems, devices, and methods for printing on three-dimensional obj...

System and method for generating mask pattern and exposure system

Line edge roughness reduction via step size alteration

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR DIGITAL LITHOGRAPHY SCAN SEQUENCING

DIGITAL LITHOGRAPHY APPARATUS WITH AUTOFOCUS POSITION CONTROL AND M...

MASKLESS PHOTOLITHOGRAPHY PROCESS FOR THE SYNTHESIS OF METALLIC NAN...

STRUCTURE COMPRISING MICROCHANNEL, PRODUCTION METHOD FOR SAID STRUC...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

MASKLESS BASED LITHOGRAPHY METHODS

MASKLESS EXPOSURE DEVICE AND DISPLAY DEVICE

Multi Pattern Maskless Lithography Method and System

MANUFACTURING METHOD FOR CURED SUBSTANCE, MANUFACTURING METHOD FOR...

TOOL DRIFT COMPENSATION WITH MACHINE LEARNING

METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOG...

PHOTORESISTS CONTAINING TANTALUM

MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS

METHODS AND SYSTEMS FOR PHOTOPATTERNING AND MINIATURIZATION

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

CIRCUIT PATTERN FORMING SHEET, CIRCUIT PATTERN MANUFACTURING APPARA...

METHODS FOR VARIABLE ETCH DEPTHS

SYSTEMS AND METHODS FOR OPTIMIZATION OF PARAMETERS FOR EXPOSING FLE...

METHOD AND APPARATUS FOR ILLUMINATING IMAGE POINTS

DEVELOPMENT METHOD AND TREATMENT METHOD FOR PATTERNING METAL LAYER

DIGITAL EXPOSURE MACHINE AND EXPOSURE CONTROL METHOD THEREOF

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

LIGHT IRRADIATING DEVICE, LIGHT IRRADIATING METHOD AND RECORDING ME...

DIGITAL MASKING SYSTEM, PATTERN IMAGING APPARATUS AND DIGITAL MASKI...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

Digital Projection System for the Development of Photolithography D...

IMAGE EXPOSURE DEVICE

Photoactive Catalyst Compositions

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD FOR MANUFACTURING ARRAY SUBSTRATE AND METHOD FOR MANUFACTURI...