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Feed and outlet means for the gases Modifying the flow of the gases
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CPC
C30B31/16
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Parent Industries
C
CHEMISTRY METALLURGY
C30
Crystal growth
C30B
SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D...
C30B31/00
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor
Current Industry
C30B31/16
Feed and outlet means for the gases Modifying the flow of the gases
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Patents Grants
last 30 patents
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Patent Grant
System based on low-pressure chemical vapor deposition for fabricat...
Patent number
10,975,498
Issue date
Apr 13, 2021
OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
Yabing Qi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition method
Patent number
10,858,736
Issue date
Dec 8, 2020
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Yi Chuang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Inject insert for EPI chamber
Patent number
10,760,161
Issue date
Sep 1, 2020
Applied Materials, Inc.
Shu-Kwan Lau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas supply pipe, and gas treatment equipment
Patent number
10,364,498
Issue date
Jul 30, 2019
Kabushiki Kaisha Toshiba
Takahiro Terada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate treating apparatus
Patent number
10,208,401
Issue date
Feb 19, 2019
Samsung Electronics Co., Ltd.
Keum Seok Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method
Patent number
9,945,048
Issue date
Apr 17, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Sen-Hong Syue
C30 - CRYSTAL GROWTH
Information
Patent Grant
Atomic layer deposition apparatus and method
Patent number
9,512,519
Issue date
Dec 6, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Yi Chuang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device for doping, deposition or oxidation of semiconductor materia...
Patent number
8,460,468
Issue date
Jun 11, 2013
Centrotherm Photovoltaics AG
Alexander Piechulla
C30 - CRYSTAL GROWTH
Information
Patent Grant
Thermal processing furnace, gas delivery system therefor, and metho...
Patent number
7,910,494
Issue date
Mar 22, 2011
Tokyo Electron Limited
Anthony Dip
C30 - CRYSTAL GROWTH
Information
Patent Grant
Diffusion system
Patent number
7,452,423
Issue date
Nov 18, 2008
Samsung Electronics Co., Ltd.
Jun-young Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conductor treating single-wafer type treating device and method for...
Patent number
7,235,137
Issue date
Jun 26, 2007
Tokyo Electron Limited
Hirofumi Kitayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of fast ambient switching for rapid thermal proce...
Patent number
6,753,506
Issue date
Jun 22, 2004
Axcelis Technologies
Yong Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for positioning gas injectors in a vertical fu...
Patent number
6,435,865
Issue date
Aug 20, 2002
Taiwan Semiconductor Manufacturing Co., Ltd
Heng-Yi Tseng
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of producing thin films using current of process gas and ine...
Patent number
6,413,884
Issue date
Jul 2, 2002
NEC Corporation
Tsuyoshi Moriyama
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for purging a furnace and furnace assembly
Patent number
6,413,081
Issue date
Jul 2, 2002
Pieter Johannes Quintus Van Voorst Vader
C30 - CRYSTAL GROWTH
Information
Patent Grant
Semiconductor device manufacturing apparatus and semiconductor devi...
Patent number
6,391,116
Issue date
May 21, 2002
NEC Corporation
Tsuyoshi Moriyama
C30 - CRYSTAL GROWTH
Information
Patent Grant
Semiconductor device manufacturing apparatus and semiconductor devi...
Patent number
6,348,417
Issue date
Feb 19, 2002
NEC Corporation
Tsuyoshi Moriyama
C30 - CRYSTAL GROWTH
Information
Patent Grant
Drafting apparatus
Patent number
6,308,738
Issue date
Oct 30, 2001
United Microelectronics Corp.
Tien-Jui Liu
C30 - CRYSTAL GROWTH
Information
Patent Grant
Vented lower liner for heating exhaust gas from a single substrate...
Patent number
6,254,686
Issue date
Jul 3, 2001
Applied Materials, Inc.
Paul B. Comita
C30 - CRYSTAL GROWTH
Information
Patent Grant
Thermal processor and components thereof
Patent number
6,191,388
Issue date
Feb 20, 2001
Semitool, Inc.
Mark P. Cleaver
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for heating exhaust gas in a substrate reactor
Patent number
6,153,260
Issue date
Nov 28, 2000
Applied Materials, Inc.
Paul B. Comita
C30 - CRYSTAL GROWTH
Information
Patent Grant
Drafting apparatus
Patent number
6,109,915
Issue date
Aug 29, 2000
United Microelectronics Corp.
Tien-Jui Liu
C30 - CRYSTAL GROWTH
Information
Patent Grant
Multi-zone gas flow control in a process chamber
Patent number
6,090,210
Issue date
Jul 18, 2000
Applied Materials, Inc.
David S. Ballance
C30 - CRYSTAL GROWTH
Information
Patent Grant
Apparatus and method for the in-situ generation of dopants
Patent number
6,001,172
Issue date
Dec 14, 1999
Advanced Technology Materials, Inc.
Gautam Bhandari
C30 - CRYSTAL GROWTH
Information
Patent Grant
Conical baffle for semiconductor furnaces
Patent number
5,961,725
Issue date
Oct 5, 1999
Taiwan Semiconductor Manufacturing Company, Ltd.
Ying-Lang Wang
C30 - CRYSTAL GROWTH
Information
Patent Grant
Process tube with in-situ gas preheating
Patent number
5,948,300
Issue date
Sep 7, 1999
Kokusai BTI Corporation
Lawrence R. Gero
C30 - CRYSTAL GROWTH
Information
Patent Grant
Diffusion furnace used for semiconductor device manufacturing process
Patent number
5,902,102
Issue date
May 11, 1999
Samsung Electronics Co., Ltd.
Ki-hum Nam
C30 - CRYSTAL GROWTH
Information
Patent Grant
Vertical furnace of a semiconductor manufacturing apparatus and a b...
Patent number
5,902,103
Issue date
May 11, 1999
Kokusai Electric Co., Ltd.
Kiyohiko Maeda
C30 - CRYSTAL GROWTH
Information
Patent Grant
Diffusion furnace system for preventing gas leakage
Patent number
5,883,919
Issue date
Mar 16, 1999
Vanguard International Semiconductor Corporation
Cheng-Chang Hung
C30 - CRYSTAL GROWTH
Information
Patent Grant
Effluent-gas-scavenger system for process tube, minimizing back dif...
Patent number
5,860,805
Issue date
Jan 19, 1999
Lansense, LLC
Donald G. Landis
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20180266017
Publication date
Sep 20, 2018
Samsung Electronics Co., Ltd.
KEUM SEOK PARK
C30 - CRYSTAL GROWTH
Information
Patent Application
SYSTEM AND METHOD BASED ON LOW-PRESSURE CHEMICAL VAPOR DEPOSITION F...
Publication number
20170268128
Publication date
Sep 21, 2017
OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
Yabing QI
C30 - CRYSTAL GROWTH
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD
Publication number
20140154414
Publication date
Jun 5, 2014
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Chia-Yi CHUANG
C30 - CRYSTAL GROWTH
Information
Patent Application
DEVICE FOR DOPING, DEPOSITION OR OXIDATION OF SEMICONDUCTOR MATERIA...
Publication number
20130025539
Publication date
Jan 31, 2013
Centrotherm Photovoltaics AG
Alexander PIECHULLA
C30 - CRYSTAL GROWTH
Information
Patent Application
Gas supply system and gas supply accumulation unit of semiconductor...
Publication number
20080295963
Publication date
Dec 4, 2008
TOKYO ELECTRON LIMITED
Shuji Moriya
C30 - CRYSTAL GROWTH
Information
Patent Application
DEVICE FOR DOPING, DEPOSITION OR OXIDATION OF SEMICONDUCTOR MATERIA...
Publication number
20080292430
Publication date
Nov 27, 2008
Centrotherm Photovoltaics AG
Alexander PIECHULLA
C30 - CRYSTAL GROWTH
Information
Patent Application
Selective Doping of a Material
Publication number
20080038524
Publication date
Feb 14, 2008
Beneq Oy
Markku Rajala
C30 - CRYSTAL GROWTH
Information
Patent Application
THERMAL PROCESSING FURNACE, GAS DELIVERY SYSTEM THEREFOR, AND METHO...
Publication number
20070231757
Publication date
Oct 4, 2007
TOKYO ELECTRON LIMITED
Anthony Dip
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for Doping Material and Doped Material
Publication number
20070218290
Publication date
Sep 20, 2007
Beneq Oy
Markku Rajala
C30 - CRYSTAL GROWTH
Information
Patent Application
Diffusion system
Publication number
20050092244
Publication date
May 5, 2005
Samsung Electronics Co., Ltd.
Jun-young Kim
C30 - CRYSTAL GROWTH
Information
Patent Application
Conductor treating single-wafer type treating device and method for...
Publication number
20040097088
Publication date
May 20, 2004
Hirofumi Kitayama
C30 - CRYSTAL GROWTH
Information
Patent Application
System and method of fast ambient switching for rapid thermal proce...
Publication number
20030038127
Publication date
Feb 27, 2003
Yong Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for producing thin films
Publication number
20020124800
Publication date
Sep 12, 2002
NEC Corporation
Tsuyoshi Moriyama
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD OF PRODUCING THIN FILMS USING CURRENT OF PROCESS GAS AND INE...
Publication number
20020048860
Publication date
Apr 25, 2002
TSUYOSHI MORIYAMA
C30 - CRYSTAL GROWTH
Information
Patent Application
HEATING INSTALLATION FOR A REACTOR
Publication number
20020002951
Publication date
Jan 10, 2002
VLADIMIR IVANOVICH KUZNETSOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVI...
Publication number
20010050052
Publication date
Dec 13, 2001
TSUYOSHI MORIYAMA
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for purging a furnace and furnace assembly
Publication number
20010016306
Publication date
Aug 23, 2001
Pieter Johannes Quintus Van Voorst Vader
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...