Feed and outlet means for the gases Modifying the flow of the reactive gases

Industry

CPC
C30B25/14

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Parent Industries

CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

Current Industry

C30B25/14Feed and outlet means for the gases Modifying the flow of the reactive gases

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vapor phase epitaxy method
- Patent number 11,955,334
- Issue date Apr 9, 2024
- Azur Space Solar Power GmbH
- Gregor Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing nitride semiconductor device
- Patent number 11,935,744
- Issue date Mar 19, 2024
- Sumitomo Electric Industries, Ltd.
- Isao Makabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure spatial chemical vapor deposition system and related...
- Patent number 11,885,018
- Issue date Jan 30, 2024
- Lehigh University
- Siddha Pimputkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single crystalline metal foil and manufacturing method therefor
- Patent number 11,879,183
- Issue date Jan 23, 2024
- Institute for Basic Science
- Rodney S. Ruoff
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Manufacturing apparatus for a group-III nitride crystal comprising...
- Patent number 11,879,184
- Issue date Jan 23, 2024
- Panasonic Holdings Corporation
- Yusuke Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase epitaxy method
- Patent number 11,859,310
- Issue date Jan 2, 2024
- Azur Space Solar Power GmbH
- Clemens Waechter
- C30 - CRYSTAL GROWTH
Information Patent Grant
Modular reactor for microwave plasma-assisted deposition
- Patent number 11,859,279
- Issue date Jan 2, 2024
- DIAM CONCEPT
- Alix Gicquel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and aggregates comprising boron nitride nanotube struc...
- Patent number 11,851,326
- Issue date Dec 26, 2023
- BNNano, Inc.
- Jason Edward Taylor
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of producing a two-dimensional material
- Patent number 11,848,206
- Issue date Dec 19, 2023
- Paragraf Ltd.
- Simon Charles Stewart Thomas
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
ALD method with multi-chambers for sic or multi-elements epitaxial...
- Patent number 11,834,754
- Issue date Dec 5, 2023
- SiEn (QingDao) Integrated Circuits Co., Ltd
- Zhaosheng Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase reactor system-with a reaction chamber, a solid precursor...
- Patent number 11,814,747
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon-containing product forming apparatus
- Patent number 11,795,543
- Issue date Oct 24, 2023
- Kabushiki Kaisha Toshiba
- Kenya Uchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 11,781,221
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
- Patent number 11,784,026
- Issue date Oct 10, 2023
- Samsung Electronics Co., Ltd.
- Woongsik Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber
- Patent number 11,773,505
- Issue date Oct 3, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Gang Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate by oscillating a boundary layer o...
- Patent number 11,761,080
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Tsung-Han Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for applying a carbon layer to a substrate comprising introd...
- Patent number 11,746,415
- Issue date Sep 5, 2023
- CARBONCOMPETENCE GMBH
- Doris Steinmuller-Nethl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth apparatus and vapor phase growth method
- Patent number 11,749,525
- Issue date Sep 5, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Active cleaning vacuum system and method
- Patent number 11,739,439
- Issue date Aug 29, 2023
- Linton Crystal Technologies Corp.
- Richard D. Webb
- C30 - CRYSTAL GROWTH
Information Patent Grant
Concentric flow reactor
- Patent number 11,702,761
- Issue date Jul 18, 2023
- AlignedBio AB
- Greg Alcott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC chemical vapor deposition apparatus
- Patent number 11,692,266
- Issue date Jul 4, 2023
- Showa Denko K.K.
- Yoshikazu Umeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,680,318
- Issue date Jun 20, 2023
- Edwards Semiconductor Solutions LLC
- Egbert Woelk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of utilizing a degassing chamber to reduce arsenic outgassin...
- Patent number 11,649,559
- Issue date May 16, 2023
- Applied Materials, Inc.
- Xinyu Bao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Half-angle nozzle
- Patent number 11,634,813
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus including horizontal flow reactor with a central injector...
- Patent number 11,618,968
- Issue date Apr 4, 2023
- AKOUSTIS, INC.
- Craig Moe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma oxidation chamber
- Patent number 11,615,944
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Christopher S. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing 2D materials by moving forming layers dispose...
- Patent number 11,542,632
- Issue date Jan 3, 2023
- General Graphene Corp.
- James Vig Sherrill
- C30 - CRYSTAL GROWTH
Information Patent Grant
Adjustable fluid inlet assembly for a substrate processing apparatu...
- Patent number 11,505,864
- Issue date Nov 22, 2022
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor-liquid reaction device, reaction tube, film forming apparatus
- Patent number 11,499,247
- Issue date Nov 15, 2022
- National University Corporation Tokyo University of Agriculture and Technology
- Akinori Koukitu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of feeding gases into a reactor to grow epitaxial structures...
- Patent number 11,492,726
- Issue date Nov 8, 2022
- Vsevolod Vladimirovich Lundin
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING AN ATMOSPHERIC EPITAXIAL D...
- Publication number 20240141483
- Publication date May 2, 2024
- Applied Materials, Inc.
- Thomas ACKERMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI OVERLAPPING DISK AND RING
- Publication number 20240141487
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF A LAYER OF PEROVSKITE ON A S...
- Publication number 20240117524
- Publication date Apr 11, 2024
- Consiglio Nazionale Delle Ricerche
- Alessandra ALBERTI
- C30 - CRYSTAL GROWTH
Information Patent Application
GAS INLET ASSEMBLY OF PROCESS CHAMBER, GAS INLET DEVICE, AND SEMICO...
- Publication number 20240117522
- Publication date Apr 11, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shikai LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING GALLIUM PRECURSOR AND METHOD FOR PRODUCING LAM...
- Publication number 20240102159
- Publication date Mar 28, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240060211
- Publication date Feb 22, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240034635
- Publication date Feb 1, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240026566
- Publication date Jan 25, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR WAFER MANUFACTURING APPARATUS
- Publication number 20240018687
- Publication date Jan 18, 2024
- DENSO CORPORATION
- Hiroaki FUJIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU EPI GROWTH RATE CONTROL OF CRYSTAL THICKNESS USING PARAMETR...
- Publication number 20240018659
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
- Publication number 20240018658
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240018688
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...
- Publication number 20240011189
- Publication date Jan 11, 2024
- ASM IP HOLDING B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Application
CHEMICAL SOURCE VESSEL WITH DIP TUBE
- Publication number 20230407480
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE METAL-ORGANIC MOLECULAR BEAM EPITAXY FOR DEPOSITION OF...
- Publication number 20230407520
- Publication date Dec 21, 2023
- Regents of the University of Minnesota
- Bharat Jalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATING APPARATUS OF SIC EPITAXIAL WAFER AND FABRICATION METHOD...
- Publication number 20230374698
- Publication date Nov 23, 2023
- ROHM CO., LTD.
- Makoto TAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPI SELF-HEATING SENSOR TUBE AS IN-SITU GROWTH RATE SENSOR
- Publication number 20230375460
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reaction Device for Improving Epitaxial Growth Uniformity
- Publication number 20230332328
- Publication date Oct 19, 2023
- Shanghai Huali Integrated Circuit Corporation
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CVD DEPOSITION OF N-TYPE DOPED SILICON CARBIDE AND EPITA...
- Publication number 20230313410
- Publication date Oct 5, 2023
- LPE S.P.A.
- Silvio Preti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD
- Publication number 20230313411
- Publication date Oct 5, 2023
- NuFlare Technology, Inc.
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING A LAYER OF SEMICONDUCTOR MATERI...
- Publication number 20230287569
- Publication date Sep 14, 2023
- Siltronic AG
- Hannes HECHT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE SINGLE CRYSTAL AND MANUFACTURING METHOD OF SILICON...
- Publication number 20230279580
- Publication date Sep 7, 2023
- DENSO CORPORATION
- Akiyoshi HORIAI
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING HEXAGONAL CRYSTALS
- Publication number 20230272549
- Publication date Aug 31, 2023
- LNBS Co, Ltd.
- Hyung Soo AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH SYSTEM AND METHOD OF PRODUCING EPITAXIAL WAFER
- Publication number 20230265580
- Publication date Aug 24, 2023
- Epicrew Corporation
- Akira Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR MANUFACTURING A SEMICONDUCTOR WAFER USING A PREHEAT RIN...
- Publication number 20230243065
- Publication date Aug 3, 2023
- GLOBALWAFERS CO., LTD.
- Chieh Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING LOW...
- Publication number 20230235459
- Publication date Jul 27, 2023
- Akoustis, Inc.
- Craig Moe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING LOW...
- Publication number 20230212781
- Publication date Jul 6, 2023
- Akoustis, Inc.
- Craig Moe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METALORGANIC CHEMICAL VAPOR PHASE EPITAXY OR VAPOR PHASE DEPOSITION...
- Publication number 20230212787
- Publication date Jul 6, 2023
- AZUR SPACE SOLAR POWER GMBH
- Clemens WAECHTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION DEVICE AND METHOD OF PRODUCING EPITAXIAL WAFER
- Publication number 20230203705
- Publication date Jun 29, 2023
- Epicrew Corporation
- Akira Okabe
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL REACTOR SYSTEMS AND METHODS OF USING SAME
- Publication number 20230203706
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Alexandros Demos
- C30 - CRYSTAL GROWTH

Feed and outlet means for the gases Modifying the flow of the reactive gases

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vapor phase epitaxy method

Method for manufacturing nitride semiconductor device

High pressure spatial chemical vapor deposition system and related...

Single crystalline metal foil and manufacturing method therefor

Manufacturing apparatus for a group-III nitride crystal comprising...

Vapor phase epitaxy method

Modular reactor for microwave plasma-assisted deposition

Compositions and aggregates comprising boron nitride nanotube struc...

Method of producing a two-dimensional material

ALD method with multi-chambers for sic or multi-elements epitaxial...

Gas-phase reactor system-with a reaction chamber, a solid precursor...

Silicon-containing product forming apparatus

Chemical source vessel with dip tube

Substrate processing apparatus, material layer deposition apparatus...

Reaction chamber

Method for processing a substrate by oscillating a boundary layer o...

Method for applying a carbon layer to a substrate comprising introd...

Vapor phase growth apparatus and vapor phase growth method

Active cleaning vacuum system and method

Concentric flow reactor

SiC chemical vapor deposition apparatus

Vapor delivery device, methods of manufacture and methods of use th...

Method of utilizing a degassing chamber to reduce arsenic outgassin...

Half-angle nozzle

Apparatus including horizontal flow reactor with a central injector...

Remote plasma oxidation chamber

Methods for producing 2D materials by moving forming layers dispose...

Adjustable fluid inlet assembly for a substrate processing apparatu...

Vapor-liquid reaction device, reaction tube, film forming apparatus

Method of feeding gases into a reactor to grow epitaxial structures...

Patents Applicationslast 30 patents

APPARATUS, SYSTEMS, AND METHODS OF USING AN ATMOSPHERIC EPITAXIAL D...

EPI OVERLAPPING DISK AND RING

METHOD AND APPARATUS FOR DEPOSITION OF A LAYER OF PEROVSKITE ON A S...

GAS INLET ASSEMBLY OF PROCESS CHAMBER, GAS INLET DEVICE, AND SEMICO...

METHOD FOR PRODUCING GALLIUM PRECURSOR AND METHOD FOR PRODUCING LAM...

Method and Device for Producing a SiC Solid Material

Method and Device for Producing a SiC Solid Material

Method and Device for Producing a SiC Solid Material

SEMICONDUCTOR WAFER MANUFACTURING APPARATUS

IN-SITU EPI GROWTH RATE CONTROL OF CRYSTAL THICKNESS USING PARAMETR...

FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...

CHEMICAL SOURCE VESSEL WITH DIP TUBE

SOLID SOURCE METAL-ORGANIC MOLECULAR BEAM EPITAXY FOR DEPOSITION OF...

FABRICATING APPARATUS OF SIC EPITAXIAL WAFER AND FABRICATION METHOD...

EPI SELF-HEATING SENSOR TUBE AS IN-SITU GROWTH RATE SENSOR

Reaction Device for Improving Epitaxial Growth Uniformity

METHOD FOR CVD DEPOSITION OF N-TYPE DOPED SILICON CARBIDE AND EPITA...

VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD

APPARATUS AND METHOD FOR DEPOSITING A LAYER OF SEMICONDUCTOR MATERI...

SILICON CARBIDE SINGLE CRYSTAL AND MANUFACTURING METHOD OF SILICON...

APPARATUS AND METHOD FOR MANUFACTURING HEXAGONAL CRYSTALS

VAPOR PHASE GROWTH SYSTEM AND METHOD OF PRODUCING EPITAXIAL WAFER

METHODS FOR MANUFACTURING A SEMICONDUCTOR WAFER USING A PREHEAT RIN...

APPARATUS FOR FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING LOW...

APPARATUS FOR FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING LOW...

METALORGANIC CHEMICAL VAPOR PHASE EPITAXY OR VAPOR PHASE DEPOSITION...

VAPOR DEPOSITION DEVICE AND METHOD OF PRODUCING EPITAXIAL WAFER

EPITAXIAL REACTOR SYSTEMS AND METHODS OF USING SAME