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H01J2237/06341
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/06341
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Patents Grants
last 30 patents
Information
Patent Grant
Emitter, electron gun in which same is used, electronic device in w...
Patent number
11,984,294
Issue date
May 14, 2024
National Institute for Materials Science
Jie Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mechanically-stable electron source
Patent number
11,749,492
Issue date
Sep 5, 2023
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron emitter and method of fabricating same
Patent number
11,688,579
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Juying Dou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing microrods for electron emitters, and associated...
Patent number
11,651,924
Issue date
May 16, 2023
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron emitter and method of fabricating same
Patent number
11,201,032
Issue date
Dec 14, 2021
ASML Netherlands B.V.
Juying Dou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cold cathode field-emission electron gun, adjustment method for col...
Patent number
11,031,208
Issue date
Jun 8, 2021
Jeol Ltd.
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron emitter and method of fabricating same
Patent number
10,784,071
Issue date
Sep 22, 2020
ASML Netherlands B.V.
Juying Dou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and devices for producing an electron beam
Patent number
10,727,022
Issue date
Jul 28, 2020
Ariel Scientific Innovations Ltd.
Moshe Einat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal protective layer for electron emitters with a diffusion barrier
Patent number
10,714,294
Issue date
Jul 14, 2020
KLA-Tencor Corporation
Frances Hill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for providing a clean environment in an electron-...
Patent number
10,692,692
Issue date
Jun 23, 2020
KLA-Tencor Corporation
William G. Schultz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope
Patent number
10,614,994
Issue date
Apr 7, 2020
Hitachi High-Technologies Corporation
Takashi Onishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field emission electron source, method for manufacturing same, and...
Patent number
10,586,674
Issue date
Mar 10, 2020
Hitachi High-Technologies Corporation
Toshiaki Kusunoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus
Patent number
10,522,319
Issue date
Dec 31, 2019
Hitachi High-Technologies Corporation
Keigo Kasuya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High performance inspection scanning electron microscope device and...
Patent number
10,504,684
Issue date
Dec 10, 2019
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gun lens design in a charged particle microscope
Patent number
10,410,827
Issue date
Sep 10, 2019
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High voltage feedthrough assembly, time-resolved transmission elect...
Patent number
10,366,861
Issue date
Jul 30, 2019
Max-Planck Gesellschaft zur Foerderung der Wissenschaften e.V.
Julian Hirscht
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
10,297,416
Issue date
May 21, 2019
Hitachi High-Technologies Corporation
Toshihide Agemura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope and method of operating same
Patent number
10,224,176
Issue date
Mar 5, 2019
Jeol Ltd.
Takashi Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope electron gun for facilitating position adjustme...
Patent number
10,128,077
Issue date
Nov 13, 2018
Korea Research Institute of Standards and Science
Bok Lae Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing electron source
Patent number
10,074,506
Issue date
Sep 11, 2018
Hitachi High-Technologies Corporation
Takashi Ichimura
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electron microscope and method of operating the same
Patent number
9,772,976
Issue date
Sep 26, 2017
Jeol Ltd.
Takashi Suzuki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Array of carbon nanotube micro-tip structures
Patent number
9,734,976
Issue date
Aug 15, 2017
Tsinghua University
Yang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal field emitter tip, electron beam device including a thermal...
Patent number
9,697,983
Issue date
Jul 4, 2017
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro-electron column having an electron emitter improving the dens...
Patent number
9,673,016
Issue date
Jun 6, 2017
Industry-University Cooperation Foundation Sunmoon University
Ho Seob Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Emitter for an electron beam, electron beam device and method for p...
Patent number
9,633,815
Issue date
Apr 25, 2017
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun, charged particle gun, and charged particle beam appar...
Patent number
9,570,268
Issue date
Feb 14, 2017
Hitachi High-Technologies Corporation
Yuta Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nanoparticle-templated lithographic patterning of nanoscale electro...
Patent number
9,548,180
Issue date
Jan 17, 2017
Elwha LLC
Max N. Mankin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carbon nanotube based micro-tip structure and method for making the...
Patent number
9,437,391
Issue date
Sep 6, 2016
Tsinghua University
Yang Wei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Device and method for electron emission and device including such a...
Patent number
9,263,229
Issue date
Feb 16, 2016
Centre National de la Recherche Scientifique (Cnrs)
Arnaud Arbouet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
9,208,995
Issue date
Dec 8, 2015
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20240379318
Publication date
Nov 14, 2024
HITACHI HIGH-TECH CORPORATION
Keigo KASUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...
Publication number
20240079198
Publication date
Mar 7, 2024
NATIONAL INSTITUTE FOR MATERIALS SCIENCE
Jie TANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Source, Method of Manufacturing the Same, And Electron Bea...
Publication number
20230317401
Publication date
Oct 5, 2023
Hitachi High-Tech Corporation
Toshiaki KUSUNOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR...
Publication number
20230005695
Publication date
Jan 5, 2023
Centre National de la Recherche Scientifique
Alain DEGIOVANNI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM DEVICE HAVING A DEFLECTION UNIT
Publication number
20220367142
Publication date
Nov 17, 2022
CARL ZEISS MICROSCOPY GMBH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MECHANICALLY-STABLE ELECTRON SOURCE
Publication number
20220293387
Publication date
Sep 15, 2022
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON EMITTER AND METHOD OF FABRICATING SAME
Publication number
20220189725
Publication date
Jun 16, 2022
ASML NETHERLANDS B.V.
Juying DOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON EMITTER AND METHOD OF FABRICATING SAME
Publication number
20210142975
Publication date
May 13, 2021
ASML NETHERLANDS B.V.
Juying Dou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL PROTECTIVE LAYER FOR ELECTRON EMITTERS WITH A DIFFUSION BARRIER
Publication number
20190362927
Publication date
Nov 28, 2019
KLA-Tencor Corporation
Frances Hill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope
Publication number
20190279837
Publication date
Sep 12, 2019
Hitachi High-Technologies Corporation
Takashi ONISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cold Cathode Field-Emission Electron Gun, Cold Cathode Field-Emissi...
Publication number
20190096626
Publication date
Mar 28, 2019
JEOL Ltd.
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE ELECTRON GUN FOR FACILITATING POSITION ADJUSTME...
Publication number
20180218874
Publication date
Aug 2, 2018
Korea Research Institute of Standards and Science
Bok Lae CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope and Method of Operating Same
Publication number
20180130635
Publication date
May 10, 2018
JEOL Ltd.
Takashi Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope
Publication number
20170309437
Publication date
Oct 26, 2017
Hitachi High-Technologies Corporation
Toshihide AGEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN, CHARGED PARTICLE GUN, AND CHARGED PARTICLE BEAM APPAR...
Publication number
20160104597
Publication date
Apr 14, 2016
Hitachi High-Technologies Corporation
Yuta IMAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR EMITTING ELECTRONS AND DEVICE COMPRISING SUCH...
Publication number
20150008323
Publication date
Jan 8, 2015
Arnaud Arbouet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE
Publication number
20140197725
Publication date
Jul 17, 2014
Souichi Katagiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE SOURCES AND METHODS FOR MANUFACTURING THE SAME
Publication number
20140077684
Publication date
Mar 20, 2014
38th Research Institute, China Electronics Technology Group Corporation
Huarong Liu
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron Microscope and Method of Adjusting the Same
Publication number
20130327938
Publication date
Dec 12, 2013
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope and Method of Operating the Same
Publication number
20130332116
Publication date
Dec 12, 2013
Takashi Suzuki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE EMISSION GUN AND CHARGED PARTICLE RAY APPARATUS
Publication number
20130264496
Publication date
Oct 10, 2013
Hitachi High-Technologies Corporation
Noriaki Arai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN EMITTING UNDER HIGH VOLTAGE, IN PARTICULAR FOR ELECTRO...
Publication number
20130234025
Publication date
Sep 12, 2013
Centre National De La Recherche Scientifique (CNRS)
Marc Monthioux
B82 - NANO-TECHNOLOGY
Information
Patent Application
CARBON NANOTUBE BASED MICRO-TIP STRUCTURE AND METHOD FOR MAKING THE...
Publication number
20130224429
Publication date
Aug 29, 2013
HON HAI Precision Industry CO., LTD.
YANG WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Determination of Emission Parameters from Field Emission Sources
Publication number
20130187058
Publication date
Jul 25, 2013
FEI Company
Lynwood W. Swanson
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE BEAM RADIATION APPARATUS
Publication number
20130140977
Publication date
Jun 6, 2013
Hitachi High-Technologies Corporation
Shunichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPACT HIGH-VOLTAGE ELECTRON GUN
Publication number
20130134324
Publication date
May 30, 2013
KLA-Tencor Corporation
Alan D. BRODIE
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
FABRICATION OF SUPER ION - ELECTRON SOURCE AND NANOPROBE BY LOCAL E...
Publication number
20130122774
Publication date
May 16, 2013
Moh'd Rezeq
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE
Publication number
20130087703
Publication date
Apr 11, 2013
Takashi Onishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM IRRADIATION DEVICE AND METHOD FOR SUPPRESSING ION BEAM DIV...
Publication number
20120085918
Publication date
Apr 12, 2012
KYOTO UNIVERSITY
Dan Nicolaescu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN
Publication number
20120062094
Publication date
Mar 15, 2012
Mikio Ichihashi
H01 - BASIC ELECTRIC ELEMENTS