Flat-bed apparatus

Industry

CPC
C23C16/5096

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/5096Flat-bed apparatus

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film manufacturing apparatus
- Patent number 11,967,492
- Issue date Apr 23, 2024
- AP SYSTEMS INC.
- Byoung Il Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus and method of manufacturing dis...
- Patent number 11,842,883
- Issue date Dec 12, 2023
- Samsung Display Co., Ltd.
- Jong-hoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,791,136
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Separation of plasma suppression and wafer edge to improve edge fil...
- Patent number 11,674,226
- Issue date Jun 13, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductive plasma source with metallic shower head using b-field con...
- Patent number 11,450,509
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Canfeng Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and electrode member
- Patent number 11,421,323
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Daisuke Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homogeneous and transparent protective coatings for precious metals...
- Patent number 11,365,481
- Issue date Jun 21, 2022
- City University of Hong Kong
- Kwok Yan Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal spraying method of component for plasma processing apparatu...
- Patent number 11,328,905
- Issue date May 10, 2022
- Tokyo Electron Limited
- Yoshiyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition apparatus and method of manufacturing dis...
- Patent number 11,302,517
- Issue date Apr 12, 2022
- SAMSUNG DISPLAY CO., LTD.
- Jong-hoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition system including ground strap bar
- Patent number 11,214,870
- Issue date Jan 4, 2022
- SAMSUNG DISPLAY CO., LTD.
- Jaihyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus
- Patent number 11,208,724
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kazuki Dempoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for UV-based suppression of plasma instability
- Patent number 11,120,989
- Issue date Sep 14, 2021
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,111,581
- Issue date Sep 7, 2021
- Lam Research Corporation
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,075,060
- Issue date Jul 27, 2021
- Jusung Engineering Co., Ltd.
- Eun Geu Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and gas injection member used therefor
- Patent number 11,069,512
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Shinya Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature monitoring
- Patent number 11,053,592
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Sanjay D. Yadav
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stack of multiple deposited semiconductor layers
- Patent number 11,056,406
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Liyan Miao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polymer substrate with hardcoat layer, and manufacturing method for...
- Patent number 11,028,284
- Issue date Jun 8, 2021
- Teijin Limited
- Tatsuya Ekinaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and method
- Patent number 11,028,481
- Issue date Jun 8, 2021
- JUSUNG ENGINEERING CO., LTD.
- Chui Joo Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,017,986
- Issue date May 25, 2021
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 10,957,514
- Issue date Mar 23, 2021
- Lam Research Corporation
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graded in-situ charge trapping layers to enable electrostatic chuck...
- Patent number 10,930,475
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and apparatus for controlling phase ang...
- Patent number 10,903,048
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Yui Lun Wu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Titanium silicide region forming method
- Patent number 10,903,086
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Hideaki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of achieving high input impedance without usin...
- Patent number 10,879,041
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA DEVICE FOR POWDER SURFACE TREATMENT USING HORIZONTAL ELECTRODE
- Publication number 20240392442
- Publication date Nov 28, 2024
- INOPLAZTECH CO., LTD.
- Deuk Yeon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20240158942
- Publication date May 16, 2024
- ASM IP HOLDING B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...
- Publication number 20230392278
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...
- Publication number 20230352279
- Publication date Nov 2, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...
- Publication number 20230323535
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS
- Publication number 20230175128
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Davinder Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS
- Publication number 20220415625
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Sunil KAPOOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING DIS...
- Publication number 20220238306
- Publication date Jul 28, 2022
- SAMSUNG DISPLAY CO., LTD.
- Jong-hoon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM MANUFACTURING APPARATUS
- Publication number 20220122824
- Publication date Apr 21, 2022
- AP SYSTEMS INC
- Byoung Il Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20220013387
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20210381106
- Publication date Dec 9, 2021
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES
- Publication number 20210296144
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Xing LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION RADIAL AND EDGE PROFILE TUNABILITY THROUGH INDEPENDENT C...
- Publication number 20210249230
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Sanjeev BALUJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITION OF SILICON NITRIDE LAYER USING PRETREATMENT,...
- Publication number 20210225643
- Publication date Jul 22, 2021
- ASM IP Holding B.V.
- Aurélie Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF ACHIEVING HIGH INPUT IMPEDANCE WITHOUT USIN...
- Publication number 20210111000
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Zheng John YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20210054519
- Publication date Feb 25, 2021
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...
- Publication number 20210017645
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20200399756
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...
- Publication number 20200190667
- Publication date Jun 18, 2020
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...
- Publication number 20200144027
- Publication date May 7, 2020
- Applied Materials, Inc.
- Canfeng LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for UV-Based Suppression of Plasma Instability
- Publication number 20200111666
- Publication date Apr 9, 2020
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACK OF MULTIPLE DEPOSITED SEMICONDUCTOR LAYERS
- Publication number 20200091019
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Liyan Miao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE
- Publication number 20200010957
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Jian J. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL
- Publication number 20190385820
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING FILM THICKNESS USING DC SELF-BI...
- Publication number 20190360101
- Publication date Nov 28, 2019
- Novellus Systems, Inc.
- Edward J. AUGUSTYNIAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20190271081
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Chunguang XIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20190256977
- Publication date Aug 22, 2019
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRADED IN-SITU CHARGE TRAPPING LAYERS TO ENABLE ELECTROSTATIC CHUCK...
- Publication number 20190252158
- Publication date Aug 15, 2019
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE
- Publication number 20190177848
- Publication date Jun 13, 2019
- Applied Materials, Inc.
- Jian J. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Flat-bed apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing system and temperature control method

Thin film manufacturing apparatus

Substrate supporting plate, thin film deposition apparatus includin...

PECVD process

Chemical vapor deposition apparatus and method of manufacturing dis...

Deposition radial and edge profile tunability through independent c...

Suppression of parasitic deposition in a substrate processing syste...

Separation of plasma suppression and wafer edge to improve edge fil...

PECVD process

Inductive plasma source with metallic shower head using b-field con...

Stage and electrode member

Homogeneous and transparent protective coatings for precious metals...

Thermal spraying method of component for plasma processing apparatu...

Chemical vapor deposition apparatus and method of manufacturing dis...

Chemical vapor deposition system including ground strap bar

Film forming apparatus

Systems and methods for UV-based suppression of plasma instability

Suppression of parasitic deposition in a substrate processing syste...

Substrate processing apparatus

Film forming apparatus and gas injection member used therefor

Substrate temperature monitoring

Stack of multiple deposited semiconductor layers

Polymer substrate with hardcoat layer, and manufacturing method for...

Substrate treating apparatus and method

Deposition radial and edge profile tunability through independent c...

Apparatus and method for deposition and etch in gap fill

Graded in-situ charge trapping layers to enable electrostatic chuck...

Substrate processing method and apparatus for controlling phase ang...

Titanium silicide region forming method

Method and apparatus of achieving high input impedance without usin...

Patents Applicationslast 30 patents

PLASMA DEVICE FOR POWDER SURFACE TREATMENT USING HORIZONTAL ELECTRODE

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...

MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...

SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...

PECVD PROCESS

HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS

SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS

CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING DIS...

THIN FILM MANUFACTURING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES

DEPOSITION RADIAL AND EDGE PROFILE TUNABILITY THROUGH INDEPENDENT C...

METHOD FOR DEPOSITION OF SILICON NITRIDE LAYER USING PRETREATMENT,...

METHOD AND APPARATUS OF ACHIEVING HIGH INPUT IMPEDANCE WITHOUT USIN...

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...

PECVD PROCESS

Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...

INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CON...

Systems and Methods for UV-Based Suppression of Plasma Instability

STACK OF MULTIPLE DEPOSITED SEMICONDUCTOR LAYERS

HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE

APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL

SYSTEMS AND METHODS FOR DETERMINING FILM THICKNESS USING DC SELF-BI...

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

TEMPERATURE CONTROLLED SHOWERHEAD

GRADED IN-SITU CHARGE TRAPPING LAYERS TO ENABLE ELECTROSTATIC CHUCK...

HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE