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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

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Patents Grantslast 30 patents

Information Patent Grant
Detection of force applied by pick-up tool for transferring semicon...
- Patent number 11,756,810
- Issue date Sep 12, 2023
- Meta Platforms Technologies, LLC
- Oscar Torrents Abad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rotatable micromirror with improved shock and vibration performance
- Patent number 11,726,312
- Issue date Aug 15, 2023
- AG MICROSYSTEMS, INC.
- Asif Godil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multidirectional translating and tilting platform using bending act...
- Patent number 11,697,584
- Issue date Jul 11, 2023
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Matthieu Gaudet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror with improved shock and vibration performance having di...
- Patent number 11,372,234
- Issue date Jun 28, 2022
- AG MICROSYSTEMS, INC.
- Asif Godil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuation systems and methods
- Patent number 10,523,135
- Issue date Dec 31, 2019
- MEMS DRIVE, INC.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electro mechanical system and layered hinge for use in MEMS m...
- Patent number 10,437,046
- Issue date Oct 8, 2019
- AG MICROSYSTEMS, INC.
- Asif Godil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Translating Z axis accelerometer
- Patent number 9,840,409
- Issue date Dec 12, 2017
- Invensense, Inc.
- Matthew Julian Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices utilizing a thick metal layer of an interconnect metal...
- Patent number 9,493,340
- Issue date Nov 15, 2016
- Intel Corporation
- Rashed Mahameed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices utilizing a thick metal layer of an interconnect metal...
- Patent number 9,150,402
- Issue date Oct 6, 2015
- Intel Corporation
- Rashed Mahameed
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS ACTUATION SYSTEMS AND METHODS
- Publication number 20180072562
- Publication date Mar 15, 2018
- MEMS Drive, Inc.
- GERARDO MORABITO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES UTILIZING A THICK METAL LAYER OF AN INTERCONNECT METAL...
- Publication number 20150145075
- Publication date May 28, 2015
- Rashed Mahameed
- B81 - MICRO-STRUCTURAL TECHNOLOGY

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Patents Grantslast 30 patents

Detection of force applied by pick-up tool for transferring semicon...

Rotatable micromirror with improved shock and vibration performance

Multidirectional translating and tilting platform using bending act...

Micromirror with improved shock and vibration performance having di...

MEMS actuation systems and methods

Micro electro mechanical system and layered hinge for use in MEMS m...

Translating Z axis accelerometer

MEMS devices utilizing a thick metal layer of an interconnect metal...

MEMS devices utilizing a thick metal layer of an interconnect metal...

Patents Applicationslast 30 patents

MEMS ACTUATION SYSTEMS AND METHODS

MEMS DEVICES UTILIZING A THICK METAL LAYER OF AN INTERCONNECT METAL...