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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70641
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Patents Grants
last 30 patents
Information
Patent Grant
Defocus measurement method, correction method, and method of manufa...
Patent number
11,977,338
Issue date
May 7, 2024
Samsung Electronics Co., Ltd.
Jieun Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Computer-readable storage medium recording data structure for stori...
Patent number
11,960,214
Issue date
Apr 16, 2024
AUROS TECHNOLOGY, INC.
Sol-Lee Hwang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system with variable focal distance and optical assembly co...
Patent number
11,921,432
Issue date
Mar 5, 2024
Thales
Luca Peverini
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Metrology method and associated metrology and lithographic apparatuses
Patent number
11,906,906
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring misregistration in the manufacture of topograph...
Patent number
11,880,141
Issue date
Jan 23, 2024
KLA Corporation
Daria Negri
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for accurately obtaining photolithography parameter
Patent number
11,868,053
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xun Yan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for diffraction pattern guided source mask opt...
Patent number
11,846,889
Issue date
Dec 19, 2023
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system of surface topography measurement for lithography
Patent number
11,835,866
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yung-Yao Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
Patent number
11,835,869
Issue date
Dec 5, 2023
Canon Kabushiki Kaisha
Kazuki Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay measurement apparatus
Patent number
11,835,865
Issue date
Dec 5, 2023
AUROS TECHNOLOGY, INC.
Hyeon Gi Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology apparatus and a method of determining a characteristic of...
Patent number
11,822,254
Issue date
Nov 21, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology device and detection apparatus therefor
Patent number
11,782,351
Issue date
Oct 10, 2023
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for manufacturing semiconductor structure
Patent number
11,768,443
Issue date
Sep 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Ching Lee
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi charged particle beam writing apparatus and method of adjusti...
Patent number
11,740,546
Issue date
Aug 29, 2023
NuFlare Technology, Inc.
Tsubasa Nanao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and patterning devices and apparatuses for measuring focus...
Patent number
11,733,615
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method
Patent number
11,709,434
Issue date
Jul 25, 2023
ASML Netherlands B.V.
Rizvi Rahman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing a semiconductor device and apparatus for ma...
Patent number
11,709,435
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shinn-Sheng Yu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Selecting a set of locations associated with a measurement or featu...
Patent number
11,681,231
Issue date
Jun 20, 2023
ASML Netherlands B.V.
Pierluigi Frisco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for pattern fidelity control
Patent number
11,669,020
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Tanbir Hasan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical arrangement for an inspection apparatus
Patent number
11,662,198
Issue date
May 30, 2023
ASML Holding N.V.
Parag Vinayak Kelkar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Model calibration and guided metrology based on smart sampling
Patent number
11,630,396
Issue date
Apr 18, 2023
ASML Netherlands B.V.
Jun Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for predicting performance of a measurement m...
Patent number
11,626,704
Issue date
Apr 11, 2023
ASML Netherlands B.V.
Sietse Thijmen Van Der Post
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for process-window characterization
Patent number
11,592,752
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Enhancing performance of overlay metrology
Patent number
11,592,755
Issue date
Feb 28, 2023
KLA Corporation
Amnon Manassen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Pattern inspection method and photomask fabrication method
Patent number
11,579,537
Issue date
Feb 14, 2023
Kioxia Corporation
Keiko Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for measuring misregistration of semiconductor de...
Patent number
11,573,497
Issue date
Feb 7, 2023
KLA Corporation
Daria Negri
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
UV lithography system
Patent number
11,561,476
Issue date
Jan 24, 2023
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scatterometer and method of scatterometry using acoustic radiation
Patent number
11,536,654
Issue date
Dec 27, 2022
ASML Netherlands B.V.
Maxim Pisarenco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and article manufacturing method
Patent number
11,531,276
Issue date
Dec 20, 2022
Canon Kabushiki Kaisha
Akio Akamatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, substrate, lithographic system and...
Patent number
11,526,085
Issue date
Dec 13, 2022
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATI...
Publication number
20240126182
Publication date
Apr 18, 2024
Canon Kabushiki Kaisha
JUN MOIZUMI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF FITTING MEASUREMENT DATA TO A MODEL AND MODELING A PERFO...
Publication number
20240118629
Publication date
Apr 11, 2024
ASML NETHERLANDS B.V.
Aliasghar KEYVANI JANBAHAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY METHOD AND SYSTEM AND LITHOGRAPHIC SYSTEM
Publication number
20240094643
Publication date
Mar 21, 2024
ASML NETHERLANDS B.V.
Filippo ALPEGGIANI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
Publication number
20240061350
Publication date
Feb 22, 2024
Canon Kabushiki Kaisha
KAZUKI OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING A FOCUS ACTUATION PROFILE FOR ONE OR MORE AC...
Publication number
20240061353
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Simon Hendrik Celine VAN GORP
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM OF SURFACE TOPOGRAPHY MEASUREMENT FOR LITHOGRAPHY
Publication number
20240045343
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing company Ltd.
YUNG-YAO LEE
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF DETERMINING AT LEAST A TARGET LAYOUT AND ASSOCIATED METRO...
Publication number
20240036479
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Roy WERKMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF METROLOGY AND ASSOCIATED APPARATUSES
Publication number
20240036484
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Timothy Dugan DAVIS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY APPARATUS BASED ON HIGH HARMONIC GENERATION AND ASSOCIATE...
Publication number
20240004312
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Peter Michael KRAUS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
Publication number
20230400780
Publication date
Dec 14, 2023
KLA Corporation
Amnon Manassen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Metrology Apparatus and a Method of Determining a Characteristic of...
Publication number
20230393490
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Arie Jeffrey DEN BOEF
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...
Publication number
20230333486
Publication date
Oct 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shinn-Sheng YU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MEASUREMENT APPARATUS
Publication number
20230324811
Publication date
Oct 12, 2023
AUROS TECHNOLOGY, INC.
Hyeon Gi SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND PATTERNING DEVICES AND APPARATUSES FOR MEASURING FOCUS...
Publication number
20230305407
Publication date
Sep 28, 2023
ASML NETHERLANDS B.V.
Fei LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
Publication number
20230288818
Publication date
Sep 14, 2023
ASML Netherlands B,V.
Wenjie JIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR THERMO-MECHANICAL CONTROL OF A HEAT SENSITIVE ELEMENT AN...
Publication number
20230229090
Publication date
Jul 20, 2023
ASML NETHERLANDS B.V.
Victor Sebastiaan Dolk
G02 - OPTICS
Information
Patent Application
SUBSTRATE, PATTERNING DEVICE AND METROLOGY APPARATUSES
Publication number
20230205097
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Mattia MARELLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
Publication number
20230185205
Publication date
Jun 15, 2023
Canon Kabushiki Kaisha
KAZUKI OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAS...
Publication number
20230176491
Publication date
Jun 8, 2023
ASML NETHERLANDS B.V.
Olger Victor ZWIER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS WINDOW QUALIFICATION MODULATION LAYOUTS
Publication number
20230175983
Publication date
Jun 8, 2023
KLA Corporation
Andrew CROSS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FEED-FORWARD AND UTILIZATION OF HEIGHT INFORMATION FOR METROLOGY TOOLS
Publication number
20230143750
Publication date
May 11, 2023
International Business Machines Corporation
Daniel Schmidt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION
Publication number
20230133487
Publication date
May 4, 2023
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE SYSTEM, EXPOSURE METHOD, AND ELECTRONIC DEVICE MANUFACTURI...
Publication number
20230098685
Publication date
Mar 30, 2023
Gigaphoton Inc.
Koichi FUJII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF SURFACE TOPOGRAPHY MEASUREMENT FOR LITHOGRAPHY
Publication number
20230085172
Publication date
Mar 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YUNG-YAO LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
Publication number
20230076566
Publication date
Mar 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Yao LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PRO...
Publication number
20230076218
Publication date
Mar 9, 2023
ASML NETHERLANDS B.V.
Koenraad VAN INGEN SCHENAU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MET...
Publication number
20230043696
Publication date
Feb 9, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Jie Du
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA
Publication number
20230042759
Publication date
Feb 9, 2023
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR FOCUS CONTROL IN EXTREME ULTRAVIOLET LITHOGRA...
Publication number
20230037093
Publication date
Feb 2, 2023
KLA Corporation
Roel Gronheid
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING A LITHOGRAPHIC APPARATUS AND ASSOCIATED APPA...
Publication number
20230021079
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Frank STAALS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY