Focused ion beam

Industry

CPC
H01J2237/31749

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31749Focused ion beam

Industries

Patents Grantslast 30 patents

Information Patent Grant
Ion beam device
- Patent number 12,148,593
- Issue date Nov 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
- Patent number 12,033,831
- Issue date Jul 9, 2024
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cross-section sample preparation
- Patent number 12,007,344
- Issue date Jun 11, 2024
- Fibics Incorporated
- Michael William Phaneuf
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
- Patent number RE50001
- Issue date Jun 4, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
Information Patent Grant
Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip
- Patent number 11,996,210
- Issue date May 28, 2024
- UChicago Argonne, LLC
- Jin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and structures for semiconductor device testing
- Patent number 11,982,709
- Issue date May 14, 2024
- Yangtze Memory Technologies Co., Ltd.
- Lin Qi
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 11,972,923
- Issue date Apr 30, 2024
- FEI Company
- Christopher Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 11,955,310
- Issue date Apr 9, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 11,935,723
- Issue date Mar 19, 2024
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
- Patent number 11,923,168
- Issue date Mar 5, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Reduced charging by low negative voltage in FIB systems
- Patent number 11,887,810
- Issue date Jan 30, 2024
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of material deposition
- Patent number 11,798,804
- Issue date Oct 24, 2023
- FEI Company
- Brian Roberts Routh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective shutter for charged particle microscope
- Patent number 11,749,496
- Issue date Sep 5, 2023
- FEI Company
- Philip Brundage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid metal ion source and focused ion beam apparatus
- Patent number 11,749,493
- Issue date Sep 5, 2023
- Hitachi High-Tech Science Corporation
- Yoshihiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device and system for the treatment of biological cryogenic...
- Patent number 11,735,404
- Issue date Aug 22, 2023
- FEI Company
- Alex De Marco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cross-section sample preparation
- Patent number 11,726,050
- Issue date Aug 15, 2023
- Fibics Incorporated
- Michael William Phaneuf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
- Patent number 11,728,126
- Issue date Aug 15, 2023
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus and composite beam apparatus
- Patent number 11,682,536
- Issue date Jun 20, 2023
- Hitachi High-Tech Science Corporation
- Koji Nagahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power wafer cooling
- Patent number 11,670,483
- Issue date Jun 6, 2023
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam device
- Patent number 11,640,897
- Issue date May 2, 2023
- Hitachi High-Technologies Corporation
- Ryo Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of preparing integrated circuits for backside pro...
- Patent number 11,605,525
- Issue date Mar 14, 2023
- FEI Company
- James Vickers
- G01 - MEASURING TESTING
Information Patent Grant
X-ray imaging in cross-section using un-cut lamella with background...
- Patent number 11,501,951
- Issue date Nov 15, 2022
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus
- Patent number 11,482,398
- Issue date Oct 25, 2022
- Hitachi High-Tech Science Corporation
- Haruyuki Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,476,078
- Issue date Oct 18, 2022
- Hitachi High-Tech Science Corporation
- Masahiro Kiyohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of sample preparation using dual ion beam trenching
- Patent number 11,476,120
- Issue date Oct 18, 2022
- Intel Corporation
- Purushotham Kaushik Muthur Srinath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for iteratively cross-sectioning a sample to corr...
- Patent number 11,462,383
- Issue date Oct 4, 2022
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Milling a multi-layered object
- Patent number 11,440,151
- Issue date Sep 13, 2022
- Yehuda Zur
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for cross-section sample preparation
- Patent number 11,366,074
- Issue date Jun 21, 2022
- Fibics Incorporated
- Michael William Phaneuf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,361,936
- Issue date Jun 14, 2022
- Hitachi High-Tech Science Corporation
- Ayana Muraki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for changing the spatial orientation of a micro-sample in a...
- Patent number 11,355,310
- Issue date Jun 7, 2022
- Carl Zeiss Microscopy GmbH
- Holger Doemer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...
- Publication number 20240379327
- Publication date Nov 14, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20240371598
- Publication date Nov 7, 2024
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM DEVICE
- Publication number 20240355574
- Publication date Oct 24, 2024
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Koji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...
- Publication number 20240347312
- Publication date Oct 17, 2024
- CARL ZEISS MICROSCOPY GMBH
- Heiko Stegmann
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
- Publication number 20240339289
- Publication date Oct 10, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adar Sonn-Segev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...
- Publication number 20240331969
- Publication date Oct 3, 2024
- FEI Company
- Chad Rue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated Circuit with FIB-Ready Structures
- Publication number 20240321548
- Publication date Sep 26, 2024
- Nuvoton Technology Corporation
- Yuval Kirschner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Device For Interfacing A Sample Transfer Device To An Analytic Or S...
- Publication number 20240274399
- Publication date Aug 15, 2024
- Ferrovac AG
- Urs MAIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
- Publication number 20240266142
- Publication date Aug 8, 2024
- FEI Company
- Christopher THOMPSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
- Publication number 20240258067
- Publication date Aug 1, 2024
- FEI Company
- Peter Christiaan TIEMEIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI
- Publication number 20240249910
- Publication date Jul 25, 2024
- FEI Company
- Jaroslav Stárek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...
- Publication number 20240249909
- Publication date Jul 25, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...
- Publication number 20240234086
- Publication date Jul 11, 2024
- CARL ZEISS MICROSCOPY GMBH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
- Publication number 20240234085
- Publication date Jul 11, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LINE DEPTH MEASUREMENTS BY AFM
- Publication number 20240212976
- Publication date Jun 27, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20240177966
- Publication date May 30, 2024
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MICROMACHINING A BIOLOGICAL SAMPLE FOR CREATING A LAMELL...
- Publication number 20240177967
- Publication date May 30, 2024
- FEI Company
- Matej Dolník
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
- Publication number 20240178022
- Publication date May 30, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Ofer Dudovitch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SAMPLE PREPARATON AND ANALYSIS
- Publication number 20240162001
- Publication date May 16, 2024
- FEI Company
- Michal Valík
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
- Publication number 20240136150
- Publication date Apr 25, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY
- Publication number 20240120175
- Publication date Apr 11, 2024
- CARL ZEISS MICROSCOPY GMBH
- Lorenz Lechner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERING OPERATIONAL CHARACTERISTICS OF A SEMICONDUCTOR DEVICE USIN...
- Publication number 20240105419
- Publication date Mar 28, 2024
- Intel Corporation
- Shida TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...
- Publication number 20240105421
- Publication date Mar 28, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PREPARING A SPECIMEN
- Publication number 20240071720
- Publication date Feb 29, 2024
- FEI Company
- Jamie Dee Gravell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused Ion Beam Apparatus
- Publication number 20240071718
- Publication date Feb 29, 2024
- JEOL Ltd.
- Yusuke Kagaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20240055220
- Publication date Feb 15, 2024
- Hitachi High-Tech Corporation
- Yuka II
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
- Publication number 20240038486
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ching Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND STRUCTURES FOR SEMICONDUCTOR DEVICE TESTING
- Publication number 20230375616
- Publication date Nov 23, 2023
- Yangtze Memory Technologies Co., Ltd.
- Lin QI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CROSS-SECTION SAMPLE PREPARATION
- Publication number 20230358696
- Publication date Nov 9, 2023
- Fibics Incorporated
- Michael William PHANEUF
- H01 - BASIC ELECTRIC ELEMENTS

Focused ion beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion beam device

Analyzing a sidewall of hole milled in a sample to determine thickn...

Method for cross-section sample preparation

Method and system for cross-sectioning a sample with a preset thick...

Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip

Methods and structures for semiconductor device testing

Systems and methods for performing sample lift-out for highly react...

Transmission charged particle microscope with an electron energy lo...

Method and device for preparing a microscopic sample from a volume...

Microscopy imaging method for 3D tomography with predictive drift t...

Reduced charging by low negative voltage in FIB systems

Method of material deposition

Protective shutter for charged particle microscope

Liquid metal ion source and focused ion beam apparatus

Method, device and system for the treatment of biological cryogenic...

Method for cross-section sample preparation

3D metrology from 3D datacube created from stack of registered imag...

Particle beam apparatus and composite beam apparatus

High power wafer cooling

Charged particle beam device

System and method of preparing integrated circuits for backside pro...

X-ray imaging in cross-section using un-cut lamella with background...

Focused ion beam apparatus

Charged particle beam apparatus

Method of sample preparation using dual ion beam trenching

Method and system for iteratively cross-sectioning a sample to corr...

Milling a multi-layered object

Method for cross-section sample preparation

Charged particle beam apparatus

Method for changing the spatial orientation of a micro-sample in a...

Patents Applicationslast 30 patents

ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...

FOCUSED ION BEAM SYSTEM

FOCUSED ION BEAM DEVICE

DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...

FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS

CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...

Integrated Circuit with FIB-Ready Structures

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

Device For Interfacing A Sample Transfer Device To An Analytic Or S...

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...

SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI

FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...

METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...

IN-LINE DEPTH MEASUREMENTS BY AFM

MICROSCOPY IMAGING METHOD AND SYSTEM

METHOD FOR MICROMACHINING A BIOLOGICAL SAMPLE FOR CREATING A LAMELL...

CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS

METHOD OF SAMPLE PREPARATON AND ANALYSIS

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...

METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY

ALTERING OPERATIONAL CHARACTERISTICS OF A SEMICONDUCTOR DEVICE USIN...

ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...

METHOD AND SYSTEM FOR PREPARING A SPECIMEN

Focused Ion Beam Apparatus

Charged Particle Beam Device

METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING

METHODS AND STRUCTURES FOR SEMICONDUCTOR DEVICE TESTING

METHOD FOR CROSS-SECTION SAMPLE PREPARATION