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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/049
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods for real time stereo imaging using multiple ele...
Patent number
11,942,303
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Yan Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,887,807
Issue date
Jan 30, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bandpass charged particle energy filtering detector for charged par...
Patent number
11,749,495
Issue date
Sep 5, 2023
KLA Corp.
Youfei Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
11,738,376
Issue date
Aug 29, 2023
ASML Netherlands, B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,705,304
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,676,795
Issue date
Jun 13, 2023
FEI Company
Pavel Stejskal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High power wafer cooling
Patent number
11,670,483
Issue date
Jun 6, 2023
Axcelis Technologies, Inc.
Joseph Ferrara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Back-scatter electrons (BSE) imaging with a SEM in tilted mode usin...
Patent number
11,626,267
Issue date
Apr 11, 2023
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam lithography system
Patent number
11,610,758
Issue date
Mar 21, 2023
KKT HOLDINGS SYNDICATE
Tzu-Yi Kuo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ion focusing device
Patent number
11,605,531
Issue date
Mar 14, 2023
Battelle Memorial Institute
Yehia M. Ibrahim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,587,758
Issue date
Feb 21, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system for adjusting the current of individual partic...
Patent number
11,562,880
Issue date
Jan 24, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and method of controlling sample ch...
Patent number
11,545,338
Issue date
Jan 3, 2023
ICT Integrated Circuit Testing Gesellschaft für Halbleiterriftechnik mbH
Dominik Patrick Ehberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Objective lens arrangement usable in particle-optical systems
Patent number
11,527,379
Issue date
Dec 13, 2022
Carl Zeiss Microscopy GmbH
Rainer Knippelmeyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ plasma cleaning of process chamber components
Patent number
11,495,434
Issue date
Nov 8, 2022
Varian Semiconductor Equipment Associates, Inc.
Kevin Anglin
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,495,444
Issue date
Nov 8, 2022
Tokyo Electron Limited
Masato Kon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, multi-beamlet assembly, and method...
Patent number
11,495,433
Issue date
Nov 8, 2022
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Benjamin John Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
Patent number
11,437,222
Issue date
Sep 6, 2022
Samsung Electronics Co., Ltd.
Jung-Pyo Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for focusing an electron beam on a wafer having a transparen...
Patent number
11,378,531
Issue date
Jul 5, 2022
Applied Materials Israel Ltd.
Arie Bader
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam electron characterization tool with telecentric illumina...
Patent number
11,373,838
Issue date
Jun 28, 2022
KLA Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D mapping of samples in charged particle microscopy
Patent number
11,355,307
Issue date
Jun 7, 2022
FEI Company
Jaroslav Kamenec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for measuring energy spectrum of backscattered...
Patent number
11,322,332
Issue date
May 3, 2022
TASMIT, INC.
Makoto Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for multiple charged-particle beams
Patent number
11,302,514
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-pole deflector for charged particle beam and charged particle...
Patent number
11,295,928
Issue date
Apr 5, 2022
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of charged-particle beam such as electron microscope comp...
Patent number
11,295,927
Issue date
Apr 5, 2022
BORRIES PTE. LTD.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Circuits for edge ring control in shaped DC pulsed plasma process d...
Patent number
11,289,310
Issue date
Mar 29, 2022
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, composite charged particle beam ap...
Patent number
11,276,555
Issue date
Mar 15, 2022
Hitachi High-Tech Science Corporation
Yasuhiko Sugiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlling transmission electron microscope and transmis...
Patent number
11,251,016
Issue date
Feb 15, 2022
Jeol Ltd.
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and method for inspecting and/or imagi...
Patent number
11,239,043
Issue date
Feb 1, 2022
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE
Publication number
20240153739
Publication date
May 9, 2024
US Electron, Inc.
John Noonan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20240128044
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20240017301
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Marc SMITS
B08 - CLEANING
Information
Patent Application
Creating Multiple Electron Beams with a Photocathode Film
Publication number
20230395349
Publication date
Dec 7, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Specimen Observation Method
Publication number
20230343549
Publication date
Oct 26, 2023
Hitachi High-Tech Corporation
Masahiro FUKUTA
G01 - MEASURING TESTING
Information
Patent Application
MINIATURE HYBRID ELECTRON BEAM COLUMN
Publication number
20230326704
Publication date
Oct 12, 2023
KLA Corporation
Lawrence Muray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Energy Filter, and Energy Analyzer and Charged Particle Beam Device...
Publication number
20230298845
Publication date
Sep 21, 2023
Hitachi High-Tech Corporation
Kazuhiro HONDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
Publication number
20230290609
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...
Publication number
20230282442
Publication date
Sep 7, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20230282441
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OP...
Publication number
20230245849
Publication date
Aug 3, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused Ion Beam System and Method of Correcting Deviation of Field...
Publication number
20230230801
Publication date
Jul 20, 2023
JEOL Ltd.
Yuichiro Ohori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR REAL TIME STEREO IMAGING USING MULTIPLE ELE...
Publication number
20230154723
Publication date
May 18, 2023
ASML NETHERLANDS B.V.
Yan REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BANDPASS CHARGED PARTICLE ENERGY FILTERING DETECTOR FOR CHARGED PAR...
Publication number
20230104558
Publication date
Apr 6, 2023
KLA Corporation
Youfei Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD OF MANIPULATING CH...
Publication number
20230037583
Publication date
Feb 9, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE
Publication number
20220384138
Publication date
Dec 1, 2022
US Electron, Inc.
John Noonan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CONTROLLING SAMPLE CH...
Publication number
20220359152
Publication date
Nov 10, 2022
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dominik Patrick Ehberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BACK-SCATTER ELECTRONS (BSE) IMAGING WITH A SEM IN TILTED MODE USIN...
Publication number
20220351937
Publication date
Nov 3, 2022
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS, MULTI-BEAMLET ASSEMBLY, AND METHOD...
Publication number
20220336186
Publication date
Oct 20, 2022
lCT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Benjamin John Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS
Publication number
20220246395
Publication date
Aug 4, 2022
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...
Publication number
20220223386
Publication date
Jul 14, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOTTOM AND MIDDLE EDGE RINGS
Publication number
20220189745
Publication date
Jun 16, 2022
LAM RESEARCH CORPORATION
Hiran Rajitha RATHNASINGHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOTTOM AND MIDDLE EDGE RINGS
Publication number
20220189744
Publication date
Jun 16, 2022
LAM RESEARCH CORPORATION
Hiran Rajitha RATHNASINGHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D MAPPING OF SAMPLES IN CHARGED PARTICLE MICROSCOPY
Publication number
20220181116
Publication date
Jun 9, 2022
FEI Company
Jaroslav Kamenec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOTTOM ELECTRODE ASSEMBLY, PLASMA PROCESSING APPARATUS, AND METHOD...
Publication number
20220165551
Publication date
May 26, 2022
Advanced Micro-Fabrication Equipment Inc. China
Jiangtao PEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20220148851
Publication date
May 12, 2022
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
Publication number
20220139665
Publication date
May 5, 2022
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...
Publication number
20220108865
Publication date
Apr 7, 2022
BORRIES PTE. LTD.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING AND/OR IMAGI...
Publication number
20210366683
Publication date
Nov 25, 2021
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE
Publication number
20210305007
Publication date
Sep 30, 2021
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS