Focussed beam

Industry

CPC
B81C2201/0143

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0143Focussed beam

Industries

Patents Grantslast 30 patents

Information Patent Grant
Laser-assisted material phase-change and expulsion micro-machining...
- Patent number 12,077,432
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Prashant Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thin-film crystalline structure with surfaces having selected plane...
- Patent number 12,057,147
- Issue date Aug 6, 2024
- Seagate Technology LLC
- Tong Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fluid sensor system
- Patent number 12,044,646
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chwen Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
- Patent number 11,939,216
- Issue date Mar 26, 2024
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capless semiconductor package with a micro-electromechanical system...
- Patent number 11,897,763
- Issue date Feb 13, 2024
- STMicroelectronics, Inc.
- Jefferson Sismundo Talledo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating micro electro-mechanical systems structures
- Patent number 11,845,654
- Issue date Dec 19, 2023
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with particle filter and method of manufacture
- Patent number 11,787,689
- Issue date Oct 17, 2023
- TDK Corporation
- Wolfgang Pahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding process for forming semiconductor device structure
- Patent number 11,772,963
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Online trimming device and method for micro-shell resonator gyroscope
- Patent number 11,703,356
- Issue date Jul 18, 2023
- NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY
- Kun Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three dimensional microstructures with selectively removed regions...
- Patent number 11,703,331
- Issue date Jul 18, 2023
- The Regents of the University of Michigan
- Khalil Najafi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method for manufacturing same
- Patent number 11,673,797
- Issue date Jun 13, 2023
- SHANGHAI INDUSTRIAL UTECHNOLOGY RESEARCH INSTITUTE
- Shinan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical nanopore coupled with a pair of transverse electrodes havi...
- Patent number 11,644,435
- Issue date May 9, 2023
- Seagate Technology LLC
- ShuaiGang Xiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabricating calcite nanofluidic channels
- Patent number 11,628,406
- Issue date Apr 18, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for sensors on glass
- Patent number 11,608,265
- Issue date Mar 21, 2023
- Infineon Technologies AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing fine structures in the volume of a substrate c...
- Patent number 11,534,754
- Issue date Dec 27, 2022
- Schott AG
- Andreas Ortner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for producing at least one recess in a material by means of...
- Patent number 11,478,880
- Issue date Oct 25, 2022
- LPKF Laser & Electronics AG
- Roman Ostholt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transparent material processing method, transparent material proces...
- Patent number 11,471,981
- Issue date Oct 18, 2022
- HIROSAKI UNIVERSITY
- Yasutaka Hanada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Bonding pad layer system, gas sensor and method for manufacturing a...
- Patent number 11,407,635
- Issue date Aug 9, 2022
- Robert Bosch GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing microstructures
- Patent number 11,383,972
- Issue date Jul 12, 2022
- LPKF Laser & Electronics AG
- Roman Ostholt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing microstructures in a glass substrate
- Patent number 11,377,387
- Issue date Jul 5, 2022
- LPKF Laser & Electronics AG
- Roman Ostholt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for manufacturing microfluidic chip with femto...
- Patent number 11,370,657
- Issue date Jun 28, 2022
- CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY
- Heping Zeng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
MEMS microphone with acoustic relief channels
- Patent number 11,197,088
- Issue date Dec 7, 2021
- Knowles Electronics, LLC
- Vahid Naderyan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding process for forming semiconductor device structure
- Patent number 11,174,156
- Issue date Nov 16, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical window structure and cor...
- Patent number 11,124,412
- Issue date Sep 21, 2021
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabricating calcite nanofluidic channels
- Patent number 10,926,227
- Issue date Feb 23, 2021
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor sensor device and method for fabricating the same
- Patent number 10,818,805
- Issue date Oct 27, 2020
- Infineon Technologies AG
- Franz-Peter Kalz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Passive wireless pressure sensor for harsh environments
- Patent number 10,794,777
- Issue date Oct 6, 2020
- University of Florida Research Foundation, Incorporated
- John E. Rogers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inorganic wafer having through-holes attached to semiconductor wafer
- Patent number 10,756,003
- Issue date Aug 25, 2020
- Corning Incorporated
- Daniel Wayne Levesque
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor characteristic evaluation method and charged particle beam d...
- Patent number 10,737,937
- Issue date Aug 11, 2020
- Hitachi, Ltd.
- Toshiyuki Mine
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical inertial sensor
- Patent number 10,730,746
- Issue date Aug 4, 2020
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF MEMS DEVICE
- Publication number 20240351865
- Publication date Oct 24, 2024
- XINTEC INC.
- Jiun-Yen LAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN-FILM CRYSTALLINE STRUCTURE WITH SURFACES HAVING SELECTED PLANE...
- Publication number 20240339125
- Publication date Oct 10, 2024
- SEAGATE TECHNOLOGY LLC
- Tong Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUID SENSOR SYSTEM
- Publication number 20240337618
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHWEN YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
- Publication number 20240253976
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...
- Publication number 20240253977
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
- Publication number 20240124300
- Publication date Apr 18, 2024
- STMICROELECTRONICS, INC.
- Jefferson Sismundo TALLEDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three Dimensional Microstructures With Selectively Removed Regions...
- Publication number 20240019249
- Publication date Jan 18, 2024
- The Regents of the University of Michigan
- Khalil NAJAFI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20230365402
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS
- Publication number 20230067030
- Publication date Mar 2, 2023
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE WITH EMBEDDED INTEGRATED CIRCUIT
- Publication number 20230030627
- Publication date Feb 2, 2023
- STMicroelectronics Pte Ltd
- Jing-En LUAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...
- Publication number 20220401953
- Publication date Dec 22, 2022
- SCHOTT AG
- Andreas Ortner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FLUID SENSOR SYSTEM
- Publication number 20220365019
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHWEN YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20220258185
- Publication date Aug 18, 2022
- SUZHOU SKYWELL HEALTHCARE INFORMATION CO., LTD.
- Yu GU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20220063993
- Publication date Mar 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANU...
- Publication number 20220043027
- Publication date Feb 10, 2022
- MPI Corporation
- Yu-Chen HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for Sensors on Glass
- Publication number 20220009771
- Publication date Jan 13, 2022
- INFINEON TECHNOLOGIES AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20210395081
- Publication date Dec 23, 2021
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING MICROSTRUCTURES
- Publication number 20210347637
- Publication date Nov 11, 2021
- LPKF Laser & Electronics AG
- Roman Ostholt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING MICROFLUIDIC CHIP WITH FEMTO...
- Publication number 20210323814
- Publication date Oct 21, 2021
- Chongqing Institute of East China Normal University
- Heping ZENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD WITH STEALTH DICING PROCESS FOR FABRICATING MEMS SEMICONDUCT...
- Publication number 20210309513
- Publication date Oct 7, 2021
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME
- Publication number 20210284528
- Publication date Sep 16, 2021
- Shanghai Industrial ?Technology Research Institute
- SHINAN WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
- Publication number 20210179423
- Publication date Jun 17, 2021
- STMICROELECTRONICS, INC.
- Jefferson Sismundo TALLEDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATING CALCITE NANOFLUIDIC CHANNELS
- Publication number 20210162352
- Publication date Jun 3, 2021
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...
- Publication number 20210139321
- Publication date May 13, 2021
- Massachusetts Institute of Technology
- Prashant Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TRANSPARENT MATERIAL PROCESSING METHOD, TRANSPARENT MATERIAL PROCES...
- Publication number 20210061650
- Publication date Mar 4, 2021
- HIROSAKI UNIVERSITY
- Yasutaka HANADA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEMS MICROPHONE WITH ACOUSTIC RELIEF CHANNELS
- Publication number 20200389721
- Publication date Dec 10, 2020
- KNOWLES ELECTRONICS, LLC
- Vahid Naderyan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20200223689
- Publication date Jul 16, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATING CALCITE NANOFLUIDIC CHANNELS
- Publication number 20200171492
- Publication date Jun 4, 2020
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDING PAD LAYER SYSTEM, GAS SENSOR AND METHOD FOR MANUFACTURING A...
- Publication number 20200140261
- Publication date May 7, 2020
- ROBERT BOSCH GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANU...
- Publication number 20200116758
- Publication date Apr 16, 2020
- MPI Corporation
- Yu-Chen HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Focussed beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser-assisted material phase-change and expulsion micro-machining...

Thin-film crystalline structure with surfaces having selected plane...

Fluid sensor system

Method with stealth dicing process for fabricating MEMS semiconduct...

Capless semiconductor package with a micro-electromechanical system...

Methods of fabricating micro electro-mechanical systems structures

MEMS device with particle filter and method of manufacture

Bonding process for forming semiconductor device structure

Online trimming device and method for micro-shell resonator gyroscope

Three dimensional microstructures with selectively removed regions...

Microstructure and method for manufacturing same

Vertical nanopore coupled with a pair of transverse electrodes havi...

Fabricating calcite nanofluidic channels

Method and structure for sensors on glass

Method for producing fine structures in the volume of a substrate c...

Method for producing at least one recess in a material by means of...

Transparent material processing method, transparent material proces...

Bonding pad layer system, gas sensor and method for manufacturing a...

Method for producing microstructures

Method for producing microstructures in a glass substrate

Method and apparatus for manufacturing microfluidic chip with femto...

MEMS microphone with acoustic relief channels

Bonding process for forming semiconductor device structure

Manufacturing method for a micromechanical window structure and cor...

Fabricating calcite nanofluidic channels

Semiconductor sensor device and method for fabricating the same

Passive wireless pressure sensor for harsh environments

Inorganic wafer having through-holes attached to semiconductor wafer

Sensor characteristic evaluation method and charged particle beam d...

Method for manufacturing a micromechanical inertial sensor

Patents Applicationslast 30 patents

MANUFACTURING METHOD OF MEMS DEVICE

THIN-FILM CRYSTALLINE STRUCTURE WITH SURFACES HAVING SELECTED PLANE...

FLUID SENSOR SYSTEM

MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...

CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...

Three Dimensional Microstructures With Selectively Removed Regions...

BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE

FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS

SENSOR PACKAGE WITH EMBEDDED INTEGRATED CIRCUIT

METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...

FLUID SENSOR SYSTEM

MICROFLUIDIC DEVICE AND METHOD FOR MANUFACTURING THE SAME

BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE

PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANU...

Method and Structure for Sensors on Glass

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

METHOD FOR PRODUCING MICROSTRUCTURES

METHOD AND APPARATUS FOR MANUFACTURING MICROFLUIDIC CHIP WITH FEMTO...

METHOD WITH STEALTH DICING PROCESS FOR FABRICATING MEMS SEMICONDUCT...

MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME

CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...

FABRICATING CALCITE NANOFLUIDIC CHANNELS

Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...

TRANSPARENT MATERIAL PROCESSING METHOD, TRANSPARENT MATERIAL PROCES...

MEMS MICROPHONE WITH ACOUSTIC RELIEF CHANNELS

BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE

FABRICATING CALCITE NANOFLUIDIC CHANNELS

BONDING PAD LAYER SYSTEM, GAS SENSOR AND METHOD FOR MANUFACTURING A...

PROBE MODULE HAVING MICROELECTROMECHANICAL PROBE AND METHOD OF MANU...