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STOPPER BUMP STRUCTURES FOR MEMS DEVICE
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Publication number 20240375939
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Publication date Nov 14, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wei-Jhih Mao
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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DOUBLE LAYER MEMS DEVICES
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Publication number 20240286890
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Publication date Aug 29, 2024
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Murata Manufacturing Co., Ltd.
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Altti TORKKELI
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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INTERPOSER FOR DAMPING MEMS MICROPHONES
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Publication number 20240279049
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Publication date Aug 22, 2024
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HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
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Achim Bittner
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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STOPPER BUMP ON ROTOR
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Publication number 20240190698
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Publication date Jun 13, 2024
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Murata Manufacturing Co., Ltd.
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Matti LIUKKU
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS DEVICE
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Publication number 20240083741
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Publication date Mar 14, 2024
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Rohm Co., Ltd.
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Daisuke NISHINOHARA
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ELECTROMECHANICAL MICROSYSTEM
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Publication number 20240034616
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Publication date Feb 1, 2024
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Commissariat A L'Energie Atomique et Aux Energies Alternatives
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Laurent MOLLARD
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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SENSOR AND SENSOR SYSTEM"
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Publication number 20230288270
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Publication date Sep 14, 2023
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Kabushiki Kaisha Toshiba
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Yoshihiko KURUI
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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STOPPER BUMP STRUCTURES FOR MEMS DEVICE
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Publication number 20230257256
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Publication date Aug 17, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wei-Jhih Mao
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MICROELECTROMECHANICAL SYSTEM DEVICE
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Publication number 20230192476
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Publication date Jun 22, 2023
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Taiwan Semiconductor Manufacturing company Ltd.
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CHEN HSIUNG YANG
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ROBUST INERTIAL SENSOR SELF-TEST
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Publication number 20230183058
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Publication date Jun 15, 2023
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InvenSense, Inc.
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Aurelio Pellegrini
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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