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H01J37/3053
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/3053
for evaporating or etching
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Patents Grants
last 30 patents
Information
Patent Grant
System and methods for automated processing of multiple samples in...
Patent number
12,165,833
Issue date
Dec 10, 2024
FEI Company
Michal Hrouzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching isolation features and dense features within a substrate
Patent number
12,119,232
Issue date
Oct 15, 2024
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
Patent number
12,119,203
Issue date
Oct 15, 2024
Canon Anelva Corporation
Yasushi Yasumatsu
B08 - CLEANING
Information
Patent Grant
Modulation of rolling k vectors of angled gratings
Patent number
12,106,935
Issue date
Oct 1, 2024
Applied Materials, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanned angled etching apparatus and techniques providing separate...
Patent number
12,106,936
Issue date
Oct 1, 2024
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liner, reaction chamber and semiconductor processing equipment
Patent number
12,106,934
Issue date
Oct 1, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and system
Patent number
12,087,591
Issue date
Sep 10, 2024
Tokyo Electron Limited
Gen Tamamushi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer etch and ion beam etch patterning
Patent number
12,080,562
Issue date
Sep 3, 2024
Lam Research Corporation
Samantha Siamhwa Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching apparatus and etching method
Patent number
12,020,892
Issue date
Jun 25, 2024
Kioxia Corporation
Yusuke Goki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and devices for extending a time period until changing a me...
Patent number
11,977,097
Issue date
May 7, 2024
Carl Zeiss SMT GmbH
Gabriel Baralia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grid structures of ion beam etching (IBE) systems
Patent number
11,961,706
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic adjustment method and automatic adjustment device of beam...
Patent number
11,955,309
Issue date
Apr 9, 2024
United Microelectronics Corp.
Zheng-Yang Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bias supply with resonant switching
Patent number
11,942,309
Issue date
Mar 26, 2024
Advanced Energy Industries, Inc.
Maneesh Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor structure
Patent number
11,908,700
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Nai-Han Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
11,894,213
Issue date
Feb 6, 2024
HITACHI HIGH-TECH CORPORATION
Asako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for structuring a decorative of technical pattern in an obje...
Patent number
11,894,215
Issue date
Feb 6, 2024
Comadur S.A.
Alexis Boulmay
G04 - HOROLOGY
Information
Patent Grant
Angle control for neutral reactive species generated in a plasma
Patent number
11,881,378
Issue date
Jan 23, 2024
Applied Materials, Inc.
Glen F. R. Gilchrist
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method for semiconductor device
Patent number
11,862,471
Issue date
Jan 2, 2024
Kioxia Corporation
Atsushi Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Depositive shielding for fiducial protection from redeposition
Patent number
11,817,395
Issue date
Nov 14, 2023
FEI Company
Sean Morgan-Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion gun and vacuum processing apparatus
Patent number
11,810,748
Issue date
Nov 7, 2023
Canon Anelva Corporation
Tsutomu Hiroishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam source for optical device fabrication using a segmented io...
Patent number
11,810,755
Issue date
Nov 7, 2023
Applied Materials, Inc.
Ludovic Godet
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus for directional processing
Patent number
11,791,126
Issue date
Oct 17, 2023
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma apparatus and methods of manufacturing semiconductor device...
Patent number
11,776,858
Issue date
Oct 3, 2023
Samsung Electronics Co., Ltd.
Joonsung Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material recovery systems for optical components
Patent number
11,715,622
Issue date
Aug 1, 2023
KLA Corporation
Gildardo Delgado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanned angled etching apparatus and techniques providing separate...
Patent number
11,715,621
Issue date
Aug 1, 2023
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma block with integrated cooling
Patent number
11,710,630
Issue date
Jul 25, 2023
Applied Materials, Inc.
Tanmay P. Gurjar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method and substrate processing apparatus
Patent number
11,688,650
Issue date
Jun 27, 2023
Tokyo Electron Limited
Gaku Shimoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulation of rolling k vectors of angled gratings
Patent number
11,670,482
Issue date
Jun 6, 2023
Applied Materials, Inc.
Joseph C. Olson
G02 - OPTICS
Information
Patent Grant
Beam steering correction for attenuating the degradation of positio...
Patent number
11,664,187
Issue date
May 30, 2023
Intel Corporation
Amir Raveh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlled/electrically biased wafer surround
Patent number
11,664,193
Issue date
May 30, 2023
Applied Materials, Inc.
Kevin R. Anglin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IN-VACUUM CHAMBER CONTROLLED-GAS-FILM DEVICE TO REDUCE LASER ABLATI...
Publication number
20240363304
Publication date
Oct 31, 2024
FEI Company
Jaroslav Velcovský
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GUIDING STRUCTURES FOR FABRICATION OF ANGLED FEATURES IN A SEMICOND...
Publication number
20240319591
Publication date
Sep 26, 2024
International Business Machines Corporation
Steven Holmes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A ME...
Publication number
20240272198
Publication date
Aug 15, 2024
Carl Zeiss SMT GMBH
Gabriel Baralia
G01 - MEASURING TESTING
Information
Patent Application
OPERATING A PARTICLE BEAM APPARATUS
Publication number
20240274397
Publication date
Aug 15, 2024
CARL ZEISS MICROSCOPY GMBH
Sebastian Schaedler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Apparatus
Publication number
20240258062
Publication date
Aug 1, 2024
HITACHI HIGH-TECH CORPORATION
Shota AIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Grid Structures Of Ion Beam Etching (IBE) Systems
Publication number
20240222071
Publication date
Jul 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chansyun David YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Fabrication of Shield Plate
Publication number
20240208762
Publication date
Jun 27, 2024
JEOL Ltd.
Tsutomu Negishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIAS SUPPLY WITH RESONANT SWITCHING
Publication number
20240194452
Publication date
Jun 13, 2024
Advanced Energy Industries, Inc.
Maneesh Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION MILLING DEVICE
Publication number
20240194443
Publication date
Jun 13, 2024
HITACHI HIGH-TECH CORPORATION
Kengo ASAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR PREPARING A SPECIMEN
Publication number
20240071720
Publication date
Feb 29, 2024
FEI Company
Jamie Dee Gravell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240071731
Publication date
Feb 29, 2024
Linco Technology Co., Ltd.
Yi-Yuan HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS INJECTION SUBSYSTEM FOR USE IN AN INSPECTION SYSTEM TO INSPECT...
Publication number
20230402251
Publication date
Dec 14, 2023
Carl Zeiss SMT GmbH
Louise Barris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC SELECTION OF STRUCTURES-OF-INTEREST FOR LAMELLA SAMPLE PR...
Publication number
20230394852
Publication date
Dec 7, 2023
FEI Company
Radim Kríz
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...
Publication number
20230377833
Publication date
Nov 23, 2023
FEI Company
Michal HROUZEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANGLE CONTROL FOR NEUTRAL REACTIVE SPECIES GENERATED IN A PLASMA
Publication number
20230369013
Publication date
Nov 16, 2023
Applied Materials, Inc.
Glen F. R. Gilchrist
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device and Ion Milling Method
Publication number
20230369010
Publication date
Nov 16, 2023
HITACHI HIGH-TECH CORPORATION
Toru Iwaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
Publication number
20230335375
Publication date
Oct 19, 2023
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING MACHINE AND LIFTING AND ROTATING PLATFORM DEVICE T...
Publication number
20230326709
Publication date
Oct 12, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS
Publication number
20230260746
Publication date
Aug 17, 2023
Applied Materials, Inc.
Joseph C. OLSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIAS SUPPLY WITH RESONANT SWITCHING
Publication number
20230253187
Publication date
Aug 10, 2023
Advanced Energy Industries, Inc.
Maneesh Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS
Publication number
20230223234
Publication date
Jul 13, 2023
Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
Bert Scheffel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of Automatic Detection of Required Peak for Sample Machining...
Publication number
20230215689
Publication date
Jul 6, 2023
TESCAN Brno, s.r.o.
Sharang Sharang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCE BAFFLE, ION ETCHING MACHINE, AND USAGE METHOD THEREFOR
Publication number
20230207250
Publication date
Jun 29, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Yaoyao ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTI-BREAKDOWN ION SOURCE DISCHARGE APPARATUS
Publication number
20230207260
Publication date
Jun 29, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Yaoyao ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY FEEDBACK FOR IMPROVED MILLING ACCURACY
Publication number
20230197403
Publication date
Jun 22, 2023
FEI Company
Thomas Gary Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAMINATED BODY AND LAMINATED BODY MANUFACTURING METHOD
Publication number
20230187338
Publication date
Jun 15, 2023
CANON ANELVA CORPORATION
HIROSHI YAKUSHIJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION GUN AND VACUUM PROCESSING APPARATUS
Publication number
20230154721
Publication date
May 18, 2023
CANON ANELVA CORPORATION
Tsutomu Hiroishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR CHAMBER COMPONENTS WITH HIGH-PERFORMANCE COATING
Publication number
20230093478
Publication date
Mar 23, 2023
Applied Materials, Inc.
Laksheswar Kalita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
Publication number
20230081844
Publication date
Mar 16, 2023
Carl Zeiss SMT GMBH
Thorsten Hofmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOMASK REPAIRING METHOD AND SYSTEM THEREOF
Publication number
20230069679
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing company Ltd.
HAO-MING CHANG
H01 - BASIC ELECTRIC ELEMENTS