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B81B3/0054
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B3/00
Devices comprising flexible or deformable elements
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B81B3/0054
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Patents Grants
last 30 patents
Information
Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
Patent number
11,993,510
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Programmable surface
Patent number
11,473,567
Issue date
Oct 18, 2022
Toyota Motor Engineering & Manufacturing North America, Inc.
Michael Paul Rowe
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
Patent number
11,420,866
Issue date
Aug 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
10,961,113
Issue date
Mar 30, 2021
Chien-Chang Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional electromechanical adhesive devices and related sy...
Patent number
10,919,158
Issue date
Feb 16, 2021
Massachusetts Institute of Technology
Anastasios John Hart
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and method of manufacturing the same
Patent number
10,841,711
Issue date
Nov 17, 2020
DB HITEK CO., LTD.
Jong Won Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electromagnetically actuated microelectromechanical switch
Patent number
10,825,628
Issue date
Nov 3, 2020
Analog Devices Global Unlimited Company
Check F. Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor device employing MEMS
Patent number
10,760,910
Issue date
Sep 1, 2020
Kabushiki Kaisha Toshiba
Ryunosuke Gando
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Rotational speed sensor with minimized interference movements in th...
Patent number
10,655,965
Issue date
May 19, 2020
Robert Bosch GmbH
Benjamin Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electromagnetically actuated latched switches
Patent number
10,580,604
Issue date
Mar 3, 2020
The Regents of the University of California
Mark Bachman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
10,562,759
Issue date
Feb 18, 2020
Chien-Chang Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
10,562,760
Issue date
Feb 18, 2020
Chien-Chang Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS sound transducer, MEMS microphone and method for providing a M...
Patent number
10,469,958
Issue date
Nov 5, 2019
Infineon Technologies AG
Stefan Barzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical systems (MEMS) terminal structure of board...
Patent number
10,418,735
Issue date
Sep 17, 2019
Advanced-Connectek Inc.
Kuo-Ching Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Angular velocity acquisition device and electronic component for ac...
Patent number
10,401,172
Issue date
Sep 3, 2019
Kabushiki Kaisha Toshiba
Haruka Yamamoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Scanning mirror device and a method for manufacturing it
Patent number
10,377,625
Issue date
Aug 13, 2019
Murata Manufacturing Co., Ltd.
Altti Torkkeli
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator, shutter device, fluid control device, switch, and two-dim...
Patent number
10,340,818
Issue date
Jul 2, 2019
National University Corporation Shizuoka University
Masato Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a rolled-up electrical or electronic component
Patent number
10,280,071
Issue date
May 7, 2019
LEIBNIZ-INSTITUT FUER FESTKOERPER-UND WRKSTOFFFORSCHUNG DRESDEN E.V
Daniel Grimm
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS accelerometer with Z axis anchor tracking
Patent number
10,203,351
Issue date
Feb 12, 2019
Analog Devices, Inc.
Xin Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acceleration sensor having spring force compensation
Patent number
10,168,351
Issue date
Jan 1, 2019
Northrop Grumman Litef GmbH
Stefan Koenig
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices and fabrication methods thereof
Patent number
10,160,633
Issue date
Dec 25, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system with spring for magnet placement
Patent number
10,125,013
Issue date
Nov 13, 2018
Intel Corporation
Robert Starkston
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Check-valve and microchemical chip using the same
Patent number
10,100,949
Issue date
Oct 16, 2018
ASAHI FR R&D CO., LTD.
Tsutomu Takano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated electroacoustic MEMS transducer with improved sensitivit...
Patent number
10,057,684
Issue date
Aug 21, 2018
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromirror device and projection device
Patent number
10,001,643
Issue date
Jun 19, 2018
Robert Bosch GmbH
Rainer Straub
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectronic component arrangement and production method for a m...
Patent number
9,919,912
Issue date
Mar 20, 2018
Robert Bosch GmbH
Frederik Ante
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
9,902,610
Issue date
Feb 27, 2018
Chien-Chan Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electromagnetically actuated latched switches
Patent number
9,601,280
Issue date
Mar 21, 2017
The Regents of the University of California
Mark Bachman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Out-of plane travel restriction structures
Patent number
9,571,008
Issue date
Feb 14, 2017
Hewlett-Packard Development Company, L.P.
Donald J. Milligan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming normally closed micromechanical device comprisin...
Patent number
9,284,183
Issue date
Mar 15, 2016
HT MicroAnalytical, Inc.
Todd Richard Christenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES
Publication number
20240327200
Publication date
Oct 3, 2024
Omnitron Sensors
Trent Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20240270565
Publication date
Aug 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electromechanical Microsystem for Moving a Mechanical Part in Two O...
Publication number
20240250620
Publication date
Jul 25, 2024
SILMACH
Thierry CÔTE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DIE AND MEMS-BASED SENSOR
Publication number
20240208802
Publication date
Jun 27, 2024
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR DESIGN WITH REJECTION OF EXTERNAL SHEAR FORCE
Publication number
20230365397
Publication date
Nov 16, 2023
InvenSense, Inc.
Mrigank Sharma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPILLARY BRIDGE ENHANCED FLUID GRIP DEVICE
Publication number
20230112010
Publication date
Apr 13, 2023
BVW HOLDING AG
Michael Milbocker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20220306454
Publication date
Sep 29, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DIE AND MEMS-BASED SENSOR
Publication number
20220298005
Publication date
Sep 22, 2022
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20210292157
Publication date
Sep 23, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVIN...
Publication number
20210139316
Publication date
May 13, 2021
Innovative Interface Laboratory Corp.
Yu-Wen Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20200021920
Publication date
Jan 16, 2020
DB HITEK CO., LTD.
Jong Won SUN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-DIMENSIONAL ELECTROMECHANICAL ADHESIVE DEVICES AND RELATED SY...
Publication number
20190240845
Publication date
Aug 8, 2019
Massachusetts Institute of Technology
Anastasios John Hart
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Hierarchical Assembly of Self-Replicating Spacecraft Using Distribu...
Publication number
20190077030
Publication date
Mar 14, 2019
Massachusetts Institute of Technology
William Kai Langford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMAGNETICALLY ACTUATED MICROELECTROMECHANICAL SWITCH
Publication number
20190019644
Publication date
Jan 17, 2019
Analog Devices Global Unlimited Company
Check F. Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) TERMINAL STRUCTURE OF BOARD...
Publication number
20180309216
Publication date
Oct 25, 2018
ADVANCED CONNECTEK INC.
Kuo-Ching Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROTATIONAL SPEED SENSOR WITH MINIMIZED INTERFERENCE MOVEMENTS IN TH...
Publication number
20180202808
Publication date
Jul 19, 2018
ROBERT BOSCH GmbH
Benjamin Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED ELECTROACOUSTIC MEMS TRANSDUCER WITH IMPROVED SENSITIVIT...
Publication number
20180152788
Publication date
May 31, 2018
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHECK-VALVE AND MICROCHEMICAL CHIP USING THE SAME
Publication number
20180066769
Publication date
Mar 8, 2018
ASAHI FR R&D CO., LTD.
Tsutomu TAKANO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACCELERATION SENSOR HAVING SPRING FORCE COMPENSATION
Publication number
20180024160
Publication date
Jan 25, 2018
NORTHROP GRUMMAN LITEF GMBH
STEFAN KOENIG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20170355592
Publication date
Dec 14, 2017
Foresee Technology Corp.
Chien-Chang CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20170313575
Publication date
Nov 2, 2017
Foresee Technology Corp.
Chien-Chang CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20170313576
Publication date
Nov 2, 2017
Foresee Technology Corp.
Chien-Chang CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SCANNING MIRROR DEVICE AND A METHOD FOR MANUFACTURING IT
Publication number
20170297898
Publication date
Oct 19, 2017
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMIRROR DEVICE AND PROJECTION DEVICE
Publication number
20170108693
Publication date
Apr 20, 2017
ROBERT BOSCH GmbH
Rainer Straub
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectronic Component Arrangement and Production Method for a M...
Publication number
20170088412
Publication date
Mar 30, 2017
ROBERT BOSCH GmbH
Frederik Ante
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Devices and Fabrication Methods Thereof
Publication number
20170008758
Publication date
Jan 12, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20160332865
Publication date
Nov 17, 2016
Foresee Technology Corp.
Chien-Chan CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PRESSURE SENSOR AND METHOD OF FABRICATING SAME
Publication number
20160272487
Publication date
Sep 22, 2016
Mitsubishi Electric Corporation
Kimitoshi SATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dim...
Publication number
20160204716
Publication date
Jul 14, 2016
NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
Masato SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND...
Publication number
20150217989
Publication date
Aug 6, 2015
SEIKO EPSON CORPORATION
Yusuke MATSUZAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY