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B81B3/0054
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B3/00
Devices comprising flexible or deformable elements
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B81B3/0054
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS die and MEMS-based sensor
Patent number
12,240,748
Issue date
Mar 4, 2025
Knowles Electronics, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sound producing cell
Patent number
12,192,722
Issue date
Jan 7, 2025
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
Patent number
11,993,510
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Programmable surface
Patent number
11,473,567
Issue date
Oct 18, 2022
Toyota Motor Engineering & Manufacturing North America, Inc.
Michael Paul Rowe
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
Patent number
11,420,866
Issue date
Aug 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
10,961,113
Issue date
Mar 30, 2021
Chien-Chang Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional electromechanical adhesive devices and related sy...
Patent number
10,919,158
Issue date
Feb 16, 2021
Massachusetts Institute of Technology
Anastasios John Hart
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and method of manufacturing the same
Patent number
10,841,711
Issue date
Nov 17, 2020
DB HITEK CO., LTD.
Jong Won Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electromagnetically actuated microelectromechanical switch
Patent number
10,825,628
Issue date
Nov 3, 2020
Analog Devices Global Unlimited Company
Check F. Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor device employing MEMS
Patent number
10,760,910
Issue date
Sep 1, 2020
Kabushiki Kaisha Toshiba
Ryunosuke Gando
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Rotational speed sensor with minimized interference movements in th...
Patent number
10,655,965
Issue date
May 19, 2020
Robert Bosch GmbH
Benjamin Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electromagnetically actuated latched switches
Patent number
10,580,604
Issue date
Mar 3, 2020
The Regents of the University of California
Mark Bachman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
10,562,759
Issue date
Feb 18, 2020
Chien-Chang Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
10,562,760
Issue date
Feb 18, 2020
Chien-Chang Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS sound transducer, MEMS microphone and method for providing a M...
Patent number
10,469,958
Issue date
Nov 5, 2019
Infineon Technologies AG
Stefan Barzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical systems (MEMS) terminal structure of board...
Patent number
10,418,735
Issue date
Sep 17, 2019
Advanced-Connectek Inc.
Kuo-Ching Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Angular velocity acquisition device and electronic component for ac...
Patent number
10,401,172
Issue date
Sep 3, 2019
Kabushiki Kaisha Toshiba
Haruka Yamamoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Scanning mirror device and a method for manufacturing it
Patent number
10,377,625
Issue date
Aug 13, 2019
Murata Manufacturing Co., Ltd.
Altti Torkkeli
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator, shutter device, fluid control device, switch, and two-dim...
Patent number
10,340,818
Issue date
Jul 2, 2019
National University Corporation Shizuoka University
Masato Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a rolled-up electrical or electronic component
Patent number
10,280,071
Issue date
May 7, 2019
LEIBNIZ-INSTITUT FUER FESTKOERPER-UND WRKSTOFFFORSCHUNG DRESDEN E.V
Daniel Grimm
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS accelerometer with Z axis anchor tracking
Patent number
10,203,351
Issue date
Feb 12, 2019
Analog Devices, Inc.
Xin Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acceleration sensor having spring force compensation
Patent number
10,168,351
Issue date
Jan 1, 2019
Northrop Grumman Litef GmbH
Stefan Koenig
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices and fabrication methods thereof
Patent number
10,160,633
Issue date
Dec 25, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system with spring for magnet placement
Patent number
10,125,013
Issue date
Nov 13, 2018
Intel Corporation
Robert Starkston
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Check-valve and microchemical chip using the same
Patent number
10,100,949
Issue date
Oct 16, 2018
ASAHI FR R&D CO., LTD.
Tsutomu Takano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated electroacoustic MEMS transducer with improved sensitivit...
Patent number
10,057,684
Issue date
Aug 21, 2018
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromirror device and projection device
Patent number
10,001,643
Issue date
Jun 19, 2018
Robert Bosch GmbH
Rainer Straub
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectronic component arrangement and production method for a m...
Patent number
9,919,912
Issue date
Mar 20, 2018
Robert Bosch GmbH
Frederik Ante
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
9,902,610
Issue date
Feb 27, 2018
Chien-Chan Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electromagnetically actuated latched switches
Patent number
9,601,280
Issue date
Mar 21, 2017
The Regents of the University of California
Mark Bachman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES
Publication number
20240327200
Publication date
Oct 3, 2024
Omnitron Sensors
Trent Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20240270565
Publication date
Aug 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electromechanical Microsystem for Moving a Mechanical Part in Two O...
Publication number
20240250620
Publication date
Jul 25, 2024
SILMACH
Thierry CÔTE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DIE AND MEMS-BASED SENSOR
Publication number
20240208802
Publication date
Jun 27, 2024
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR DESIGN WITH REJECTION OF EXTERNAL SHEAR FORCE
Publication number
20230365397
Publication date
Nov 16, 2023
InvenSense, Inc.
Mrigank Sharma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPILLARY BRIDGE ENHANCED FLUID GRIP DEVICE
Publication number
20230112010
Publication date
Apr 13, 2023
BVW HOLDING AG
Michael Milbocker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20220306454
Publication date
Sep 29, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DIE AND MEMS-BASED SENSOR
Publication number
20220298005
Publication date
Sep 22, 2022
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
Publication number
20210292157
Publication date
Sep 23, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVIN...
Publication number
20210139316
Publication date
May 13, 2021
Innovative Interface Laboratory Corp.
Yu-Wen Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20200021920
Publication date
Jan 16, 2020
DB HITEK CO., LTD.
Jong Won SUN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-DIMENSIONAL ELECTROMECHANICAL ADHESIVE DEVICES AND RELATED SY...
Publication number
20190240845
Publication date
Aug 8, 2019
Massachusetts Institute of Technology
Anastasios John Hart
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Hierarchical Assembly of Self-Replicating Spacecraft Using Distribu...
Publication number
20190077030
Publication date
Mar 14, 2019
Massachusetts Institute of Technology
William Kai Langford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMAGNETICALLY ACTUATED MICROELECTROMECHANICAL SWITCH
Publication number
20190019644
Publication date
Jan 17, 2019
Analog Devices Global Unlimited Company
Check F. Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) TERMINAL STRUCTURE OF BOARD...
Publication number
20180309216
Publication date
Oct 25, 2018
ADVANCED CONNECTEK INC.
Kuo-Ching Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROTATIONAL SPEED SENSOR WITH MINIMIZED INTERFERENCE MOVEMENTS IN TH...
Publication number
20180202808
Publication date
Jul 19, 2018
ROBERT BOSCH GmbH
Benjamin Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED ELECTROACOUSTIC MEMS TRANSDUCER WITH IMPROVED SENSITIVIT...
Publication number
20180152788
Publication date
May 31, 2018
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHECK-VALVE AND MICROCHEMICAL CHIP USING THE SAME
Publication number
20180066769
Publication date
Mar 8, 2018
ASAHI FR R&D CO., LTD.
Tsutomu TAKANO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACCELERATION SENSOR HAVING SPRING FORCE COMPENSATION
Publication number
20180024160
Publication date
Jan 25, 2018
NORTHROP GRUMMAN LITEF GMBH
STEFAN KOENIG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20170355592
Publication date
Dec 14, 2017
Foresee Technology Corp.
Chien-Chang CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20170313575
Publication date
Nov 2, 2017
Foresee Technology Corp.
Chien-Chang CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20170313576
Publication date
Nov 2, 2017
Foresee Technology Corp.
Chien-Chang CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SCANNING MIRROR DEVICE AND A METHOD FOR MANUFACTURING IT
Publication number
20170297898
Publication date
Oct 19, 2017
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMIRROR DEVICE AND PROJECTION DEVICE
Publication number
20170108693
Publication date
Apr 20, 2017
ROBERT BOSCH GmbH
Rainer Straub
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectronic Component Arrangement and Production Method for a M...
Publication number
20170088412
Publication date
Mar 30, 2017
ROBERT BOSCH GmbH
Frederik Ante
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Devices and Fabrication Methods Thereof
Publication number
20170008758
Publication date
Jan 12, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT PILLAR
Publication number
20160332865
Publication date
Nov 17, 2016
Foresee Technology Corp.
Chien-Chan CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PRESSURE SENSOR AND METHOD OF FABRICATING SAME
Publication number
20160272487
Publication date
Sep 22, 2016
Mitsubishi Electric Corporation
Kimitoshi SATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dim...
Publication number
20160204716
Publication date
Jul 14, 2016
NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
Masato SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND...
Publication number
20150217989
Publication date
Aug 6, 2015
SEIKO EPSON CORPORATION
Yusuke MATSUZAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY