for making multi-layered devices, film deposition or growing

Industry

CPC
B81C2201/0174

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0174for making multi-layered devices, film deposition or growing

Industries

Patents Grantslast 30 patents

Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 11,932,533
- Issue date Mar 19, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,906,727
- Issue date Feb 20, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bi-layer metal electrode for micromachined ultrasonic transducer de...
- Patent number 11,766,696
- Issue date Sep 26, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,693,230
- Issue date Jul 4, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,650,411
- Issue date May 16, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress compensation for piezoelectric optical MEMS devices
- Patent number 11,148,939
- Issue date Oct 19, 2021
- Texas Instruments Incorporated
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress compensation for piezoelectric optical MEMS devices
- Patent number 9,890,040
- Issue date Feb 13, 2018
- Texas Instruments Incorporated
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of detecting sound using a micro-electro-mechanical system o...
- Patent number 9,609,439
- Issue date Mar 28, 2017
- Apple Inc.
- Janhavi S. Agashe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device with stacked chips
- Patent number 9,502,361
- Issue date Nov 22, 2016
- STMicroelectronics (Grenoble 2) SAS
- Romain Coffy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system optical sensor with tilt plates
- Patent number 9,404,860
- Issue date Aug 2, 2016
- Apple Inc.
- Janhavi S. Agashe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic Microelectromechanical structures
- Patent number 8,975,104
- Issue date Mar 10, 2015
- The Royal Institution for the Advancement of Learning/McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic microelectromechanical structures
- Patent number 8,658,452
- Issue date Feb 25, 2014
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microstructure
- Patent number 7,033,515
- Issue date Apr 25, 2006
- Fujitsu Limited
- Norinao Kouma
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS BUMP STOPPER SURFACE FEATURES
- Publication number 20240208800
- Publication date Jun 27, 2024
- KNOWLES ELECTRONICS, LLC
- Ken Deng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE
- Publication number 20240174514
- Publication date May 30, 2024
- INFINEON TECHNOLOGIES AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE
- Publication number 20230303387
- Publication date Sep 28, 2023
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20230138044
- Publication date May 4, 2023
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
- Publication number 20230118429
- Publication date Apr 20, 2023
- TDK Electronics AG
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MI...
- Publication number 20220315418
- Publication date Oct 6, 2022
- Shin-Etsu Chemical Co., Ltd.
- Yoshinori OGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES
- Publication number 20180179054
- Publication date Jun 28, 2018
- TEXAS INSTRUMENTS INCORPORATED
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHODS OF MANUFACTURING THE SAME
- Publication number 20170081173
- Publication date Mar 23, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YU-CHIA LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES
- Publication number 20150378127
- Publication date Dec 31, 2015
- TEXAS INSTRUMENTS INCORPORATED
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TILTED MEMS
- Publication number 20150323456
- Publication date Nov 12, 2015
- Apple Inc.
- Janhavi S. Agashe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH DIFFERENTIAL VERTICAL SENSE ELECTRODES
- Publication number 20150041927
- Publication date Feb 12, 2015
- FREESCALE SEMICONDUCTOR, INC.
- Aaron A. Geisberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20150008788
- Publication date Jan 8, 2015
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20110111545
- Publication date May 12, 2011
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing microstructure
- Publication number 20040232107
- Publication date Nov 25, 2004
- FUJITSU LIMITED
- Norinao Kouma
- B81 - MICRO-STRUCTURAL TECHNOLOGY

for making multi-layered devices, film deposition or growing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Optical device production method

Signal processing circuit for triple-membrane MEMS device

Optical device production method

Bi-layer metal electrode for micromachined ultrasonic transducer de...

Method for coating microstructured components

Optical device

Optical device

Stress compensation for piezoelectric optical MEMS devices

Stress compensation for piezoelectric optical MEMS devices

Method of detecting sound using a micro-electro-mechanical system o...

Electronic device with stacked chips

Micro-electro-mechanical system optical sensor with tilt plates

Low temperature ceramic Microelectromechanical structures

Low temperature ceramic microelectromechanical structures

Method for manufacturing microstructure

Patents Applicationslast 30 patents

MEMS BUMP STOPPER SURFACE FEATURES

OPTICAL DEVICE PRODUCTION METHOD

SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE

MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE

OPTICAL DEVICE PRODUCTION METHOD

MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...

METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MI...

STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES

MEMS DEVICES AND METHODS OF MANUFACTURING THE SAME

STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES

TILTED MEMS

MEMS DEVICE WITH DIFFERENTIAL VERTICAL SENSE ELECTRODES

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

Method for manufacturing microstructure