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for measurement of a wafer
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CPC
G01B2210/48
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Parent Industries
G
PHYSICS
G01
Measuring instruments
G01B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B2210/00
Aspects not specifically covered by any group under G01B
Current Industry
G01B2210/48
for measurement of a wafer
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