for wet cleaning or washing

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CPC
H01L21/6704

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6704for wet cleaning or washing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Fittings for wafer cleaning systems
- Patent number 12,237,179
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Ping Chen
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,230,515
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Substrate cleaning brush
- Patent number 12,226,805
- Issue date Feb 18, 2025
- Aion Co., Ltd.
- Tadashi Kawaguchi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning system and substrate cleaning method
- Patent number 12,220,732
- Issue date Feb 11, 2025
- Ebara Corporation
- Hiroki Takahashi
- B08 - CLEANING
Information Patent Grant
Apparatus and method of brush cleaning using periodic chemical trea...
- Patent number 12,224,186
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Brian J. Brown
- B08 - CLEANING
Information Patent Grant
Photoresist removal method and photoresist removal system
- Patent number 12,210,288
- Issue date Jan 28, 2025
- Tencent Technology (Shenzhen) Company Limited
- Zhongping Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 12,202,016
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Yuki Ito
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and polishing apparatus
- Patent number 12,205,831
- Issue date Jan 21, 2025
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Intelligent customizable wet processing system
- Patent number 12,198,946
- Issue date Jan 14, 2025
- Yangtze Memory Technologies Co., Ltd.
- Gonglian Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-CMP cleaning and apparatus
- Patent number 12,170,195
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
- Patent number 12,165,866
- Issue date Dec 10, 2024
- Samsung Electronics Co., Ltd.
- Sung Hyun Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor wafer and method of wafer thinning
- Patent number 12,154,783
- Issue date Nov 26, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and cleaning method of mist guard
- Patent number 12,148,632
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Yusuke Hashimoto
- B08 - CLEANING
Information Patent Grant
Method, device, and non-transitory computer readable medium for det...
- Patent number 12,119,246
- Issue date Oct 15, 2024
- Ebara Corporation
- Hidetatsu Isokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device
- Patent number 12,106,982
- Issue date Oct 1, 2024
- SCREEN Holdings Co., Ltd.
- Masaki Inaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning method
- Patent number 12,087,602
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Shu Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,068,169
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ji Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Jig and installation method using same jig
- Patent number 12,053,851
- Issue date Aug 6, 2024
- Ebara Corporation
- Lien Yin Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning liquid supply device, cleaning unit, and storage medium st...
- Patent number 12,042,901
- Issue date Jul 23, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Dilute chemical supply device
- Patent number 12,030,024
- Issue date Jul 9, 2024
- Kurita Water Industries Ltd.
- Hideaki Iino
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Cleaning system for semiconductor storage shelf
- Patent number 12,030,091
- Issue date Jul 9, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yimo Wang
- B08 - CLEANING
Information Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
- Patent number 12,033,847
- Issue date Jul 9, 2024
- Ebara Corporation
- Toshio Mizuno
- B24 - GRINDING POLISHING
Information Patent Grant
Method for forming semiconductor device structure
- Patent number 12,009,222
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 12,002,688
- Issue date Jun 4, 2024
- Ebara Corporation
- Haiyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods for wafer drying
- Patent number 12,002,687
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Trace Hurd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,996,303
- Issue date May 28, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,986,867
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Akira Horikoshi
- B08 - CLEANING
Information Patent Grant
Fluid heating device
- Patent number 11,985,736
- Issue date May 14, 2024
- Kelk Ltd.
- Daisuke Watanabe
- B08 - CLEANING
Information Patent Grant
Damper control system and damper control method
- Patent number 11,967,508
- Issue date Apr 23, 2024
- Ebara Corporation
- Akira Imamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-WAFER SCRUBBING DEVICE
- Publication number 20250069905
- Publication date Feb 27, 2025
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Qi YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FITTINGS FOR WAFER CLEANING SYSTEMS
- Publication number 20250069906
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Ping Chen
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR WAFER AND METHOD OF WAFER THINNING
- Publication number 20250062114
- Publication date Feb 20, 2025
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. SEDDON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CENTRAL SHAFT OF CLEANING ROLLER
- Publication number 20250054780
- Publication date Feb 13, 2025
- CENEFOM CORP.
- Chen-Ping HSU
- B08 - CLEANING
Information Patent Application
WAFER CLEANING APPARATUS
- Publication number 20250040693
- Publication date Feb 6, 2025
- Samsung Electronics Co., Ltd.
- DONGHOON KWON
- A46 - BRUSHWARE
Information Patent Application
WAFER ALIGNMENT DEVICE AND METHOD AND WAFER SPEED CALCULATION METHOD
- Publication number 20250038031
- Publication date Jan 30, 2025
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Qi YIN
- B08 - CLEANING
Information Patent Application
BRUSH CLEANING SYSTEM AND BRUSH CLEANING METHOD
- Publication number 20250033091
- Publication date Jan 30, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Yen KU
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20250001462
- Publication date Jan 2, 2025
- SCREEN Holdings Co., Ltd.
- Takuma TAKAHASHI
- B08 - CLEANING
Information Patent Application
ETCHING DEVICE AND ETCHING METHOD THEREOF
- Publication number 20240429069
- Publication date Dec 26, 2024
- ZEUS CO., LTD.
- Seung Hoon LEE
- B08 - CLEANING
Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST CMP BRUSH AND METHOD OF MANUFACTURING
- Publication number 20240381994
- Publication date Nov 21, 2024
- RAJEEV BAJAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...
- Publication number 20240383011
- Publication date Nov 21, 2024
- EBARA CORPORATION
- Shuichi SUEMASA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...
- Publication number 20240387220
- Publication date Nov 21, 2024
- DAIKIN FINETECH, LTD.
- Yasunori DEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING SYSTEM
- Publication number 20240371667
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Shu TSENG
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240363361
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ji CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING IMPROVEMENT
- Publication number 20240363371
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B08 - CLEANING
Information Patent Application
BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS
- Publication number 20240341465
- Publication date Oct 17, 2024
- Samsung Electronics Co., Ltd.
- Jinoh IM
- A46 - BRUSHWARE
Information Patent Application
APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREA...
- Publication number 20240332037
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Brian J. BROWN
- B08 - CLEANING
Information Patent Application
METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE
- Publication number 20240321574
- Publication date Sep 26, 2024
- ROBERT BOSCH GmbH
- Mirjam Henn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE
- Publication number 20240321598
- Publication date Sep 26, 2024
- SCREEN Holdings Co., Ltd.
- Takuma TAKAHASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20240316600
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Kenji KODERA
- B08 - CLEANING
Information Patent Application
BRUSH ASSEMBLY AND WAFER CLEANING DEVICE INCLUDING THE SAME
- Publication number 20240290637
- Publication date Aug 29, 2024
- Samsung Electronics Co., Ltd.
- Minseon Kim
- A46 - BRUSHWARE
Information Patent Application
APPARATUS OF CLEANING SUBSTRATE, APPARATUS OF SEMICONDUCTOR DEVICE...
- Publication number 20240242979
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Hyo Shin LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240242985
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240207900
- Publication date Jun 27, 2024
- SCREEN Holdings Co., Ltd.
- Kazuki NAKAMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213046
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213076
- Publication date Jun 27, 2024
- SCREEN Holdings Co., Ltd.
- Yoshifumi OKADA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20240213045
- Publication date Jun 27, 2024
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213044
- Publication date Jun 27, 2024
- SCREEN Holdings Co., Ltd.
- Yoshifumi OKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20240194498
- Publication date Jun 13, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING

for wet cleaning or washing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Fittings for wafer cleaning systems

Substrate processing apparatus and substrate processing method

Substrate cleaning brush

Substrate cleaning system and substrate cleaning method

Apparatus and method of brush cleaning using periodic chemical trea...

Photoresist removal method and photoresist removal system

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Cleaning apparatus and polishing apparatus

Intelligent customizable wet processing system

Post-CMP cleaning and apparatus

Wafer cleaning apparatus and wafer cleaning method using the same

Semiconductor wafer and method of wafer thinning

Substrate processing apparatus and cleaning method of mist guard

Method, device, and non-transitory computer readable medium for det...

PECVD apparatus

Substrate processing device

Wafer cleaning method

Semiconductor processing tool and methods of operation

Jig and installation method using same jig

Cleaning liquid supply device, cleaning unit, and storage medium st...

Dilute chemical supply device

Cleaning system for semiconductor storage shelf

Cleaning module, substrate processing apparatus including cleaning...

Method for forming semiconductor device structure

Substrate cleaning device and substrate cleaning method

System and methods for wafer drying

Substrate cleaning device and substrate cleaning method

Substrate processing method and substrate processing apparatus

Fluid heating device

Damper control system and damper control method

Patents Applicationslast 30 patents

MULTI-WAFER SCRUBBING DEVICE

FITTINGS FOR WAFER CLEANING SYSTEMS

SEMICONDUCTOR WAFER AND METHOD OF WAFER THINNING

CENTRAL SHAFT OF CLEANING ROLLER

WAFER CLEANING APPARATUS

WAFER ALIGNMENT DEVICE AND METHOD AND WAFER SPEED CALCULATION METHOD

BRUSH CLEANING SYSTEM AND BRUSH CLEANING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

ETCHING DEVICE AND ETCHING METHOD THEREOF

PROCESSING TOOL AND METHOD

POST CMP BRUSH AND METHOD OF MANUFACTURING

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...

SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...

WAFER CLEANING SYSTEM

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

SUBSTRATE CLEANING IMPROVEMENT

BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS

APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREA...

METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE

SUBSTRATE CLEANING DEVICE

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

BRUSH ASSEMBLY AND WAFER CLEANING DEVICE INCLUDING THE SAME

APPARATUS OF CLEANING SUBSTRATE, APPARATUS OF SEMICONDUCTOR DEVICE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

CLEANING APPARATUS AND POLISHING APPARATUS