for wet cleaning or washing

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CPC
H01L21/6704

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/6704for wet cleaning or washing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Post-CMP cleaning and apparatus
- Patent number 12,170,195
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
- Patent number 12,165,866
- Issue date Dec 10, 2024
- Samsung Electronics Co., Ltd.
- Sung Hyun Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor wafer and method of wafer thinning
- Patent number 12,154,783
- Issue date Nov 26, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and cleaning method of mist guard
- Patent number 12,148,632
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Yusuke Hashimoto
- B08 - CLEANING
Information Patent Grant
Method, device, and non-transitory computer readable medium for det...
- Patent number 12,119,246
- Issue date Oct 15, 2024
- Ebara Corporation
- Hidetatsu Isokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device
- Patent number 12,106,982
- Issue date Oct 1, 2024
- SCREEN Holdings Co., Ltd.
- Masaki Inaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning method
- Patent number 12,087,602
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Shu Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,068,169
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ji Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Jig and installation method using same jig
- Patent number 12,053,851
- Issue date Aug 6, 2024
- Ebara Corporation
- Lien Yin Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning liquid supply device, cleaning unit, and storage medium st...
- Patent number 12,042,901
- Issue date Jul 23, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Dilute chemical supply device
- Patent number 12,030,024
- Issue date Jul 9, 2024
- Kurita Water Industries Ltd.
- Hideaki Iino
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Cleaning system for semiconductor storage shelf
- Patent number 12,030,091
- Issue date Jul 9, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yimo Wang
- B08 - CLEANING
Information Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
- Patent number 12,033,847
- Issue date Jul 9, 2024
- Ebara Corporation
- Toshio Mizuno
- B24 - GRINDING POLISHING
Information Patent Grant
Method for forming semiconductor device structure
- Patent number 12,009,222
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 12,002,688
- Issue date Jun 4, 2024
- Ebara Corporation
- Haiyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods for wafer drying
- Patent number 12,002,687
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Trace Hurd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,996,303
- Issue date May 28, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,986,867
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Akira Horikoshi
- B08 - CLEANING
Information Patent Grant
Fluid heating device
- Patent number 11,985,736
- Issue date May 14, 2024
- Kelk Ltd.
- Daisuke Watanabe
- B08 - CLEANING
Information Patent Grant
Damper control system and damper control method
- Patent number 11,967,508
- Issue date Apr 23, 2024
- Ebara Corporation
- Akira Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,967,509
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Osamu Miyahara
- B08 - CLEANING
Information Patent Grant
Apparatus and method for wafer cleaning
- Patent number 11,958,090
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Bo Chen Chen
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and polishing apparatus
- Patent number 11,948,811
- Issue date Apr 2, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING
Information Patent Grant
Gate valve device, cleaning method and mechanical apparatus
- Patent number 11,933,416
- Issue date Mar 19, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Zhengzheng Wang
- B08 - CLEANING
Information Patent Grant
Cleaning machine and cleaning method
- Patent number 11,935,737
- Issue date Mar 19, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Ning Xi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for chemical delivery for brush conditioning
- Patent number 11,923,208
- Issue date Mar 5, 2024
- Illinois Tool Works Inc.
- Bradley Scott Withers
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,919,051
- Issue date Mar 5, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Semiconductor fabricating system having hybrid brush assembly
- Patent number 11,908,681
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Ying Mai
- B08 - CLEANING
Information Patent Grant
Cleaning member mounting mechanism and substrate cleaning apparatus
- Patent number 11,894,244
- Issue date Feb 6, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST CMP BRUSH AND METHOD OF MANUFACTURING
- Publication number 20240381994
- Publication date Nov 21, 2024
- RAJEEV BAJAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...
- Publication number 20240383011
- Publication date Nov 21, 2024
- EBARA CORPORATION
- Shuichi SUEMASA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...
- Publication number 20240387220
- Publication date Nov 21, 2024
- DAIKIN FINETECH, LTD.
- Yasunori DEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING SYSTEM
- Publication number 20240371667
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Shu TSENG
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240363361
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ji CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING IMPROVEMENT
- Publication number 20240363371
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B08 - CLEANING
Information Patent Application
BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS
- Publication number 20240341465
- Publication date Oct 17, 2024
- Samsung Electronics Co., Ltd.
- Jinoh IM
- A46 - BRUSHWARE
Information Patent Application
APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREA...
- Publication number 20240332037
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Brian J. BROWN
- B08 - CLEANING
Information Patent Application
METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE
- Publication number 20240321574
- Publication date Sep 26, 2024
- ROBERT BOSCH GmbH
- Mirjam Henn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE
- Publication number 20240321598
- Publication date Sep 26, 2024
- SCREEN Holdings Co., Ltd.
- Takuma TAKAHASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20240316600
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Kenji KODERA
- B08 - CLEANING
Information Patent Application
BRUSH ASSEMBLY AND WAFER CLEANING DEVICE INCLUDING THE SAME
- Publication number 20240290637
- Publication date Aug 29, 2024
- Samsung Electronics Co., Ltd.
- Minseon Kim
- A46 - BRUSHWARE
Information Patent Application
APPARATUS OF CLEANING SUBSTRATE, APPARATUS OF SEMICONDUCTOR DEVICE...
- Publication number 20240242979
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Hyo Shin LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240242985
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240207900
- Publication date Jun 27, 2024
- SCREEN Holdings Co., Ltd.
- Kazuki NAKAMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213046
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213076
- Publication date Jun 27, 2024
- SCREEN Holdings Co., Ltd.
- Yoshifumi OKADA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20240213045
- Publication date Jun 27, 2024
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213044
- Publication date Jun 27, 2024
- SCREEN Holdings Co., Ltd.
- Yoshifumi OKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20240194498
- Publication date Jun 13, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING
Information Patent Application
METHOD FOR CONTROLLING HYGIENE OF A PORTABLE PACKAGED FOOD CONTAINER
- Publication number 20240181107
- Publication date Jun 6, 2024
- ECOLAB USA INC.
- Wenbin Wei
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MONITORING METHOD
- Publication number 20240186159
- Publication date Jun 6, 2024
- TES CO., LTD.
- Jong-Seok LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS DETECTING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRAT...
- Publication number 20240178023
- Publication date May 30, 2024
- TES CO., LTD.
- Jong-Seok LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATING SYSTEM HAVING HYBRID BRUSH ASSEMBLY
- Publication number 20240177988
- Publication date May 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Ying MAI
- B08 - CLEANING
Information Patent Application
Apparatus And Method For Wafer Cleaning
- Publication number 20240157412
- Publication date May 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Bo Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE...
- Publication number 20240145276
- Publication date May 2, 2024
- EBARA CORPORATION
- Yosuke HIMORI
- B08 - CLEANING
Information Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR DISPENSING MULTIPLE FLUIDS DURING...
- Publication number 20240112925
- Publication date Apr 4, 2024
- Illinois Tool Works Inc.
- Bradley Scott Withers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE
- Publication number 20240112926
- Publication date Apr 4, 2024
- Illinois Tool Works Inc.
- Bradley Scott Withers
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20240091815
- Publication date Mar 21, 2024
- SCREEN Holdings Co., Ltd.
- Kazuki NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS

for wet cleaning or washing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Post-CMP cleaning and apparatus

Wafer cleaning apparatus and wafer cleaning method using the same

Semiconductor wafer and method of wafer thinning

Substrate processing apparatus and cleaning method of mist guard

Method, device, and non-transitory computer readable medium for det...

PECVD apparatus

Substrate processing device

Wafer cleaning method

Semiconductor processing tool and methods of operation

Jig and installation method using same jig

Cleaning liquid supply device, cleaning unit, and storage medium st...

Dilute chemical supply device

Cleaning system for semiconductor storage shelf

Cleaning module, substrate processing apparatus including cleaning...

Method for forming semiconductor device structure

Substrate cleaning device and substrate cleaning method

System and methods for wafer drying

Substrate cleaning device and substrate cleaning method

Substrate processing method and substrate processing apparatus

Fluid heating device

Damper control system and damper control method

Substrate processing apparatus, substrate processing method, and st...

Apparatus and method for wafer cleaning

Cleaning apparatus and polishing apparatus

Gate valve device, cleaning method and mechanical apparatus

Cleaning machine and cleaning method

Methods and apparatuses for chemical delivery for brush conditioning

Substrate cleaning apparatus and substrate cleaning method

Semiconductor fabricating system having hybrid brush assembly

Cleaning member mounting mechanism and substrate cleaning apparatus

Patents Applicationslast 30 patents

PROCESSING TOOL AND METHOD

POST CMP BRUSH AND METHOD OF MANUFACTURING

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND MAINTEN...

SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...

WAFER CLEANING SYSTEM

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

SUBSTRATE CLEANING IMPROVEMENT

BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS

APPARATUS AND METHOD OF BRUSH CLEANING USING PERIODIC CHEMICAL TREA...

METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE

SUBSTRATE CLEANING DEVICE

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

BRUSH ASSEMBLY AND WAFER CLEANING DEVICE INCLUDING THE SAME

APPARATUS OF CLEANING SUBSTRATE, APPARATUS OF SEMICONDUCTOR DEVICE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

CLEANING APPARATUS AND POLISHING APPARATUS

METHOD FOR CONTROLLING HYGIENE OF A PORTABLE PACKAGED FOOD CONTAINER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MONITORING METHOD

PROCESS DETECTING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRAT...

SEMICONDUCTOR FABRICATING SYSTEM HAVING HYBRID BRUSH ASSEMBLY

Apparatus And Method For Wafer Cleaning

SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE...

BRUSHES, SYSTEMS, AND METHODS FOR DISPENSING MULTIPLE FLUIDS DURING...

BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD