For X-Y scanning

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H01J2237/1526

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1526For X-Y scanning

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam vaporizer and method for vaporizing a vaporization ma...
- Patent number 11,133,154
- Issue date Sep 28, 2021
- VON ARDENNE Asset GmbH & Co. KG
- Carsten Deus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control method for multi-phase winding deflection scanning device
- Patent number 10,950,411
- Issue date Mar 16, 2021
- Xiaodong Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,818,470
- Issue date Oct 27, 2020
- HITACHI HIGH-TECH CORPORATION
- Kazuki Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field fluctuation for beam smoothing
- Patent number 10,361,059
- Issue date Jul 23, 2019
- Advanced Ion Beam Technology, Inc.
- Xiao Bai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compact deflecting magnet
- Patent number 10,332,718
- Issue date Jun 25, 2019
- IMATREX, INC.
- Roy E. Rand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact deflecting magnet
- Patent number 10,290,463
- Issue date May 14, 2019
- IMATREX, INC.
- Roy E. Rand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multicolumn charged particle beam exposure apparatus
- Patent number 10,083,813
- Issue date Sep 25, 2018
- Intel Corporation
- Masaki Kurokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annular cooling fluid passage for magnets
- Patent number 9,852,882
- Issue date Dec 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Scott Barraclough
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged particle beams with multi-axis magnetic...
- Patent number 9,431,209
- Issue date Aug 30, 2016
- Hermes-Microvision, Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field fluctuation for beam smoothing
- Patent number 9,340,870
- Issue date May 17, 2016
- Advanced Ion Beam Technology, Inc.
- Xiao Bai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Annular cooling fluid passage for magnets
- Patent number 9,177,708
- Issue date Nov 3, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Scott Barraclough
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern modification schemes for improved FIB patterning
- Patent number 8,624,206
- Issue date Jan 7, 2014
- FEI Company
- Tom Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ion beam implantation using scanning and s...
- Patent number 8,354,654
- Issue date Jan 15, 2013
- Kingstone Semiconductor Company
- Jiong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern modification schemes for improved FIB patterning
- Patent number 8,314,409
- Issue date Nov 20, 2012
- FEI Company
- Tom Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic scanning system with improved efficiency
- Patent number 8,138,484
- Issue date Mar 20, 2012
- Axcelis Technologies. Inc.
- Bo Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 7,888,652
- Issue date Feb 15, 2011
- Nissin Ion Equipment Co., Ltd.
- Hideki Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for reducing magnetic fields at an implant location
- Patent number 7,807,983
- Issue date Oct 5, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of aberration correction and electron beam system
- Patent number 7,763,862
- Issue date Jul 27, 2010
- Jeol Ltd.
- Fumio Hosokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irradiating device and method for controlling the same
- Patent number 7,696,488
- Issue date Apr 13, 2010
- Nuctech Company Limited
- Yaohong Liu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electric charged particle beam microscopy and electric charged part...
- Patent number 7,633,064
- Issue date Dec 15, 2009
- Hitachi High-Technologies Corporation
- Ruriko Tsuneta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
E-beam vision system for monitoring and control
- Patent number 7,479,632
- Issue date Jan 20, 2009
- Trustees of Boston University
- Michael Alan Gevelber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and a device manufacturing method using the...
- Patent number 7,385,197
- Issue date Jun 10, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for discharging a sample
- Patent number 7,170,068
- Issue date Jan 30, 2007
- Applied Materials, Israel, Ltd.
- Igor Petrov
- G01 - MEASURING TESTING
Information Patent Grant
Beam directing system and method for use in a charged particle beam...
- Patent number 7,112,803
- Issue date Sep 26, 2006
- Applied Materials, Israel, Ltd.
- Igor Petrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-aberration deflectors for use in charged-particle-beam optical...
- Patent number 6,802,986
- Issue date Oct 12, 2004
- Nikon Corporation
- Katsushi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 5,751,002
- Issue date May 12, 1998
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Seiji Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic deflection system for a high-power electron beam
- Patent number 5,532,446
- Issue date Jul 2, 1996
- Leybold Durferrit
- Matthias Blum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature stable magnetic deflection assembly
- Patent number 5,136,166
- Issue date Aug 4, 1992
- Etec Systems, Inc.
- Lydia J. Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally stable magnetic deflection assembly and method of making...
- Patent number 5,012,104
- Issue date Apr 30, 1991
- Etec Systems, Inc.
- Lydia J. Young
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
- Publication number 20240371600
- Publication date Nov 7, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL METHOD FOR MULTI-PHASE WINDING DEFLECTION SCANNING DEVICE
- Publication number 20200152413
- Publication date May 14, 2020
- Guilin THD Technology Co., Ltd.
- Xiaodong Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM VAPORIZER AND METHOD FOR VAPORIZING A VAPORIZATION MA...
- Publication number 20190318909
- Publication date Oct 17, 2019
- VON ARDENNE Asset GmbH & Co. KG
- Carsten DEUS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPACT DEFLECTING MAGNET
- Publication number 20190198286
- Publication date Jun 27, 2019
- IMATREX, INC.
- Roy E. RAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPACT DEFLECTING MAGNET
- Publication number 20180315578
- Publication date Nov 1, 2018
- IMATREX, INC.
- Roy E. RAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus of Plural Charged Particle Beams with Multi-axis Magnetic...
- Publication number 20160064180
- Publication date Mar 3, 2016
- HERMES MICROVISION, INC.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS
- Publication number 20150262863
- Publication date Sep 17, 2015
- GTAT Corporation
- William H. Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNULAR COOLING FLUID PASSAGE FOR MAGNETS
- Publication number 20140367583
- Publication date Dec 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Scott Barraclough
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SCAN DEFLECTOR AND METHOD OF MANUFACTURING THEREOF
- Publication number 20140264062
- Publication date Sep 18, 2014
- ICT Integrated Circuit Testing Gessellschaft fur Halbleiterpruftechnik GmbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC FIELD FLUCTUATION FOR BEAM SMOOTHING
- Publication number 20140212595
- Publication date Jul 31, 2014
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Xiao BAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pattern Modification Schemes for Improved FIB Patterning
- Publication number 20130092826
- Publication date Apr 18, 2013
- FEI Company
- Tom Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetic Scanning System with Improved Efficiency
- Publication number 20110266456
- Publication date Nov 3, 2011
- Axcelis Technologies, Inc.
- Bo Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN MODIFICATION SCHEMES FOR IMPROVED FIB PATTERNING
- Publication number 20110049382
- Publication date Mar 3, 2011
- FEI Company
- Tom Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus & method for ion beam implantation using scanning and spo...
- Publication number 20100237232
- Publication date Sep 23, 2010
- Jiong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for Reducing Magnetic Fields at an Implant Location
- Publication number 20080169426
- Publication date Jul 17, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20080121822
- Publication date May 29, 2008
- NISSIN ION EQUIPMENT CO., LTD.
- Hideki Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRIC CHARGED PARTICLE BEAM MICROSCOPY AND ELECTRIC CHARGED PART...
- Publication number 20080093551
- Publication date Apr 24, 2008
- Ruriko TSUNETA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IRRADIATING DEVICE AND METHOD FOR CONTROLLING THE SAME
- Publication number 20080067406
- Publication date Mar 20, 2008
- Yaohong Liu
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Method of Aberration Correction and Electron Beam System
- Publication number 20080054186
- Publication date Mar 6, 2008
- JEOL Ltd.
- Fumio Hosokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for discharging a sample
- Publication number 20060255288
- Publication date Nov 16, 2006
- Applied Materials Israel Ltd.
- Igor Petrov
- G01 - MEASURING TESTING
Information Patent Application
Beam directing system and method for use in a charged particle beam...
- Publication number 20060016988
- Publication date Jan 26, 2006
- Applied Materials Israel Ltd.
- Igor Petrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus and a device manufacturing method using the...
- Publication number 20060016989
- Publication date Jan 26, 2006
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Low-aberration deflectors for use in charged-particle-beam optical...
- Publication number 20050040137
- Publication date Feb 24, 2005
- NIKON CORPORATION
- Katsushi Nakano
- B82 - NANO-TECHNOLOGY
Information Patent Application
Low-aberration deflectors for use in charged-particle-beam optical...
- Publication number 20030025085
- Publication date Feb 6, 2003
- NIKON CORPORATION
- Katsushi Nakano
- B82 - NANO-TECHNOLOGY

For X-Y scanning

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron beam vaporizer and method for vaporizing a vaporization ma...

Control method for multi-phase winding deflection scanning device

Charged particle beam device

Magnetic field fluctuation for beam smoothing

Compact deflecting magnet

Compact deflecting magnet

Multicolumn charged particle beam exposure apparatus

Annular cooling fluid passage for magnets

Apparatus of plural charged particle beams with multi-axis magnetic...

Magnetic field fluctuation for beam smoothing

Annular cooling fluid passage for magnets

Pattern modification schemes for improved FIB patterning

Apparatus and method for ion beam implantation using scanning and s...

Pattern modification schemes for improved FIB patterning

Magnetic scanning system with improved efficiency

Ion implantation apparatus

Technique for reducing magnetic fields at an implant location

Method of aberration correction and electron beam system

Irradiating device and method for controlling the same

Electric charged particle beam microscopy and electric charged part...

E-beam vision system for monitoring and control

Electron beam apparatus and a device manufacturing method using the...

Method and system for discharging a sample

Beam directing system and method for use in a charged particle beam...

Low-aberration deflectors for use in charged-particle-beam optical...

Ion implantation apparatus

Magnetic deflection system for a high-power electron beam

Temperature stable magnetic deflection assembly

Thermally stable magnetic deflection assembly and method of making...

Patents Applicationslast 30 patents

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...

CONTROL METHOD FOR MULTI-PHASE WINDING DEFLECTION SCANNING DEVICE

ELECTRON BEAM VAPORIZER AND METHOD FOR VAPORIZING A VAPORIZATION MA...

COMPACT DEFLECTING MAGNET

COMPACT DEFLECTING MAGNET

Apparatus of Plural Charged Particle Beams with Multi-axis Magnetic...

MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS

ANNULAR COOLING FLUID PASSAGE FOR MAGNETS

HIGH THROUGHPUT SCAN DEFLECTOR AND METHOD OF MANUFACTURING THEREOF

MAGNETIC FIELD FLUCTUATION FOR BEAM SMOOTHING

Pattern Modification Schemes for Improved FIB Patterning

Magnetic Scanning System with Improved Efficiency

PATTERN MODIFICATION SCHEMES FOR IMPROVED FIB PATTERNING

Apparatus & method for ion beam implantation using scanning and spo...

Technique for Reducing Magnetic Fields at an Implant Location

ION IMPLANTATION APPARATUS

ELECTRIC CHARGED PARTICLE BEAM MICROSCOPY AND ELECTRIC CHARGED PART...

IRRADIATING DEVICE AND METHOD FOR CONTROLLING THE SAME

Method of Aberration Correction and Electron Beam System

Method and system for discharging a sample

Beam directing system and method for use in a charged particle beam...

Electron beam apparatus and a device manufacturing method using the...

Low-aberration deflectors for use in charged-particle-beam optical...

Low-aberration deflectors for use in charged-particle-beam optical...