Claims
- 1. For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising:
- a plurality of magnetic coils each formed of conductors; and
- means for spacing apart and arranging the coils, said means being formed of non-metallic thermally stable material.
- 2. The assembly as claimed in claim 1, wherein said means for spacing apart comprises:
- a plurality of coil forms, each of said plurality of coils being wound on one of said plurality of coil forms;
- a pipe, said coils being stacked on said pipe;
- means for vertically spacing each coil from each other; and
- thermally conductive material coating each coil.
- 3. The assembly as claimed in claim 1, wherein each of said coils is individually cooled so as to be thermally independent of one another.
- 4. The assembly as claimed in claim 2, wherein said means for vertically spacing comprises a standoff formed integrally with one of said coil forms and extending beyond the coated coils.
- 5. The assembly as claimed in claim 3, wherein said means for vertically spacing comprises spacers of non-metallic thermally stable material.
- 6. The assembly as claimed in claim 1, wherein each of said coils are stacked on said pipe in a snug-fit relationship.
- 7. The assembly as claimed in claim 1, further comprising a shroud of non-metallic material surrounding said coils, said shroud defining a passage for circulating fluid coolant.
- 8. The assembly as claimed in claim 7, wherein said shroud comprises a plurality of shroud pieces of non-metallic material and surrounding some of said coils, and a cup-like shroud piece of non-metallic material and surrounding the remainder of said coils.
- 9. The assembly as claimed in claim 8, wherein said shroud pieces are separated by spacers of non-metallic thermally stable material.
- 10. For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising:
- a plurality of magnetic coils each wound on a form of non-metallic thermally stable material;
- each coil being surrounded by thermally conductive material;
- a pipe of non-metallic thermally stable material;
- said coils being stacked on said pipe; and
- means for vertically spacing each coil from each other.
Parent Case Info
This application is a continuation of application Ser. No. 07/524,508, filed May 17, 1990, now U.S. Pat. No. 5,012,104.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
5012104 |
Young |
Apr 1991 |
|
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Continuations (1)
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Number |
Date |
Country |
Parent |
524508 |
May 1990 |
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