Formation of buried layers by techniques other than deposition

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B81C1/00507

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00507Formation of buried layers by techniques other than deposition

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for transferring a useful layer into a supporting substrate
- Patent number 11,401,162
- Issue date Aug 2, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Lamine Benaissa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tunable MEMS etalon
- Patent number 10,827,152
- Issue date Nov 3, 2020
- TECHNOLOGY INNOVATION MOMENTUM FUND (ISRAEL) LIMITED PARTNERSHIP
- Viacheslav Krylov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a multilayer MEMS component, and corresponding...
- Patent number 10,427,937
- Issue date Oct 1, 2019
- Robert Bosch GmbH
- Arnd Kaelberer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for preparing films comprising metal using sequ...
- Patent number 8,946,864
- Issue date Feb 3, 2015
- The Aerospace Corporation
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS substrates, devices, and methods of manufacture thereof
- Patent number 8,703,516
- Issue date Apr 22, 2014
- Infineon Technologies AG
- Florian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contoured insulator layer of silicon-on-insulator wafers and proces...
- Patent number 8,405,150
- Issue date Mar 26, 2013
- International Business Machines Corporation
- Levent Gulari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional silicon on oxide device isolation
- Patent number 7,935,613
- Issue date May 3, 2011
- International Business Machines Corporation
- Levent Gulari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a MEMS/NEMS electromechanical component
- Patent number 7,906,439
- Issue date Mar 15, 2011
- Commissarit a l'Energie Atomique
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing porous silicon
- Patent number 7,396,479
- Issue date Jul 8, 2008
- Intel Corporation
- Kramadhati Ravi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for realizing microchannels in an integrated structure
- Patent number 7,063,798
- Issue date Jun 20, 2006
- STMicroelectronics S.r.l.
- Alessio M. D'arrigo Guiseppe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making cavities in a semiconductor wafer
- Patent number 6,987,051
- Issue date Jan 17, 2006
- S.O.I.Tec Silicon on Insulator Technologies S.A.
- Walter Schwarzenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for micro-mechanical structures
- Patent number 6,344,417
- Issue date Feb 5, 2002
- Silicon Wafer Technologies
- Alexander Usenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multilayered wafer with thick sacrificial layer using porous silico...
- Patent number 6,277,712
- Issue date Aug 21, 2001
- Samsung Electronics Co., Ltd.
- Sung-gyu Kang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
- Publication number 20190233280
- Publication date Aug 1, 2019
- Shenyang Silicon Technology Co., Ltd.
- Xiang LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR TRANSFERRING A USEFUL LAYER INTO A SUPPORTING SUBSTRATE
- Publication number 20190202688
- Publication date Jul 4, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Lamine BENAISSA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...
- Publication number 20190016590
- Publication date Jan 17, 2019
- ROBERT BOSCH GmbH
- Arnd Kaelberer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TUNABLE MEMS ETALON
- Publication number 20180205915
- Publication date Jul 19, 2018
- Technology Innovation Momentum Fund (Israel) Limited Partnership
- Viacheslav KRYLOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...
- Publication number 20140326702
- Publication date Nov 6, 2014
- FUJIKURA LTD.
- Osamu NUKAGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...
- Publication number 20130309445
- Publication date Nov 21, 2013
- THE UNIVERSITY OF TOKYO
- Osamu NUKAGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR PREPARING FILMS COMPRISING METAL USING SEQU...
- Publication number 20120235281
- Publication date Sep 20, 2012
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTOURED INSULATOR LAYER OF SILICON-ON-INSULATOR WAFERS AND PROCES...
- Publication number 20110101490
- Publication date May 5, 2011
- International Business Machines Corporation
- LEVENT GULARI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT
- Publication number 20100029031
- Publication date Feb 4, 2010
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- François Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Substrates, Devices, and Methods of Manufacture Thereof
- Publication number 20100013031
- Publication date Jan 21, 2010
- Florian Schoen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL SILICON ON OXIDE DEVICE ISOLATION
- Publication number 20100013044
- Publication date Jan 21, 2010
- Levent Gulari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for realizing microchannels in an integrated structure
- Publication number 20060207972
- Publication date Sep 21, 2006
- STMicroelectronics S.r. I.
- Alessio M. D'arrigo Guiseppe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ion implanted microscale and nanoscale device method
- Publication number 20060115965
- Publication date Jun 1, 2006
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of making cavities in a semiconductor wafer
- Publication number 20060054973
- Publication date Mar 16, 2006
- S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES S.A.
- Walter Schwarzenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for realizing microchanels in an integrated structure
- Publication number 20040217447
- Publication date Nov 4, 2004
- STMicroelectronics, S.r.I.
- Alessio M. D'arrigo Guiseppe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of making cavities in a semiconductor wafer
- Publication number 20040180519
- Publication date Sep 16, 2004
- Walter Schwarzenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Formation of buried layers by techniques other than deposition

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for transferring a useful layer into a supporting substrate

Tunable MEMS etalon

Method for producing a multilayer MEMS component, and corresponding...

Systems and methods for preparing films comprising metal using sequ...

MEMS substrates, devices, and methods of manufacture thereof

Contoured insulator layer of silicon-on-insulator wafers and proces...

Three-dimensional silicon on oxide device isolation

Method of fabricating a MEMS/NEMS electromechanical component

Method for manufacturing porous silicon

Method for realizing microchannels in an integrated structure

Method of making cavities in a semiconductor wafer

Method for micro-mechanical structures

Multilayered wafer with thick sacrificial layer using porous silico...

Patents Applicationslast 30 patents

METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE

METHOD FOR TRANSFERRING A USEFUL LAYER INTO A SUPPORTING SUBSTRATE

METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...

TUNABLE MEMS ETALON

METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...

METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE...

SYSTEMS AND METHODS FOR PREPARING FILMS COMPRISING METAL USING SEQU...

CONTOURED INSULATOR LAYER OF SILICON-ON-INSULATOR WAFERS AND PROCES...

METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT

MEMS Substrates, Devices, and Methods of Manufacture Thereof

THREE-DIMENSIONAL SILICON ON OXIDE DEVICE ISOLATION

Method for realizing microchannels in an integrated structure

Ion implanted microscale and nanoscale device method

Method of making cavities in a semiconductor wafer

Method for realizing microchanels in an integrated structure

Method of making cavities in a semiconductor wafer