Forming the micromechanical structure with a low-temperature process

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B81C2203/0721

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

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B81C2203/0721Forming the micromechanical structure with a low-temperature process

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Patents Grantslast 30 patents

Information Patent Grant
Heterogenous integration of complementary metal-oxide-semiconductor...
- Patent number 11,845,653
- Issue date Dec 19, 2023
- MERIDIAN INNOVATION PTE LTD
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Display device, method of manufacturing the same, display method, a...
- Patent number 9,954,037
- Issue date Apr 24, 2018
- BOE Technology Group Co., Ltd.
- Zhidong Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic Microelectromechanical structures
- Patent number 8,975,104
- Issue date Mar 10, 2015
- The Royal Institution for the Advancement of Learning/McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic microelectromechanical structures
- Patent number 8,658,452
- Issue date Feb 25, 2014
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar microshells for vacuum encapsulated devices and damascene me...
- Patent number 8,313,970
- Issue date Nov 20, 2012
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microshells with integrated getter layer
- Patent number 8,288,835
- Issue date Oct 16, 2012
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar microshells for vacuum encapsulated devices and damascene me...
- Patent number 8,273,594
- Issue date Sep 25, 2012
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar microshells for vacuum encapsulated devices and damascene me...
- Patent number 7,923,790
- Issue date Apr 12, 2011
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature fabrication of conductive micro structures
- Patent number 7,821,010
- Issue date Oct 26, 2010
- Spatial Photonics, Inc.
- Shaoher X. Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
HETEROGENOUS INTEGRATION OF COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR...
- Publication number 20220162062
- Publication date May 26, 2022
- Meridian Innovation Pte Ltd
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DISPLAY DEVICE, METHOD OF MANUFACTURING THE SAME, DISPLAY METHOD, A...
- Publication number 20170104041
- Publication date Apr 13, 2017
- BOE TECHNOLOGY GROUP CO., LTD.
- Zhidong WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20150008788
- Publication date Jan 8, 2015
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE ME...
- Publication number 20110121412
- Publication date May 26, 2011
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE ME...
- Publication number 20110121415
- Publication date May 26, 2011
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE ME...
- Publication number 20110121416
- Publication date May 26, 2011
- Silicon Laboratoires Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20110111545
- Publication date May 12, 2011
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE FABRICATION OF CONDUCTIVE MICRO STRUCTURES
- Publication number 20080003784
- Publication date Jan 3, 2008
- Shaoher X. Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Forming the micromechanical structure with a low-temperature process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Heterogenous integration of complementary metal-oxide-semiconductor...

Display device, method of manufacturing the same, display method, a...

Low temperature ceramic Microelectromechanical structures

Low temperature ceramic microelectromechanical structures

Planar microshells for vacuum encapsulated devices and damascene me...

Microshells with integrated getter layer

Planar microshells for vacuum encapsulated devices and damascene me...

Planar microshells for vacuum encapsulated devices and damascene me...

Low temperature fabrication of conductive micro structures

Patents Applicationslast 30 patents

HETEROGENOUS INTEGRATION OF COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR...

DISPLAY DEVICE, METHOD OF MANUFACTURING THE SAME, DISPLAY METHOD, A...

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE ME...

PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE ME...

PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE ME...

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

LOW TEMPERATURE FABRICATION OF CONDUCTIVE MICRO STRUCTURES