Gas plumbing upstream of the reaction chamber

Industry

CPC
C23C16/45561

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45561Gas plumbing upstream of the reaction chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
- Patent number 12,276,913
- Issue date Apr 15, 2025
- Inpria Corporation
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and mixing inlet device
- Patent number 12,264,393
- Issue date Apr 1, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jingfeng Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing oxide film and display appara...
- Patent number 12,258,663
- Issue date Mar 25, 2025
- LG Display Co., Ltd.
- Jaeyoon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater assembly including cooling apparatus and method of using same
- Patent number 12,247,286
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 12,241,156
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 12,228,534
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 12,209,309
- Issue date Jan 28, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takenori Watabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase reactor system including a gas detector
- Patent number 12,195,855
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,195,853
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Motonari Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 12,191,118
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- James Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controlled chemical delivery system and reactor system...
- Patent number 12,163,225
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor container
- Patent number 12,146,218
- Issue date Nov 19, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,148,614
- Issue date Nov 19, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder-atomic-layer-deposition device with knocker
- Patent number 12,123,092
- Issue date Oct 22, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable fluid inlet assembly for a substrate processing apparatu...
- Patent number 12,110,588
- Issue date Oct 8, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas feeding cup and a gas manifold assembly
- Patent number 12,104,248
- Issue date Oct 1, 2024
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for stabilizing reaction chamber pressure
- Patent number 12,098,460
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition furnace with a cleaning gas system to pro...
- Patent number 12,077,854
- Issue date Sep 3, 2024
- ASM IP Holding B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device, manufacturing method for semiconductor...
- Patent number 12,062,546
- Issue date Aug 13, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing processes to synthesize, functionalize, surface treat...
- Patent number 12,043,893
- Issue date Jul 23, 2024
- Forge Nano, Inc.
- David King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Film forming method
- Patent number 12,037,683
- Issue date Jul 16, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori Watabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution system and reactor system including same
- Patent number 12,024,775
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Sonti Sreeram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for supplying gas and apparatus for processing substrate...
- Patent number 12,024,774
- Issue date Jul 2, 2024
- Jusung Engineering Co., Ltd.
- Ki Bum Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply apparatus, gas supply method, and substrate processing a...
- Patent number 12,024,776
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing a thin film and a method therefor
- Patent number 12,014,922
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsai-Fu Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor source arrangement and atomic layer deposition apparatus
- Patent number 12,000,043
- Issue date Jun 4, 2024
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for heating a liquid
- Patent number 11,988,316
- Issue date May 21, 2024
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply apparatus, gas supply method, and substrate processing a...
- Patent number 11,987,885
- Issue date May 21, 2024
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CHAMBER GAS FLOW IMPROVEMENT
- Publication number 20250122621
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20250122616
- Publication date Apr 17, 2025
- LPE S.p.A.
- Silvio Roberto Mario Preti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...
- Publication number 20250109495
- Publication date Apr 3, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250101588
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Masato KADOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS
- Publication number 20250092520
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Davide Proserpio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEM FOR MITIGATING CVD FORELINE GROWTH
- Publication number 20250092519
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS-PHASE REACTOR SYSTEM INCLUDING A GAS DETECTOR
- Publication number 20250092525
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- SungBae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20250087480
- Publication date Mar 13, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Haifeng QIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE
- Publication number 20250075322
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Takuya HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM WITH A CAPABILITY TO MONITOR GATE VALVE...
- Publication number 20250075325
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Hoon Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FAST SWITCHING GAS CIRCUITS AND PROCESSING CHAMBERS, AND RELATED ME...
- Publication number 20250066915
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Enle CHOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...
- Publication number 20250043421
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Michael Philip ROBERTS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
- Publication number 20250034709
- Publication date Jan 30, 2025
- Semsysco GmbH
- Andreas Gleissner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-SUBSTRATE PROCESSING SYSTEM
- Publication number 20250034708
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES
- Publication number 20250027199
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022708
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION SYSTEM AND A WAFER PROCESSING APPARATUS USING THE SAME
- Publication number 20250019828
- Publication date Jan 16, 2025
- ASM IP HOLDING B.V.
- Vivek Upadhaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
- Publication number 20250011930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Kentaro GOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011931
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Shun MATSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...
- Publication number 20250003072
- Publication date Jan 2, 2025
- Entegris, Inc.
- Joseph E. Reynolds
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR A VALVE ASSEMBLY
- Publication number 20250003073
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Anirudhan Chandrasekaran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20240425981
- Publication date Dec 26, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION SYSTEM FOR USE IN A PROCESSING CHAMBER
- Publication number 20240425986
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Junwei Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL MONITORING SYSTEM, PROCESSING APPARATUS, METHOD OF MANUFAC...
- Publication number 20240421007
- Publication date Dec 19, 2024
- Kokusai Electric Corporation
- Kentaro GOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BALANCING GAS FLOW TO MULTIPLE STATIONS USING HEATERS UPSTREAM OF F...
- Publication number 20240401202
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Brian RATLIFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240401192
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...
- Publication number 20240392435
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR
- Publication number 20240384417
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR
- Publication number 20240368758
- Publication date Nov 7, 2024
- Air Liquide Electronics Systems
- Sonia PLAZA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Gas plumbing upstream of the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Organotin oxide hydroxide patterning compositions, precursors, and...

Semiconductor processing apparatus and mixing inlet device

Apparatus and method of manufacturing oxide film and display appara...

Heater assembly including cooling apparatus and method of using same

Combination CVD/ALD method, source and pulse profile modification

Vapor accumulator for corrosive gases with purging

Capacitive sensor for monitoring gas concentration

Film forming method

Concentration control using a bubbler

Gas-phase reactor system including a gas detector

Substrate processing apparatus, method of manufacturing semiconduct...

Monolithic modular microwave source with integrated process gas dis...

Temperature-controlled chemical delivery system and reactor system...

Precursor container

Method of manufacturing semiconductor device, substrate processing...

Powder-atomic-layer-deposition device with knocker

Adjustable fluid inlet assembly for a substrate processing apparatu...

Gas feeding cup and a gas manifold assembly

Systems and methods for stabilizing reaction chamber pressure

Chemical vapor deposition furnace with a cleaning gas system to pro...

Substrate processing device, manufacturing method for semiconductor...

Manufacturing processes to synthesize, functionalize, surface treat...

Film forming method

Gas distribution system and reactor system including same

Apparatus for supplying gas and apparatus for processing substrate...

Gas supply apparatus, gas supply method, and substrate processing a...

Apparatus for manufacturing a thin film and a method therefor

Precursor source arrangement and atomic layer deposition apparatus

Methods and apparatus for heating a liquid

Gas supply apparatus, gas supply method, and substrate processing a...

Patents Applicationslast 30 patents

PROCESS CHAMBER GAS FLOW IMPROVEMENT

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES

FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS

METHODS AND SYSTEM FOR MITIGATING CVD FORELINE GROWTH

GAS-PHASE REACTOR SYSTEM INCLUDING A GAS DETECTOR

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND METHOD THEREOF

METHOD OF MONITORING LIQUID RAW MATERIAL AND GAS SUPPLY DEVICE

SUBSTRATE PROCESSING SYSTEM WITH A CAPABILITY TO MONITOR GATE VALVE...

FAST SWITCHING GAS CIRCUITS AND PROCESSING CHAMBERS, AND RELATED ME...

VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...

DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...

MULTI-SUBSTRATE PROCESSING SYSTEM

SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

GAS INJECTION SYSTEM AND A WAFER PROCESSING APPARATUS USING THE SAME

Substrate Processing Apparatus, Substrate Processing Method, Method...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...

METHODS AND APPARATUS FOR A VALVE ASSEMBLY

FILM FORMING METHOD

GAS INJECTION SYSTEM FOR USE IN A PROCESSING CHAMBER

MATERIAL MONITORING SYSTEM, PROCESSING APPARATUS, METHOD OF MANUFAC...

BALANCING GAS FLOW TO MULTIPLE STATIONS USING HEATERS UPSTREAM OF F...

REMOTE SOLID REFILL CHAMBER

CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...

THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR

DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR