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H01J37/32201
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/32201
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Patents Grants
last 30 patents
Information
Patent Grant
Microwave coupling/combining device and associated microwave generator
Patent number
11,961,713
Issue date
Apr 16, 2024
SAIREM SOCIETE POUR L'APPLICATION INDUSTRIELLE DE LA RECHERCHE EN ELECTRONIQU...
Louis Latrasse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave heating device
Patent number
11,862,432
Issue date
Jan 2, 2024
Mitsubishi Electric Corporation
Hiroshi Suenobu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular reactor for microwave plasma-assisted deposition
Patent number
11,859,279
Issue date
Jan 2, 2024
DIAM CONCEPT
Alix Gicquel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PEALD titanium nitride with direct microwave plasma
Patent number
11,823,870
Issue date
Nov 21, 2023
Applied Materials, Inc.
Hanhong Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus, electrostatic attraction method, and e...
Patent number
11,764,038
Issue date
Sep 19, 2023
Tokyo Electron Limited
Shoichiro Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of power generation with phase linked solid-state...
Patent number
11,721,526
Issue date
Aug 8, 2023
MKS Instruments, Inc.
Francesco Braghiroli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular microwave source with local lorentz force
Patent number
11,721,532
Issue date
Aug 8, 2023
Applied Materials, Inc.
Philip Allan Kraus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for the plasma processing of containers
Patent number
11,660,361
Issue date
May 30, 2023
KHS GmbH
Juergen Franz Vorwerk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for plasma processing
Patent number
11,646,178
Issue date
May 9, 2023
Tokyo Electron Limited
Yuji Onuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-power solid-state microwave generator for RF energy applications
Patent number
11,646,177
Issue date
May 9, 2023
Precisepower, LLC
Kenneth Kaplan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave output device and plasma processing apparatus
Patent number
11,587,769
Issue date
Feb 21, 2023
Tokyo Electron Limited
Yohei Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atmospheric cold plasma jet coating and surface treatment
Patent number
11,560,627
Issue date
Jan 24, 2023
Starfire Industries LLC
Brian Edward Jurczyk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
11,527,386
Issue date
Dec 13, 2022
Tokyo Electron Limited
Kazushi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of power generation with phase linked solid-state...
Patent number
11,476,092
Issue date
Oct 18, 2022
MKS Instruments, Inc.
Kenneth Trenholm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,424,106
Issue date
Aug 23, 2022
HITACHI HIGH-TECH CORPORATION
Yuki Kondo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma density monitor, plasma processing apparatus, and plasma pro...
Patent number
11,410,835
Issue date
Aug 9, 2022
Tokyo Electron Limited
Taro Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular microwave plasma source
Patent number
11,404,248
Issue date
Aug 2, 2022
Applied Materials, Inc.
Philip Allan Kraus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Remote modular high-frequency source
Patent number
11,393,661
Issue date
Jul 19, 2022
Applied Materials, Inc.
Hanh Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for dynamical control of radial uniformity in...
Patent number
11,355,317
Issue date
Jun 7, 2022
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for dynamical control of radial uniformity wi...
Patent number
11,348,783
Issue date
May 31, 2022
Applied Materials, Inc.
Satoru Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for expanding sheath and bulk of plasma by using double radi...
Patent number
11,330,698
Issue date
May 10, 2022
Postech Academy-Industry Foundation
Ji Mo Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cold plasma generating apparatus and multi-cold plasma array appara...
Patent number
11,264,211
Issue date
Mar 1, 2022
PSM Inc.
Keun-Ho Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave magnetron with constant anodic impedance and systems usin...
Patent number
11,255,016
Issue date
Feb 22, 2022
MKS Instruments, Inc.
Francesco Braghiroli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radical source with contained plasma
Patent number
11,201,035
Issue date
Dec 14, 2021
Tokyo Electron Limited
Barton Lane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Phased array modular high-frequency source
Patent number
11,114,282
Issue date
Sep 7, 2021
Applied Materials, Inc.
Philip Allan Kraus
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Reactor system coupled to an energy emitter control circuit
Patent number
11,107,662
Issue date
Aug 31, 2021
LytEn, Inc.
Michael W. Stowell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
ECR ion source and method for operating an ECR ion source
Patent number
11,094,510
Issue date
Aug 17, 2021
Dreebit GmbH
Alexandra Philipp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular high-frequency source
Patent number
11,081,317
Issue date
Aug 3, 2021
Applied Materials, Inc.
Thai Cheng Chua
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma processing method, and ECR heig...
Patent number
11,081,320
Issue date
Aug 3, 2021
HITACHI HIGH-TECH CORPORATION
Norihiko Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular microwave source with local Lorentz force
Patent number
11,037,764
Issue date
Jun 15, 2021
Applied Materials, Inc.
Philip Allan Kraus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240096655
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Katsuhiko Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA APPARATUS AND METHODS FOR PROCESSING FEED MATERIAL UTIZILING...
Publication number
20240071725
Publication date
Feb 29, 2024
6K Inc.
Michael C. Kozlowski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240014007
Publication date
Jan 11, 2024
Hitachi High-Tech Corporation
Norihiko Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240014010
Publication date
Jan 11, 2024
Hitachi High-Tech Corporation
Tetsuo KAWANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA APPARATUS AND METHODS FOR PROCESSING FEED MATERIAL UTILIZING...
Publication number
20230411123
Publication date
Dec 21, 2023
6K Inc.
Michael C. Kozlowski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP FILL
Publication number
20230399745
Publication date
Dec 14, 2023
ASM IP HOLDING B.V.
Shinya Yoshimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
Publication number
20230392255
Publication date
Dec 7, 2023
PLASMABILITY, LLC
William Holber
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MICROWAVE PLASMA APPARATUS AND METHODS FOR PROCESSING MATERIALS USI...
Publication number
20230377848
Publication date
Nov 23, 2023
6K Inc.
Richard K. Holman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND DIELECTR...
Publication number
20230326716
Publication date
Oct 12, 2023
Tokyo Electron Limited
Eiki KAMATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-port Phase Compensation Nested Microwave-plasma Apparatus for...
Publication number
20230260756
Publication date
Aug 17, 2023
Hangzhou Dianzi University
Jie Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
Publication number
20230253186
Publication date
Aug 10, 2023
Applied Materials, Inc.
Hanhong Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20230207272
Publication date
Jun 29, 2023
SEMES CO., LTD.
Sang Jeong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20230207271
Publication date
Jun 29, 2023
SEMES CO., LTD.
Yoon Seok CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND MICROWAVE RADIATION SOURCE
Publication number
20230178339
Publication date
Jun 8, 2023
TOKYO ELECTRON LIMITED
Kenta KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
Publication number
20230160067
Publication date
May 25, 2023
Starfire Industires, LLC
Brian Edward Jurczyk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE FOR MEASURING DENSITY OF PLASMA, PLASMA PROCESSING SYSTEM, A...
Publication number
20230102201
Publication date
Mar 30, 2023
Samsung Electronics Co., Ltd.
Vladimir Vsevolodovich PROTOPOPOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...
Publication number
20230067917
Publication date
Mar 2, 2023
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Michael VERGÖHL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230062105
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus For Single Chamber Deposition And Etch
Publication number
20220389571
Publication date
Dec 8, 2022
Applied Materials, Inc.
Joseph AuBuchon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DRY ETCHING METHOD USING POTENTIAL CONTROL OF GRID AND SUBSTRATE
Publication number
20220375761
Publication date
Nov 24, 2022
Research & Business Foundation Sungkyunkwan University
Geun Young YEOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20220367156
Publication date
Nov 17, 2022
Hitachi High-Tech Corporation
Tatsuya Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20220359166
Publication date
Nov 10, 2022
Hitachi High-Tech Corporation
Nanako Tamari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR MICROWAVE PLASMA SOURCE
Publication number
20220344131
Publication date
Oct 27, 2022
Applied Materials, Inc.
Philip Allan KRAUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE MODULAR HIGH-FREQUENCY SOURCE
Publication number
20220319812
Publication date
Oct 6, 2022
Applied Materials, Inc.
Hanh NGUYEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220223378
Publication date
Jul 14, 2022
TOKYO ELECTRON LIMITED
Hiroyuki IKUTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR RECLAMATION OF LI-ION CATHODE MATERIALS USI...
Publication number
20220223379
Publication date
Jul 14, 2022
6K Inc.
Richard K. Holman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE SUPPLY MECHANISM, PLASMA TREATMENT APPARATUS, AND PLASMA...
Publication number
20220223380
Publication date
Jul 14, 2022
Tokyo Electron Limited
Makoto ISHITSUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20220028661
Publication date
Jan 27, 2022
TOKYO ELECTRON LIMITED
Yohei Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PLASMA PROCESSING
Publication number
20210351012
Publication date
Nov 11, 2021
TOKYO ELECTRON LIMITED
Yuji ONUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR HIGH-FREQUENCY SOURCE
Publication number
20210327685
Publication date
Oct 21, 2021
Applied Materials, Inc.
Thai Cheng CHUA
H03 - BASIC ELECTRONIC CIRCUITRY